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    • 21. 发明申请
    • ROBOT HAND FOR SUBSTRATE TRANSFER
    • 机架手柄用于基板传送
    • US20120049555A1
    • 2012-03-01
    • US13288206
    • 2011-11-03
    • Yoshinori FujiiShinya Nakamura
    • Yoshinori FujiiShinya Nakamura
    • H01L21/683
    • H01L21/67742H01L21/68707Y10S414/141
    • There is provided a robot hand for substrate transfer in which the robot hand is so arranged that, even in case a substrate (S) gives rise to warping, the substrate (S) can be stably supported. On an upper surface of the robot hand there is formed a first seating surface on which is seated a lower-surface peripheral portion of the substrate (S) and, on a periphery thereof, there is formed an upwardly extended step. The step is provided with a plurality of stair-shaped stages. On an upper surface of the robot hand inwardly away from the first seating surface there is provided a second seating surface which is inclined downward toward the center of the substrate (S) such that a lower surface of the substrate (S) is seated on the second seating surface when the substrate (S) is warped downward into a concave shape.
    • 提供了一种用于基板转印的机器人手,其中机器人手布置成使得即使在基板(S)引起翘曲的情况下,也可以稳定地支撑基板(S)。 在机器人手的上表面上形成有第一就座表面,其上安置有基底(S)的下表面周边部分,并且在其周边上形成向上延伸的步骤。 台阶设置有多个楼梯阶段。 在机器人手的上表面向内离开第一座面,设置有第二座面,其朝向衬底(S)的中心向下倾斜,使得衬底(S)的下表面位于 当基板(S)向下弯曲成凹形时,第二座面。
    • 23. 发明申请
    • Numerical controller
    • 数控机
    • US20070192707A1
    • 2007-08-16
    • US11706205
    • 2007-02-15
    • Hideaki MaedaShinya NakamuraSusumu Nagayama
    • Hideaki MaedaShinya NakamuraSusumu Nagayama
    • G06F3/00
    • G05B19/409
    • A numerical controller in which similar icons are created without applying major load onto a memory. Among icon definition data displayed in areas F1 . . . , G1 . . . , H1 . . . , on frames A, B and C, the data that can be expressed by conversions, such as rotation, horizontal mirror image, vertical mirror image, horizontal-and-vertical mirror image, magnification/contraction retaining horizontal/vertical ratio, magnification/contraction varying horizontal/vertical ratio, black/white reversal, display in red, blue, yellow and green, with respect to one parent icon, are substituted with data indicating the conversion contents. It is possible to display many icons with a small storage capacity. The definition data of each icon can be previously written in a ROM and copied to a RAM when the power is turned on to be used for display.
    • 数字控制器,其中创建相似的图标而不对存储器施加主要负载。 在区域F 1中显示的图标定义数据中。 。 。 ,G 1。 。 。 ,H 1。 。 。 在帧A,B和C上,可以通过转换表示的数据,如旋转,水平镜像,垂直镜像,水平和垂直镜像,放大/缩小保持水平/垂直比,放大/缩小 变化的水平/垂直比率,黑/白反转,相对于一个父图标的红色,蓝色,黄色和绿色的显示被用指示转换内容的数据代替。 可以显示许多具有小存储容量的图标。 每个图标的定义数据可以预先写入ROM中,并在电源打开时复制到RAM中以用于显示。
    • 24. 发明申请
    • METHOD OF MANUFACTURING BONDED WAFER
    • 制造粘结波的方法
    • US20070184631A1
    • 2007-08-09
    • US11562635
    • 2006-11-22
    • Shinya NakamuraNobuyuki Morimoto
    • Shinya NakamuraNobuyuki Morimoto
    • H01L21/30
    • H01L21/76254
    • The method of manufacturing a bonded wafer including, implanting hydrogen ions, rare gas ions, or a mixture of hydrogen ions and rare gas ions into a bond wafer to form an ion implantation layer in the bond wafer, bonding the bond wafer in which the ion implantation layer has been formed to a base wafer to form a bonded wafer, and subjecting the bonded wafer to heat treatment to separate the bond wafer from the base wafer at the ion implantation layer as boundary to form the bonded wafer. In the method of manufacturing a bonded wafer, the heat treatment at least from the start of the separation to the end of the separation is conducted in an oxidizing atmosphere.
    • 包括将氢离子,稀有气体离子或氢离子和稀有气体离子的混合物注入接合晶片以在接合晶片中形成离子注入层的粘合晶片的制造方法,将接合晶片接合,其中离子 注入层已经形成到基底晶片以形成接合晶片,并且对接合的晶片进行热处理,以在离子注入层作为边界将接合晶片与基底晶片分离,以形成接合晶片。 在制造接合晶片的方法中,至少从分离开始到分离结束的热处理在氧化气氛中进行。
    • 26. 发明授权
    • Inhibitor switch having magnetic contact portion
    • 具有磁性接触部分的抑制开关
    • US6144273A
    • 2000-11-07
    • US386194
    • 1999-08-30
    • Shunichi SatohShinya NakamuraTetsuya Tomotoshi
    • Shunichi SatohShinya NakamuraTetsuya Tomotoshi
    • F16H59/10H01H36/00H03K17/97H01H9/00
    • H01H36/0046F16H59/105H03K17/97H01H2300/02
    • An inhibitor switch is provided with a movable base 1 having permanent magnets 4, which is adapted to be rotatable in accordance with the transmission operating position of an automatic transmission device. The inhibitor switch also has magnetic sensors 9 for detecting the magnetic flux from the permanent magnets 4, a pole base 3, and a cover body 2 for rotatably supporting the movable base 1 in cooperation with the pole base 3. The pole base 3 has an approximate arc shape with a radius of curvature centered about the center of a shaft hole 3a. A base surface 3d is provided for forming a space for receiving a substrate 6 connected to the connecting sections 7a, on which the magnetic sensors 9 and electronic elements 10 are installed. The connecting sections 7a are used to electrically connect a conductive body 7 to the substrate 6. The shaft hole 3a is coupled with a cylindrical shaft section 1a of the movable base 1 at an end of the base surface 3d. This construction provides an inhibitor switch having permanent magnets with high operating precision and low manufacturing cost.
    • 抑制开关设置有具有永磁体4的可移动基座1,该永磁体适于根据自动变速器装置的变速器操作位置而旋转。 抑制开关还具有磁传感器9,用于检测来自永磁体4的磁通量,极基座3以及用于与极基座3协作可旋转地支撑可移动基座1的盖体2.杆座3具有 大致圆弧形状,其曲率半径以轴孔3a的中心为中心。 提供基面3d用于形成用于接收连接到其上安装有磁传感器9和电子元件10的连接部分7a的基板6的空间。 连接部7a用于将导电体7与基板6电连接。轴孔3a在基面3d的端部与可动基体1的筒状轴部1a连接。 这种结构提供了具有高操作精度和低制造成本的永磁体的抑制开关。