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21. 发明授权

US07387813B2 Methods of preparation of hollow microstructures and nanostructures 有权
标题翻译：中空微结构和纳米结构的制备方法
公开(公告)号：US07387813B2
公开(公告)日：2008-06-17
申请号：US11176017
申请日：2005-07-07
申请人： Rakesh Kumar , Bawa Singh , Brian G. Lewis , Michael T. Marczi
发明人： Rakesh Kumar , Bawa Singh , Brian G. Lewis , Michael T. Marczi
IPC分类号： B05D3/02 , B05D3/10 , C23C8/02 , B32B5/16 , C08F2/36
CPC分类号： B01J13/14 , B01J35/06 , B01J35/08 , Y10T428/2982 , Y10T428/2984 , Y10T428/2991
摘要： Structures in the nanoscale and mesoscale domain are provided. The structures typically have a shell which can be comprised of a porous polymeric material such as parylene. The surfaces of the shell can further comprise pendant functional groups that can provide reactive or passive characteristics.
摘要翻译：提供了纳米尺度和中尺度域中的结构。结构通常具有可以由多孔聚合材料如聚对二甲苯构成的壳。壳体的表面可进一步包含可提供反应性或被动特性的侧链官能团。

22. 发明授权

US07678255B2 Mask and method for electrokinetic deposition and patterning process on substrates 有权
标题翻译：用于基体上的电动沉积和图案化工艺的掩模和方法
公开(公告)号：US07678255B2
公开(公告)日：2010-03-16
申请号：US11419128
申请日：2006-05-18
申请人： Oscar Khaselev , Brian G. Lewis , Michael Marczi , Bawa Singh
发明人： Oscar Khaselev , Brian G. Lewis , Michael Marczi , Bawa Singh
IPC分类号： C25D13/12 , G03G13/32
CPC分类号： C25D13/00 , B23K3/0623 , B23K2101/42 , C25D5/022 , C25D13/22 , C25D15/00 , H01L21/2885 , H01L24/11 , H01L24/12 , H01L2224/05001 , H01L2224/05023 , H01L2224/05124 , H01L2224/05155 , H01L2224/05171 , H01L2224/05568 , H01L2224/11505 , H01L2224/13099 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01015 , H01L2924/01023 , H01L2924/01024 , H01L2924/01029 , H01L2924/01033 , H01L2924/01042 , H01L2924/01045 , H01L2924/01047 , H01L2924/01056 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/04953 , H01L2924/09701 , H01L2924/3025 , H05K3/3484 , H05K2203/0425 , H05K2203/0557 , H05K2203/0776 , H05K2203/09 , H05K2203/105 , H01L2224/05599
摘要： A mask for application to a substrate to facilitate electrokinetic deposition of charged particles onto the substrate, the mask comprising a conducting layer, a dielectric layer, and mask openings. A method for applying a pattern of charged particles to a substrate comprising applying the foregoing the substrate to yield a masked substrate; immersing the masked substrate in a bath containing the charged particles; and establishing an electrical potential between the conducting layer of the mask and a counter-electrode thereby electrokinetically depositing the particles through the mask openings onto areas of the substrate exposed in the mask openings. Products made by this method.
摘要翻译：一种用于施加到基底以便于将带电粒子电动沉积到基底上的掩模，该掩模包括导电层，电介质层和掩模开口。一种将带电粒子的图案应用于基板的方法，包括将上述基板施加到掩模基板上; 将掩蔽的基板浸入含有带电粒子的浴中; 并且在掩模的导电层和对电极之间建立电位，从而通过掩模开口电动地将颗粒沉积到暴露在掩模开口中的基板的区域上。通过这种方法制成的产品。

23. 发明申请

US20050106329A1 Deposition and patterning process 有权
标题翻译：沉积和图案化过程
公开(公告)号：US20050106329A1
公开(公告)日：2005-05-19
申请号：US10888286
申请日：2004-07-09
申请人： Brian Lewis , Gerard Minogue , Robert Detig , Dietmar Eberlein , Bawa Singh , Michael Marczi , Kenneth Reilly
发明人： Brian Lewis , Gerard Minogue , Robert Detig , Dietmar Eberlein , Bawa Singh , Michael Marczi , Kenneth Reilly
IPC分类号： B01J19/08 , B05D1/06 , B05D1/32 , B23K3/06 , C23C20060101 , H01L21/288 , H01L21/48 , H01L21/60 , H05K3/34
CPC分类号： H05K3/3484 , B23K3/0607 , H01L21/288 , H01L21/2885 , H01L21/4853 , H01L24/03 , H01L24/05 , H01L24/11 , H01L24/13 , H01L2224/03622 , H01L2224/03912 , H01L2224/0401 , H01L2224/05023 , H01L2224/05155 , H01L2224/05568 , H01L2224/05647 , H01L2224/11005 , H01L2224/11332 , H01L2224/11334 , H01L2224/114 , H01L2224/11442 , H01L2224/116 , H01L2224/11849 , H01L2224/131 , H01L2924/00013 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01015 , H01L2924/01022 , H01L2924/01023 , H01L2924/01029 , H01L2924/01033 , H01L2924/01045 , H01L2924/01049 , H01L2924/01056 , H01L2924/01074 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/04953 , H01L2924/09701 , H01L2924/12042 , H05K3/3478 , H05K2203/0338 , H05K2203/041 , H05K2203/0425 , H05K2203/0776 , H05K2203/09 , H05K2203/105 , H01L2224/13099 , H01L2924/00014 , H01L2924/00
摘要： A method for applying particles in a pattern to a substrate, either directly or by use of an intermediate tool, by electrokinetic or electrostatic means. A method for applying metal particles such as solder metal in a pattern to an electronic device substrate, either directly or by use of an intermediate tool, by electrokinetic or electrostatic means.
摘要翻译：通过电动或静电方式直接或通过使用中间工具将图案中的颗粒施加到基底上的方法。通过电动或静电方式直接地或通过使用中间工具将诸如焊料金属的金属颗粒以图案施加到电子器件基板的方法。

24. 发明授权

US06511712B1 Methods using dry powder deposition apparatuses 失效
标题翻译：使用干粉沉积设备的方法
公开(公告)号：US06511712B1
公开(公告)日：2003-01-28
申请号：US09531639
申请日：2000-03-21
申请人： Eugene Samuel Poliniak , Hoi Cheong Steve Sun , Nitin Vithalbhai Desai , Nalin Kumar , William Ronald Roach , Lawrence Harrison Hammer , Peter David Southgate , Bawa Singh , Howard Christopher Rivenburg , Peter Zanzucchi , David Keller , Dominic Stephen Rosati
发明人： Eugene Samuel Poliniak , Hoi Cheong Steve Sun , Nitin Vithalbhai Desai , Nalin Kumar , William Ronald Roach , Lawrence Harrison Hammer , Peter David Southgate , Bawa Singh , Howard Christopher Rivenburg , Peter Zanzucchi , David Keller , Dominic Stephen Rosati
IPC分类号： B05D104
CPC分类号： A61J3/00 , A61J1/035 , A61K9/70 , B05B5/08 , B65B1/04 , B65B1/30 , B65B11/50
摘要： Provided is a method using a dry deposition apparatus for depositing grains on a substrate comprising: an electrostatic chuck having one or more collection zones, wherein the substrate is layered on the chuck for processing; a charged grain delivery apparatus for directing charged grains for electrostatic deposition on the substrate at the locations of the collection zones; and an optical detection device for quantifying the amount of grains deposited.
摘要翻译：提供了一种使用用于在基板上沉积晶粒的干式沉积装置的方法，包括：具有一个或多个收集区的静电卡盘，其中基板层叠在卡盘上用于加工;带电粒子输送装置，用于引导带电粒子进行静电沉积在收集区的位置处的基底上; 和用于量化沉积的颗粒量的光学检测装置。

25. 发明授权

US06475351B2 AC waveforms biasing for bead manipulating chucks 失效
标题翻译：交流波形偏置用于珠操纵卡盘
公开(公告)号：US06475351B2
公开(公告)日：2002-11-05
申请号：US09772536
申请日：2001-01-30
申请人： Hoi Cheong Sun , Dominic Stephen Rosati , Eugene Samuel Puliniak , Bawa Singh , Nitin Vithalbhai Desai
发明人： Hoi Cheong Sun , Dominic Stephen Rosati , Eugene Samuel Puliniak , Bawa Singh , Nitin Vithalbhai Desai
IPC分类号： B01J1908
CPC分类号： H02N13/00 , B01J19/0046 , B01J2219/00468 , B01J2219/005 , G01N2035/00574 , Y10S118/02 , Y10T279/23
摘要： AC waveforms biasing of bead transporter chucks and their accumulated charge sensing circuits tailored for low resistivity substrates and beads where if traditional DC quasi-static biasing potentials were used, the bead attraction potentials of the chuck would undergo rapid RC decay and cause the bead transporter chuck to stop working. Methods for selecting AC waveforms are given, including those that maximize the time average of the bead attraction potential at the bead collection zone of the bead contact surface.
摘要翻译：针对低电阻率基板和珠子的珠子运输卡盘的交流波形偏置及其积累的电荷感应电路，如果使用传统的直流准静态偏置电位，卡盘的珠子吸引电位将经历快速的RC衰减，并导致珠子运输卡盘停止工作给出了选择交流波形的方法，包括使珠接触表面的珠收集区的珠吸引电位的时间平均最大化的方法。

26. 发明授权

US6146685A Method of deposition a dry powder and dispensing device 失效
标题翻译：沉积干粉和分配装置的方法
公开(公告)号：US6146685A
公开(公告)日：2000-11-14
申请号：US187092
申请日：1998-11-05
申请人： Suggy S. Chrai , Joseph Thomas McGinn , Bawa Singh
发明人： Suggy S. Chrai , Joseph Thomas McGinn , Bawa Singh
IPC分类号： A61J3/00 , A61J7/00 , A61K9/00 , A61M15/00 , A61M15/02 , B05D1/06 , B05D1/04
CPC分类号： B05D1/06 , A61M11/001 , A61M15/0043 , A61M15/0045 , A61M15/0051 , A61M15/0055 , A61K9/0075 , A61M15/02 , A61M2202/064
摘要： A dry powder, for example, a medicament for an inhaler, comprises elongated particles with an aspect ratio sufficient to cause the particles to be bound to a preferably metal or non-metallic sheet material substrate at the particle tips by electrostatic deposition and for aligning a plurality of particles with their major axes aligned normal to the substrate and oriented tip-to-tip. Particles deposited form a low density, high relative void deposition to minimize attractive forces between the particles. This minimizes agglomeration and bonding forces to the substrate facilitating the release of a powdered medicament in an inhaler. Medicament dosages in a substrate pocket are covered by a sealing layer. An embodiment of a drug dosage inhaler substrate and inhaler is disclosed.
摘要翻译：干粉，例如用于吸入器的药物，包括细长的颗粒，其长宽比足以使得颗粒通过静电沉积而在颗粒尖端处与优选金属或非金属片材基材结合，并且用于对准多个颗粒的主轴与衬底垂直对齐并且取向尖端到尖端。沉积的颗粒形成低密度，高相对空隙沉积，以最小化颗粒之间的吸引力。这最小化对基质的附聚和结合力，有助于在吸入器中释放粉末状药物。衬底袋中的药物剂量被密封层覆盖。公开了药物剂量吸入器基质和吸入器的实施方案。

27. 发明授权

US5309063A Inductive coil for inductively coupled plasma production apparatus 失效
标题翻译：电感耦合等离子体生产设备的感应线圈
公开(公告)号：US5309063A
公开(公告)日：1994-05-03
申请号：US26400
申请日：1993-03-04
申请人： Bawa Singh
发明人： Bawa Singh
IPC分类号： H01J37/32 , H01J7/24
CPC分类号： H01J37/321
摘要： The invention is directed to an induction coil which includes a flat spirally wound portion and a tubular spirally wound portion extending from the outer edge of the flat portion. The axis of the tubular portion is substantially perpendicular to the flat portion. The coil is useful in a plasma production apparatus which includes a chamber having walls and adapted to be evacuated. A window extends into the chamber from one of the walls. The coil is in the window with the flat portion being at the bottom of the window.
摘要翻译：本发明涉及一种感应线圈，其包括平坦螺旋卷绕部分和从平坦部分的外边缘延伸的管状螺旋卷绕部分。管状部分的轴线基本上垂直于平坦部分。线圈在等离子体生产设备中是有用的，其包括具有壁并适于被抽空的室。一个窗户从一个墙壁延伸进入房间。线圈在窗口中，平坦部分在窗口的底部。

28. 发明授权

US5057185A Triode plasma reactor with phase modulated plasma control 失效
标题翻译：具有相位调制等离子体控制的三极管等离子体反应器
公开(公告)号：US5057185A
公开(公告)日：1991-10-15
申请号：US589401
申请日：1990-09-27
申请人： John Henry Thomas, III , Bawa Singh
发明人： John Henry Thomas, III , Bawa Singh
IPC分类号： H01J37/32
CPC分类号： H01J37/32174 , H01J37/32082 , H01J37/32165 , H01J37/32587 , H01J37/32779
摘要： A triode plasma reactor having first, second and third electrodes for forming a plasma in a reaction chamber from a reactant gas includes a phase modulated potential generator for generating time varying potentials on the second and third electrodes which are phase modulated versions of one another. The phase modulated versions may also include a fixed phase shift between them. By time varying the phase angle relative to a set phase shift, a new dimension of time varying control for the reactor may be obtained. Phase modulation at frequencies from audio frequencies to radio frequencies may be provided. Phase modulation may be accomplished digitally or in the analogue domain.
摘要翻译：具有用于在反应室中形成等离子体的第一，第二和第三电极的三极管等离子体反应器包括：相位调制电位发生器，用于在第二和第三电极上产生彼此相位调制版本的时变电位。相位调制版本还可以包括它们之间的固定相移。通过相对于设定的相移时变相位角，可以获得反应器的时变控制的新维度。可以提供从音频到射频的频率的相位调制。相位调制可以数字地或在模拟域中完成。

29. 发明授权

US4830702A Hollow cathode plasma assisted apparatus and method of diamond synthesis 失效
标题翻译：空心阴极等离子体辅助设备和金刚石合成方法
公开(公告)号：US4830702A
公开(公告)日：1989-05-16
申请号：US68863
申请日：1987-07-02
申请人： Bawa Singh , Yehuda Arie , Ormond R. Mesker
发明人： Bawa Singh , Yehuda Arie , Ormond R. Mesker
IPC分类号： C30B29/04 , C23C16/513 , C30B25/10
CPC分类号： C23C16/513 , C30B25/105
摘要： The present invention includes an apparatus and method for depositing diamond on a substrate. A hydrocarbon/hydrogen gas mixture is passed through a refractory metal hollow cathode which is self heated to a high temperature. The gas mixture is dissociated by a combination of thermal and plasma effects. The plasma plume emanating from the hollow cathode heats the substrate which is positioned on a surface of the anode. Growth of the diamond film is enhanced by bombardment of electrons.

30. 发明授权

US4542321A Inverted magnetron ion source 失效
标题翻译：倒置磁控管离子源
公开(公告)号：US4542321A
公开(公告)日：1985-09-17
申请号：US397527
申请日：1982-07-12
申请人： Bawa Singh , David Boyarsky
发明人： Bawa Singh , David Boyarsky
IPC分类号： H01J27/08 , H01J27/14 , H01J37/08 , H01J7/24
CPC分类号： H01J37/08 , H01J27/08 , H01J27/14
摘要： The present invention provides, in a preferred embodiment, a cylindrical stainless steel cathode with end pieces thereon to form a cathode chamber within. In addition, in a preferred embodiment, there is a stainless steel rod which passes axially through the cathode chamber and which is electrically insulated therefrom at the end pieces. The stainless steel cathode has first and second apertures formed therein with the first to be connected to a source of ionizable gas and the second to act as the opening through which there passes a stream of ions to an ion beam target. A magnetic flux source is coupled to the cathode chamber to pass magnetic flux therethrough and a voltage source is connected between the anode and the cathode to provide an electrostatic field therebetween whereby when ionizable gas is fed into the cathode chamber, it is ionized and a stream of ions emanates from the second aperture. In a preferred embodiment there is further provided an electrostatic ion focusing means to focus the ion stream emanating from the second aperture.
摘要翻译：在优选实施例中，本发明提供一种圆柱形不锈钢阴极，其上具有端部件以在其内形成阴极室。此外，在一个优选实施例中，存在一个不锈钢棒，其轴向通过阴极室并且在端部件处与其电绝缘。不锈钢阴极具有形成在其中的第一和第二孔，其中第一和第二孔形成有第一和第二孔，第一和第二孔与第一可连接的可电离气体源连接，而第二孔用作开口，通过该开口将离子流传递到离子束靶。磁通源耦合到阴极室以通过其中的磁通，并且电压源连接在阳极和阴极之间以在其间提供静电场，由此当将可电离气体馈送到阴极室中时，将其电离并流的离子从第二孔发出。在优选实施例中，还提供了一种用于聚焦从第二孔发出的离子流的静电离子聚焦装置。

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