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    • 3. 发明授权
    • Method of manufacturing bonded wafer
    • 制造接合晶片的方法
    • US07855132B2
    • 2010-12-21
    • US12057896
    • 2008-03-28
    • Akihiko EndoNobuyuki Morimoto
    • Akihiko EndoNobuyuki Morimoto
    • H01L21/425
    • H01L21/76243H01L21/76251
    • The present invention provides a method of manufacturing a bonded wafer. The method includes forming an oxygen ion implantation layer in an active layer wafer having a substrate resistivity of 1 to 100 mΩcm by implanting oxygen ions in the active layer wafer, bonding a base wafer and the active layer wafer directly or through an insulating layer to form a bonded wafer, heat treating the bonded wafer to strengthen the bond and convert the oxygen ion implantation layer into a stop layer, grinding, polishing, and/or etching, from the active layer wafer surface side, the bonded wafer in which the bond has been strengthened to expose the stop layer on a surface of the bonded wafer, removing the stop layer, and subjecting the bonded wafer from which the stop layer has been removed to a heat treatment under a reducing atmosphere to diffuse an electrically conductive component comprised in the active layer wafer.
    • 本发明提供一种制造接合晶片的方法。 该方法包括通过在有源层晶片中注入氧离子,在基片电阻率为1〜100mΩ/ cm 2的有源层晶片中形成氧离子注入层,将基底晶片和有源层晶片直接或通过绝缘层 形成接合晶片,对接合的晶片进行加热处理,以加强结合,并将氧离子注入层转换成活性层晶片表面侧的停止层,研磨,抛光和/或蚀刻, 已经加强了接合以使接合晶片的表面上的停止层露出,去除停止层,并且在还原气氛下对已经去除了停止层的接合晶片进行热处理以扩散包含的导电组分 在有源层晶片中。
    • 4. 发明申请
    • FASTENING TOOL
    • 紧固工具
    • US20100199810A1
    • 2010-08-12
    • US12675332
    • 2008-08-20
    • Toshinari KatsunumaMikio HanaiYoshitada ArakawaHarutsugu YoshidaJiro TsukamotoNobuyuki MorimotoNoritsugu Okada
    • Toshinari KatsunumaMikio HanaiYoshitada ArakawaHarutsugu YoshidaJiro TsukamotoNobuyuki MorimotoNoritsugu Okada
    • B25B21/00B25B23/00
    • B25B21/02B25B23/00
    • When bolts are fastened to tack a door to a car body by means of a conventional impact wrench, the shavings stick to the surface of the door or car body, thereby to cause the poor coating quality such as a seeding when the inter-coating or finish-coating is performed in the coating procedure. An impact wrench provided is a fastening tool for fastening a bolt gripped by a socket, in a nut. The impact wrench includes a suction cover for covering the surroundings of the socket, and a suction port capable of sucking the atmosphere in the portion covered with the suction cover, and is constituted such that the atmosphere in the suction cover is sucked through the suction port to recover the shavings left at the time of fastening the bolt. This constitution makes it possible to prevent the shavings from being scattered to the surroundings. When the door is temporarily attached at the coating step to a car body, the poor coating quality such as the seeding, as might otherwise be caused by the shavings stuck to the surface of the car body or door, can be prevented and improved.
    • 当通过常规的冲击扳手将螺栓紧固以将车门固定到车身时,刨削物粘附到门或车体的表面,从而当涂层或 在涂布过程中进行精加工。 提供的冲击扳手是用于将由插座夹持的螺栓紧固在螺母中的紧固工具。 所述冲击扳手包括用于覆盖所述插座的周围的吸入罩以及能够吸入由所述吸入盖覆盖的部分中的气氛的吸入口,并且构成为使得所述吸入盖的气氛通过所述吸入口 以恢复在紧固螺栓时留下的刨花。 这种构造使得可以防止刨屑散布到周围环境中。 当门在涂覆步骤中临时安装到车身时,可以防止和改善由粘附在车体或门的表面上的刨花引起的诸如播种的不良涂层质量。
    • 5. 发明申请
    • METHOD FOR PRODUCING BONDED WAFER
    • 生产粘结波的方法
    • US20100015779A1
    • 2010-01-21
    • US12064605
    • 2007-07-04
    • Nobuyuki MorimotoAkihiko EndoEtsurou Morita
    • Nobuyuki MorimotoAkihiko EndoEtsurou Morita
    • H01L21/762
    • H01L21/76251H01L21/2007H01L21/26506H01L21/30604H01L21/30625
    • There is provided a bonded wafer having excellent thickness uniformity after thinning but also good surface roughness and being less in defects.In the production method of a bonded wafer by bonding a wafer for active layer to a wafer for support substrate and thinning the wafer for active layer, oxygen ions are implanted into the wafer for active layer to form an oxygen ion implanted layer in the active layer and thereafter a heat treatment is carried out in a non-oxidizing atmosphere at a temperature of not lower than 1100° C., and an oxide film formed on the exposed surface of the oxygen ion implanted layer is removed and then a heat treatment is carried out in a non-oxidizing atmosphere at a temperature of not higher than 1100° C.
    • 提供了在变薄后具有优异的厚度均匀性但具有良好的表面粗糙度并且缺陷较少的接合晶片。 在通过将有源层用晶片与用于支撑基板的晶片接合并使用于有源层的晶片变薄的接合晶片的制造方法中,将氧离子注入到有源层用晶片中,在活性层中形成氧离子注入层 然后在非氧化性气氛中在不低于1100℃的温度下进行热处理,除去形成在氧离子注入层的暴露表面上的氧化膜,然后进行热处理 在不高于1100℃的温度下在非氧化性气氛中。
    • 6. 发明申请
    • METHOD FOR MANUFACTURING SOI SUBSTRATE
    • 制造SOI衬底的方法
    • US20090117708A1
    • 2009-05-07
    • US11933882
    • 2007-11-01
    • Hideki NishihataNobuyuki MorimotoAkihiko Endo
    • Hideki NishihataNobuyuki MorimotoAkihiko Endo
    • H01L21/30
    • H01L21/76254
    • A method for manufacturing an SOI substrate includes steps of forming a first oxide film on a surface of a first silicon substrate; implanting hydrogen ions into the surface of the first silicon substrate on which the first oxide film is formed to form an ion implant region inside the first silicon substrate; removing the entire or the portion of first oxide film; forming a laminate by bonding the second silicon substrate to a hydrogen ion-implanted surface of the first silicon substrate with the first oxide film, or second oxide film formed on a surface of the second silicon substrate, or the first oxide film and second oxide film, interposed therebetween; and subjecting the laminate to a heat treatment at a predetermined temperature to separate the first silicon substrate along the ion implant region, thereby obtaining an SOI substrate including a thin SOI layer formed on the second silicon substrate with the oxide film interposed therebetween. The method can reduce a degree of contamination from heavy metals inside the SOI substrate.
    • SOI衬底的制造方法包括在第一硅衬底的表面上形成第一氧化膜的步骤; 将氢离子注入到其上形成有第一氧化膜的第一硅衬底的表面中以在第一硅衬底内部形成离子注入区; 去除第一氧化膜的全部或部分; 通过将第二硅衬底与形成在第二硅衬底的表面上的第一氧化物膜或第二氧化物膜的第一硅衬底的氢离子注入表面接合,或者将第一氧化物膜和第二氧化物膜 ; 以及在预定温度下对层压体进行热处理以沿离子注入区分离第一硅衬底,从而获得SOI衬底,其包括在第二硅衬底上形成的薄SOI层,其间插入有氧化膜。 该方法可以降低SOI衬底内重金属的污染程度。
    • 8. 发明申请
    • Method of producing bonded wafer
    • 生产接合晶片的方法
    • US20080124897A1
    • 2008-05-29
    • US11823010
    • 2007-06-25
    • Nobuyuki MorimotoHideki Nishihata
    • Nobuyuki MorimotoHideki Nishihata
    • H01L21/30
    • H01L21/76254
    • A bonded wafer is produced by implanting ions of a light element into a wafer for active layer to a predetermined depth position to form an ion implanted layer, bonding the wafer for active layer to a wafer for support substrate directly or through an insulating film of not more than 50 nm, exfoliating the wafer for active layer at the ion implanted layer and thinning an active layer exposed through the exfoliation to form the active layer having a predetermined thickness, in which the thickness of the active layer before the thinning is not more than 750 nm and an elongation of slip dislocation in a strength test of the wafer for active layer before the bonding is not more than 100 μm at a predetermined thickness.
    • 通过将光元件的离子注入用于有源层的晶片到预定深度位置来形成键合晶片,以形成离子注入层,将用于有源层的晶片直接将晶片用于支撑衬底的晶片或通过非绝缘膜 超过50nm,在离子注入层剥离有源层的晶片,并使通过剥离暴露的活性层变薄以形成具有预定厚度的活性层,其中在稀化之前活性层的厚度不大于 750nm以下,并且在接合前的有源层用晶片的强度试验中,滑动位错的伸长率为100μm以下。
    • 10. 发明申请
    • METHOD OF MANUFACTURING BONDED WAFER
    • 制造粘结波的方法
    • US20070184631A1
    • 2007-08-09
    • US11562635
    • 2006-11-22
    • Shinya NakamuraNobuyuki Morimoto
    • Shinya NakamuraNobuyuki Morimoto
    • H01L21/30
    • H01L21/76254
    • The method of manufacturing a bonded wafer including, implanting hydrogen ions, rare gas ions, or a mixture of hydrogen ions and rare gas ions into a bond wafer to form an ion implantation layer in the bond wafer, bonding the bond wafer in which the ion implantation layer has been formed to a base wafer to form a bonded wafer, and subjecting the bonded wafer to heat treatment to separate the bond wafer from the base wafer at the ion implantation layer as boundary to form the bonded wafer. In the method of manufacturing a bonded wafer, the heat treatment at least from the start of the separation to the end of the separation is conducted in an oxidizing atmosphere.
    • 包括将氢离子,稀有气体离子或氢离子和稀有气体离子的混合物注入接合晶片以在接合晶片中形成离子注入层的粘合晶片的制造方法,将接合晶片接合,其中离子 注入层已经形成到基底晶片以形成接合晶片,并且对接合的晶片进行热处理,以在离子注入层作为边界将接合晶片与基底晶片分离,以形成接合晶片。 在制造接合晶片的方法中,至少从分离开始到分离结束的热处理在氧化气氛中进行。