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    • 23. 发明授权
    • Surface inspection apparatus
    • 表面检查装置
    • US08023111B2
    • 2011-09-20
    • US12595699
    • 2008-04-25
    • Yoshinori HayashiMasao KawamuraHideki Mori
    • Yoshinori HayashiMasao KawamuraHideki Mori
    • G01N21/88
    • G01N21/9503
    • A semiconductor wafer inspection apparatus for inspecting an outer circumference edge part of a semiconductor wafer. The apparatus has a camera lens arranged facing an outer circumference edge part of a semiconductor wafer, an imaging surface arranged facing an outer circumference end face of a semiconductor wafer via the camera lens, a mirror forming an image of a first outer circumference bevel surface of the semiconductor wafer on the imaging surface via the camera lens, a mirror forming an image of a second outer circumference bevel surface of the semiconductor wafer on the imaging surface via the camera lens, a correction lens forming an image of an outer circumference end face of the semiconductor wafer on the imaging surface via the center part of the camera lens, and an illumination light guide lamp part illuminating the surfaces. With use of the apparatus the first outer circumference bevel surface and second outer circumference bevel surface become brighter compared with the outer circumference end face.
    • 一种用于检查半导体晶片的外周边缘部分的半导体晶片检查装置。 该装置具有面向半导体晶片的外周缘部的相机透镜,经由照相机透镜与半导体晶片的外周端面相对配置的摄像面,形成第一外周斜面的图像的反射镜 通过照相机镜头在成像表面上的半导体晶片,通过照相机镜头在成像表面上形成半导体晶片的第二外圆周斜面的图像的镜;校正透镜,其形成外周端面的图像 通过照相机镜头的中心部分的成像表面上的半导体晶片和照亮该表面的照明光导灯部分。 通过使用该装置,与外周端面相比,第一外周斜面和第二外圆周斜面变得更亮。
    • 25. 发明授权
    • Optical scan apparatus and image formation apparatus
    • 光学扫描装置和图像形成装置
    • US07760223B2
    • 2010-07-20
    • US12116002
    • 2008-05-06
    • Seizo SuzukiHironobu MifuneYoshinori HayashiYasuhiro Nihei
    • Seizo SuzukiHironobu MifuneYoshinori HayashiYasuhiro Nihei
    • B41J2/435B41J2/47
    • B41J2/473G02B26/123G02B26/127G06K15/1219G06K15/1261
    • An optical scan apparatus which deflects a plurality of light beams to scan a write region on a scan surface in a main scan direction is configured to include a light source which has a plurality of emission portions emitting the plurality of light beams arranged two-dimensionally on a plane in parallel to the main scan direction and a sub scan direction perpendicular to the main scan direction; a deflector which deflects the plurality of light beams from the plurality of emission portions; a light receiving element which receives the light beams and outputs a synchronous detection signal in accordance with the received light beams; and a control unit which selectively controls any one of the emission portions to emit a light beam upon each scanning and allows the light beam from the selected emission portion to be incident on the light receiving element via the deflector.
    • 使多个光束偏转以扫描主扫描方向上的扫描面上的写入区域的光学扫描装置被配置为包括具有多个发射部分的光源,所述多个发射部分发射二维布置的多个光束 平行于主扫描方向的平面和垂直于主扫描方向的副扫描方向; 偏转器,其使来自所述多个发射部分的所述多个光束偏转; 光接收元件,其接收光束并根据所接收的光束输出同步检测信号; 以及控制单元,其在每次扫描时选择性地控制发射部分中的任何一个发射光束,并且允许来自所选择的发射部分的光束经由偏转器入射到光接收元件。
    • 28. 发明申请
    • APPARATUS AND METHOD FOR INSPECTING EDGE OF SEMICONDUCTOR WAFER
    • 检测半导体波形边缘的装置和方法
    • US20100026997A1
    • 2010-02-04
    • US12531429
    • 2008-03-28
    • Yoshinori HayashiHideki Mori
    • Yoshinori HayashiHideki Mori
    • G01N21/00
    • G01B11/24G01N21/9503G01N2021/8841H01L22/12
    • A linear actuator which can make a bed flat in emergency. A linear actuator (10) comprising a shaft (16) having an externally threaded portion (17), a worm reduction gear for transmitting rotation of a motor (40) to the shaft (16), a nut (19) screwing on the externally threaded portion (17) and advancing or retreating as the shaft (16) rotates forward or reversely, and a moving tube (12) secured to the nut (19) and advancing or retreating for the housing (11) is further provided with a sub-shaft (52) interlocked with the worm reduction gear, an inner race (59) spline coupled with the sub-shaft (52), an engaging male portion (82) and an engaging female portion (83) interposed between the inner race (59) and the collar (55) of the shaft (16) to engage freely with each other, an operating ring (66) fitted rotatably to the outer circumference of the housing (11), and a working ring (72) for transmitting the rotation of the operating ring (66) to the inner race (59) while converting into axial movement. The shaft (16) can be rotated freely in emergency by disengaging the engaging male portion and the engaging female portion.
    • 为了提供用于检查半导体晶片的边缘的装置和方法,用于通过与用于检查缺陷的存在的相同步骤或相同的装置容易地检查半导体晶片的外周边缘部分的形状。 用于检查半导体晶片的边缘的装置设置有CCD摄像机(10),用于通过顺序地在圆周方向上拍摄半导体晶片(100)的外周边缘部分(101)来输出图像信号; 以及处理从CCD照相机(10)顺序输出的图像信号的图像处理单元(20)。 图像处理单元(20)具有从图像信号生成表示半导体晶片(100)的外周缘部(101)的图像信息的图像信息生成单元(S2) 以及形成信息生成装置(S13),用于生成表示多个位置(θ)的外周缘部(101)的形状的边缘形状信息(Ap(ω),Ub(ω),Lb(θ) ,基于图像信息。 根据边缘形状信息输出检查结果。
    • 29. 发明授权
    • Magnetic scale manufacturing method and magnetic scale
    • 磁性刻度制造方法和磁性刻度
    • US07617614B2
    • 2009-11-17
    • US11726873
    • 2007-03-23
    • Kojiro KatoYoshinori Hayashi
    • Kojiro KatoYoshinori Hayashi
    • G01B7/00
    • G01D5/145Y10S33/01
    • First, an inner tube member is accommodated in an outer tube member. Then, rigid powder, having high rigidity and a hard-to-magnetize characteristic, into the inner tube member. Next, magnetic powder is filled into a recessed portion of the inner tube member. Then, the inner tube member is drawn out of the outer tube member. Then, a composite filler composed of the rigid powder, magnetic powder and outer tube member is subjected to a cold hydrostatic pressure pressing process as pre-processing. Next, the composite filler is heated and solidified into a billet. Then, the billet is subjected to a hot extrusion process so that it is formed into a bar-shaped workpiece. The bar-shaped workpiece is rolled onto a roller, and then the outer tube member is peeled off. Next, the bar-shaped workpiece is subjected to a cutting process so that it is formed into an elongated bar. Then, a magnetic section of the elongated bar is magnetized into a scale structure.
    • 首先,将内筒件容纳在外管件中。 然后,具有高刚性和难以磁化的特性的刚性粉末进入内管构件。 接下来,将磁性粉末填充到内管构件的凹部中。 然后,将内管部件从外筒部件拉出。 然后,将由刚性粉末,磁性粉末和外管部件构成的复合填料作为预处理进行冷静压压制。 接着,将复合填料加热固化成坯料。 然后,对钢坯进行热挤压加工,形成棒状工件。 将该棒状工件卷绕到辊上,然后将外管部件剥离。 接下来,对条形工件进行切割处理,使其形成为细长条。 然后,细长条的磁性部分被磁化成刻度结构。