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21. 发明申请

US20070146697A1 APPARATUS AND METHOD FOR TESTING DEFECTS 失效
标题翻译：测试缺陷的装置和方法
公开(公告)号：US20070146697A1
公开(公告)日：2007-06-28
申请号：US11681996
申请日：2007-03-05
申请人： Minori Noguchi , Yoshimasa Ohshima , Hidetoshi Nishiyama , Shunichi Matsumoto , Yukio Kembo , Ryouji Matsunaga , Keiji Sakai , Takanori Ninomiya , Tetsuya Watanabe , Hisato Nakamura , Takahiro Jingu , Yoshio Morishige , Shuichi Chikamatsu
发明人： Minori Noguchi , Yoshimasa Ohshima , Hidetoshi Nishiyama , Shunichi Matsumoto , Yukio Kembo , Ryouji Matsunaga , Keiji Sakai , Takanori Ninomiya , Tetsuya Watanabe , Hisato Nakamura , Takahiro Jingu , Yoshio Morishige , Shuichi Chikamatsu
IPC分类号： G01N21/88
CPC分类号： B82Y15/00 , G01N21/94 , G01N21/95623 , G01N21/95684 , G01N2021/8822 , G01R31/308 , H01J37/00 , H01J2237/022 , H01J2237/0225 , H01L21/67253 , H01L21/67288 , H01L21/681 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： A defect inspection apparatus includes an illumination optical unit for obliquely illuminating an object with a slit-like shaped laser, a first detection optical unit for detecting a first image formed by light reflected from the object by the illumination of the slit-like shaped laser and reflected in a first direction substantially normal to a surface of the object, a second detection optical unit for detecting a second image formed by light reflected from the object by the illumination of the slit-like shaped laser and reflected in a second direction inclined to the normal direction to the surface of the object, an image signal processing unit which processes a signal outputted from the first detection optical unit and a signal outputted from the second detection optical unit, and an output unit which outputs information processed by the image signal processing unit.
摘要翻译：缺陷检查装置包括：用狭缝状激光器对物体进行倾斜照明的照明光学单元;第一检测光学单元，用于检测由所述狭缝状激光的照射而从物体反射的光形成的第一图像;以及反射在基本上垂直于物体的表面的第一方向上;第二检测光学单元，用于检测由通过照射狭缝状激光而从物体反射的光形成的第二图像，并以与第二方向倾斜的第二方向反射对象物的表面的正常方向，处理从第一检测光学单元输出的信号的图像信号处理单元和从第二检测光学单元输出的信号，以及输出单元，其输出由图像信号处理单元处理的信息。

22. 发明申请

US20070146696A1 APPARATUS AND METHOD FOR TESTING DEFECTS 失效
标题翻译：测试缺陷的装置和方法
公开(公告)号：US20070146696A1
公开(公告)日：2007-06-28
申请号：US11681981
申请日：2007-03-05
申请人： Minori Noguchi , Yoshimasa Ohshima , Hidetoshi Nishiyama , Shunichi Matsumoto , Yukio Kembo , Ryouji Matsunaga , Keiji Sakai , Takanori Ninomiya , Tetsuya Watanabe , Hisato Nakamura , Takahiro Jingu , Yoshio Morishige , Shuichi Chikamatsu
发明人： Minori Noguchi , Yoshimasa Ohshima , Hidetoshi Nishiyama , Shunichi Matsumoto , Yukio Kembo , Ryouji Matsunaga , Keiji Sakai , Takanori Ninomiya , Tetsuya Watanabe , Hisato Nakamura , Takahiro Jingu , Yoshio Morishige , Shuichi Chikamatsu
IPC分类号： G01N21/88
CPC分类号： B82Y15/00 , G01N21/94 , G01N21/95623 , G01N21/95684 , G01N2021/8822 , G01R31/308 , H01J37/00 , H01J2237/022 , H01J2237/0225 , H01L21/67253 , H01L21/67288 , H01L21/681 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： A method for detecting defects on a specimen includes mounting a specimen on a table with which is movable, obliquely projecting a laser as a line onto a surface of the specimen, detecting with an image sensor an image of light formed by light reflected from the specimen and passed through a filter which blocks scattered light resulting from repetitive patterns formed on the specimen, processing a signal outputted from the image sensor to extract defects of the specimen, and a displaying information of defects extracted by the signal processor.
摘要翻译：一种检测试样缺陷的方法，其特征在于，将试样安装在可移动的台面上，将作为线的激光线倾斜投射到试样的表面上，用图像传感器检测由试样反射的光形成的光的图像通过滤波器，该滤波器阻挡由样本上形成的重复图案产生的散射光，处理从图像传感器输出的信号，提取样本的缺陷，以及由信号处理器提取的缺陷的显示信息。

23. 发明授权

US07230435B2 Capacitance measurement circuit 失效
标题翻译：电容测量电路
公开(公告)号：US07230435B2
公开(公告)日：2007-06-12
申请号：US10760449
申请日：2004-01-21
申请人： Tatsuya Kunikiyo , Tetsuya Watanabe , Toshiki Kanamoto , Kyoji Yamashita
发明人： Tatsuya Kunikiyo , Tetsuya Watanabe , Toshiki Kanamoto , Kyoji Yamashita
IPC分类号： G01R27/26 , G01R27/02
CPC分类号： G01R27/2605
摘要： A CBCM circuit is capable of separately measuring each component of a measuring target capacitance. A node (N1) is electrically connected to a terminal (P2) between the drains of PMOS and NMOS transistors (MP2, MN2). As a target capacitance forming part, a coupling capacitance (Cc) is formed between the node (N1) and a node (N2). The node (N2) is connected to a pad (58) through the terminal (P2) and an NMOS transistor (MN3), and a node (N3) is connected to a terminal (P3) between the drains of PMOS and NMOS transistors (MP1, MN1). A reference capacitance (Cref) is formed at the node (N3) as a dummy capacitance. Currents (Ir, It) supplied from a power source to the nodes (N3, N1) are measured with current meters (61, 62), respectively and a current (Im) induced from the node (N2) and flowing to a ground level is measured with a current meter (63).
摘要翻译： CBCM电路能够单独测量测量目标电容的每个分量。节点（N 1）电连接到PMOS和NMOS晶体管（MP 2，MN 2）的漏极之间的端子（P 2）。作为目标电容形成部，在节点（N 1）和节点（N 2）之间形成耦合电容（C SUB）。节点（N 2）经由端子（P 2）和NMOS晶体管（MN 3）连接到焊盘（58），并且节点（N 3）连接到端子（N 3）之间的端子（P 3） PMOS和NMOS晶体管（MP 1，MN 1）。在节点（N 3）处形成参考电容（C SUB）作为虚拟电容。分别用电流计（61,62）从电源向节点（N 3，N 1）提供的电流（I，R，I，T）使用电流计（63）测量从节点（N 2）感应并流到地平面的电流（I SUB）。

24. 发明授权

US07115892B2 Method and its apparatus for inspecting particles or defects of a semiconductor device 有权
公开(公告)号：US07115892B2
公开(公告)日：2006-10-03
申请号：US11302847
申请日：2005-12-13
申请人： Hidetoshi Nishiyama , Minori Noguchi , Yoshimasa Ooshima , Akira Hamamatsu , Kenji Watanabe , Tetsuya Watanabe , Takahiro Jingu
发明人： Hidetoshi Nishiyama , Minori Noguchi , Yoshimasa Ooshima , Akira Hamamatsu , Kenji Watanabe , Tetsuya Watanabe , Takahiro Jingu
IPC分类号： G01N21/88
CPC分类号： G01N21/4738 , G01N21/8806 , G01N21/93 , G01N21/94 , G01N21/9501 , G01N2015/1486 , G01N2015/1493
摘要： Conventionally, a particle/defect inspection apparatus outputs a total number of detected particles/defects as the result of detection. For taking countermeasures to failures in manufacturing processes, the particles/defects detected by the inspection apparatus are analyzed. Since the inspection apparatus outputs a large number of detected particles/defects, an immense time is required for analyzing the detected particles/defects, resulting in a delay in taking countermeasures to a failure in the manufacturing processes. In the present invention, an apparatus for optically inspecting particles or defects relates a particle or defect size to a cause of failure in an inspection result. A data processing circuit points out a cause of failure from the statistics on the inspection result, and displays information on the inspection result. A failure analysis is conducted by setting a threshold for identifying a failure in each of regions on a semiconductor device or the like to statistically evaluate detected particles.

25. 发明申请

US20060194938A1 Process for production of uv-curable liquid polyurethane resin 失效
标题翻译：紫外可固化液体聚氨酯树脂的生产工艺
公开(公告)号：US20060194938A1
公开(公告)日：2006-08-31
申请号：US10552236
申请日：2004-04-07
申请人： Tetsuya Watanabe , Takashi Chiba , Shuzo Yamada
发明人： Tetsuya Watanabe , Takashi Chiba , Shuzo Yamada
IPC分类号： C08G18/00
CPC分类号： H04N5/782 , C08F290/067 , C08G18/672 , C09D175/16 , H04N7/0887 , H04N21/235 , H04N21/4147 , H04N21/435 , H04N21/4383 , H04N21/462 , H04N21/47214 , C08G18/6644
摘要： (A) a polycarbonatediol, (B) a trifunctional alcohol, and (C) a diisocyanate are subjected to reaction in the presence of (D) a (meth)acrylate compound represented by the general formula CH2═CRCO(OCnH2n)pR′ or CH2═CRCO(OCmH2m)qOCOCH═CH2, and (E) a di(meth)acrylate compound of alkylene glycol whose alkylene group is substituted as a lower alkyl group, and then (F) a hydroxyl group-containing (meth)acrylate is added to the resulting solution of urethane oligomers in (meth)acrylate to conduct terminal (meth)acrylating reaction of the urethane oligomers, thereby producing a UV-curable liquid polyurethane resin having a viscosity (25° C.) of preferably 150,000-1,000,000 mPa·s, where before or after the terminal (meth)acrylating reaction of the urethane oligomers (G) a photopolymerization initiator and (H) a hindered phenol-based antioxidant having a molecular weight of 500-2,000 are added thereto to form the UV-curable liquid polyurethane resin. The TV-curable liquid polyurethane resin can produce HDD gaskets, etc. in a cross-sectional shape with a good sealability by an automatic coating robot efficiently.
摘要翻译：（A）聚碳酸酯二醇，（B）三官能醇和（C）二异氰酸酯在（D）由通式CH 2（2）表示的（甲基）丙烯酸酯化合物的存在下进行反应， -CRCO（OC n H 2n）R'或CH 2 -CRCO（OC m）（E）二（甲基）丙烯酸亚烷基二醇的二（甲基）丙烯酸酯化合物，其亚烷基取代为低级烷基，然后向（甲基）丙烯酸酯中的氨基甲酸酯低聚物溶液中加入（F）含羟基的（甲基）丙烯酸酯，进行氨基甲酸酯低聚物的末端（甲基）丙烯酸酯化反应，从而生产粘度（25℃）优选为150,000-1,000,000mPa.s的UV可固化液体聚氨酯树脂，其中在氨基甲酸酯低聚物（G）为光聚合引发剂的末端（甲基）丙烯酸酯化反应之前或之后，和 H）分子量为500〜2000的受阻酚系抗氧化剂以形成UV可固化液体聚氨酯树脂。电视可固化液体聚氨酯树脂可以通过自动涂布机器人有效地生产具有良好密封性的横截面形状的HDD垫片等。

26. 发明授权

US07098055B2 Apparatus and method for testing defects 失效
公开(公告)号：US07098055B2
公开(公告)日：2006-08-29
申请号：US11244078
申请日：2005-10-06
申请人： Minori Noguchi , Yoshimasa Ohshima , Hidetoshi Nishiyama , Shunichi Matsumoto , Yukio Kembo , Ryouji Matsunaga , Keiji Sakai , Takanori Ninomiya , Tetsuya Watanabe , Hisato Nakamura , Takahiro Jingu , Yoshio Morishige , Shuichi Chikamatsu
发明人： Minori Noguchi , Yoshimasa Ohshima , Hidetoshi Nishiyama , Shunichi Matsumoto , Yukio Kembo , Ryouji Matsunaga , Keiji Sakai , Takanori Ninomiya , Tetsuya Watanabe , Hisato Nakamura , Takahiro Jingu , Yoshio Morishige , Shuichi Chikamatsu
IPC分类号： H01L21/66 , G01R31/26
CPC分类号： B82Y15/00 , G01N21/94 , G01N21/95623 , G01N21/95684 , G01N2021/8822 , G01R31/308 , H01J37/00 , H01J2237/022 , H01J2237/0225 , H01L21/67253 , H01L21/67288 , H01L21/681 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： A defect inspection method includes radiating an illumination slit-shaped beam having lights substantially parallel to a longitudinal direction to a substrate having circuit patterns in a direction inclined at a predetermined gradient relative to the direction of a line normal to the substrate and inclined at a predetermined gradient on a surface with respect to a group of main straight lines of the circuit patterns with its longitudinal direction oriented almost perpendicularly to a direction of a movement of the substrate. Scattered light reflected by a defect such as a foreign particle existing on the illuminated substrate is received and converted into a detection signal by using an image sensor, and defect judging is effected of an extracted a signal indicating a defect such as a foreign particle on the basis of the detection signal output.

27. 发明申请

US20060170052A1 Semiconductor device, method of manufacture thereof and semiconductor integrated circuit 有权
标题翻译：半导体装置及其制造方法以及半导体集成电路
公开(公告)号：US20060170052A1
公开(公告)日：2006-08-03
申请号：US11336874
申请日：2006-01-23
申请人： Toshiki Kanamoto , Masumi Yoshida , Tetsuya Watanabe , Takashi Ippoushi
发明人： Toshiki Kanamoto , Masumi Yoshida , Tetsuya Watanabe , Takashi Ippoushi
IPC分类号： H01L27/12
CPC分类号： H01L21/76281 , H01L21/761 , H01L21/84 , H01L27/0207 , H01L27/11807 , H01L27/1203
摘要： An FTI structure is employed in an isolation region making contact in a Y direction with a P-type impurity region serving as a drain region of a PMOS transistor. First, second and third N-type impurity layers serving as body regions are connected to a high potential line via fourth, fifth and sixth N-type impurity layers, respectively, and further via a seventh N-type impurity layer. The fourth to sixth N-type impurity layers are provided between an insulating layer of an SOI substrate and an element isolation insulating film in a PTI region.
摘要翻译：在与用作PMOS晶体管的漏极区域的P型杂质区域在Y方向上接触的隔离区域中采用FTI结构。首先，用作体区的第二和第三N型杂质层分别经由第四，第五和第六N型杂质层连接到高电位线，并且还经由第七N型杂质层连接。第四至第六N型杂质层设置在SOI衬底的绝缘层和PTI区域中的元件隔离绝缘膜之间。

28. 发明授权

US07040852B2 Robot arm mechanism and robot apparatus 有权
公开(公告)号：US07040852B2
公开(公告)日：2006-05-09
申请号：US10421834
申请日：2003-04-24
申请人： Hiroki Mori , Tetsuya Watanabe , Chohei Okuno
发明人： Hiroki Mori , Tetsuya Watanabe , Chohei Okuno
IPC分类号： B25J18/00
CPC分类号： B25J9/1065 , H01L21/67739 , Y10S414/13 , Y10T74/20329
摘要： Herein disclosed is a robot arm mechanism comprising: a first handling member for supporting and handling a first object; a second handling member for supporting and handling a second object; a first robot arm including a first arm link and a second arm link, the first end portion of the second arm link being pivotably connected to the second end portion of the first arm link, and the second end portion of the second arm link being connected to the first handling member to allow the first handling member to support the first object in a stable condition; a second robot arm including a first arm link and a second arm link, the first end portion of the second arm link being pivotably connected to the second end portion of the first arm link, the second arm link being inclined with respect to the second arm link of the first robot arm at a preset angle defined between the central line of the second arm link of the second robot arm and the central line of the second arm link of the first robot arm, and the second end portion of the second arm link being connected to the second handling member to allow the second handling member to support the second object in a stable condition; a robot arm moving mechanism for allowing one of the first arm links and of the first and second robot arms to be angularly moved with respect to the other of the first arm links of the first and second robot arms; and an angle keeping mechanism for keeping substantially fixed the preset angle defined between the central line of the second arm link of the second robot arm and the central line of the second arm link of the first robot arm as one of the first arm links of the first and second robot arms is angularly moved with respect to the other of the first arm links of the first and second robot arms.

29. 发明授权

US07011875B2 Optical information-recording medium and dye 失效
标题翻译：光学信息记录介质和染料
公开(公告)号：US07011875B2
公开(公告)日：2006-03-14
申请号：US10826254
申请日：2004-04-19
申请人： Tetsuya Watanabe , Masatomi Sen , Hisashi Mikoshiba
发明人： Tetsuya Watanabe , Masatomi Sen , Hisashi Mikoshiba
IPC分类号： B32B3/02
CPC分类号： G11B7/2467 , B32B27/18 , C09B31/153 , C09B45/00 , G11B7/245 , G11B7/246 , G11B7/2472 , G11B7/2478 , G11B7/248 , G11B7/249 , G11B7/2531 , G11B7/2533 , G11B7/2534 , G11B7/2535 , G11B7/2542 , G11B7/2548 , G11B7/256 , G11B7/259 , G11B2007/24612 , G11B2007/25417 , Y10T428/21
摘要： The present invention provides an optical information-recording medium capable of recording and reproducing information with laser beams and having excellent recording characteristics, the optical information-recording medium comprising a support and a recording layer capable of recording information by laser beam exposure, wherein the recording layer contains a dye represented by the following formula (I): wherein R1, R2, R3 and R4 each independently represents a hydrogen atom or a substituent; B1 and B2 represent ═CR5— and —CR6═ respectively, or one of B1 and B2 represents a nitrogen atom and the other represents ═CR5— or —CR6═; R5 and R6 each independently represents a hydrogen atom or a substituent; Q1 represents a substituted or unsubstituted arylene group, or a substituted or unsubstituted divalent heterocyclic group; and Q2 represents a substituted or unsubstituted aryl group, or a substituted or unsubstituted heterocyclic group.
摘要翻译：本发明提供一种能够利用激光束记录和再现信息并且具有优异的记录特性的光学信息记录介质，该光学信息记录介质包括支持体和能够通过激光束曝光来记录信息的记录层，其中记录层包含由下式（I）表示的染料：其中R 1，R 2，R 3和R 4，各自独立地表示氢原子或取代基; B 1和B 2分别代表-CR 5和-CR 6，或者B <！ - SIPO 1和B 2表示氮原子，另一个表示-CR 5或-CR 6 - 。 R 5和R 6各自独立地表示氢原子或取代基; Q 1表示取代或未取代的亚芳基或取代或未取代的二价杂环基; 和Q 2表示取代或未取代的芳基或取代或未取代的杂环基。

30. 发明授权

US07001139B2 Robot arm mechanism 有权
公开(公告)号：US07001139B2
公开(公告)日：2006-02-21
申请号：US10308122
申请日：2002-12-03
申请人： Hiroki Mori , Tetsuya Watanabe , Chohei Okuno
发明人： Hiroki Mori , Tetsuya Watanabe , Chohei Okuno
IPC分类号： B25J18/04
CPC分类号： B25J9/1065 , Y10S414/13 , Y10T74/20329
摘要： Herein disclosed is a robot arm mechanism comprising a first arm link mechanism and a second arm link mechanism, a robot arm driving mechanism for driving the first arm link mechanism and the second arm link mechanism, and a link retaining mechanism for pivotably retaining the first arm link mechanism and the second arm link mechanism, in which a third arm link and a fourth arm link of the first arm link mechanism are kept forward in a first rotation direction, in which the first arm link mechanism and the second arm link mechanism are extended, thereby enabling to prevent the quadric crank chain constituting the robot arm mechanism from being flattened out while the first arm link mechanism and the second arm link mechanism are extended, and improving resistance to deformation, in comparison with the conventional robot arm mechanism.

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