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    • 24. 发明授权
    • Power semiconductor device
    • 功率半导体器件
    • US06297534B1
    • 2001-10-02
    • US09413811
    • 1999-10-07
    • Yusuke KawaguchiKazutoshi NakamuraAkio Nakagawa
    • Yusuke KawaguchiKazutoshi NakamuraAkio Nakagawa
    • H01L2976
    • H01L29/7816H01L29/0634H01L29/1095H01L29/7824
    • A first conductivity type active layer having high resistance is provided on an insulation region. A second conductivity type base layer is selectively formed on a surface of the first conductivity type active layer. A first conductivity type source layer is selectively formed on a surface of the second conductivity type base layer. A first conductivity type drain layer is selectively formed on a surface of the first conductivity type active layer. A gate electrode is formed facing, through a gate insulating film, a surface region of the second conductivity type base layer between the first conductivity type source layer and the first conductivity type active layer. A plurality of first and second conductivity type semiconductor regions are formed between the second conductivity type base layer and the first conductivity type drain layer. Each of the second conductivity type semiconductor regions is arranged alternately with each of the first conductivity type semiconductor regions. A drain current flows from the first conductivity type source layer to the first conductivity type drain layer through the first conductivity type semiconductor regions. Bottom portions of the second conductivity type semiconductor regions are shallower than the interface between the first conductivity type active layer and the insulation region. According to the present invention, low ON resistance and high withstand voltage are realized at the same time.
    • 在绝缘区域上设置具有高电阻的第一导电型有源层。 在第一导电型有源层的表面上选择性地形成第二导电型基极层。 第一导电型源极层选择性地形成在第二导电型基极层的表面上。 第一导电型漏极层选择性地形成在第一导电型有源层的表面上。 栅极电极通过栅极绝缘膜形成在第一导电型源极层和第一导电型有源层之间的第二导电型基极层的表面区域。 在第二导电型基极层和第一导电型漏极层之间形成多个第一和第二导电型半导体区域。 每个第二导电类型半导体区域与第一导电类型半导体区域中的每一个交替布置。 漏极电流通过第一导电型半导体区域从第一导电型源极层流到第一导电型漏极层。 第二导电类型半导体区域的底部比第一导电型有源层和绝缘区域之间的界面浅。 根据本发明,同时实现低导通电阻和高耐受电压。