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    • 22. 发明授权
    • Magnetic recording medium having ion-implanted parts
    • 具有离子注入部件的磁记录介质
    • US08361640B2
    • 2013-01-29
    • US12378894
    • 2009-02-20
    • Toshinori OnoHiroshi KanaiTatsuysa HinoueHiroyuki SuzukiHiroshi Inaba
    • Toshinori OnoHiroshi KanaiTatsuysa HinoueHiroyuki SuzukiHiroshi Inaba
    • G11B5/66
    • G11B5/82G11B5/855
    • Embodiments of the present invention provide recording area separated magnetic recording media (DTMs, BPMs) allowing magnetic heads to fly lower. According to one embodiment, the recording area separated magnetic recording media are configured so that magnetic recording layers have parts with the relatively higher element ratio of a ferromagnetic material, and parts with the lower element ratio of the ferromagnetic material, occurring periodically in the in-plane direction, and the average height from the substrate surface of the parts with the relatively higher element ratio of a ferromagnetic material is higher than the average height from the substrate surface of the parts with the lower element ratio of the ferromagnetic material. In producing recording area separated magnetic recording media with the element ratio of a ferromagnetic material relatively lowered by ion implantation, preliminarily etching the part to be ion implanted makes the height after ion implantation relatively lower than the non-implanted part.
    • 本发明的实施例提供了允许磁头较低飞行的记录区分离的磁记录介质(DTM,BPM)。 根据一个实施例,记录区域分离的磁记录介质被配置为使得磁记录层具有铁磁材料的相对较高的元件比的部件,并且具有铁磁材料的较低元件比的部件在内部周期性地出现, 并且与铁磁材料相对较高的元件比的部件的基板表面的平均高度高于具有铁素体的较低元素比的部件的基板表面的平均高度。 在通过离子注入相对降低的铁磁材料的元素比率的记录区域分离的磁记录介质中,预先蚀刻待离子注入的部分使离子注入后的高度相对低于非注入部分。
    • 26. 发明申请
    • Magnetic recording medium and manufacturing method thereof
    • 磁记录介质及其制造方法
    • US20090214895A1
    • 2009-08-27
    • US12378777
    • 2009-02-18
    • Tatsuya HinoueHiroshi KanaiToshinori OnoHiroyuki SuzukiHiroshi Inaba
    • Tatsuya HinoueHiroshi KanaiToshinori OnoHiroyuki SuzukiHiroshi Inaba
    • G11B5/66C23C14/04
    • G11B5/855C23C14/3414C23C30/00G11B5/66H01F41/34
    • Embodiments of the present invention produce discrete track media and bit patterned media having both excellent read/write performance and reliability. According to one embodiment, the medium comprises a magnetic layers formed by at least two ferromagnetic alloy layers with different compositions on a substrate. The ferromagnetic alloy layer located closest to the medium surface has more concentrated parts and less concentrated parts of nonmagnetic element in the in-plane direction. The more concentrated parts of the nonmagnetic element contain more nonmagnetic elements than the other parts except for an intermediate layer in the magnetic recording layer. The more concentrated parts and the less concentrated parts of the nonmagnetic element in the ferromagnetic alloy layer located closest to the medium surface are formed substantially concentric. The more concentrated parts of the nonmagnetic element is formed by being doped with ions of nonmagnetic element.
    • 本发明的实施例产生具有优异的读/写性能和可靠性的离散轨道介质和位图案化介质。 根据一个实施例,介质包括由衬底上具有不同组成的至少两个铁磁性合金层形成的磁性层。 位于最靠近介质表面的铁磁合金层在面内方向具有更多的集中部分和更少的非磁性元件的集中部分。 除了磁记录层中的中间层之外,非磁性元件的集中部分比其他部分含有更多的非磁性元件。 位于最靠近介质表面的铁磁性合金层中的非磁性元件的集中部分和较不集中的部分基本上是同心的。 通过掺杂非磁性元素的离子形成非磁性元件越集中的部分。
    • 27. 发明授权
    • Magnetic head with air bearing surface protection film and manufacturing method thereof
    • 带空气轴承表面保护膜的磁头及其制造方法
    • US07551398B2
    • 2009-06-23
    • US11245481
    • 2005-10-05
    • Shigehiko FujimakiHiroshi InabaHiroshi Ishizaki
    • Shigehiko FujimakiHiroshi InabaHiroshi Ishizaki
    • G11B5/60
    • G11B5/6005G11B5/3106G11B5/40
    • To promote reduction in thickness of an air bearing surface protective film of a magnetic head, a magnetic head having an air bearing surface protective film consisting only of a thin carbon film while excluding formation of a dead layer by ion incidence as less as possible to the read/write device, and a manufacturing method therefore, are provided. In an embodiment, an air bearing surface protective film of a magnetic head comprises a thin carbon film, in which the mass density a lowermost layer of the air bearing surface protective film on the side of a magnetic device is made lower compared with a thin carbon film constituting other adjacent layers. Further, the manufacturing method comprises deposition under the control of time for the incident angle of ion flow to a substrate to be processed and deposition under the control of time for the ion flow energy to a substrate to be processed.
    • 为了促进磁头的空气轴承表面保护膜的厚度的减小,磁头具有仅由薄碳膜构成的空气轴承表面保护膜,同时排除通过离子入射形成的死层尽可能少地 读/写装置及其制造方法。 在一个实施例中,磁头的空气轴承表面保护膜包括薄碳膜,其中与磁性元件一侧的空气轴承表面保护膜的最下层的质量密度比薄碳 构成其他相邻层的膜。 此外,制造方法包括在时间控制下进行离子流入待处理基板的入射角的沉积,并且在时间控制下进行离子流向待处理基板的能量的沉积。
    • 28. 发明申请
    • Lapping tool and method for manufacturing the same
    • 研磨工具及其制造方法
    • US20070122548A1
    • 2007-05-31
    • US11594080
    • 2006-11-08
    • Hiroshi InabaHiromu ChibaXudong YangShinji SasakiNobuto Yasui
    • Hiroshi InabaHiromu ChibaXudong YangShinji SasakiNobuto Yasui
    • H05H1/24B05D1/12
    • B24D18/0054B24B37/12
    • Since structural portions of a device made of a plurality of materials are different from one another in mechanical hardness, it is very difficult to uniformly lap the structural portions. This is attributable to generation of machining recessions due to differences in lapped amount when large fixed abrasive grains are used, and generation of lapping marks caused by that the dropped abrasive grains rotate. Accordingly, in order to cope with the disadvantage, it is essential to surely grip abrasive grains of small size to a surface of a surface plate. [Solving Means]Abrasive grains are fixedly forced into a surface of a lapping tool with mechanical pressure and then the surface of the lapping tool including the abrasive grains is subjected to plasma processing, whereby an improvement in adhesion between the abrasive grains and a surface plate and reduction in the number of loose abrasive grains, which are dropped from the surface of the lapping tool, can be achieved, so that it is possible to realize lapping, in which a surface of a device made of a plurality of materials is made very plane.
    • 由于由多种​​材料制成的装置的结构部分在机械硬度上彼此不同,所以很难均匀地研磨结构部分。 这是由于当使用大的固定磨粒时由于研磨量的差异而产生加工凹陷,并且由于下落的磨料颗粒旋转而产生研磨痕迹。 因此,为了应对这个缺点,必须将小尺寸的磨粒牢固地夹在表面板的表面上。 [解决方案]将研磨颗粒以机械压力固定地压入研磨工具的表面,然后对包含磨粒的研磨工具的表面进行等离子体处理,由此改善磨粒与表面板之间的粘合性 并且可以实现从研磨工具的表面落下的松散的磨粒的数量的减少,从而可以实现由多种材料制成的装置的表面非常成型的研磨 飞机
    • 29. 发明申请
    • Magnetic head slider and production method thereof
    • 磁头滑块及其制造方法
    • US20070014050A1
    • 2007-01-18
    • US11486182
    • 2006-07-12
    • Nobuto YasuiHiroshi InabaShinji SasakiKazuhito Miyata
    • Nobuto YasuiHiroshi InabaShinji SasakiKazuhito Miyata
    • G11B5/60
    • G11B5/3169G11B5/102G11B5/3106G11B5/6005G11B21/21Y10T29/49025Y10T29/49027Y10T29/4903Y10T29/49032Y10T29/49046Y10T29/49048
    • A magnetic head slider having an air bearing surface overcoat that has excellent corrosion resistance and wear resistance despite its very small thickness is provided. In one embodiment, a method of producing a magnetic head slider comprises the steps of forming, on the air bearing surface of the slider, an air bearing surface overcoat which is a film stack of an amorphous silicon film and a hard amorphous carbon film, removing the surface region from the hard amorphous carbon film by the irradiation with an ion beam which is tilted with respect to a normal to the air bearing surface, and forming a rail in the air bearing surface on which the air bearing surface overcoat has been formed. The amount of the diamond component in the hard amorphous carbon film must not be smaller than about 45% and, desirably, in a range of about 60% to 85%. A high density and covering performance are obtained when the angle of irradiating the ion beam is not smaller than about 60 degrees from a normal to the air bearing surface of the magnetic head slider and when the acceleration voltage for the ion beam is not higher than about 300 V in the step of removing part of the air bearing surface overcoat.
    • 提供具有空气轴承表面外涂层的磁头滑块,其具有优异的耐腐蚀性和耐磨性,尽管其非常小的厚度。 在一个实施例中,制造磁头滑动器的方法包括以下步骤:在滑块的空气轴承表面上形成空气轴承表面外涂层,其是非晶硅膜和硬质非晶碳膜的膜叠层,去除 通过照射相对于空气轴承表面的法线倾斜的离子束,并且在已经形成有空气轴承表面外涂层的空气轴承表面中形成轨道,来自硬非晶碳膜的表面区域。 硬质无定形碳膜中的金刚石成分的含量不得小于约45%,优选为约60%〜85%的范围。 当照射离子束的角度与磁头滑块的空气轴承表面的法线不小于约60度时,并且当离子束的加速电压不高于约10度时,可获得高密度和覆盖性能 在去除部分空气轴承表面外套的步骤中为300V。