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    • 25. 发明授权
    • Nonvolatile semiconductor memory device
    • 非易失性半导体存储器件
    • US07130223B2
    • 2006-10-31
    • US11251963
    • 2005-10-18
    • Tetsuya IshimaruNozomu MatsuzakiHitoshi Kume
    • Tetsuya IshimaruNozomu MatsuzakiHitoshi Kume
    • G11C11/34
    • G11C16/0433G11C16/0466G11C16/10G11C16/14H01L27/11568H01L29/513H01L29/518H01L29/792
    • Characteristics of a nonvolatile semiconductor memory device are improved. The memory cell comprises: an ONO film constituted by a silicon nitride film SIN for accumulating charge and by oxide films BOTOX and TOPOX disposed thereon and thereunder; a memory gate electrode MG disposed at an upper portion thereof; a select gate electrode SG disposed at a side portion thereof through the ONO film; a gate oxide film SGOX disposed thereunder. By applying a potential to a select gate electrode SG of a memory cell having a source region MS and a drain region MD and to the source region MS and by accelerating electrons flowing in a channel through a high electric field produced between a channel end of the select transistor and an end of an n-type doped region ME disposed under the memory gate electrode MG, hot holes are generated by impact ionization, and the hot holes are injected into a silicon nitride film SIN by a negative potential applied to the memory gate electrode MG, and thereby an erase operation is performed.
    • 提高了非易失性半导体存储器件的特性。 存储单元包括:由用于累积电荷的氮化硅膜SIN和其上设置的氧化膜BOTOX和TOPOX构成的ONO膜; 设置在其上部的存储栅极电极MG; 通过ONO膜设置在其侧部的选择栅电极SG; 设置在其下方的栅氧化膜SGOX。 通过向具有源极区域MS和漏极区域MD的存储单元的选择栅极SG施加电位,并且通过在通道的沟道端之间产生的高电场加速在沟道中流动的电子, 选择晶体管和设置在存储栅电极MG下方的n型掺杂区ME的端部,通过冲击电离产生热孔,并且通过施加到存储栅的负电位将热孔注入氮化硅膜SIN 电极MG,从而进行擦除操作。
    • 30. 发明授权
    • Semiconductor device and method of manufacturing the same
    • 半导体装置及其制造方法
    • US07884348B2
    • 2011-02-08
    • US12754049
    • 2010-04-05
    • Masahiro MoniwaNozomu MatsuzakiRiichiro Takemura
    • Masahiro MoniwaNozomu MatsuzakiRiichiro Takemura
    • H01L29/02H01L31/032
    • H01L45/144G11C11/5678G11C13/0004G11C2213/79H01L27/2436H01L27/2472H01L45/06H01L45/1233H01L45/1675
    • A semiconductor device and a method of manufacturing the same with easy formation of a phase change film is realized, realizing high integration at the time of using a phase change film as a memory element.Between MISFET of the region which forms one memory cell, and MISFET which adjoined it, each source of MISFET adjoins in the front surface of a semiconductor substrate, insulating. And the multi-layer structure of a phase change film, and the electric conduction film of specific resistance lower than the specific resistance is formed in the plan view of the front surface of a semiconductor substrate ranging over each source of both MISFET, and a plug and a plug stacked on it. The multi-layer structure functions as a wiring extending and existing in parallel on the surface of a semiconductor substrate, and an electric conduction film sends the current of a parallel direction on the surface of a semiconductor substrate.
    • 实现了容易形成相变膜的半导体器件及其制造方法,在使用相变膜作为存储元件时实现高集成度。 在形成一个存储单元的区域的MISFET和与其相邻的MISFET之间,MISFET的每个源极邻接在半导体衬底的前表面中,绝缘。 并且在两个MISFET的每个源上的半导体衬底的前表面的平面图中形成相变膜的多层结构和比电阻率低的电阻率的导电膜,并且插塞 和堆叠在其上的插头。 多层结构用作在半导体衬底的表面上平行延伸并存在的布线,并且导电膜在半导体衬底的表面上发送平行方向的电流。