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    • 22. 发明申请
    • FLEX-RIGID WIRING BOARD AND METHOD FOR MANUFACTURING THE SAME
    • FLEX-RIGID接线板及其制造方法
    • US20120249283A1
    • 2012-10-04
    • US13145455
    • 2010-01-14
    • Yuji KimuraTakahiro AsadaKazuaki Suzuki
    • Yuji KimuraTakahiro AsadaKazuaki Suzuki
    • H01H37/76
    • H01H37/761H01H1/5805H01H2037/768
    • A protection element is provided which is capable of stably retaining a flux on a soluble conductor at a predetermined position, enabling a speedy and precise blowout of the soluble conductor in the event of an abnormality. This protection element includes: a soluble conductor 13 which is disposed on an insulation baseboard 11 and is connected to a power supply path of a device targeted to be protected, to cause a blowout by means of a predetermined abnormal electric power; a flux 19 which is coated onto a surface of the soluble conductor 13; and an insulation cover 14 which is mounted on the baseboard 11 with the soluble conductor 13 being covered therewith. In addition, the protection element is provided with a protrusive stripe portion 20 which is formed on an interior face of the insulation cover 14 in opposite to the soluble conductor 13 and in which a stepped portion 20a for retaining the flux 19 is formed at a predetermined position while in contact with the flux 19. The soluble conductor 13 has a hole portion 13a at which the flux 19 is retained.
    • 提供一种保护元件,其能够在预定位置上稳定地保持可溶性导体上的助熔剂,从而能够在异常情况下快速且精确地喷出可溶性导体。 该保护元件包括:可溶性导体13,其设置在绝缘基板11上并连接到被保护的装置的电源路径,以通过预定的异常电力引起井喷; 焊剂19,其涂覆在可溶性导体13的表面上; 以及绝缘盖14,其被安装在基板11上,可溶性导体13被覆盖。 此外,保护元件设置有突出条形部分20,其形成在绝缘盖14的与可溶性导体13相对的内表面上,并且其中用于保持焊剂19的阶梯部分20a形成在预定的 位置,同时与焊剂19接触。可溶性导体13具有孔部分13a,焊剂19保持在该孔部分13a。
    • 26. 发明授权
    • Methods and devices for controlling blur resulting from the space-charge effect and geometrical aberration in a charged-particle-beam microlithography apparatus
    • 用于控制由带电粒子束微光刻设备中的空间电荷效应和几何像差引起的模糊的方法和装置
    • US06917048B2
    • 2005-07-12
    • US10132983
    • 2002-04-26
    • Tomoharu FujiwaraKazuaki Suzuki
    • Tomoharu FujiwaraKazuaki Suzuki
    • G03F7/20G03F9/02H01J37/305H01J37/317H01L21/027G21K5/10H01J37/08
    • B82Y10/00B82Y40/00H01J37/3174H01J2237/30455
    • Methods and devices are disclosed for controlling blur resulting from the space-charge effect and geometrical aberration in a charged-particle-beam microlithography apparatus. Based on the pattern-element densities of the exposure units to be transferred to the substrate, a relationship between the total blur and the beam semi-angle, the current density, and/or the beam-acceleration voltage is determined. An optimal beam semi-angle, current density, and/or beam-acceleration voltage is calculated to: (1) minimize the blur during the transfer-exposure of an exposure unit having a certain pattern-element density; (2) make the blur constant during the transfer-exposure of a group of exposure units having various pattern-element densities; or (3) maximize the patterned-beam current during the transfer-exposure of an exposure unit having a certain pattern-element density and blur tolerance. The beam semi-angle, current density, and/or acceleration voltage of the CPB-optical system is then adjusted to the calculated value.
    • 公开了用于控制由带电粒子束微光刻设备中的空间电荷效应和几何像差引起的模糊的方法和装置。 基于要转印到基板的曝光单元的图案元素密度,确定总模糊与光束半角,电流密度和/或光束加速电压之间的关系。 计算最佳光束半角,电流密度和/或光束加速电压:(1)使具有特定图案元素密度的曝光单元的转印曝光期间的模糊最小化; (2)在具有各种图案元素密度的一组曝光单元的转印曝光期间使模糊恒定; 或(3)在具有特定图案元素密度和模糊公差的曝光单元的转印曝光期间使图案束电流最大化。 然后将CPB光学系统的光束半角,电流密度和/或加速电压调整到计算值。
    • 28. 发明授权
    • IC card having a mica capacitor
    • 具有云母电容器的IC卡
    • US06585165B1
    • 2003-07-01
    • US09763453
    • 2001-02-23
    • Nobukazu KurodaKazuaki Suzuki
    • Nobukazu KurodaKazuaki Suzuki
    • G06K1906
    • G06K19/0775G06K19/07749
    • An IC card 10A has a mica capacitor 5, an antenna coil 2 and an IC chip 3 formed on an insulating substrate 1, where the mica capacitor is composed of a mica film 6 and electrodes 7a and 7b formed on both sides of the mica film 6. terminal of the electrode 7b on one side of the mica capacitor 5 is formed on the other side of the mica capacitor 5, and this terminal and a terminal of the electrode 7a on the other side are connected on the insulating substrate 1 with the use of an anisotropic conductive adhesive 4. Thus, an IC card can be manufactured at low cost, in which the resonance frequency is stabilized and the antenna characteristics are improved.
    • IC卡10A具有形成在绝缘基板1上的云母电容器5,天线线圈2和IC芯片3,其中云母电容器由云母膜6和形成在云母膜两侧的电极7a和7b组成 在云母电容器5的另一侧上形成在云母电容器5的一侧上的电极7b的端子,并且该端子和另一侧的电极7a的端子在绝缘基板1上与 使用各向异性导电粘合剂4.因此,可以以低成本制造IC卡,其中谐振频率稳定并且天线特性得到改善。
    • 29. 发明授权
    • Charged-particle-beam projection-exposure methods and apparatus that selectively expose desired exposure units of a reticle pattern
    • 带电粒子束投影曝光方法和设备,其选择性地曝光标线图案的期望曝光单元
    • US06433347B1
    • 2002-08-13
    • US09336866
    • 1999-06-18
    • Kazuaki Suzuki
    • Kazuaki Suzuki
    • G03F900
    • B82Y10/00B82Y40/00H01J37/3174H01J2237/31776
    • Methods and apparatus are disclosed for performing charged-particle-beam projection exposure of selected exposure units of a pattern, defined by a reticle, without compromising throughput or transfer accuracy. An illumination beam sequentially illuminates individual exposure units (e.g., subfields) of the reticle pattern to form a patterned beam. The patterned beam sequentially projects images of the illuminated exposure units on a sensitive substrate (e.g., resist-coated wafer). The images are formed on the substrate so as to be stitched together in a manner that reproduces the entire pattern over a large field on the substrate. Exposure is controllably performed according to data concerning whether the illumination beam should be ON or OFF, according to data concerning exposure-dose values, and/or according to data concerning focal position for each respective exposure unit.
    • 公开了用于执行由掩模版定义的图案的选定曝光单元的带电粒子束投影曝光,而不损害生产量或转印精度的方法和装置。 照明光束顺序地照亮标线图案的各个曝光单元(例如,子场)以形成图案化的光束。 图案化的光束顺序地将照射的曝光单元的图像投影在敏感基板(例如,抗蚀剂涂覆的晶片)上。 图像形成在基板上,以便以在基板上的大场上再现整个图案的方式被缝合在一起。 根据关于曝光剂量值的数据,和/或根据各个曝光单元的焦点位置的数据,根据关于照明光束是ON还是OFF的数据可控制曝光。
    • 30. 发明授权
    • Exposure apparatus
    • 曝光装置
    • US06411364B1
    • 2002-06-25
    • US09249303
    • 1999-02-12
    • Kazuaki Suzuki
    • Kazuaki Suzuki
    • G03B2742
    • G03F7/70066G03F7/70091G03F7/70225G03F7/70358G03F7/70433G03F7/70558G03F7/70716
    • An exposure apparatus for transferring a pattern formed on a mask to a photosensitive substrate is provided with an illumination optical system for illuminating a local area on the mask with a light beam, a projection optical system for projecting the pattern of the mask to the photosensitive substrate and a scanning device for scanning synchronously the mask and the photosensitive substrate, and a device for setting a width of an exposure area in a scan direction of the photosensitive substrate conjugate with an illumination area on the mask with respect to the projection optical system, to integer times as large as a distance which the photosensitive substrate moves during an interval between pulse emissions from the light source.
    • 用于将形成在掩模上的图案转印到感光基板上的曝光装置设置有用光束照射掩模上的局部区域的照明光学系统,用于将掩模的图案投影到感光基板的投影光学系统 以及用于同时扫描掩模和感光基板的扫描装置,以及用于设置与掩模相对于投影光学系统的照明区域共轭的感光基板的扫描方向上的曝光区域的宽度的装置, 在光源的脉冲发射间隔期间,感光基片移动的距离的整数倍。