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    • 22. 发明授权
    • Sample preparing device and sample posture shifting method
    • 样品制备装置和样品姿态转换方法
    • US08198603B2
    • 2012-06-12
    • US12290397
    • 2008-10-29
    • Haruo TakahashiIkuko NakataniJunichi Tashiro
    • Haruo TakahashiIkuko NakataniJunichi Tashiro
    • H01J37/20G21K5/10G01N1/28
    • H01J37/20H01J37/023H01J37/3056H01J2237/202H01J2237/204H01J2237/2062H01J2237/208H01J2237/31745H01J2237/31749
    • A sample preparing device has a sample stage that supports a sample and undergoes rotation about a first rotation axis to bring a preselected direction of the sample piece into coincidence with an intersection line between a first plane formed by a surface of the sample piece and a second plane. A manipulator holds sample piece of the sample and undergoes rotation about a second rotation axis independently of the sample stage to rotate the sample piece to a preselected position in the state in which the preselected direction of the sample piece coincides with the intersection line. The manipulator is disposed relative to the sample stage so that an angle between the second rotation axis and the surface of the sample is in the range of 0° to 45°. The second plane corresponds to a plane obtained by rotating around the second rotation axis a line segment which is vertical to the surface of the sample and of which one end corresponds to an intersection between the surface of the sample and the second rotation axis.
    • 样品制备装置具有样品台,其支撑样品并围绕第一旋转轴线旋转以使样品片的预选方向与由样品片的表面形成的第一平面和第二面之间的交线相符, 飞机 操纵器保持样品的样品并且独立于样品台绕第二旋转轴旋转,以在样品的预选方向与交叉线重合的状态下将样品片旋转到预选位置。 操纵器相对于样品台设置,使得第二旋转轴与样品表面之间的角度在0°至45°的范围内。 第二平面对应于通过围绕第二旋转轴旋转垂直于样品表面的线段并且其一端对应于样品表面和第二旋转轴线之间的交叉而获得的平面。
    • 25. 发明授权
    • Composite charged-particle beam system
    • 复合带电粒子束系统
    • US07718981B2
    • 2010-05-18
    • US12134919
    • 2008-06-06
    • Haruo TakahashiYo YamamotoToshiaki Fujii
    • Haruo TakahashiYo YamamotoToshiaki Fujii
    • G01N23/00
    • H01J37/20H01J37/3056H01J2237/20242H01J2237/31745H01J2237/31749
    • There is provided a method of arranging, as a composite charged-particle beam system, a gas ion beam apparatus, an FIB and an SEM in order to efficiently prepare a TEM sample. The composite charged-particle beam system includes an FIB lens-barrel 1, an SEM lens-barrel 2, a gas ion beam lens-barrel 3, and a rotary sample stage 9 having an eucentric tilt mechanism and a rotating shaft 10 orthogonal to an eucentric tilt axis 8. In the composite charged-particle beam system, an arrangement is made such that a focused ion beam 4, an electron beam 5 and a gas ion beam 6 intersect at a single point, an axis of the FIB lens-barrel 1 and an axis of the SEM lens barrel 2 are orthogonal to the eucentric tilt axis 8, respectively, and the axis of the FIB lens-barrel 1, an axis of the gas ion beam lens-barrel 3 and the eucentric tilt axis 8 are in one plane.
    • 提供了一种作为复合带电粒子束系统布置气体离子束装置,FIB和SEM以便有效地制备TEM样品的方法。 复合带电粒子束系统包括FIB透镜镜筒1,SEM透镜镜筒2,气体离子束透镜镜筒3以及具有偏心倾斜机构的旋转样品台9和与其垂直的旋转轴10 在复合带电粒子束系统中,使得聚焦离子束4,电子束5和气体离子束6在单点相交,FIB透镜镜筒的轴线 1并且SEM透镜镜筒2的轴线分别与偏心倾斜轴8正交,并且FIB透镜镜筒1的轴线,气体离子束透镜镜筒3的轴线和偏心倾斜轴线8是 在一架飞机上
    • 27. 发明申请
    • COMPOSITE CHARGED-PARTICLE BEAM SYSTEM
    • 复合充电粒子束系统
    • US20080315088A1
    • 2008-12-25
    • US12134919
    • 2008-06-06
    • Haruo TakahashiYo YAMAMOTOToshiaki FUJII
    • Haruo TakahashiYo YAMAMOTOToshiaki FUJII
    • G01N23/00
    • H01J37/20H01J37/3056H01J2237/20242H01J2237/31745H01J2237/31749
    • There is provided a method of arranging, as a composite charged-particle beam system, a gas ion beam apparatus, an FIB and an SEM in order to efficiently prepare a TEM sample. The composite charged-particle beam system includes an FIB lens-barrel 1, an SEM lens-barrel 2, a gas ion beam lens-barrel 3, and a rotary sample stage 9 having an eucentric tilt mechanism and a rotating shaft 10 orthogonal to an eucentric tilt axis 8. In the composite charged-particle beam system, an arrangement is made such that a focused ion beam 4, an electron beam 5 and a gas ion beam 6 intersect at a single point, an axis of the FIB lens-barrel 1 and an axis of the SEM lens barrel 2 are orthogonal to the eucentric tilt axis 8, respectively, and the axis of the FIB lens-barrel 1, an axis of the gas ion beam lens-barrel 3 and the eucentric tilt axis 8 are in one plane.
    • 提供了一种作为复合带电粒子束系统布置气体离子束装置,FIB和SEM以便有效地制备TEM样品的方法。 复合带电粒子束系统包括FIB透镜镜筒1,SEM透镜镜筒2,气体离子束透镜镜筒3以及具有偏心倾斜机构的旋转样品台9和与其垂直的旋转轴10 在复合带电粒子束系统中,使得聚焦离子束4,电子束5和气体离子束6在单点相交,FIB透镜镜筒的轴线 1并且SEM透镜镜筒2的轴线分别与偏心倾斜轴8正交,并且FIB透镜镜筒1的轴线,气体离子束透镜镜筒3的轴线和偏心倾斜轴线8是 在一架飞机上
    • 30. 发明申请
    • Charged particle beam apparatus
    • 带电粒子束装置
    • US20070045560A1
    • 2007-03-01
    • US11509520
    • 2006-08-24
    • Haruo TakahashiToshiaki FujiiYutaka IkkuKouji IwasakiYo Yamamoto
    • Haruo TakahashiToshiaki FujiiYutaka IkkuKouji IwasakiYo Yamamoto
    • H01J37/20G01N1/28
    • H01J37/304G01N1/32H01J2237/31745H01J2237/31749
    • To include a focused ion beam apparatus fabricating a sliced specimen by processing a specimen as well as observing the sliced specimen, a scanning electron microscope observing the slice specimen, a gas-ion beam irradiation apparatus performing finishing processing by irradiating a gas-ion beam onto a surface of the sliced specimen, a specimen stage on which the sliced specimen is fixed and having at least one or more rotation axis, a specimen posture recognition means recognizing positional relation of the sliced specimen with respect to the specimen stage and a specimen stage control means controlling the specimen stage based on a specimen posture recognized by the posture recognition means and an installation angle of the gas-ion beam irradiation apparatus in order to allow an incident angle of the gas-ion beam with respect to the obverse or the reverse of the sliced specimen to be a desired value.
    • 为了包括聚焦离子束装置,通过加工试样和观察切片试样来制造切片样品,观察切片试样的扫描电子显微镜,气相离子束照射装置,通过将气体离子束照射到 切片试样的表面,切片试样固定并具有至少一个以上的旋转轴的试样台,识别切片试样相对于试样台的位置关系的试样姿势识别装置和试样台控制 意味着基于由姿势识别装置识别的样本姿势和气体离子束照射装置的安装角度来控制样本台,以便允许气体离子束相对于正面或反向的入射角 切片样品为期望值。