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    • 21. 发明申请
    • Fabrication method for a trench capacitor with an insulation collar
    • 具有绝缘套管的沟槽电容器的制造方法
    • US20050153507A1
    • 2005-07-14
    • US11013921
    • 2004-12-17
    • Thomas HechtTill SchlosserMichael Sesterhenn
    • Thomas HechtTill SchlosserMichael Sesterhenn
    • H01L21/265H01L21/76H01L21/8242
    • H01L27/10867H01L21/26586
    • The present invention provides a fabrication method for a trench capacitor with an insulation collar in a substrate, which is electrically connected to the substrate on one side via a buried contact. After forming and sinking an electrically conductive filling, an insulation collar and, if appropriate, a buried contact that is connected on all sides, the following are effected: providing at least one liner layer in the trench; filling the trench with a filling made of an auxiliary material, which filling is encapsulated by the at least one liner layer in the trench; providing a mask on the filling for defining the structure of the buried contact, the mask having no projections into the trench; removing a part of the filling using the mask; removing an underlying part of the at least one liner layer for uncovering a corresponding part of the insulation collar.
    • 本发明提供了一种用于在衬底中具有绝缘套环的沟槽电容器的制造方法,其通过埋入触点在一侧电连接到衬底。 在形成和下沉导电填料之后,绝缘套环以及如果合适的话,在所有侧面上连接的埋入触头都可以实现:在沟槽中提供至少一个衬垫层; 用由辅助材料制成的填充物填充沟槽,该填充物被沟槽中的至少一个衬垫层封装; 在所述填充物上设置掩模以限定所述埋入接触件的结构,所述掩模没有突起到所述沟槽中; 使用掩模去除一部分填充物; 去除所述至少一个衬垫层的下部部分以露出所述绝缘套环的对应部分。