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    • 27. 发明申请
    • Rotation Control Device of Working Machine
    • 工作机械转动控制装置
    • US20140032059A1
    • 2014-01-30
    • US13980607
    • 2012-01-19
    • Takako Satake
    • Tsutomu UdagawaMitsuo SonodaManabu EdamuraTakenori HirokiManabu SugiuraHidetoshi Satake
    • E02F9/12
    • E02F9/123E02F9/2095
    • To automatically prevent a reverse movement by inhibiting an excessive increase in an output torque of an electric motor.A means (31) calculates a target value for a rotation speed based on a command from a system (20), a means (32) calculates a deviation between a detection value from a rotation speed sensor (81) and the target value, a means (33) calculates a first target torque in a direction that the deviation will be eliminated, and a means (34) calculates, based on a command from the system (20), a second target torque in the same direction as the target value. A means (50) calculates a variation in a rotation angle of an electric motor (12) in a first range, and a means (60) calculates the same variation in a second range. A means (40) calculates, based on the variations from the means (50, 60), a third target torque in a direction that the rotation angle will return to a rotation angle before a predetermined time (t), and a means (73) limits the first target torque to one of the second and third target torques, said one target torque being in the same direction as the first target torque and being greater in absolute value. Substantially an entirety of the first range specifies a range for the variation in one direction, a remaining small range specifies a range for the variation in the other direction, substantially an entirety of the second range specifies a range for the variation in the other direction, and a remaining small range specifies a range for the variation in the one direction.
    • 通过抑制电动机的输出转矩的过度增加来自动地防止反向运动。 装置(31)基于来自系统(20)的命令计算转速的目标值,装置(32)计算来自转速传感器(81)的检测值与目标值之间的偏差, 装置(33)在偏移将被消除的方向上计算第一目标转矩,并且装置(34)基于来自系统(20)的命令,计算与目标值相同方向的第二目标转矩 。 装置(50)计算第一范围内的电动机(12)的旋转角度的变化,并且装​​置(60)在第二范围中计算相同的变化。 装置(40)基于来自装置(50,60)的变化,根据旋转角度将返回到预定时间(t)之前的旋转角度的方向,计算第三目标扭矩,以及装置 )将第一目标转矩限制到第二和第三目标转矩中的一个,所述一个目标转矩与第一目标转矩处于相同的方向,并且绝对值较大。 基本上第一范围的整体指定一个方向的变化的范围,剩余的小范围指定另一方向的变化的范围,基本上整个第二范围指定了另一方向的变化的范围, 剩下的小范围指定一个方向的变化范围。
    • 28. 发明申请
    • Plasma Processing Apparatus
    • 等离子体处理装置
    • US20100263796A1
    • 2010-10-21
    • US12783686
    • 2010-05-20
    • Manabu EdamuraGo MiyaKen Yoshioka
    • Manabu EdamuraGo MiyaKen Yoshioka
    • H01L21/465C23F1/08C23C16/00
    • H01J37/321
    • A plasma processing apparatus includes a processing chamber, a sample stage for mounting an object to be processed, a power supply, and at least one induction coil connected to the power supply. The induction coil is formed by connecting at least two identical coil elements in a parallel circuit-like arrangement so that current flows in each of the plurality of identical coil elements in a same direction when viewed from the sample stage. The induction coil is positioned so that a center thereof corresponds to a center of the object, and input ends of the coil elements are displaced circumferentially at equal angular intervals calculated by dividing 360° by the number of identical coil elements.
    • 等离子体处理装置包括处理室,用于安装待加工物体的样品台,电源以及连接到电源的至少一个感应线圈。 感应线圈通过以并联电路状布置连接至少两个相同的线圈元件而形成,使得当从样品台观察时,电流以相同的方向在多个相同的线圈元件中的每一个中流动。 感应线圈被定位成使得其中心对应于物体的中心,并且线圈元件的输入端部以相等的角度间隔沿圆周方向移位,其通过将360°除以相同线圈元件的数量而计算。
    • 30. 发明申请
    • Plasma processing apparatus
    • 等离子体处理装置
    • US20050224182A1
    • 2005-10-13
    • US10921341
    • 2004-08-19
    • Manabu EdamuraGo MiyaKen Yoshioka
    • Manabu EdamuraGo MiyaKen Yoshioka
    • H05H1/46C23F1/00H01J37/32H01L21/205H01L21/3065
    • H01J37/321
    • The invention provides an inductively coupled plasma apparatus capable of disposing a parallel coil with a large number of total turns in a relatively small space. The present plasma processing apparatus comprises a processing chamber for subjecting an object to plasma processing, an inlet means for introducing a processing gas into the processing chamber, an evacuation means for evacuating an interior of the processing chamber, a sample stage for placing the object, a power supply means for generating plasma, and at least one induction coil connected to the power supply means, wherein the induction coil is formed by connecting a plurality of identical coil elements 101 in a parallel circuit-like arrangement, the induction coil being positioned so that its center corresponds to a center of the object, and wherein input ends 101 in of the coil elements 101 are arranged at equal angular intervals calculated by dividing 360° by the number of coil elements, the coil elements having a three-dimensional structure in a radial direction and a height direction along a surface of an annular ring with an arbitrary cross-sectional shape.
    • 本发明提供一种电感耦合等离子体装置,其能够在相对较小的空间中设置具有大量总匝数的平行线圈。 本等离子体处理装置包括用于对物体进行等离子体处理的处理室,用于将处理气体引入处理室的入口装置,用于抽出处理室内部的抽空装置,用于放置物体的样品台, 用于产生等离子体的电源装置和连接到电源装置的至少一个感应线圈,其中感应线圈通过以并联电路状布置连接多个相同的线圈元件101而形成,感应线圈定位成 其中心对应于物体的中心,并且其中线圈元件101中的输入端101a以360度乘以线圈元件的数量计算的等角度间隔布置,线圈元件具有三维结构 沿着具有任意横截面形状的环形环的表面的径向方向和高度方向。