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21. 发明申请

US20070018101A1 Electron beam apparatus and method of manufacturing semiconductor device using the apparatus 失效
标题翻译：电子束装置及使用该装置制造半导体器件的方法
公开(公告)号：US20070018101A1
公开(公告)日：2007-01-25
申请号：US11528673
申请日：2006-09-28
申请人： Mamoru Nakasuji , Nobuhara Noji , Tohru Satake , Masahiro Hatakeyama , Kenji Watanabe , Takao Kato , Hirosi Sobukawa , Tsutomu Karimata , Shoji Yoshikawa , Toshifumi Kimba , Shin Oowada , Mutsumi Saito , Muneki Hamashima
发明人： Mamoru Nakasuji , Nobuhara Noji , Tohru Satake , Masahiro Hatakeyama , Kenji Watanabe , Takao Kato , Hirosi Sobukawa , Tsutomu Karimata , Shoji Yoshikawa , Toshifumi Kimba , Shin Oowada , Mutsumi Saito , Muneki Hamashima
IPC分类号： G21K7/00
CPC分类号： B82Y10/00 , B82Y40/00 , G01N23/225 , H01J37/06 , H01J37/063 , H01J37/073 , H01J37/185 , H01J37/20 , H01J37/222 , H01J37/244 , H01J37/28 , H01J37/3174 , H01J2237/0435 , H01J2237/0635 , H01J2237/082 , H01J2237/202 , H01J2237/20228 , H01J2237/204 , H01J2237/22 , H01J2237/2446 , H01J2237/24485 , H01J2237/24564 , H01J2237/2806 , H01J2237/2816 , H01J2237/2817
摘要： The present invention provides an electron beam apparatus for irradiating a sample with primary electron beams to detect secondary electron beams generated from a surface of the sample by the irradiation for evaluating the sample surface. In the electron beam apparatus, an electron gun has a cathode for emitting primary electron beams. The cathode includes a plurality of emitters for emitting primary electron beams, arranged apart from one another on a circle centered at an optical axis of a primary electro-optical system. The plurality of emitters are arranged such that when the plurality of emitters are projected onto a straight line parallel with a direction in which the primary electron beams are scanned, resulting points on the straight line are spaced at equal intervals.
摘要翻译：本发明提供了一种用于用一次电子束照射样品的电子束装置，以通过用于评估样品表面的照射来检测从样品表面产生的二次电子束。在电子束装置中，电子枪具有用于发射一次电子束的阴极。阴极包括用于发射一次电子束的多个发射器，其以在主电光系统的光轴为中心的圆周彼此分开布置。多个发射器被布置成使得当多个发射器投射到与一次电子束扫描的方向平行的直线上时，直线上的所得点以相等的间隔隔开。

22. 发明授权

US07598471B2 Method of electric discharge machining a cathode for an electron gun 有权
标题翻译：放电加工电子枪阴极的方法
公开(公告)号：US07598471B2
公开(公告)日：2009-10-06
申请号：US11714885
申请日：2007-03-07
申请人： Muneki Hamashima , Takao Kato , Mamoru Nakasuji , Nobuharu Noji , Tohru Satake
发明人： Muneki Hamashima , Takao Kato , Mamoru Nakasuji , Nobuharu Noji , Tohru Satake
IPC分类号： B23H9/00 , B23H1/04
CPC分类号： F01N3/2828 , F01N2260/18 , F01N2330/06 , H01J37/06 , H01J37/28
摘要： A method of machining a cathode used in an electron gun. The method includes steps of placing an object to be machined, which is a material of the cathode, and a machining electrode in an electrically insulating oil; applying a discharge current to the machining electrode; and machining the object to be machined to have a shape corresponding to the shape of the machining electrode by means of electric discharge machining of the machining electrode. The machining electrode includes a disk, recesses formed on a front surface of the disk, a protrusion provided on a back surface of the disk, and a hole for mounting a lead wire for applying discharge current to the machining electrode. Bumps corresponding to the shape of the recesses of the machining electrode are formed on the object to be machined by means of the electric discharge machining.
摘要翻译：一种加工电子枪阴极的方法。该方法包括以下步骤：将作为阴极材料的待加工对象和电绝缘油中的加工电极放置; 向加工电极施加放电电流; 并且通过加工电极的放电加工将被加工物加工成具有与加工电极的形状对应的形状。加工电极包括盘，形成在盘的前表面上的凹部，设置在盘的后表面上的突起，以及用于安装用于向加工电极施加放电电流的引线的孔。通过放电加工在被加工物体上形成与加工电极的凹部的形状相对应的凸起。

23. 发明申请

US20070164226A1 Electron beam apparatus and device manufacturing method using the same 有权
标题翻译：电子束装置及其制造方法
公开(公告)号：US20070164226A1
公开(公告)日：2007-07-19
申请号：US11714885
申请日：2007-03-07
申请人： Muneki Hamashima , Takao Kato , Mamoru Nakasuji , Nobuharu Noji , Tohru Satake
发明人： Muneki Hamashima , Takao Kato , Mamoru Nakasuji , Nobuharu Noji , Tohru Satake
IPC分类号： H01J47/00
CPC分类号： F01N3/2828 , F01N2260/18 , F01N2330/06 , H01J37/06 , H01J37/28
摘要： An electron beam apparatus including an electron gun for directing a plurality of primary electron beams onto a sample, an objective lens for forming an electric filed to accelerate a plurality of secondary electron beams emitted from the sample, and a separator for separating the plurality of secondary electron beams from a primary optical system and for directing the plurality of secondary electron beams into a secondary optical system for guiding to a detector outputting a detection signal of the secondary electron beams. A deflector deflects the secondary electron beams in the secondary optical system. The deflector is controlled to deflect the plurality of secondary electron beams synchronously with scanning of the plurality of primary electron beams, thereby preventing the plurality of secondary electron beams from moving on the detector in response to the scanning of the plurality of primary electron beams.
摘要翻译：一种电子束装置，包括用于将多个一次电子束引导到样品上的电子枪，用于形成电场以加速从样品发射的多个二次电子束的物镜，以及用于分离多个次级来自主光学系统的电子束和用于将多个二次电子束引导到二次光学系统中，用于引导到检测器输出二次电子束的检测信号。偏转器偏转二次光学系统中的二次电子束。控制偏转器以与多个一次电子束的扫描同步地偏转多个二次电子束，从而防止多个二次电子束响应于多个一次电子束的扫描在检测器上移动。

24. 发明授权

US07205559B2 Electron beam apparatus and device manufacturing method using same 失效
标题翻译：电子束装置及其制造方法
公开(公告)号：US07205559B2
公开(公告)日：2007-04-17
申请号：US10697647
申请日：2003-10-31
申请人： Muneki Hamashima , Takao Kato , Mamoru Nakasuji , Nobuharu Noji , Tohru Satake
发明人： Muneki Hamashima , Takao Kato , Mamoru Nakasuji , Nobuharu Noji , Tohru Satake
IPC分类号： A61N5/00 , G01K1/08 , H01J29/70
CPC分类号： F01N3/2828 , F01N2260/18 , F01N2330/06 , H01J37/06 , H01J37/28
摘要： An electron beam apparatus including an electron gun for directing a plurality of primary electron beams onto a sample, an objective lens for forming an electric field to accelerate a plurality of secondary electron beams emitted from the sample, and a separator for separating the plurality of secondary electron beams from a primary optical system and for directing the plurality of secondary electron beams into a secondary optical system for guiding to a detector outputting a detection signal of the secondary electron beams. A deflector deflects the secondary electron beams in the secondary optical system. The deflector is controlled to deflect the plurality of secondary electron beams synchronously with scanning of the plurality of primary electron beams, thereby preventing the plurality of secondary electron beams from moving on the detector in response to the scanning of the plurality of primary electron beams.
摘要翻译：一种电子束装置，包括用于将多个一次电子束引导到样品上的电子枪，用于形成电场以加速从样品发射的多个二次电子束的物镜，以及用于分离多个次级来自主光学系统的电子束和用于将多个二次电子束引导到二次光学系统中，用于引导到检测器输出二次电子束的检测信号。偏转器偏转二次光学系统中的二次电子束。控制偏转器以与多个一次电子束的扫描同步地偏转多个二次电子束，从而防止多个二次电子束响应于多个一次电子束的扫描在检测器上移动。

25. 发明授权

US06365897B1 Electron beam type inspection device and method of making same 有权
标题翻译：电子束型检查装置及其制造方法
公开(公告)号：US06365897B1
公开(公告)日：2002-04-02
申请号：US09216598
申请日：1998-12-18
申请人： Muneki Hamashima , Akihiro Goto , Hiroshi Nishimura
发明人： Muneki Hamashima , Akihiro Goto , Hiroshi Nishimura
IPC分类号： H01J3726
CPC分类号： H01J37/28 , H01J37/265 , H01J2237/2813 , H01J2237/2817
摘要： Electron beam type inspection device for generating images of specimens (e.g., silicon wafers, etc.) includes an electron gun which emits an electron beam, an electron beam optical system which causes the electron beam to form an irradiation region on a surface of a specimen, a detector which detects at least one of second order electrons and reflected electrons reflected by the irradiation region, a projection optical system projecting the second order electrons and the reflected electrons onto a detection surface within the detector. The second order electrons and the reflected electrons correspond to an observation region within the irradiation region. The inspection device also includes a magnification controller which controls the size of the observation region and the magnification of the projection optical system, and an irradiation controller which controls the current density of the irradiation region based on the size of the observation region. Also provided is a method of making a corresponding inspection device which includes steps of providing and assembling the aforementioned component parts.
摘要翻译：用于产生试样（例如，硅片等）的图像的电子束型检查装置包括发射电子束的电子枪，使电子束在试样表面形成照射区域的电子束光学系统检测器，其检测由所述照射区反射的二次电子和反射电子中的至少一个;投影光学系统，将所述二次电子和所述反射的电子投射到所述检测器内的检测面上。二次电子和反射电子对应于照射区域内的观察区域。检查装置还包括控制观察区域的尺寸和投影光学系统的放大率的放大率控制器，以及基于观察区域的尺寸来控制照射区域的电流密度的照射控制器。还提供了制造相应的检查装置的方法，其包括提供和组装上述部件的步骤。

26. 发明授权

US06670602B1 Scanning device and scanning method 有权
标题翻译：扫描装置和扫描方法
公开(公告)号：US06670602B1
公开(公告)日：2003-12-30
申请号：US09324896
申请日：1999-06-03
申请人： Yoshiaki Kohama , Akihiro Goto , Muneki Hamashima , Yukiharu Okubo
发明人： Yoshiaki Kohama , Akihiro Goto , Muneki Hamashima , Yukiharu Okubo
IPC分类号： H01J314
CPC分类号： H01J37/28 , H01J2237/2817
摘要： New and improved scanning device and corresponding method that include and involve a movable stage on which a specimen is positioned, irradiation means which irradiates an electron beam onto an irradiation region of the specimen, secondary beam detection means used in generating a picture of the irradiation region by detecting a secondary beam which consists of at least one of secondary electrons or reflected electrons from the irradiation region of the electron beam, an imaging electron optical system which causes imaging of the secondary beam on a detection surface of the secondary beam detection means, and which is arranged between the specimen and the secondary beam detection means. The secondary beam detection means is equipped with a fluorescent unit which is arranged on the detection surface, and which converts the secondary beam into light, and one-dimensional line sensors which have a structure arrayed in two dimensions forming electric charge by photoelectric conversion, an array imaging element which continuously adds up the electric charge of the accumulated image in a predetermined line of the line sensors, and the electric charge of the line of the image which moves accompanying the movement of the stage, and a two-dimensional imaging element which emits electric charge by means of photoelectric conversion. The scanning device and corresponding method further include and involve changeover means for selectively irradiating the light converted by means of the fluorescent unit to an imaging element which is either one of the array imaging elements and the two-dimensional imaging element.
摘要翻译：新的改进的扫描装置及其相应的方法，其包括并涉及其上放置试样的可移动台，将电子束照射到试样的照射区域上的照射装置，用于产生照射区域的图像的二次束检测装置通过检测由来自电子束的照射区域的二次电子或反射电子中的至少一种构成的次级光束，使次光束在二次光束检测装置的检测表面上成像的成像电子光学系统，以及其布置在样本和次级束检测装置之间。二次光束检测装置配备有布置在检测表面上并将次光束转换为光的荧光单元和具有通过光电转换形成电荷的二维排列的结构的一维线传感器，阵列成像元件，其连续地将累积图像的电荷累积在行传感器的预定线中，以及伴随舞台移动移动的图像线的电荷，以及二维成像元件通过光电转换发射电荷。扫描装置和相应的方法还包括并包括切换装置，用于选择性地将通过荧光单元转换的光照射到作为阵列成像元件和二维成像元件之一的成像元件。

27. 再颁专利

USRE40221E1 Object observation apparatus and object observation 有权
公开(公告)号：USRE40221E1
公开(公告)日：2008-04-08
申请号：US10986576
申请日：2004-11-12
申请人： Muneki Hamashima , Yoichi Watanabe , Yoshiaki Kohama
发明人： Muneki Hamashima , Yoichi Watanabe , Yoshiaki Kohama
IPC分类号： H01J37/28
CPC分类号： H01J37/265 , G01N23/225 , H01J37/244 , H01J37/28 , H01J37/292 , H01J2237/2446 , H01J2237/2817
摘要： This invention relates to an object observation apparatus and observation method. The object observation apparatus is characterized by including a drivable stage on which a sample is placed, an irradiation optical system which is arranged to face the sample on the stage, and emits an electron beam as a secondary beam, an electron detection device which is arranged to face the sample, causes to project, as a primary beam, at least one of a secondary electron, reflected electron, and back-scattering electron generated by the sample upon irradiation of the electron beam, and generates image information of the sample, a stage driving device which is adjacent to the stage to drive the stage, and a deflector arranged between the sample and the electron detection device to deflect the secondary beam, the electron detection device having a converter arranged on a detection surface to convert the secondary beam into light, an array image sensing unit which is adjacent to the converter, has pixels of a plurality of lines each including a plurality of pixels on the detection surface, sequentially transfers charges of pixels of each line generated upon reception of light of an optical image obtained via the converter to corresponding pixels of an adjacent line at a predetermined timing, adds, every transfer, charges generated upon reception of light after the transfer at the pixels which received the charges, and sequentially outputs charges added up to a line corresponding to an end, and a control unit connected to the array image sensing unit to output a transfer signal for sequentially transferring charges of pixels of each line to an adjacent line, and the control unit having a stage scanning mode in which the array image sensing unit is controlled in accordance with a variation in projection position of the secondary beam projected on the electron detection device that is generated by movement of the stage device, and a deflector operation mode in which the array image sensing unit is controlled in accordance with a variation in projection position of the secondary beam projected on the detection device by the deflector.

28. 发明授权

US06953944B2 Scanning device and method including electric charge movement 有权
标题翻译：包括电荷运动的扫描装置和方法
公开(公告)号：US06953944B2
公开(公告)日：2005-10-11
申请号：US10705497
申请日：2003-11-12
申请人： Yoshiaki Kohama , Akihiro Goto , Muneki Hamashima , Yukiharu Okubo
发明人： Yoshiaki Kohama , Akihiro Goto , Muneki Hamashima , Yukiharu Okubo
IPC分类号： G01Q30/20 , H01J37/28 , G01N21/86
CPC分类号： H01J37/28 , H01J2237/2817
摘要： A scanning device and method includes a movable stage on which a specimen is positioned, an irradiating device for electron beam irradiation of the specimen, a detection device for generating a picture of the irradiation region by detecting a secondary beam including secondary or reflected electrons from the irradiation region, and imaging electron optical system for imaging the secondary beam on a detection surface. A secondary beam detector including a fluorescent unit arranged on the detection surface to convert the secondary beam into light, one-dimensional line sensors for forming electric charge by photoelectric conversion, an array imaging element for accumulating the electric charge in a predetermined line of the line sensors, and a two-dimensional imaging element which emits electric charge by means of photoelectric conversion. A corresponding method is also disclosed.
摘要翻译：一种扫描装置及方法，其特征在于，包括：移动台，其上设有试样;照射装置，用于对试样进行电子束照射;检测装置，用于通过检测包含二次或反射电子照射区域和用于在检测表面上成像次级束的成像电子光学系统。一种辅助光束检测器，包括布置在检测表面上以将次级光束转换为光的荧光单元，用于通过光电转换形成电荷的一维线传感器，用于在线的预定线中累积电荷的阵列成像元件传感器和通过光电转换发射电荷的二维成像元件。还公开了相应的方法。

29. 发明授权

US09532033B2 Image sensor and imaging device 有权
标题翻译：图像传感器和成像装置
公开(公告)号：US09532033B2
公开(公告)日：2016-12-27
申请号：US13305272
申请日：2011-11-28
申请人： Kiyoshige Shibazaki , Muneki Hamashima , Susumu Mori , Satoshi Suzuki
发明人： Kiyoshige Shibazaki , Muneki Hamashima , Susumu Mori , Satoshi Suzuki
IPC分类号： H04N13/02 , H01L27/146
CPC分类号： H04N13/286 , H01L27/14621 , H01L27/14623 , H01L27/14629 , H04N13/225 , H04N13/257
摘要： An image capturing element comprising photoelectric converting elements that are arranged two-dimensionally and photoelectrically convert incident light into an electric signal; aperture masks that correspond one-to-one with the photoelectric converting elements; and color filters that correspond one-to-one with the photoelectric converting elements. Among n adjacent photoelectric converting elements, where n is an integer no less than three, apertures of the aperture masks corresponding to at least three of the photoelectric converting elements are included within each pattern of a color filter pattern formed from at least two types of the color filters that respectively pass different wavelength bands, and are positioned to respectively pass light from different partial regions within a cross-sectional region of the incident light, and photoelectric converting element groups that are each formed of the n photoelectric converting elements are arranged in series.
摘要翻译：一种图像拍摄元件，包括被二维布置并将入射光光电转换成电信号的光电转换元件; 与光电转换元件一一对应的孔径掩模; 以及与光电转换元件一一对应的滤色器。在n个相邻的光电转换元件中，n是不小于3的整数，对应于至少三个光电转换元件的孔径掩模的孔径包括在由至少两种类型的光电转换元件形成的滤色器图案的每个图案内分别通过不同波长带的滤色器，并且被定位成分别在入射光的横截面区域内传递来自不同部分区域的光，并且各自由n个光电转换元件形成的光电转换元件组被串联布置。

30. 发明授权

US09341935B2 Image capturing device 有权
标题翻译：图像捕捉设备
公开(公告)号：US09341935B2
公开(公告)日：2016-05-17
申请号：US13520873
申请日：2011-03-02
申请人： Muneki Hamashima
发明人： Muneki Hamashima
IPC分类号： H04N15/00 , G03B35/08 , H04N13/02 , H04N13/00 , H04N13/04 , G03B35/10 , G02B27/22
CPC分类号： G03B35/08 , G02B27/2214 , G03B35/10 , H04N13/189 , H04N13/211 , H04N13/229 , H04N13/232 , H04N13/239 , H04N13/398
摘要： An image capture device includes: a plurality of microlenses; an image capture element in which a plurality of element groups including a plurality of photoelectric conversion elements that receive light fluxes and that output image signals are arranged; a generation unit that extracts a plurality of region image signals respectively corresponding to a plurality of different partial regions upon the pupil surface of the photographic optical system, and that generates a plurality of sets of image data corresponding to the partial regions as a plurality of sets of viewpoint image data whose viewpoint positions are different with each other; and a reception unit that receives a viewpoint number selection operation to select a number of viewpoints; wherein the generation unit generates the sets of viewpoint image data by extracting the region image signals whose number is equal to a number of selected viewpoints.
摘要翻译：图像捕获装置包括：多个微透镜; 图像捕获元件，其中包括接收光束并输出图像信号的多个光电转换元件的多个元件组; 生成单元，其在拍摄光学系统的光瞳表面上提取分别对应于多个不同部分区域的多个区域图像信号，并且生成与该部分区域对应的多组图像数据作为多组其视点位置彼此不同的视点图像数据; 以及接收单元，其接收视点数选择操作以选择多个视点; 其中生成单元通过提取数量等于所选择的视点数的区域图像信号来生成视点图像数据集。

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