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21. 发明申请

US20090039175A1 VAPORIZATION OF THERMALLY SENSITIVE MATERIALS 有权
标题翻译：热敏材料的蒸发
公开(公告)号：US20090039175A1
公开(公告)日：2009-02-12
申请号：US11834039
申请日：2007-08-06
申请人： Michael Long , Bruce E. Koppe
发明人： Michael Long , Bruce E. Koppe
IPC分类号： B05B7/16 , B05B17/04
CPC分类号： C23C14/243 , C23C14/26
摘要： A vaporizer for receiving and vaporizing particulate material, comprising: a heater having a reticulated material structure composed of ligands that define voids adapted to receive particulate materials, wherein the voids comprise greater than 85% of the volume of the reticulated material structure so that delivery of particulate material into the voids and conduction of vaporized material from the voids is facilitated; causes heat to be produced or conducted by the ligands to cause the particulate material in the voids to vaporize and be conducted through the voids.
摘要翻译：一种用于接收和蒸发颗粒材料的蒸发器，包括：加热器，其具有由限定适于接收颗粒材料的空隙的配体构成的网状材料结构，其中所述空隙包含大于网状材料结构体积的85％颗粒材料进入空隙并促进气化材料从空隙的传导; 导致热量由配体产生或传导，导致空隙中的颗粒物质蒸发并通过空隙传导。

22. 发明申请

US20110247562A1 Vaporizing Material at a Uniform Rate 审中-公开
标题翻译：蒸发材料均匀率
公开(公告)号：US20110247562A1
公开(公告)日：2011-10-13
申请号：US13165677
申请日：2011-06-21
申请人： Michael LONG , Bruce E. Koppe
发明人： Michael LONG , Bruce E. Koppe
IPC分类号： C23C16/448
CPC分类号： C23C14/246
摘要： A method of vaporizing material at a uniform rate for forming a layer on a substrate includes feeding a column of vaporizable material from a temperature controlled region maintained below the vaporizable material's effective vaporization temperature to a source of vaporization energy, wherein the volume of the column can vary during vaporization; and providing a source of vaporization energy delivering a constant heat flux to the surface of the column so that a uniform volume per unit time of the vaporizable material is vaporized to form the layer on the substrate, irrespective of the feeding rate.
摘要翻译：以均匀的速率蒸发材料以在衬底上形成层的方法包括将可蒸发材料柱从保持在可蒸发材料的有效蒸发温度以下的温度控制区域供给到蒸发能源，其中柱的体积可以在蒸发期间变化; 并且提供蒸发能量源，其将恒定的热通量输送到塔的表面，使得可蒸发材料的每单位时间的均匀体积被蒸发以在基材上形成层，而与进料速率无关。

23. 发明授权

US07989021B2 Vaporizing material at a uniform rate 有权
标题翻译：蒸发材料以均匀的速度
公开(公告)号：US07989021B2
公开(公告)日：2011-08-02
申请号：US11190653
申请日：2005-07-27
申请人： Michael Long , Bruce E. Koppe
发明人： Michael Long , Bruce E. Koppe
IPC分类号： C23C16/448
CPC分类号： C23C14/246
摘要： A method of vaporizing material at a uniform rate for forming a layer on a substrate includes feeding a column of vaporizable material from a temperature controlled region maintained below the vaporizable material's effective vaporization temperature to a source of vaporization energy, wherein the volume of the column can vary during vaporization; and providing a source of vaporization energy delivering a constant heat flux to the surface of the column so that a uniform volume per unit time of the vaporizable material is vaporized to form the layer on the substrate, irrespective of the feeding rate.
摘要翻译：以均匀的速率蒸发材料以在衬底上形成层的方法包括将可蒸发材料柱从保持在可蒸发材料的有效蒸发温度以下的温度控制区域供给到蒸发能源，其中柱的体积可以在蒸发期间变化; 并且提供蒸发能量源，其将恒定的热通量输送到塔的表面，使得可蒸发材料的每单位时间的均匀体积被蒸发以在基材上形成层，而与进料速率无关。

24. 发明申请

US20100206233A1 Device and Method for Vaporizing Temperature Sensitive Materials 审中-公开
标题翻译：蒸发温度敏感材料的装置和方法
公开(公告)号：US20100206233A1
公开(公告)日：2010-08-19
申请号：US12768312
申请日：2010-04-27
申请人： Michael Long , Randolph C. Brost , Jeremy M. Grace , Dennis R. Freeman , Neil P. Redden , Bruce E. Koppe
发明人： Michael Long , Randolph C. Brost , Jeremy M. Grace , Dennis R. Freeman , Neil P. Redden , Bruce E. Koppe
IPC分类号： C23C16/00
CPC分类号： C23C14/243 , C23C14/12 , H01L51/001 , H01L51/0059 , H01L51/0077 , H01L51/0081
摘要： A device vaporizes organic materials onto a substrate surface to form a film. The device includes a vaporization apparatus to receive a quantity of organic material that can have one or more components each having a different vaporization temperature, the vaporization apparatus having a first region and a second region spaced from the first region; a cooling unit to actively cool the organic material in the first region so that each of the one or more organic components is maintained well below its vaporization temperature to reduce degradation of the organic material; heating unit to heat the second region of the vaporization apparatus above the vaporization temperature of each of the one or more organic components; and a metering unit having a permeable member to meter organic material at a controlled rate from the first region into the second region so that a thin cross section of the organic material is heated at a desired rate-dependent vaporization temperature, whereby organic material vaporizes and forms a film on the substrate surface.
摘要翻译：装置将有机材料蒸发到基材表面上以形成膜。该装置包括一个蒸发装置，用于接收一定量的有机材料，该有机材料可以具有各自具有不同蒸发温度的一种或多种组分，该蒸发装置具有第一区域和与该第一区域间隔开的第二区域; 冷却单元，用于主动冷却第一区域中的有机材料，使得一种或多种有机组分中的每一种保持在低于其蒸发温度以降低有机材料的降解; 加热单元以将所述蒸发装置的所述第二区域加热到所述一个或多个有机组分中的每一个的蒸发温度之上; 以及计量单元，其具有以从第一区域到第二区域的受控速率计量有机材料的渗透构件，使得有机材料的薄横截面以期望的速率依赖性蒸发温度被加热，由此有机材料蒸发，在基板表面上形成膜。

25. 发明授权

US07288285B2 Delivering organic powder to a vaporization zone 有权
标题翻译：将有机粉末送至汽化区
公开(公告)号：US07288285B2
公开(公告)日：2007-10-30
申请号：US10945940
申请日：2004-09-21
申请人： Michael Long , Jeremy M. Grace , Bruce E. Koppe
发明人： Michael Long , Jeremy M. Grace , Bruce E. Koppe
IPC分类号： C23C16/00
CPC分类号： C23C14/246 , C23C14/12 , C23C14/26
摘要： A method for vaporizing organic materials and condensing them onto a surface to form a layer, comprising: providing a quantity of organic material in a powdered form in a first container; fluidizing the organic material in the first container and transferring such fluidized material to an auger structure; and rotating at least a portion of the auger structure to transfer fluidized powder from the first container along a feeding path to a vaporization zone where such powder is vaporized and delivered to the substrate to form the layer.
摘要翻译：一种用于蒸发有机材料并将其冷凝到表面上以形成层的方法，包括：在第一容器中提供一定数量的粉末形式的有机材料; 使第一容器中的有机材料流化，并将这种流化材料转移到螺旋钻结构; 以及旋转所述螺旋推进器结构的至少一部分，以将来自所述第一容器的流化粉末沿着进料路径转移到蒸发区域，在所述蒸发区域将所述粉末蒸发并输送到所述基底以形成所述层。

26. 发明授权

US5373365A Apparatus and method for measuring particle contamination 失效
标题翻译：测量颗粒污染的仪器和方法
公开(公告)号：US5373365A
公开(公告)日：1994-12-13
申请号：US995435
申请日：1992-12-23
申请人： Paul T. Brown , Bruce E. Koppe , Robert Lewis Walton
发明人： Paul T. Brown , Bruce E. Koppe , Robert Lewis Walton
IPC分类号： G01N21/89 , G01N21/86 , G01N21/892 , G01N21/94 , G01N21/84
CPC分类号： G01N21/94 , G01N21/4738 , G01N21/86
摘要： An apparatus, and a method for its use, for measuring particulate contamination on a web (10) in a web-cleaning system having means for contacting and removing particles from the web (12). The means for contacting and removing particles has a particle-collecting surface (14). A light source (16) is positioned to direct a light beam against the particle-collecting surface. A sensor (18) senses the intensity of light reflected from the particle collecting surface and generates a signal R.sub.0 representative of the initial reflected light intensity prior to particle collection by the particle collecting surface and a signal R.sub.f representative of the reflected light intensity after particle collection by the particle collecting surface, the difference between R.sub.0 and R.sub.f being a measure of the particulate contamination level on the web.
摘要翻译：一种用于测量幅材清洁系统中的幅材（10）上的微粒污染物的装置及其使用方法，其具有用于从所述幅材（12）接触和除去颗粒的装置。用于接触和除去颗粒的装置具有颗粒收集表面（14）。光源（16）被定位成将光束引导到颗粒收集表面。传感器（18）感测从颗粒收集表面反射的光的强度，并产生代表颗粒收集表面的颗粒收集之前的初始反射光强度的信号R0，以及代表颗粒收集后的反射光强度的信号Rf 通过颗粒收集表面，R0和Rf之间的差异是幅材上颗粒污染物水平的量度。

27. 发明授权

US5177631A Magnetic position sensor 失效
标题翻译：磁性位置传感器
公开(公告)号：US5177631A
公开(公告)日：1993-01-05
申请号：US728910
申请日：1991-06-28
申请人： David M. Orlicki , Bruce E. Koppe , John M. Kresock
发明人： David M. Orlicki , Bruce E. Koppe , John M. Kresock
IPC分类号： B41J2/44 , G01R5/16 , G02B26/10
CPC分类号： G01R5/16 , G02B26/10
摘要： A beam scanning galvanometer is disclosed which oscillates a mirror in a non-resonant mode. The moving parts of the galvanometer are made with as small a moment of inertia as possible because the mirror is oscillated in a non-resonant mode. The galvanometer uses two sets of crossed leaf-springs to support the mirror instead of bearings which are usually used in non-resonant galvanometers. Each of the sets of leaf-springs is formed of a single strip of cold rolled stainless steel. The springs are embedded in uniquely shaped cavities in a permanent magnet that supports the mirror at a distance very close to an axis of rotation of the mirror. The mirror is specially shaped with beveled edges so that its moment of inertia is low and so that it can oscillate in very close proximity to a driving current coil which surrounds the mirror supporting magnet. A magnetic position sensor is used to detect as angular position of the mirror during operation of the galvanometer. A compensating system eliminates distorting magnetic field effects from a magnetic driving system from adversely influencing the magnetic position sensor. Signals from the magnetic position sensor are usable to provide accurate feedback information to a galvanometer driving system.

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