专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

21. 发明授权

US07575504B2 Retaining ring, flexible membrane for applying load to a retaining ring, and retaining ring assembly 有权
标题翻译：保持环，用于将负载施加到保持环的柔性膜和保持环组件
公开(公告)号：US07575504B2
公开(公告)日：2009-08-18
申请号：US11741691
申请日：2007-04-27
申请人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
发明人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
IPC分类号： B24B7/22
CPC分类号： B24B37/32
摘要： A carrier head that has a base assembly, a retaining ring assembly, a carrier ring, and a flexible membrane is described. A retaining ring assembly has a flexible membrane shaped to provide an annular chamber and an annular retaining ring, wherein annular concentric projections of the flexible membrane are sized to fit into annular concentric recesses of the annular retaining ring.
摘要翻译：描述了具有基座组件，保持环组件，载体环和柔性膜的承载头。保持环组件具有成形为提供环形室和环形保持环的柔性膜，其中柔性膜的环形同心突起的尺寸设计成适合环形保持环的环形同心凹槽。

22. 发明申请

US20080119118A1 Retaining Ring, Flexible Membrane for Applying Load to a Retaining Ring, and Retaining Ring Assembly 有权
标题翻译：保持环，柔性膜，用于将负载施加到固定环和保持环组件
公开(公告)号：US20080119118A1
公开(公告)日：2008-05-22
申请号：US11741691
申请日：2007-04-27
申请人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
发明人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
IPC分类号： B24B5/00
CPC分类号： B24B37/32
摘要： A carrier head that has a base assembly, a retaining ring assembly, a carrier ring, and a flexible membrane is described. A retaining ring assembly has a flexible membrane shaped to provide an annular chamber and an annular retaining ring, wherein annular concentric projections of the flexible membrane are sized to fit into annular concentric recesses of the annular retaining ring.
摘要翻译：描述了具有基座组件，保持环组件，载体环和柔性膜的承载头。保持环组件具有成形为提供环形室和环形保持环的柔性膜，其中柔性膜的环形同心突起的尺寸设计成适合环形保持环的环形同心凹槽。

23. 发明申请

US20130334752A1 MULTI-CHAMBER CARRIER HEAD WITH A TEXTURED MEMBRANE 有权
标题翻译：带有纹理膜的多层车载头
公开(公告)号：US20130334752A1
公开(公告)日：2013-12-19
申请号：US13908774
申请日：2013-06-03
申请人： Jeonghoon Oh , Tsz-Sin Siu , Hung Chih Chen , Andrew J. Nagengast , Steven M. Zuniga , Thomas B. Brezoczky
发明人： Jeonghoon Oh , Tsz-Sin Siu , Hung Chih Chen , Andrew J. Nagengast , Steven M. Zuniga , Thomas B. Brezoczky
IPC分类号： B24B37/30
CPC分类号： B24B37/30 , B24B41/06 , B29C33/424 , B29C35/02 , B29K2023/00 , B29K2083/00 , B29K2995/0074 , B29L2031/755
摘要： A flexible membrane for use in a carrier head has a generally circular main portion with a lower surface, an annular outer portion for connection to a base assembly, and an annular flap extending from the main portion on a side opposite the lower surface for connection to the base assembly. At least one surface of the flap has a surface texture to prevent adhesion.
摘要翻译：用于载体头部的柔性膜具有大致圆形的主要部分，具有下表面，用于连接到基座组件的环形外部部分和从主体部分在与下表面相对的一侧延伸的环形挡片，用于连接到基座组件。翼片的至少一个表面具有表面纹理以防止粘附。

24. 发明申请

US20100151777A1 Carrier Ring for Carrier Head 有权
标题翻译：载波头载波环
公开(公告)号：US20100151777A1
公开(公告)日：2010-06-17
申请号：US12698912
申请日：2010-02-02
申请人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
发明人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
IPC分类号： B24D15/00
CPC分类号： B24B37/32
摘要： A carrier head that has a base assembly, a retaining ring assembly, a carrier ring, and a flexible membrane is described. A carrier ring has an annular upper portion and an annular lower portion having a lower surface with a smaller inner diameter than the upper surface of the annular upper portion, wherein the carrier ring circumferentially surrounds a retaining ring and has a lower surface to contact a polishing pad.
摘要翻译：描述了具有基座组件，保持环组件，载体环和柔性膜的承载头。承载环具有环形上部和环形下部，其具有比环形上部的上表面更小的内径的下表面，其中承载环周向地包围保持环并且具有接触抛光的下表面垫。

25. 发明申请

US20100136892A1 CARRIER HEAD WITH RETAINING RING AND CARRIER RING 有权
标题翻译：带保持环和承载环的承载头
公开(公告)号：US20100136892A1
公开(公告)日：2010-06-03
申请号：US12698009
申请日：2010-02-01
申请人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
发明人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
IPC分类号： B24B41/06
CPC分类号： B24B37/32 , B24B37/30
摘要： A carrier head that has a housing, a base assembly, a retaining ring, a carrier ring, and a flexible membrane is described. The base assembly is vertically movable relative to the housing. The retaining ring is connected to and vertically movable relative to the base assembly and has a lower surface configured to contact a polishing pad and an inner surface configured to circumferentially surround the edge of a substrate to retain the substrate. The carrier ring is connected to and vertically fixed relative to the base assembly, circumferentially surrounds the retaining ring to prevent lateral motion of the retaining ring, and has a bottom surface configured to contact a polishing pad.
摘要翻译：描述了具有壳体，基座组件，保持环，载体环和柔性膜的承载头。基座组件相对于外壳可垂直移动。保持环相对于基座组件连接并且可垂直移动，并且具有被配置为接触抛光垫的下表面和被配置为周向围绕衬底的边缘以保持衬底的内表面。承载环相对于基座组件连接并且垂直固定，周向地包围保持环以防止保持环的横向运动，并且具有构造成接触抛光垫的底表面。

26. 发明授权

US07699688B2 Carrier ring for carrier head 有权
标题翻译：承载头用于承载头
公开(公告)号：US07699688B2
公开(公告)日：2010-04-20
申请号：US11741677
申请日：2007-04-27
申请人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
发明人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
IPC分类号： B24B21/18
CPC分类号： B24B37/32
摘要： A carrier head that has a base assembly, a retaining ring assembly, a carrier ring, and a flexible membrane is described. A carrier ring has an annular upper portion and an annular lower portion having a lower surface with a smaller inner diameter than the upper surface of the annular upper portion, wherein the carrier ring circumferentially surrounds a retaining ring and has a lower surface to contact a polishing pad.
摘要翻译：描述了具有基座组件，保持环组件，载体环和柔性膜的承载头。承载环具有环形上部和环形下部，其具有比环形上部的上表面更小的内径的下表面，其中承载环周向地包围保持环并且具有接触抛光的下表面垫。

27. 发明授权

US07654888B2 Carrier head with retaining ring and carrier ring 有权
标题翻译：带保护环和承载环的承载头
公开(公告)号：US07654888B2
公开(公告)日：2010-02-02
申请号：US11862096
申请日：2007-09-26
申请人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
发明人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
IPC分类号： B24B41/06
CPC分类号： B24B37/32 , B24B37/30
摘要： A carrier head that has a housing, a base assembly, a retaining ring, a carrier ring, and a flexible membrane is described. The base assembly is vertically movable relative to the housing. The retaining ring is connected to and vertically movable relative to the base assembly and has a lower surface configured to contact a polishing pad and an inner surface configured to circumferentially surround the edge of a substrate to retain the substrate. The carrier ring is connected to and vertically fixed relative to the base assembly, circumferentially surrounds the retaining ring to prevent lateral motion of the retaining ring, and has a bottom surface configured to contact a polishing pad.
摘要翻译：描述了具有壳体，基座组件，保持环，载体环和柔性膜的承载头。基座组件相对于外壳可垂直移动。保持环相对于基座组件连接并且可垂直移动，并且具有被配置为接触抛光垫的下表面和被配置为周向围绕衬底的边缘以保持衬底的内表面。承载环相对于基座组件连接并且垂直固定，周向地包围保持环以防止保持环的横向运动，并且具有构造成接触抛光垫的底表面。

28. 发明申请

US20080119122A1 Flexible Membrane for Carrier Head 有权
标题翻译：用于载体头的柔性膜
公开(公告)号：US20080119122A1
公开(公告)日：2008-05-22
申请号：US11741692
申请日：2007-04-27
申请人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
发明人： Steven M. Zuniga , Andrew J. Nagengast , Jeonghoon Oh
IPC分类号： B24B41/06 , B24B37/04
CPC分类号： B24B37/30 , Y10T428/24174 , Y10T428/24182
摘要： A carrier head that has a base assembly, a retaining ring assembly, a carrier ring, and a flexible membrane is described. The flexible membrane has a main portion and an outer annular portion, wherein a junction between the main portion and the outer annular portion comprises a peripheral edge hinge and an annular recess above the hinge along the outer wall of the outer annular portion.
摘要翻译：描述了具有基座组件，保持环组件，载体环和柔性膜的承载头。柔性膜具有主要部分和外部环形部分，其中主要部分和外部环形部分之间的接合处包括周边边缘铰链和沿着外部环形部分的外壁的铰链上方的环形凹部。

29. 发明授权

US08298047B2 Substrate retainer 有权
标题翻译：基板保持架
公开(公告)号：US08298047B2
公开(公告)日：2012-10-30
申请号：US12987709
申请日：2011-01-10
申请人： Steven M. Zuniga , Hung Chih Chen
发明人： Steven M. Zuniga , Hung Chih Chen
IPC分类号： B24B5/35
CPC分类号： B24B37/32 , B24B37/28
摘要： A retainer is used with an apparatus for polishing a substrate. The substrate has upper and lower surfaces and a lateral, substantially circular, perimeter. The apparatus has a polishing pad with an upper polishing surface for contacting and polishing the lower face of the substrate. The retainer has an inward facing retaining face for engaging and retaining the substrate against lateral movement during polishing of the substrate. The retaining face engages a substrate perimeter at more than substantially a single discrete circumferential location along the perimeter.
摘要翻译：保持器用于抛光衬底的装置。衬底具有上表面和下表面以及侧面，基本上圆形的周边。该装置具有抛光垫，该抛光垫具有用于接触和抛光基底的下表面的上抛光表面。保持器具有向内的保持面，用于在衬底的抛光期间接合和保持衬底以防止横向移动。保持面在沿着周边的基本上一个单独的离散圆周位置处接合基底周边。

30. 发明申请

US20120192935A1 BACK-CONTACT PHOTOVOLTAIC CELL COMPRISING A THIN LAMINA HAVING A SUPERSTRATE RECEIVER ELEMENT 有权
标题翻译：具有超级接收器元件的薄接片的背接触光电池
公开(公告)号：US20120192935A1
公开(公告)日：2012-08-02
申请号：US13425870
申请日：2012-03-21
申请人： Steven M. Zuniga , Christopher J. Petti , Gopal Prabhu
发明人： Steven M. Zuniga , Christopher J. Petti , Gopal Prabhu
IPC分类号： H01L31/0352 , H01L31/02
CPC分类号： H01L27/142 , H01L31/03921 , H01L31/042 , H01L31/0682 , H01L31/1804 , H01L31/1896 , Y02E10/547 , Y02P70/521
摘要： A method to fabricate a photovoltaic device includes forming first and second contact regions at the first surface of a semiconductor donor body. A cleave plane may be formed by implanting ions into the donor body, and a lamina that includes the contact regions is cleaved from the donor body at the cleave plane. The first surface of the lamina may be contacted with a temporary support and fabricated into a photovoltaic device, wherein the lamina comprises the base of the photovoltaic device.
摘要翻译：制造光伏器件的方法包括在半导体施主体的第一表面形成第一和第二接触区域。可以通过将离子注入给体体中形成切割平面，并且包括接触区域的层在分裂面处从施主体断裂。薄片的第一表面可以与临时支撑件接触并制成光伏器件，其中薄片包括光伏器件的基极。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式