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    • 26. 发明授权
    • Scanning probe apparatus and drive stage therefor
    • 扫描探针装置及驱动台
    • US07631547B2
    • 2009-12-15
    • US11612111
    • 2006-12-18
    • Nobuki YoshimatsuTakao KusakaSusumu YasudaJunichi Seki
    • Nobuki YoshimatsuTakao KusakaSusumu YasudaJunichi Seki
    • G01B5/28G01N13/16G12B21/24
    • G01Q10/02G01Q70/04
    • A scanning probe apparatus for obtaining information of a sample or processing the sample with relative movement between the sample and the apparatus includes a sample stage for holding the sample, and a drive stage with a probe, a cantilever supporting the probe, a cantilever holding member for holding the cantilever, and a drive element for driving the probe in three directions perpendicular to each other. In addition, a movable portion surrounds the drive element and is positioned outside of the drive element, with the movable portion movable in a direction in which an inertial force generated during movement of the probe is canceled. The drive stage includes an optical path, through which light passes, provided inside of the drive stage.
    • 用于获取样品信息或在样品与设备之间相对移动的样品处理的扫描探针装置包括用于保持样品的样品台和具有探针的驱动台,支撑探针的悬臂,悬臂保持构件 用于保持悬臂,以及用于在垂直于彼此的三个方向上驱动探针的驱动元件。 此外,可动部分围绕驱动元件并且位于驱动元件的外侧,其中可移动部分可以在探测器移动期间产生的惯性力被消除的方向上移动。 驱动级包括设置在驱动级内部的光通过的光路。