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    • 21. 发明授权
    • Vertical field effect transistor and manufacturing method thereof
    • 垂直场效应晶体管及其制造方法
    • US6015725A
    • 2000-01-18
    • US914096
    • 1997-08-19
    • Teruo Hirayama
    • Teruo Hirayama
    • H01L21/336H01L21/8234H01L21/8247H01L27/115H01L29/78H01L29/788H01L29/792H01L21/8232
    • H01L29/66666H01L21/823487H01L27/115H01L27/11556H01L29/66825H01L29/7827
    • A vertical field effect transistor (1) and a method of manufacturing thereof are disclosed, in which a buried layer (3) of a conduction type opposite to that of a substrate (2) is formed to a predetermined depth in the substrate (2) by ion implantation. The bottom of recess (2a) for forming a protrusion (2b) on the substrate (2) is located within the corresponding one of the buried layer (3). The width of the recess (2a) is set smaller than the width of the buried layer (3). The surface of the protrusion (2b) and the bottom of the recess (2a) are formed with impurities regions (4a, 4b; 5a, 5b) constituting a source and a drain, respectively. A channel length (L) of the channel region formed on the side wall of the protrusion (2b) is defined by the distance between the buried layer (3) and the impurities regions (5a, 5b) on the surface of the protrusion (2b).
    • 公开了一种垂直场效应晶体管(1)及其制造方法,其中在衬底(2)中形成与衬底(2)相反的导电类型的掩埋层(3)至预定深度, 通过离子注入。 用于在基板(2)上形成突起(2b)的凹部(2a)的底部位于相应的一个埋层(3)内。 凹部(2a)的宽度被设定为小于掩埋层(3)的宽度。 突起(2b)的表面和凹部(2a)的底部分别形成有构成源极和漏极的杂质区域(4a,4b; 5a,5b)。 形成在突起(2b)的侧壁上的沟道区域的沟道长度(L)由突起(2b)表面上的掩埋层(3)和杂质区域(5a,5b)之间的距离限定 )。
    • 22. 发明授权
    • Static random memory device
    • 静态随机存储设备
    • US6001680A
    • 1999-12-14
    • US104913
    • 1998-06-25
    • Minoru IshidaTeruo Hirayama
    • Minoru IshidaTeruo Hirayama
    • G11C11/412H01L27/11H01L21/8244
    • G11C11/412H01L27/1104
    • A static random access memory device (SRAM) keeping a resistance value of a resistance element at a predetermined level regardless a process variation, by improving a special margin of a diffusion layer region at which the resistance element is formed and a node for connecting a gate electrode thereto. In the SRAM, there is provided a diffusion layer region in a substrate, having a first part of which may form a the resistance element, a second part of which is connected to the drain or source of the MIS access transistor, and a third part of which is connected to the source or drain of the MIS driver transistor and is defined the node, and there is provided an electrode layer connecting the gate of the MIS driver transistor and the node in the diffusion layer region. The diffusion layer region is formed so that the diffusion layer region is bent at the first part which may form the resistance element and is defined the node and a first direction between the first part and the second part and a second direction between the first part and the third part intersect at an obtuse angle.
    • 一种静态随机存取存储器件(SRAM),通过改善形成电阻元件的扩散层区域的特殊余量和用于连接栅极的节点,将电阻元件的电阻值保持在预定水平而不管工艺变化如何 电极。 在SRAM中,在基板中设置有扩散层区域,其第一部分可以形成电阻元件,第二部分连接到MIS存取晶体管的漏极或源极,第三部分 其连接到MIS驱动器晶体管的源极或漏极,并且被定义为节点,并且提供连接MIS驱动器晶体管的栅极和扩散层区域中的节点的电极层。 扩散层区域被形成为使得扩散层区域在可形成电阻元件的第一部分处弯曲并且被限定为节点和第一部分与第二部分之间的第一方向以及在第一部分与第二部分之间的第二方向 第三部分以钝角相交。
    • 25. 发明授权
    • Static random access memory semiconductor layout
    • 静态随机存取存储器半导体布局
    • US5831898A
    • 1998-11-03
    • US783209
    • 1997-01-14
    • Minoru IshidaTeruo Hirayama
    • Minoru IshidaTeruo Hirayama
    • G11C11/412H01L21/8244H01L27/11G11C11/00
    • H01L27/1104G11C11/412Y10S257/904
    • A static random access memory device (SRAM) keeping a resistance value of a resistance element at a predetermined level regardless a process variation, by improving a special margin of a diffusion layer region at which the resistance element is formed and a node for connecting a gate electrode thereto. In the SRAM, there is provided a diffusion layer region in a substrate, having a first part of which may form a the resistance element, a second part of which is connected to the drain or source of the MIS access transistor, and a third part of which is connected to the source or drain of the MIS driver transistor and is defined the node, and there is provided an electrode layer connecting the gate of the MIS driver transistor and the node in the diffusion layer region. The diffusion layer region is formed so that the diffusion layer region is bent at the first part which may form the resistance element and is defined the node and a first direction between the first part and the second part and a second direction between the first part and the third part intersect at an obtuse angle.
    • 一种静态随机存取存储器件(SRAM),通过改善形成电阻元件的扩散层区域的特殊余量和用于连接栅极的节点,将电阻元件的电阻值保持在预定水平而不管工艺变化如何 电极。 在SRAM中,在基板中设置有扩散层区域,其第一部分可以形成电阻元件,第二部分连接到MIS存取晶体管的漏极或源极,第三部分 其连接到MIS驱动器晶体管的源极或漏极,并且被定义为节点,并且提供连接MIS驱动器晶体管的栅极和扩散层区域中的节点的电极层。 扩散层区域被形成为使得扩散层区域在可形成电阻元件的第一部分处弯曲并且被限定为节点和第一部分与第二部分之间的第一方向以及在第一部分与第二部分之间的第二方向 第三部分以钝角相交。