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    • 30. 发明申请
    • PIEZOELECTRIC/ELECTROSTRICTIVE ELEMENT AND METHOD OF MANUFACTURING THE SAME
    • 压电/电气元件及其制造方法
    • US20090205181A1
    • 2009-08-20
    • US12367701
    • 2009-02-09
    • Takaaki KoizumiHideki Shimizu
    • Takaaki KoizumiHideki Shimizu
    • H01L41/22H01L41/04
    • H01L41/0533H01L41/23Y10T29/42
    • A piezoelectric/electrostrictive element with improved moisture resistance while having less degradation in its piezoelectric/electrostrictive properties and a method of manufacturing such a piezoelectric/electrostrictive element are provided. A laminated vibrator of a piezoelectric/electrostrictive element has a structure in which an electrode film, a piezoelectric/electrostrictive film, another electrode film, another piezoelectric/electrostrictive film, and another electrode film are laminated one above the other. In the manufacture of the piezoelectric/electrostrictive element, the laminated vibrator and a counter electrode are immersed in an electrodeposition coating fluid containing a coating component so that the electrodeposition coating fluid is brought into contact with the surfaces of the laminated vibrator and the counter electrode. Thereafter, voltage is applied between an internal electrode film and the counter electrode to induce electrophoresis of the coating component toward a surface-exposed defect, whereby the coating material is selectively electrodeposited on the surface-exposed defect.
    • 提供了具有改善的耐湿性同时具有较小的压电/电致伸缩性能降低的压电/电致伸缩元件以及制造这种压电/电致伸缩元件的方法。 压电/电致伸缩元件的叠层振动器具有其中电极膜,压电/电致伸缩膜,另一电极膜,另一压电/电致伸缩膜和另一电极膜层叠的结构。 在压电/电致伸缩元件的制造中,层压振动器和对电极浸渍在含有涂层成分的电沉积涂布液中,使得电沉积涂布液与层叠振动器和对电极的表面接触。 此后,在内部电极膜和对电极之间施加电压,以引起涂层组分向表面暴露的缺陷的电泳,由此将涂层材料选择性地电沉积在表面暴露的缺陷上。