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    • 23. 发明授权
    • Method and apparatus for aligning a work piece in a laser drilling system
    • 用于在激光钻孔系统中对准工件的方法和装置
    • US06710288B2
    • 2004-03-23
    • US10266944
    • 2002-10-08
    • Xinbing LiuMing Li
    • Xinbing LiuMing Li
    • B23K2603
    • B23K26/067B23K26/042B23K26/0624H05K3/0008H05K3/0026
    • A method is provided for aligning a workpiece in a laser drilling system. The method includes: providing a workpiece having at least two substantially planar and parallel surfaces, including a first planar surface in which ablations are formed therein by the laser drilling system; propagating an alignment beam of light towards a second planar surface of the workpiece, the alignment beam being incident on and reflected by the second planar surface, thereby forming a reflected beam of light; measuring a reflection angle of the reflected beam; and determining alignment information for the workpiece based on the measured reflection angle of the reflected beam. The method may further include adjusting alignment of the workpiece based on the alignment information.
    • 提供了一种用于在激光钻孔系统中对准工件的方法。 该方法包括:提供具有至少两个基本平坦且平行的表面的工件,其包括第一平面,激光钻孔系统在其中形成有消融; 将对准光束朝向工件的第二平面传播,所述对准光束入射并由第二平面表面反射,从而形成反射光束; 测量反射光束的反射角; 并且基于所测量的反射光束的反射角确定工件的对准信息。 该方法还可以包括基于对准信息来调整工件的对准。
    • 25. 发明申请
    • COLOR SEPARATION MICROLENS AND COLOR SEPARATION GRATING
    • 颜色分离显微镜和颜色分离光栅
    • US20100309554A1
    • 2010-12-09
    • US12477325
    • 2009-06-03
    • Shuichi NagaiXinbing Liu
    • Shuichi NagaiXinbing Liu
    • G02B5/18
    • G02B5/1871G02B5/1814G02B5/1842
    • Color separation gratings, color separation microlenses and imaging arrays are provided. A color separation grating includes a transparent grating material having a grating formed therein. The transparent grating material has a first surface configured to receive incident light and a second surface opposite the first surface. The second surface is configured to pass selective separated colors from the incident light corresponding to different diffraction orders. The grating is formed in the first surface and includes a number of steps in a grating period and a number of sub-steps formed on each step. A combination of the number of steps and the number of sub-steps are selected to correspond to a number of diffraction orders produced by the color separation grating.
    • 提供了色分离光栅,分色微透镜和成像阵列。 色分离光栅包括其中形成有光栅的透明光栅材料。 透明光栅材料具有被配置为接收入射光的第一表面和与第一表面相对的第二表面。 第二表面被配置为从与不同衍射级相对应的入射光中传递选择性分离的颜色。 光栅形成在第一表面中并且包括在光栅周期中的多个步骤以及在每个步骤上形成的多个子步骤。 选择步数和子步数的组合以对应于由分色光栅产生的衍射次数。
    • 26. 发明授权
    • Precision machining system and methods
    • 精密加工系统及方法
    • US07788998B2
    • 2010-09-07
    • US11374373
    • 2006-03-13
    • Jon EthingtonXinbing Liu
    • Jon EthingtonXinbing Liu
    • B23B5/36B23B5/00
    • B23B1/00B23B2226/31Y10T82/25Y10T82/2512Y10T82/2585Y10T82/2591
    • A precision machining system with a variable projected machining width of the cutting surface of the machining tool, including: a workpiece holder to hold a workpiece; a machining tool holder to hold the machining tool such that the Z axis is substantially parallel to the tool's centerline; a Z translation stage and an X translation stage each coupled to one of the workpiece holder or the machining tool holder; a workpiece spindle coupled to the workpiece holder to rotate the workpiece about the workpiece axis that is parallel to the Z axis; a machining path controller electrically coupled to the X translation stage and the workpiece spindle; and a tool spindle coupled to the machining tool holder. The tool spindle rotates the machining tool about the centerline of the machining tool, which varies the width of the cutting surface of the machining tool projected perpendicular to the machining path.
    • 一种精密加工系统,具有加工刀具切削面的可变投影加工宽度,包括:工件夹持器,用于夹持工件; 加工工具夹持器,用于保持加工工具,使得Z轴基本上平行于工具的中心线; Z平移台和X平移台,每个平台与工件保持器或加工工具夹具中的一个相连接; 工件主轴,其联接到工件夹持器,以使工件围绕平行于Z轴的工件轴旋转; 电耦合到X平移台和工件主轴的加工路径控制器; 以及联接到加工工具保持器的工具主轴。 工具主轴围绕加工工具的中心线旋转加工工具,这改变了加工刀具垂直于加工路径投影的切削面的宽度。
    • 28. 发明授权
    • Slab laser amplifier with parasitic oscillation suppression
    • 平板激光放大器具有寄生振荡抑制
    • US07505499B2
    • 2009-03-17
    • US11013203
    • 2004-12-15
    • Craig FirstXinbing Liu
    • Craig FirstXinbing Liu
    • H01S3/14
    • H01S3/0606H01S3/0615H01S3/063H01S3/08095H01S3/0941H01S3/2333
    • A slab laser amplifier with parasitic oscillation suppression has a plurality of angled pump faces related to one another in order to decrease likelihood of parasitic oscillations, with internal beam incidence angles at total internal reflection that alleviate need for reflective coatings. No polished surfaces of gain material comprising the amplifier are parallel to one another. A beam path within the gain material is such that all incident angles of the beam path upon the two main faces and the common end face are greater than a critical angle required for total internal reflection, thereby alleviating need for reflective coatings. Based on an index of refraction of the gain material, and based on a diameter of the laser beam, dimensions of the gain material are selected to maximize beam overlap in a pumped volume of the gain material.
    • 具有寄生振荡抑制的平板激光放大器具有彼此相关的多个倾斜的泵浦面,以便减少寄生振荡的可能性,其中内部射束入射角在全内反射处可减轻对反射涂层的需要。 不包括放大器的增益材料的抛光表面彼此平行。 增益材料内的光束路径使得在两个主面和公共端面上的光束路径的所有入射角大于全内反射所需的临界角,从而减轻对反射涂层的需要。 基于增益材料的折射率,并且基于激光束的直径,选择增益材料的尺寸以使增益材料的泵送体积中的束重叠最大化。
    • 29. 发明申请
    • Apparatus and method of making a grayscale photo mask and an optical grayscale element
    • 制造灰度光掩模和光学灰度元件的装置和方法
    • US20060263698A1
    • 2006-11-23
    • US11134310
    • 2005-05-23
    • Yosuke MizuyamaXinbing Liu
    • Yosuke MizuyamaXinbing Liu
    • G02B6/00H01S5/00G03F1/00
    • G03F7/70383G03F1/50G03F7/0015
    • An apparatus and method for making a grayscale photo mask and a three-dimensional grayscale diffractive optical element operate as follows. A grayscale photo mask is obtained by exposing a laser direct write (LDW) glass material to laser beam radiation from a first laser beam of modulated power moved over a grid of discrete locations on the LDW material, the modulated power being in accordance with grayscale pattern data, and, while the first laser beam is moved over the discrete locations of the grid, exposing the grid to a second laser beam, the power of the second laser beam being less than the bleach threshold of the glass material, to provide each of the discrete locations with a gray scale level to provide a predetermined gray scale pattern of varying optical transmissivity on the LDW material to produce a grayscale mask. An optical element is obtained by exposing a photoresist layer on a wafer to radiation transmitted through the grayscale mask; and removing material from the photoresist layer to provide a predetermined varying thickness of the photoresist layer as determined by the gray scale patterns on the grayscale mask to produce the three-dimensional grayscale diffractive optical element. The optical element may be a diffraction grating. The power of the second laser exposed on said discrete locations may be between about 50 mW and about 5 W, and the power of the first laser exposed on the discrete locations may be between about 20 mW and about 500 mW.
    • 用于制造灰度光掩模和三维灰度级衍射光学元件的装置和方法如下操作。 通过将激光直接写入(LDW)玻璃材料暴露于来自在LDW材料上离散位置网格上移动的调制电力的第一激光束的激光束辐射,获得灰度光掩模,调制后的功率与灰度图 数据,并且当第一激光束在网格的离散位置移动时,将栅格暴露于第二激光束,第二激光束的功率小于玻璃材料的漂白阈值,以提供每个 具有灰度级的离散位置,以在LDW材料上提供改变光学透射​​率的预定灰度图案,以产生灰度掩模。 通过将晶片上的光致抗蚀剂层暴露于通过灰度掩模的辐射而获得光学元件; 以及从光致抗蚀剂层去除材料以提供通过灰度掩模上的灰度图案确定的光致抗蚀剂层的预定变化厚度,以产生三维灰度级衍射光学元件。 光学元件可以是衍射光栅。 暴露在所述分立位置上的第二激光器的功率可以在约50mW至约5W之间,并且在离散位置上暴露的第一激光器的功率可以在约20mW至约500mW之间。