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21. 发明授权

US07732107B2 Mask pattern correction device, method of correcting mask pattern, light exposure correction device, and method of correcting light exposure 有权
标题翻译：掩模图案校正装置，掩模图案的校正方法，曝光修正装置以及曝光校正方法
公开(公告)号：US07732107B2
公开(公告)日：2010-06-08
申请号：US10995215
申请日：2004-11-24
申请人： Teruyoshi Yao , Satoru Asai , Morimi Osawa , Hiromi Hoshino , Kouzou Ogino , Kazumasa Morishita
发明人： Teruyoshi Yao , Satoru Asai , Morimi Osawa , Hiromi Hoshino , Kouzou Ogino , Kazumasa Morishita
IPC分类号： G03C5/00 , G03F1/00 , G06F17/50
CPC分类号： G03F7/70941 , G03F7/70433 , G03F7/705
摘要： In view of realizing a lithographic process which makes it possible to estimate and correct flare with an extremely high accuracy, and causes only an extremely small dimensional variation in width, over the entire portion not only of a single shot region, but also of a single chip region, a mask pattern correction device of the present invention has a numerical aperture calculation unit calculating, for every single shot region, flare energy for a mask pattern corresponding to a transferred pattern, based on an exposure layout of a plurality of shot regions, or more specifically, while considering flare from a plurality of shot regions located around every single shot region.
摘要翻译：鉴于实现能够以极高的精度估计和校正火炬的平版印刷工艺，并且在整个部分上不仅在单一拍摄区域上，而且在单个区域的整个部分上仅产生非常小的尺寸变化芯片区域，本发明的掩模图案校正装置具有数值孔径计算单元，对于每个单个拍摄区域，基于多个拍摄区域的曝光布局来计算对应于被转印图案的掩模图案的闪光能量，或者更具体地，同时考虑来自位于每个单个拍摄区域周围的多个拍摄区域的闪光。

22. 发明申请

US20090308847A1 EROSION PREVENTION METHOD AND MEMBER WITH EROSION PREVENTIVE SECTION 审中-公开
标题翻译：防腐预防方法和防腐防护部分
公开(公告)号：US20090308847A1
公开(公告)日：2009-12-17
申请号：US12375948
申请日：2007-08-02
申请人： Kenji Kamimura , Katsunori Shiihara , Itaru Murakami , Satoru Asai
发明人： Kenji Kamimura , Katsunori Shiihara , Itaru Murakami , Satoru Asai
IPC分类号： B23K9/04
CPC分类号： B23K15/0086 , B23K26/32 , B23K26/342 , B23K35/004 , B23K35/007 , B23K35/0244 , B23K2101/001 , B23K2103/05 , B23K2103/18 , B23K2103/26 , B23K2103/50
摘要： A method is provided, which ensures reliability during manufacture and in the use environment, and allows affording erosion prevention capability in an inexpensive manner, to an erosion-susceptible portion such as turbine rotor blades. An erosion preventive section 4, comprising a lower layer (low-hardness layer) 2 of an austenitic material, and an upper layer (hard layer) 3 of a hard material, such as stellite, harder than the low-hardness layer 2, is formed by laser build-up welding on a portion, which is susceptible to erosion caused by liquid droplets and solid particles in a use environment, of a target member 1 such as a turbine rotor blade. Laser build-up welding is carried out through irradiation of a laser beam from a laser light source 6 while a welding material supply means 5 supplies an austenitic material and a hard material in the form of, for instance, a rod, powder or the like.
摘要翻译：提供了一种方法，其确保在制造和使用环境中的可靠性，并且允许以廉价的方式向诸如涡轮转子叶片的易腐蚀部分提供防腐蚀能力。包含奥氏体材料的下层（低硬度层）2和比低硬度层2硬的硬质材料（例如硬质锡）3的上层（硬质层）3的防腐蚀部分4是通过在诸如涡轮转子叶片的目标构件1的部分上易于被液滴和使用环境中的固体颗粒侵蚀的部分上的激光积聚焊接形成。激光积聚焊接是通过照射来自激光光源6的激光束进行的，而焊接材料供给装置5提供奥氏体材料和例如棒，粉末等形式的硬质材料。

23. 发明授权

US07601471B2 Apparatus and method for correcting pattern dimension and photo mask and test photo mask 有权
标题翻译：用于校正图案尺寸和光掩模和测试光罩的装置和方法
公开(公告)号：US07601471B2
公开(公告)日：2009-10-13
申请号：US11156592
申请日：2005-06-21
申请人： Morimi Osawa , Teruyoshi Yao , Hiroshi Arimoto , Satoru Asai
发明人： Morimi Osawa , Teruyoshi Yao , Hiroshi Arimoto , Satoru Asai
IPC分类号： G03C5/00 , H01L21/00 , G03B27/68 , G03F1/00
CPC分类号： G03F7/70941 , G03F1/44 , G03F1/70 , G03F7/70591 , G03F7/70625
摘要： The width values of transferred patterns of respective evaluation patterns transferred using a test photo mask (11) are calculated by first calculation unit (12) based on the relationship with the opening ratio of flare generation patterns. The distribution of the calculated width values of the respective transferred patterns is linearly approximated by second calculation unit (13) and the inclination thereof is calculated. On the basis of a table defining the inclination of the width values of the respective transferred patterns (the ratio of dimension fluctuation), the amount of correction is changed for each pattern by correction unit (14). Consequently, the amount of dimension fluctuation caused by local flares can be accurately calculated. This enables accurately performing pattern-dimension corrections against local flares.
摘要翻译：使用测试光掩模（11）转印的各个评估图案的转印图案的宽度值基于与闪光发生图案的开口率的关系由第一计算单元（12）计算。所计算的各个转移图案的宽度值的分布由第二计算单元（13）线性近似，并且计算其倾斜度。基于定义各个转印图案的宽度值的倾斜度（尺寸波动的比例）的表格，通过校正单元（14）对每个图案改变校正量。因此，可以精确地计算由局部耀斑引起的尺寸波动量。这使得能够对局部耀斑进行精确的模式维度校正。

24. 发明授权

US07455570B2 Large part polishing apparatus and polishing method 失效
标题翻译：大型抛光装置和抛光方法
公开(公告)号：US07455570B2
公开(公告)日：2008-11-25
申请号：US11313696
申请日：2005-12-22
申请人： Satoru Yanaka , Satoru Asai , Ryusuke Tsuboi , Kenji Kamimura , Tadashi Tanuma , Masataka Kikuchi
发明人： Satoru Yanaka , Satoru Asai , Ryusuke Tsuboi , Kenji Kamimura , Tadashi Tanuma , Masataka Kikuchi
IPC分类号： B24B1/00
CPC分类号： B24C1/08 , B24C3/24 , B24C9/003 , B24C9/006 , B24C11/00 , F01D5/005 , F01D25/002 , F05D2230/10 , F05D2230/14 , F05D2230/90 , Y02P70/179
摘要： The present invention comprises a turntable which holds a turbine part at a predetermined position, the turn table being rotatably supported by a support member, and rotated and driven by a driving motor, an abrasive feeding unit which feeds an abrasive particle having an elastic material as a core to a predetermined position as an abrasive, and a polishing head including an impeller which is rotated and driven by an impeller driving motor at high speed and applies rotary energy to the abrasive particle to be supplied from the abrasive feeding unit, the polishing head injecting the abrasive particle flying from the tangential direction of the impeller at a predetermined speed toward a surface to be polished of the turbine part held on the turntable, and an abrasive recovery unit which recovers the abrasive particle provided for polishing of the turbine part from the polishing head, and feeding into the abrasive feeding unit.
摘要翻译：本发明包括将涡轮部分保持在预定位置的转台，转台由支撑构件可旋转地支撑，并由驱动电机旋转驱动;磨料供给单元，其将具有弹性材料的磨料颗粒作为将作为研磨剂的预定位置的芯体，以及包括叶轮的研磨头，所述叶轮由叶轮驱动马达高速旋转驱动，并向从研磨给料单元供给的磨料颗粒施加旋转能量，抛光头将磨粒从叶轮的切线方向以预定的速度喷射到被保持在转台上的涡轮部分的待抛光表面;以及研磨回收单元，其从所述涡轮机部件的磨抛光头，并送入研磨给料单元。

25. 发明申请

US20080175706A1 STEAM TURBINE 有权
标题翻译：汽轮机
公开(公告)号：US20080175706A1
公开(公告)日：2008-07-24
申请号：US11968309
申请日：2008-01-02
申请人： Kazutaka IKEDA , Takashi Sasaki , Satoru Asai , Hitoshi Sakakida , Kenji Kamimura , Ryohei Ogino , Yasushi Ooishi
发明人： Kazutaka IKEDA , Takashi Sasaki , Satoru Asai , Hitoshi Sakakida , Kenji Kamimura , Ryohei Ogino , Yasushi Ooishi
IPC分类号： F01D11/12
CPC分类号： F01D25/246 , F01D5/3046 , F01D11/001 , F01D11/02 , F01D11/122 , F05D2220/31 , F05D2240/55
摘要： A steam turbine has: a casing; a rotor rotatably arranged in the casing; a nozzle diaphragm concentrically arranged with respect to the rotor, the nozzle diaphragm being engaged with the casing; moving blades arranged in circumferential direction on outer circumference of the rotor at positions adjacent to the nozzle diaphragm; seal strips circumferentially extending on tips of the moving blades, the seal strips protruding in radial outward direction; and an abradable structure rigidly connected to the nozzle diaphragm. The abradable structure faces the seal strips in radial direction at a facing surface, and has an abradable part made of an abradable material arranged at the facing surface.
摘要翻译：蒸汽轮机具有：壳体; 可旋转地布置在壳体中的转子; 相对于转子同心地布置的喷嘴隔膜，喷嘴隔膜与壳体接合; 在与所述喷嘴隔膜相邻的位置处，在所述转子的外周上沿圆周方向配置的动叶片; 密封条在活动叶片的尖端周向延伸，密封条沿径向向外的方向突出; 以及刚性地连接到喷嘴隔膜的可磨损结构。可磨损结构在面对面处径向地面向密封条，并且具有由布置在相对表面上的可磨损材料制成的可磨损部分。

26. 发明申请

US20070147990A1 SEALING DEVICE 审中-公开
标题翻译：密封装置
公开(公告)号：US20070147990A1
公开(公告)日：2007-06-28
申请号：US11612831
申请日：2006-12-19
申请人： Kenji Kamimura , Takashi Sasaki , Hitoshi Sakakida , Yoichi Tsuda , Satoru Asai
发明人： Kenji Kamimura , Takashi Sasaki , Hitoshi Sakakida , Yoichi Tsuda , Satoru Asai
IPC分类号： F01D11/08
CPC分类号： F16J15/445
摘要： A sealing device by which the leakage of fluid is further reduced by securely maintaining the adhesion between a base material and an abradable layer and further strengthening the prevention of fluid leakage is provided. The sealing device according to the present invention includes seal strips provided to either one of a rotating portion or a stationary portion forming a gap therebetween; and a coating layer provided to a base material of the rotating portion or the stationary portion so that the coating layer faces the seal strips. The coating layer is composed of an abradable layer and a bond coat layer.
摘要翻译：提供了通过牢固地保持基材和耐磨层之间的粘合力进一步减少流体泄漏的密封装置，并且进一步加强了防止流体泄漏。根据本发明的密封装置包括设置在旋转部分或静止部分中的任一个之间形成间隙的密封条; 以及设置在旋转部分或固定部分的基材上的涂层，使得涂层面向密封条。涂层由可磨损层和粘合涂层组成。

27. 发明申请

US20070013471A1 Superconducting coil, method for manufacturing thereof and welding device 审中-公开
标题翻译：超导线圈，其制造方法和焊接装置
公开(公告)号：US20070013471A1
公开(公告)日：2007-01-18
申请号：US11478343
申请日：2006-06-30
申请人： Koichi Minami , Satoru Asai , Yoshinobu Makino , Katsunori Shiihara , Toshio Kanahara
发明人： Koichi Minami , Satoru Asai , Yoshinobu Makino , Katsunori Shiihara , Toshio Kanahara
IPC分类号： H01F27/28 , H01L39/24
CPC分类号： H01F41/048 , B23K26/206 , B23K26/348 , H01F6/06 , Y10T29/49014
摘要： In the method of manufacturing a superconducting coil, a superconducting line coated with an insulating member is contained in a groove formed on a surface of a stainless steel plate, and a stainless steel lid is fitted in outer side of the superconducting line in an opening in the groove. The lid is formed to fit in the groove. Then, the plate and the lid are welded to seal at joint sections. The welding is conducted using a plurality of heat sources including a laser and an arc so that melting depth at the joint section is within a predetermined range. The lid may have two joint sections, and the welding of the joint sections of the lid may be conducted simultaneously. The plate may have a plurality of grooves, and the welding of the joint sections of the lid may be conducted simultaneously.
摘要翻译：在制造超导线圈的方法中，在不锈钢板的表面上形成的沟槽中包含涂覆有绝缘构件的超导线，并且在超导线的外侧的开口内装配有不锈钢盖凹槽盖形成为适合于凹槽。然后，板和盖被焊接以在接合部分处密封。使用包括激光和电弧的多个热源进行焊接，使得接合部的熔融深度在预定范围内。盖可以具有两个接合部分，并且盖的接合部分的焊接可以同时进行。该板可以具有多个槽，并且可以同时进行盖的接合部的焊接。

28. 发明申请

US20050095513A1 Photomask 审中-公开
标题翻译：光掩模
公开(公告)号：US20050095513A1
公开(公告)日：2005-05-05
申请号：US11006688
申请日：2004-12-08
申请人： Teruyoshi Yao , Satoru Asai
发明人： Teruyoshi Yao , Satoru Asai
IPC分类号： G03C5/00 , G03F1/14 , G03F9/00
CPC分类号： G03F1/70
摘要： Dummy patterns serving as sub-patterns are formed in virtual regions (2, 3). The numerical apertures of when only main patterns are formed in the virtual regions (2, 3) are 60% and 90%, respectively. The dummy pattern in the virtual region (2) is a light-shielding pattern of a rectangle having a side of 0.15 μm and the dummy pattern in the virtual region 3 is a light-shielding pattern of a rectangle having a side of 0.2 μm. The numerical apertures of the virtual regions (2, 3) are both set to 30%. When exposure using such a photomask is conducted, the amount of light produced by local flare is almost uniform at any point in the area where exposure light is applied on a photosensitive body. As a result, variation of the line width, even if caused, is uniform over the photomask.
摘要翻译：用作子图案的虚拟图案形成在虚拟区域（2,3）中。在虚拟区域（2,3）中仅形成主图案的数值孔径分别为60％和90％。虚拟区域（2）中的虚拟图案是具有0.15μm的边的矩形的遮光图案，虚拟区域3中的虚拟图案是具有0.2μm的边的矩形的遮光图案。虚拟区域（2,3）的数值孔径都设置为30％。当进行使用这种光掩模的曝光时，在曝光光被施加在感光体上的区域的任何点处，由局部耀斑产生的光量几乎是均匀的。结果，即使导致的线宽的变化在光掩模上是均匀的。

29. 发明授权

US5979779A Air conditioning system for vehicle 失效
标题翻译：汽车空调系统
公开(公告)号：US5979779A
公开(公告)日：1999-11-09
申请号：US8928
申请日：1998-01-20
申请人： Satoru Asai , Yuji Ito
发明人： Satoru Asai , Yuji Ito
IPC分类号： B60J5/10 , B60H1/00 , F24F7/00 , G05D23/00
CPC分类号： B60H1/0075 , B60H1/00021 , B60H2001/002
摘要： An air conditioning system for a cabin of a vehicle having a rear hatch. The air conditioning system has a sun radiation sensor for detecting a sun radiation amount into a rear part of the cabin and an air conditioning means for providing air conditioning at a rear seat section of the cabin in accordance with the sun radiation amount detected by the sun radiation amount sensor. The sun radiation amount sensor is mounted on the rear hatch in such a manner that the sun radiation sensor moves together with the movement of the rear hatch. A sensor for detecting if the rear hatch is open or closed is provided. A sun radiation amount detected by the sun radiation sensor during a closed condition of the rear hatch is memorized. When it is detected that the rear hatch is opened, the air conditioning, by the air conditioning means of the rear seat section, is done based on the memorized value of the sun radiation amount just before the rear hatch was opened.
摘要翻译：一种用于具有后舱口的车辆舱的空调系统。空调系统具有太阳辐射传感器，用于检测进入车厢后部的太阳辐射量，以及空调装置，用于根据太阳检测到的太阳辐射量在车厢的后座部分处提供空调辐射量传感器太阳辐射量传感器以这样的方式安装在后舱上，使得太阳辐射传感器随着后舱盖的运动而移动。提供用于检测后舱盖是否打开或关闭的传感器。记录在后舱的封闭状态下由太阳辐射传感器检测到的太阳辐射量。当检测到后舱口打开时，通过后座部分的空气调节装置的空调是基于刚好在后舱口打开之前的太阳辐射量的记忆值来完成的。

30. 发明授权

US5418093A Projection exposure method and an optical mask for use in projection exposure 失效
标题翻译：投影曝光方法和用于投影曝光的光学掩模
公开(公告)号：US5418093A
公开(公告)日：1995-05-23
申请号：US201079
申请日：1994-02-24
申请人： Satoru Asai , Isamu Hanyu , Mitsuji Nunokawa
发明人： Satoru Asai , Isamu Hanyu , Mitsuji Nunokawa
IPC分类号： G03F1/00 , G03F7/20 , G03F9/00
CPC分类号： G03F7/70433 , G03F1/36
摘要： A projection exposure method includes the steps of (a) irradiating a light from a light source on an optical mask, where the optical mask includes a main space which transmits light and has a desired exposure pattern, and a subspace which transmits light and is provided adjacent to the main space, and (b) exposing a photoresist layer by the light which is transmitted through the optical mask via a lens so as to project an optical image of the main space, where the subspace has a narrow width such that the light transmitted through the subspace by itself does not expose the photosensitive layer.
摘要翻译：投影曝光方法包括以下步骤：（a）将来自光源的光照射在光学掩模上，其中光学掩模包括透光的主空间并具有期望的曝光图案，以及提供透光的子空间邻近主空间，和（b）通过透镜通过光掩模透射的光使光致抗蚀剂层曝光，以便投影主空间的光学图像，其中子空间具有窄的宽度，使得光透过子空间本身不会使感光层露出。

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