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21. 发明申请

US20050023480A1 Corrector for correcting first-order chromatic aberrations of the first degree 有权
标题翻译：用于校正第一度的一阶色差的校正器
公开(公告)号：US20050023480A1
公开(公告)日：2005-02-03
申请号：US10927119
申请日：2004-08-27
申请人： Harald Rose
发明人： Harald Rose
IPC分类号： H01J37/10 , H01J37/153 , H01L21/027 , H01J3/14
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/153 , H01J37/3174 , H01J2237/1534 , H01J2237/3175 , H01J2237/31754
摘要： The invention is directed to a corrector for correcting energy-dependent first-order aberrations of the first degree as well as third-order spherical aberrations of electron-optical lens systems. The corrector includes at least one quadropole septuplet (S1) having seven quadrupoles (Q1 to Q7). The quadrupoles are mounted symmetrically to a center plane (ZS) so as to permit excitation along a linear axis. The corrector furthermore includes at least five octopoles (O1 to O7) which can be excited within the quadrupole septuplet. In an advantageous embodiment, two quadrupole septuplets are mounted in series one behind the other. The quadrupole fields of the two quadrupole septuplets are excited antisymmetrically to a center plane lying between the two quadrupole septuplets. With such a system, all geometric third-order aberrations and additional energy-dependent first-order aberrations of the third degree and geometric fifth-order aberrations of a lens system can be corrected in addition to the axial and off-axial first-order chromatic aberrations of the first degree.
摘要翻译：本发明涉及用于校正电子 - 光学透镜系统的第一度以及三阶球面像差的能量相关一阶像差的校正器。校正器包括至少一个具有七个四极管（Q1至Q7）的四极簧片（S1）。四极杆对称地安装在中心平面（ZS）上，以便沿线性轴线激发。校正器还包括至少五个八极管（O1至O7），其可以在四极六通孔内被激发。在一个有利的实施例中，两个四极簧片串联地一个接一个地安装。两个四极七分体的四极场与位于两个四极六分体之间的中心平面反对称地被激发。利用这样的系统，除了轴向和轴向外的一阶色度之外，可以校正透镜系统的第三度和第五级像差的所有几何三阶像差和附加的依赖于能量的一阶像差第一度的畸变。

22. 发明授权

US5126565A Energy filter for charged particle beam apparatus 失效
标题翻译：充电粒子装置的能量过滤器
公开(公告)号：US5126565A
公开(公告)日：1992-06-30
申请号：US741030
申请日：1991-08-06
申请人： Harald Rose
发明人： Harald Rose
IPC分类号： G21K3/00 , H01J37/05 , H01J49/44 , H01J49/48
CPC分类号： H01J37/05 , H01J49/484 , H01J2237/2602 , H01J2237/2823
摘要： An energy selecting filter comprising a structure of four hemispheres to be transpassed successively by a beam of charged particles to be filtered. The structure is symmetrically with respect to a plane of symmetry in which the energy selecting element, such as slit or a knife-edge is introduced. In a charged particle beam apparatus such as a high resolution electron microscope the energy spread introduced by a source can adjustable be reduced to below for example 0,1 eV without introducing any beam deviation at the cost of only a small lengthening of the apparatus.

23. 发明授权

US4962313A Wien-type imaging corrector for an electron microscope 失效
标题翻译：维恩型电子显微镜成像校正器
公开(公告)号：US4962313A
公开(公告)日：1990-10-09
申请号：US448270
申请日：1989-12-11
申请人： Harald Rose
发明人： Harald Rose
IPC分类号： H01J37/153
CPC分类号： H01J37/153
摘要： The invention relates to an imaging corrector of the Wien type which is especially suitable for use in an electron microscope. The corrector includes an arrangement of at least eight electrodes and at least eight magnetic poles and is mounted between two electron lenses. The corrector simultaneously corrects the chromatic and spherical aberrations especially of electron lenses of low-voltage electron microscopes. The corrector begins and ends at intermediate image planes and has an intermediate image plane in its center. The intermediate image plane at the center coacts with two symmetry planes located between the intermediate image planes for the desired imaging characteristics. All chromatic and spherical aberrations for electrons of any desired energy can be corrected with two of the correctors coacting with a thick telescopic round lens disposed therebetween.
摘要翻译：本发明涉及一种特别适用于电子显微镜的维恩型成像校正器。校正器包括至少八个电极和至少八个磁极的布置，并且安装在两个电子透镜之间。校正器同时校正低电压电子显微镜的电子透镜的色差和球面像差。校正器在中间像平面处开始和结束，并且在其中心具有中间像平面。位于中间图像平面之间的中间图像平面与用于所需成像特征的两个对称面共同作用。任何所需能量的电子的所有色差和球面像差都可以用两个校准器进行校正，这两个校正器与设置在它们之间的厚伸缩式圆形透镜共同作用。

24. 发明授权

US4896036A Detector objective for scanning microscopes 失效
标题翻译：扫描显微镜检测器的目的
公开(公告)号：US4896036A
公开(公告)日：1990-01-23
申请号：US150245
申请日：1988-01-29
申请人： Harald Rose , Joachim Zach
发明人： Harald Rose , Joachim Zach
IPC分类号： H01J37/12 , G01Q30/02 , H01J37/141 , H01J37/147 , H01J37/244 , H01J37/28
CPC分类号： H01J37/28 , H01J37/141
摘要： In a high resolution imaging system for close inspection of sub-micrometer structures, a scanning electron microscope includes a detector objective essentially composed of an immersion lens and an annular detector which is arranged between a source side electrode lying at a positive potential and a middle electrode of the immersion lens which likewise lies at a variable positive potential and is arranged concentrically relative to a beam axis of a scanning microscope. The middle electrode and the source side electrode are preferrably formed as truncated cones. The two-stage deflection element for positioning the primary electron beam on the specimen is preferrably integrated into the source side electrode of the immersion lens, the source side electrode being composed of an annular diaphragm and a hollow cylinder.
摘要翻译：在用于仔细检查亚微米结构的高分辨率成像系统中，扫描电子显微镜包括基本上由浸没透镜组成的检测器物镜和布置在位于正电位的源极电极和中间电极之间的环形检测器的浸没透镜同样位于可变的正电位并且相对于扫描显微镜的光束轴线同心地布置。中间电极和源极电极优选地形成为截锥体。用于将一次电子束定位在试样上的两级偏转元件优选地集成到浸没透镜的源极侧电极中，源极电极由环形隔膜和中空圆筒构成。

25. 发明授权

US4740704A Omega-type electron energy filter 失效
标题翻译：欧米茄型电子能量过滤器
公开(公告)号：US4740704A
公开(公告)日：1988-04-26
申请号：US907040
申请日：1986-09-12
申请人： Harald Rose , Stefan Lanio
发明人： Harald Rose , Stefan Lanio
IPC分类号： H01J37/05 , H01J37/26 , H01J49/44 , H01J3/14 , G21K1/08
CPC分类号： H01J37/05
摘要： The invention is directed to an image forming omega filter having pole pieces with straight edges which has good local resolution and very good energy resolution. The omega filter includes four deflection regions, with deflection angles greater than 90.degree..
摘要翻译：本发明涉及一种具有直边的极片的图像形成ω滤波器，其具有良好的局部分辨率和非常好的能量分辨率。 ω滤波器包括四个偏转区域，偏转角大于90°。

26. 发明授权

US07902506B2 Phase-shifting element and particle beam device having a phase-shifting element 有权
标题翻译：具有相移元件的相移元件和粒子束器件
公开(公告)号：US07902506B2
公开(公告)日：2011-03-08
申请号：US12070055
申请日：2008-02-14
申请人： Rasmus Schröder , Bastian Barton , Gerd Benner , Harald Rose
发明人： Rasmus Schröder , Bastian Barton , Gerd Benner , Harald Rose
IPC分类号： G01N23/00
CPC分类号： H01J37/26 , H01J37/295 , H01J2237/041 , H01J2237/0453 , H01J2237/1534 , H01J2237/2455 , H01J2237/2614 , H01J2237/2802 , H01J2237/2809
摘要： A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a article beam device having a phase-shifting element of this type. In the phase-shifting element and the particle beam device having a phase-shifting element, components shadowing the particle beam are avoided, so that proper information content is achieved and in which the phase contrast is essentially spatial frequency-independent. The phase-shifting element may have at least one means for generating a non-homogeneous or anisotropic potential. The particle beam device according to the system described herein may be provided with the phase-shifting element.
摘要翻译：描述了用于移动粒子束的至少一部分的相位的相移元件，以及具有这种类型的相移元件的物品束装置。在具有相移元件的相移元件和粒子束装置中，避免了影响粒子束的分量，使得实现适当的信息内容，并且相位对比度基本上与空间频率无关。相移元件可以具有至少一个用于产生非均匀或各向异性电位的装置。根据本文所述的系统的粒子束装置可以设置有相移元件。

27. 发明授权

US07012262B2 Corrector for correcting first-order chromatic aberrations of the first degree 有权
公开(公告)号：US07012262B2
公开(公告)日：2006-03-14
申请号：US10927119
申请日：2004-08-27
申请人： Harald Rose
发明人： Harald Rose
IPC分类号： H01J1/50 , G01N23/00 , G21K7/00
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/153 , H01J37/3174 , H01J2237/1534 , H01J2237/3175 , H01J2237/31754
摘要： The invention is directed to a corrector for correcting energy-dependent first-order aberrations of the first degree as well as third-order spherical aberrations of electron-optical lens systems. The corrector includes at least one quadropole septuplet (S1) having seven quadrupoles (Q1 to Q7). The quadrupoles are mounted symmetrically to a center plane (ZS) so as to permit excitation along a linear axis. The corrector furthermore includes at least five octopoles (O1 to O7) which can be excited within the quadrupole septuplet. In an advantageous embodiment, two quadrupole septuplets are mounted in series one behind the other. The quadrupole fields of the two quadrupole septuplets are excited antisymmetrically to a center plane lying between the two quadrupole septuplets. With such a system, all geometric third-order aberrations and additional energy-dependent first-order aberrations of the third degree and geometric fifth-order aberrations of a lens system can be corrected in addition to the axial and off-axial first-order chromatic aberrations of the first degree.

28. 发明授权

US06888145B2 Optical particle corrector 有权
标题翻译：光学粒子校正器
公开(公告)号：US06888145B2
公开(公告)日：2005-05-03
申请号：US10478820
申请日：2002-12-03
申请人： Heiko Müller , Harald Rose
发明人： Heiko Müller , Harald Rose
IPC分类号： G01Q30/00 , H01J37/153 , H01L21/027
CPC分类号： H01J37/153 , H01J2237/1534
摘要： An optical particle corrector with a straight optical axis for eliminating color and aperture aberrations in optical particle lenses includes multipole elements in the form of electric and/or magnetic quadrupole and octupole elements. There are at least twelve quadrupole elements and ten octupole elements, in which three quadrupole elements and two octupole elements are assembled into a group. These groups are arranged successively along the straight optical axis, in which a first symmetrical plane is defined between the first and second groups, a second symmetrical plane is defined between the second and third groups and a third symmetrical plane is defined between the third and fourth groups. The multipole elements from one group to another correspond to each other in pairs, in which the multipole elements of the corresponding following group are positioned in reverse order along the straight optical axis in comparison with the corresponding multipole elements of the preceding group. The structure and refractive powers of the multipole elements that correspond to each other are mirror-symmetrically configured relative to the corresponding symmetrical plane between the groups. At least two of the quadrupole elements generate electric-magnetic quadrupole fields, in which the quadrupole element are, preferably, arranged in a mirror-symmetrical manner relative to the second, or to all, symmetrical planes. An additional octupole element is arranged in the first and third symmetrical planes. The corrector enables the transmission of extremely large image fields, while the optical quality remains the same due to the fact image aberrations outside the axis can be corrected.
摘要翻译：具有用于消除光学粒子透镜中的颜色和孔径像差的具有直线光轴的光学粒子校正器包括电和/或四极和八极元件形式的多极元件。有至少十二个四极元件和十个八极元件，其中三个四极元件和两个八极元件组装成一组。这些组沿着直线光轴连续布置，其中在第一和第二组之间限定第一对称平面，在第二组和第三组之间限定第二对称平面，并且在第三和第四组之间限定第三对称平面团体从一组到另一组的多极元件成对地相对应，其中相应的后续组的多极元件与前一组的相应多极元件相比沿着直线光轴以相反的顺序定位。对应于多个元件的多极元件的结构和折射能力相对于组之间的相应的对称平面被镜对称地构造。四极元件中的至少两个产生电磁四极场，其中四极元件优选地相对于第二或全部对称平面以镜像对称的方式布置。在第一和第三对称平面中设置一个额外的八极元件。校正器使得能够传输极大的图像场，同时光学质量保持相同，这是由于可以校正轴外的图像像差。

29. 发明授权

US06855939B2 Particle beam system having a mirror corrector 有权
标题翻译：具有镜面校正器的粒子束系统
公开(公告)号：US06855939B2
公开(公告)日：2005-02-15
申请号：US10644037
申请日：2003-08-20
申请人： Harald Rose , Dirk Preikszas , Peter Hartel
发明人： Harald Rose , Dirk Preikszas , Peter Hartel
IPC分类号： H01J37/153 , H01J37/28 , G01J1/42 , G01N23/00 , G01T1/00 , G21K7/00 , H05H000/00
CPC分类号： H01J37/153
摘要： The invention relates to a particle beam system comprising a particle source (1), a mirror corrector (9, 21 to 25), and an objective lens (16). The mirror corrector comprises an electrostatic mirror (9) and a magnetic beam deflector (21, 22, 23, 24, 25), which is arranged between the particle source (1) and the electrostatic mirror (9) as well as between the electrostatic mirror (9) and the objective lens (16). The magnetic beam deflector (21, 22, 23, 24, 25) is free from dispersion for each single pass. The magnetic beam deflector (21, 22, 23, 24, 25) also comprises quadrupoles and/or quadrupole components, which are provided in such a manner that a maximum of two planes, which are conjugated with regard to the diffraction plane (28) of the objective lens (16), occur on the entire path length between the first outlet from the magnetic beam deflector (21, 22, 23, 24, 25) and from the objective lens (16).
摘要翻译：本发明涉及一种包括粒子源（1），镜面校正器（9,21至25）和物镜（16）的粒子束系统。镜面校正器包括静电镜（9）和布置在颗粒源（1）和静电反射镜（9）之间以及静电反射镜（11,22,23,24,25）之间的磁性偏转器（21,22,23,24,25）镜（9）和物镜（16）。对于每一次通过，磁光束偏转器（21,22,23,24,25）没有分散。磁光束偏转器（21,22,23,24,25）还包括四极和/或四极组件，其以这样一种方式被提供，使得相对于衍射平面（28）共轭的最多两个平面，在物镜（16）的第一出口与物镜（16）之间的整个路径长度上出现物镜16。

30. 发明授权

US5448063A Energy filter with correction of a second-order chromatic aberration 失效
标题翻译：具有二阶色差校正的能量滤波器
公开(公告)号：US5448063A
公开(公告)日：1995-09-05
申请号：US246534
申请日：1994-05-20
申请人： Alan F. De Jong , Johan G. Bakker , Harald Rose
发明人： Alan F. De Jong , Johan G. Bakker , Harald Rose
IPC分类号： G21K1/093 , H01J37/05 , H01J49/46 , H05H7/04
CPC分类号： H01J49/46 , H01J37/05
摘要： An imaging symmetrical energy filter (of the .OMEGA.-type) comprising two pairs of sector magnets (1), (2), (3), (4) for an electron microscope. The second-order chromatic aberration is corrected by arranging the two pairs of sector magnets {(1),(4) and (2),(3)} further apart. This enables suitable arrangement of the coils to generate correction hexapole fields, so that the chromatic error is even completely eliminated. Moreover, correction of the third-order aperture aberration is also possible by constructing the hexapole coil (9) in the symmetry plane also as an octupole coil. Further correction of this third-order aberration is achieved by applying an octupole field (5) directly at the entrance of the first sector magnet (1) and an octupole field (13) directly at the exit of the fourth sector magnet (4).
摘要翻译：包括用于电子显微镜的两对扇形磁体（1），（2），（3），（4）的成像对称能量过滤器（OMEGA型）。通过将两对扇形磁铁{（1），（4）和（2），（3）}进一步分开来校正二阶色差。这使得能够适当地布置线圈以产生校正六极场，使得色差甚至完全消除。此外，通过在对称平面中也作为八极线圈构造六极线圈（9），也可以校正三次孔径像差。通过直接在第一扇形磁体（1）的入口处施加八极场（5）并直接在第四扇形磁体（4）的出口处施加八极场（13）来实现对该三阶像差的进一步校正。

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