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21. 发明申请

US20120127447A1 METHOD FOR DETERMING A COMMUTATION OFFSET AND FOR DETERMINING A COMPENSATION MAP FOR A STAGE 有权
标题翻译：用于确定报告偏移和用于确定阶段的补偿地图的方法
公开(公告)号：US20120127447A1
公开(公告)日：2012-05-24
申请号：US13110760
申请日：2011-05-18
申请人： Pai-Hsueh Yang , Scott Coakley , Michael B. Binnard , Kazuhiro Hirano , Bausan Yuan , Shiang-Lung Koo
发明人： Pai-Hsueh Yang , Scott Coakley , Michael B. Binnard , Kazuhiro Hirano , Bausan Yuan , Shiang-Lung Koo
IPC分类号： G03B27/58
CPC分类号： G03F7/70758 , G03F7/70516 , G03F7/70775 , H02P6/006
摘要： A method for determining a commutation offset for a mover (250A) of a mover assembly (220C) that moves and positions a stage (220A) relative to a stage base (220B) includes controlling the mover assembly (220C) in a closed loop fashion to maintain the position of the stage (220A) along a first axis and along a second axis with the stage (220A) levitated above the stage base (220B). The method also includes the steps of (i) directing current to a coil array (240) of the mover assembly (220C) so that the mover assembly (220C) imparts a disturbance on the stage (220A); and (ii) evaluating one or more forces generated by the mover assembly (220C) as a result of the disturbance on the stage (220A) created by the mover (250A). Further, a method for generating a compensation map (1402) includes sequentially directing a plurality of excitation signals to the control of the mover assembly (220C) and determining the control commands that result from the plurality of excitation signals.
摘要翻译：用于确定相对于台架（220B）移动和定位平台（220A）的移动器组件（220C）的移动器（250A）的换向偏移的方法包括以闭环方式控制所述动子组件（220C）以使台架（220A）沿着第一轴线并且沿着第二轴线保持台架（220A）的位置，台架（220A）悬浮在平台底座（220B）上方。该方法还包括以下步骤：（i）将电流引导到移动器组件（220C）的线圈阵列（240），使得移动器组件（220C）在平台（220A）上施加干扰; 以及（ii）评估由所述移动器组件（220C）产生的由所述移动器（250A）产生的所述平台（220A）上的干扰所产生的一个或多个力。此外，用于产生补偿图（1402）的方法包括将多个激励信号顺序地引导到移动器组件（220C）的控制，并且确定由多个激励信号产生的控制命令。

22. 发明申请

US20120113405A1 METHOD FOR DETERMINING A COMMUTATION OFFSET AND FOR DETERMINING A COMPENSATION MAP FOR A STAGE 有权
标题翻译：用于确定报告偏移量和确定阶段补偿地图的方法
公开(公告)号：US20120113405A1
公开(公告)日：2012-05-10
申请号：US13101264
申请日：2011-05-05
申请人： Pai-Hsueh Yang , Scott Coakley , Michael B. Binnard , Kazuhiro Hirano , Bausan Yuan , Shiang-Lung Koo
发明人： Pai-Hsueh Yang , Scott Coakley , Michael B. Binnard , Kazuhiro Hirano , Bausan Yuan , Shiang-Lung Koo
IPC分类号： G03B27/58 , G05B1/06
CPC分类号： G03F7/70758 , G03F7/70516 , G03F7/70775 , H02P6/006
摘要： A method for determining a commutation offset for a mover (250A) of a mover assembly (220C) that moves and positions a stage (220A) relative to a stage base (220B) includes controlling the mover assembly (220C) in a closed loop fashion to maintain the position of the stage (220A) along a first axis and along a second axis with the stage (220A) levitated above the stage base (220B). The method also includes the steps of (i) directing current to a coil array (240) of the mover assembly (220C) so that the mover assembly (220C) imparts a disturbance on the stage (220A); and (ii) evaluating one or more forces generated by the mover assembly (220C) as a result of the disturbance on the stage (220A) created by the mover (250A). Further, a method for generating a compensation map (1402) includes sequentially directing a plurality of excitation signals to the control of the mover assembly (220C) and determining the control commands that result from the plurality of excitation signals.
摘要翻译：用于确定相对于台架（220B）移动和定位平台（220A）的移动器组件（220C）的移动器（250A）的换向偏移的方法包括以闭环方式控制所述动子组件（220C）以使台架（220A）沿着第一轴线并且沿着第二轴线保持台架（220A）的位置，台架（220A）悬浮在平台底座（220B）上方。该方法还包括以下步骤：（i）将电流引导到移动器组件（220C）的线圈阵列（240），使得移动器组件（220C）在平台（220A）上施加干扰; 以及（ii）评估由所述移动器组件（220C）产生的由所述移动器（250A）产生的所述平台（220A）上的干扰所产生的一个或多个力。此外，用于产生补偿图（1402）的方法包括将多个激励信号顺序地引导到移动器组件（220C）的控制，并且确定由多个激励信号产生的控制命令。

23. 发明授权

US08140288B2 On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage 有权
标题翻译：用于识别和补偿由多个执行器在多轴平台上产生的力 - 波动和侧力的机上方法
公开(公告)号：US08140288B2
公开(公告)日：2012-03-20
申请号：US11986314
申请日：2007-11-19
申请人： Pai-Hsueh Yang , Bausan Yuan , Kazuo Masaki , Kazuhiro Hirano , Xiao-Feng Yang , Scott Coakley , Michael B. Binnard
发明人： Pai-Hsueh Yang , Bausan Yuan , Kazuo Masaki , Kazuhiro Hirano , Xiao-Feng Yang , Scott Coakley , Michael B. Binnard
IPC分类号： G01L25/00
CPC分类号： G03F7/70758 , G03F7/70725
摘要： Methods, apparatus, and systems are disclosed for identifying force-ripple and/or side-forces in actuators used for moving a multiple-axis stage. The identified force-ripple and/or side-forces can be mapped, and maps of corresponding position-dependent compensation ratios useful for correcting same are obtained. The methods are especially useful for stages providing motion in at least one degree of freedom using multiple (redundant) actuators. In an exemplary method a stage member is displaced, using at least one selected actuator, multiple times over a set distance in the range of motion of the subject actuator(s). Each displacement has a predetermined trajectory and respective starting point in the range. For each displacement, respective section force-command(s) are extracted and normalized to a reference section force-command to define a section compensation-ratio. Multiple section compensation-ratios are assembled, as functions of displacement in the range, to provide a map of compensation ratios for the actuator(s) throughout the range.
摘要翻译：公开了用于识别用于移动多轴平台的致动器中的力波动和/或侧向力的方法，装置和系统。可以对所识别的力 - 纹波和/或侧向力进行映射，并且获得用于校正相应的位置相关的补偿比的映射。这些方法对于使用多个（冗余）致动器在至少一个自由度中提供运动的阶段特别有用。在示例性方法中，使用至少一个所选择的致动器，在主体致动器的运动范围内的设定距离上移动台架构件多次。每个位移具有预定的轨迹和该范围内的相应起始点。对于每个位移，提取相应的截面力命令并将其归一化为参考部分力命令以定义截面补偿比。组合多段补偿比作为该范围内的位移的函数，以提供在整个范围内的致动器的补偿比的图。

24. 发明授权

US07692768B2 Iron core motor driven automatic reticle blind 有权
标题翻译：铁芯电机驱动自动掩模版盲
公开(公告)号：US07692768B2
公开(公告)日：2010-04-06
申请号：US11427439
申请日：2006-06-29
申请人： Michael B. Binnard , Douglas C. Watson , Christopher S. Margeson
发明人： Michael B. Binnard , Douglas C. Watson , Christopher S. Margeson
IPC分类号： G03B27/54 , G03B27/42 , G03B27/62
CPC分类号： G03B27/52 , G03F7/70066
摘要： Methods and apparatus for shielding a reticle within an illumination system are disclosed. According to one aspect of the present invention, a blind arrangement for shielding an object such as a reticle includes a coil assembly which has at least one coil, an air supply that supplies air, and a first blind portion. The first blind portion includes at least one magnet and is not in physical contact with the coil. The first blind portion is supported at a distance from the coil by the air, and the coil assembly cooperates with the magnet to cause the first blind portion to move. The first blind portion shields the object when the first blind portion is in a first position.
摘要翻译：公开了用于屏蔽照明系统内的掩模版的方法和装置。根据本发明的一个方面，用于屏蔽诸如掩模版的物体的盲装置包括具有至少一个线圈的线圈组件，供应空气的空气供应器和第一盲区部件。第一盲部包括至少一个磁体并且不与线圈物理接触。第一盲部通过空气与线圈支撑一定距离，并且线圈组件与磁体协作以使第一盲部移动。当第一盲区部分处于第一位置时，第一盲区部分屏蔽物体。

25. 发明申请

US20100053738A1 High NA Catadioptric Imaging Optics For Imaging A reticle to a Pair of Imaging Locations 有权
标题翻译：高NA反射折射成像光学用于成像一个掩模版到一对成像位置
公开(公告)号：US20100053738A1
公开(公告)日：2010-03-04
申请号：US12547086
申请日：2009-08-25
申请人： David M. Williamson , Michael B. Binnard , Douglas C. Watson
发明人： David M. Williamson , Michael B. Binnard , Douglas C. Watson
IPC分类号： G02B17/08
CPC分类号： G02B17/0892 , G02B27/1066 , G02B27/143 , G03F7/70225 , G03F7/7025 , G03F7/70275 , G03F7/70833
摘要： New and useful concepts for an imaging optical system configured to simultaneously image a reticle to a pair of imaging locations are provided, where the imaging optics comprise a pair of arms, each of which includes catadioptric imaging optics. In addition, the imaging optics are preferably designed to image a reticle simultaneously to the pair of imaging locations, at a numerical aperture of at least 1.3, and without obscuration of light by the imaging optics.
摘要翻译：提供了一种被配置为将掩模版同时成像到一对成像位置的成像光学系统的新的和有用的概念，其中成像光学器件包括一对臂，每个臂包括反射折射成像光学元件。此外，成像光学器件优选地设计成在至少为1.3的数值孔径同时成像成对位置的成对位置成像，并且不会由成像光学元件遮挡光。

26. 发明申请

US20090303454A1 EXPOSURE APPARATUS WITH A SCANNING ILLUMINATION BEAM 审中-公开
标题翻译：曝光装置与扫描照明光束
公开(公告)号：US20090303454A1
公开(公告)日：2009-12-10
申请号：US12481326
申请日：2009-06-09
申请人： Michael B. Binnard , Douglas C. Watson , Daniel Gene Smith , David M. Williamson
发明人： Michael B. Binnard , Douglas C. Watson , Daniel Gene Smith , David M. Williamson
IPC分类号： G03B27/54
CPC分类号： G03B27/54 , G03F7/70358
摘要： An exposure apparatus (10) for transferring a mask pattern (358) from a mask (12) to a substrate (14) includes a mask retainer (44), a substrate stage assembly (24), and an illumination system (18). The mask retainer (44) retains the mask (12). The substrate stage assembly (24) retains and positions the substrate (14). The illumination system (18) generates an illumination beam (31) that moves along a beam scan axis (35) relative to the mask (12) to scan at least a portion of the mask pattern (358). The beam scan axis (35) is substantially parallel to the mask pattern (358). The illumination system (18) can include an illumination source (32) that generates the illumination beam (31) and an illumination optical assembly (34) that guides the illumination beam (31). The illumination optical assembly (34) moves the illumination beam (31) relative to the mask (12) so that the illumination beam (31) scans substantially the entire mask pattern (358). The illumination optical assembly (34) can further include an illumination reflector (36) that is incident on the illumination beam (31), and the illumination reflector (36) can be selectively moved to move the illumination beam (31) along the beam scan axis (35).
摘要翻译：用于将掩模图案（358）从掩模（12）传送到基板（14）的曝光装置（10）包括掩模保持器（44），基板台组件（24）和照明系统（18）。掩模保持器（44）保持掩模（12）。衬底台组件（24）保持并定位衬底（14）。照明系统（18）产生相对于掩模（12）沿着光束扫描轴（35）移动以扫描掩模图案（358）的至少一部分的照明光束（31）。光束扫描轴（35）基本上平行于掩模图案（358）。照明系统（18）可以包括产生照明光束（31）的照明源（32）和引导照明光束（31）的照明光学组件（34）。照明光学组件（34）相对于掩模（12）移动照明光束（31），使得照明光束（31）基本上扫描整个掩模图案（358）。照明光学组件（34）还可以包括入射到照明光束（31）上的照明反射器（36），并且照明反射器（36）可以被选择性地移动以沿着光束扫描来移动照明光束（31）轴（35）。

27. 发明申请

US20080002173A1 Iron Core Motor Driven Automatic Reticle Blind 有权
标题翻译：铁芯电机驱动自动掩模开窗
公开(公告)号：US20080002173A1
公开(公告)日：2008-01-03
申请号：US11427439
申请日：2006-06-29
申请人： Michael B. Binnard , Douglas C. Watson , Christopher S. Margeson
发明人： Michael B. Binnard , Douglas C. Watson , Christopher S. Margeson
IPC分类号： G03B27/54
CPC分类号： G03B27/52 , G03F7/70066
摘要： Methods and apparatus for shielding a reticle within an illumination system are disclosed. According to one aspect of the present invention, a blind arrangement for shielding an object such as a reticle includes a coil assembly which has at least one coil, an air supply that supplies air, and a first blind portion. The first blind portion includes at least one magnet and is not in physical contact with the coil. The first blind portion is supported at a distance from the coil by the air, and the coil assembly cooperates with the magnet to cause the first blind portion to move. The first blind portion shields the object when the first blind portion is in a first position.
摘要翻译：公开了用于屏蔽照明系统内的掩模版的方法和装置。根据本发明的一个方面，用于屏蔽诸如掩模版的物体的盲装置包括具有至少一个线圈的线圈组件，供应空气的空气供应器和第一盲区部件。第一盲部包括至少一个磁体并且不与线圈物理接触。第一盲部通过空气与线圈支撑一定距离，并且线圈组件与磁体协作以使第一盲部移动。当第一盲区部分处于第一位置时，第一盲区部分屏蔽物体。

28. 发明申请

US20120069316A1 METHODS FOR LIMITING COUNTER-MASS TRIM-MOTOR FORCE AND STAGE ASSEMBLIES INCORPORATING SAME 有权
标题翻译：用于限制相同尺寸的电机和电机组合的方法
公开(公告)号：US20120069316A1
公开(公告)日：2012-03-22
申请号：US13228341
申请日：2011-09-08
申请人： Pai-Hsueh Yang , Michael B. Binnard , Scott Coakley
发明人： Pai-Hsueh Yang , Michael B. Binnard , Scott Coakley
IPC分类号： G03B27/58 , G05B11/42
CPC分类号： G05B19/404 , G03F7/70725 , G03F7/70766
摘要： An exemplary stage assembly has movable stage mass and counter-mass. A stage motor is coupled to the stage mass and counter-mass such that stage-mass motion imparted by the stage motor causes a reactive motion of the counter-mass counter to the motion of the stage mass. At least one trim-motor is coupled to the counter-mass. A control system commands the trim-motor to regulate movement of the counter-mass in reaction to stage-mass motion. A PI feedback controller receives the following-error of the counter-mass and generates corresponding center-of-gravity (CG) force commands and trim-motor force commands to the trim-motor(s) to produce corrective counter-mass motion. A trim-motor force limiter receives trim-motor force commands and produces corresponding limited trim-motor force commands that are fed back as actual CG force commands to the feedback controller to modify integral terms of the feedback controller according to the limited trim-motor force commands.
摘要翻译：示例性的舞台组件具有可移动的舞台质量和反质量。舞台电机被耦合到舞台质量和反质量，使得由舞台电动机施加的舞台质量运动导致反质量计数器对舞台质量的运动的反作用运动。至少一个调整电机与反质量联接。控制系统命令微调电机调节反质量运动反应阶段质量运动。 PI反馈控制器接收反质量的跟随误差，并产生相应的重心（CG）力指令和微调电机力指令给微调电机，以产生校正反质量运动。修剪马达力限制器接收修剪马达力指令并产生相应的有限的修剪马达力命令，作为实际的CG力命令反馈到反馈控制器，以根据限制的修正马达力修改反馈控制器的积分项命令。

29. 发明申请

US20120062866A1 MICROCHANNEL-COOLED COILS OF ELECTROMAGNETIC ACTUATORS EXHIBITING REDUCED EDDY-CURRENT DRAG 审中-公开
标题翻译：电磁致动器的微通道冷却线圈展示减少的EDDY-CURRENT DRAG
公开(公告)号：US20120062866A1
公开(公告)日：2012-03-15
申请号：US13225235
申请日：2011-09-02
申请人： Michael B. Binnard , Scott Coakley , Alex Ka Tim Poon , Masahiro Totsu , Derek Coon , Leonard Wai Fung Kho , Gaurav Keswani , Alexander Cooper , Michel Pharand , Matt Bjork
发明人： Michael B. Binnard , Scott Coakley , Alex Ka Tim Poon , Masahiro Totsu , Derek Coon , Leonard Wai Fung Kho , Gaurav Keswani , Alexander Cooper , Michel Pharand , Matt Bjork
IPC分类号： G03B27/58 , H02K41/02
CPC分类号： H02K9/22 , G03F7/70758 , G03F7/70875 , H02K9/19 , H02K41/031 , H02K2201/18
摘要： Electromagnetic actuators are disclosed having at least one actively cooled coil assembly. Exemplary actuators are linear and planar motors of which the cooled coil assembly has a coil having first and second main surfaces. A respective thermally conductive cooling plate is in thermal contact with at least one main surface of the coil. Defined in or on each cooling plate is a coolant passageway that conducts a liquid coolant. A primary pattern of the coolant passageway is coextensive with at least part of the main surface of the coil. The primary pattern can have a secondary pattern through which coolant flows in a manner reducing eddy-current losses. An exemplary secondary pattern is serpentine. An exemplary primary pattern is radial or has a radial aspect, such as an X-shaped pattern. The devices exhibit reduced eddy-current drag.
摘要翻译：公开了具有至少一个主动冷却的线圈组件的电磁致动器。示例性致动器是线性和平面电动机，其中冷却的线圈组件具有具有第一和第二主表面的线圈。相应的导热冷却板与线圈的至少一个主表面热接触。在每个冷却板中或每个冷却板上定义的是冷却剂通道，其导通液体冷却剂。冷却剂通道的主要图案与线圈的主表面的至少一部分共同延伸。初级图案可以具有二次图案，冷却剂通过该图案以减少涡流损耗的方式流动。示例性的次要图案是蛇纹石。示例性的主要图案是径向的或具有径向方面，例如X形图案。该装置表现出减小的涡流阻力。

30. 发明申请

US20100167556A1 THREE DEGREE OF MOVEMENT MOVER AND METHOD FOR CONTROLLING A THREE DEGREE OF MOVEMENT MOVER 审中-公开
标题翻译：运动运动的三个程度和控制三个运动程度的方法
公开(公告)号：US20100167556A1
公开(公告)日：2010-07-01
申请号：US12596569
申请日：2008-04-16
申请人： Masahiro Totsu , Michael B. Binnard , Scott Coakley
发明人： Masahiro Totsu , Michael B. Binnard , Scott Coakley
IPC分类号： H01L21/26 , G03B27/58 , H02K41/02 , H02P7/285 , H05K13/00
CPC分类号： H02K41/03 , G03F7/70758 , H02K2201/18 , H02P25/06 , Y10T29/49002
摘要： A mover (344) moving a stage (238) along a first axis and about a second axis includes a magnetic component (454), and a conductor component (456). The magnetic component (454) includes one or more magnets (454D) that are surrounded by a magnetic field. The conductor component (456) is positioned near the magnetic component (454) in the magnetic field. Further, the conductor component (456) interacts with the magnetic component (454) when current is directed to the conductor component (456) to generate a controlled force along the first axis, and a controlled moment about the second axis. Additionally, the conductor component (456) interacts with the magnetic component (454) to generate a controlled force along a third axis that is perpendicular to the first axis and the second axis when current is directed to the conductor component (456).
摘要翻译：沿着第一轴线和第二轴线移动台架（238）的移动器（344）包括磁性部件（454）和导体部件（456）。磁性部件（454）包括由磁场包围的一个或多个磁体（454D）。导体部件（456）位于磁场附近的磁性部件（454）附近。此外，当电流指向导体部件（456）时，导体部件（456）与磁性部件（454）相互作用，以产生沿着第一轴线的受控力，以及围绕第二轴线的受控力矩。另外，当电流被引导到导体部件（456）时，导体部件（456）与磁性部件（454）相互作用，以沿垂直于第一轴线和第二轴线的第三轴线产生受控的力。

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