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    • 22. 发明申请
    • ISOTROPICALLY-ETCHED CAVITIES FOR EVANESCENT-MODE ELECTROMAGNETIC-WAVE CAVITY RESONATORS
    • EVEESCENT-MODE电磁波腔谐振器的等离子体蚀刻
    • US20130278609A1
    • 2013-10-24
    • US13451385
    • 2012-04-19
    • Philip Jason StephanouSang-June ParkRavindra V. Shenoy
    • Philip Jason StephanouSang-June ParkRavindra V. Shenoy
    • G06T1/00B44C1/22H01P11/00H01P7/06
    • H01P1/208H01P1/202H01P1/2084H01P7/04H01P7/06H01P11/007H01P11/008
    • This disclosure provides implementations of electromechanical systems (EMS) resonator structures, devices, apparatus, systems, and related processes. In one aspect, a device includes an evanescent-mode electromagnetic-wave cavity resonator. In some implementations, the resonator includes an isotropically-etched cavity operable to support one or more evanescent electromagnetic wave modes. In some implementations, the resonator also includes a cavity ceiling arranged to form a volume in conjunction with the isotropically-etched cavity. In some implementations, the resonator also includes a capacitive tuning structure having a portion that is located at least partially within the volume so as to support the evanescent electromagnetic wave modes. In some implementations, a distal surface of the tuning structure is separated from the closest surface to it by a gap distance, a resonant electromagnetic wave mode of the cavity resonator being dependent at least partially on the gap distance.
    • 本公开提供了机电系统(EMS)谐振器结构,设备,装置,系统和相关过程的实现。 在一个方面,一种器件包括ev逝模式电磁波谐振腔谐振器。 在一些实施方案中,谐振器包括可操作以支持一个或多个ev逝电磁波模式的各向同性蚀刻的腔。 在一些实施方案中,谐振器还包括空腔顶板,其被设置成与各向同性蚀刻的空腔结合形成体积。 在一些实施方案中,谐振器还包括电容调谐结构,其具有至少部分地位于体积内的部分,以便支持渐逝电磁波模式。 在一些实施方案中,调谐结构的远端表面与距离其最近的表面分开间隙距离,空腔谐振器的谐振电磁波模式至少部分地取决于间隙距离。