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21. 发明授权

US5668023A Composition for off-axis growth sites on non-polar substrates 失效
标题翻译：非极性基质上离轴生长位点的组成
公开(公告)号：US5668023A
公开(公告)日：1997-09-16
申请号：US676989
申请日：1996-07-08
申请人： Keith Wayne Goossen , James A. Walker
发明人： Keith Wayne Goossen , James A. Walker
IPC分类号： C23C14/34 , H01L21/027 , H01L21/20 , H01L21/308 , H01L21/336 , H01L21/365 , H01L29/78 , H01L21/265
CPC分类号： H01L21/3085 , H01L21/0274 , H01L21/3083 , Y10S438/933
摘要： Nonpolar substrates comprising off-axis growth regions for the growth of polar semiconductors, and a method for making such substrates, are disclosed. According to the invention, an erodible material, such as a photoresist, is applied to a substrate at a site and is exposed to radiation at that site which has an linear variation in energy at the surface of the erodible material. Due to this variation in exposure energy, a taper results in the erodible material after development. The tapered region is then etched in a manner which etches both the erodible layer and the underlying substrate. The taper in the erodible layer provides a varying attenuation during the etching process such that the taper of the erodible layer is transferred to the substrate.
摘要翻译：公开了包含用于极性半导体的生长的离轴生长区域的非极性底物及其制造方法。根据本发明，一种可蚀刻的材料，例如光致抗蚀剂，被施加到一个位置处的基底上，并且暴露在该可剥蚀材料表面处的能量线性变化的位置。由于暴露能量的这种变化，锥形导致显影后的可侵蚀材料。然后以蚀刻两个可侵蚀层和下面的衬底的方式蚀刻该锥形区域。可侵蚀层中的锥度在蚀刻工艺期间提供变化的衰减，使得可侵蚀层的锥度被转移到衬底。

22. 发明授权

US06631246B2 Wavelength division multiplexed optical communication system having tunable multi-channel dispersion compensating filters 有权
标题翻译：具有可调谐多通道色散补偿滤波器的波分复用光通信系统
公开(公告)号：US06631246B2
公开(公告)日：2003-10-07
申请号：US09332677
申请日：1999-06-14
申请人： Joseph Earl Ford , Keith Wayne Goossen , Christi Kay Madsen , James Albert Walker
发明人： Joseph Earl Ford , Keith Wayne Goossen , Christi Kay Madsen , James Albert Walker
IPC分类号： G02B626
CPC分类号： G02B6/29374 , G02B6/29358 , G02B6/29394 , G02B6/29395 , H04B10/25133
摘要： In accordance with the invention, a WDM optical communication system includes a new tunable multi-channel dispersion compensating filter having low loss, low polarization dependence and capable of compensating many channels over a large wavelength range. In essence, the filter comprises an optical cavity with a near 100% reflector on one side and a variable partial reflector on the other side. The device acts as a tunable all-pass filter.
摘要翻译：根据本发明，WDM光通信系统包括具有低损耗，低偏振依赖性并且能够在大波长范围内补偿多个信道的新的可调谐多通道色散补偿滤波器。本质上，滤光器包括一个光学腔，一侧具有接近100％的反射器，另一侧具有可变部分反射器。该器件充当可调谐全通滤波器。

23. 发明授权

US06172417B2 Integrated semiconductor devices 失效
标题翻译：集成半导体器件
公开(公告)号：US06172417B2
公开(公告)日：2001-01-09
申请号：US08535677
申请日：1995-09-27
申请人： Keith Wayne Goossen
发明人： Keith Wayne Goossen
IPC分类号： H01L2334
CPC分类号： H01L31/125 , H01L25/167 , H01L2221/68359 , H01L2221/68363 , H01L2924/0002 , Y10S438/933 , Y10S438/977 , H01L2924/00
摘要： An integrated semiconductor device is formed by bonding the conductors of one fabricated semiconductor device having a substrate to the conductors on another fabricated semiconductor device having a substrate, flowing an etch-resist in the form of a photoresist between the devices, allowing the etch-resist to dry, and removing the substrate from one of the semiconductor devices. Preferably the etch-resist is retained to impart mechanical strength to the device. More specifically, a hybrid semiconductor device is formed by bonding the conductors of one or more GaAs/AlGaAs multiple quantum well modulators to conductors on an IC chip, flowing a photoresist between the modulators and the chip, allowing the photoresist to dry, and removing the substrate from the modulator.
摘要翻译：通过将具有衬底的一个制造的半导体器件的导体与具有衬底的另一制造的半导体器件上的导体结合来形成集成半导体器件，在器件之间流动以光致抗蚀剂形式的蚀刻抗蚀剂，允许蚀刻抗蚀剂干燥，并从一个半导体器件中去除衬底。优选地，保留抗蚀剂以赋予该装置机械强度。更具体地说，通过将一个或多个GaAs / AlGaAs多量子阱调制器的导体与IC芯片上的导体结合，形成混合半导体器件，在调制器和芯片之间流动光致抗蚀剂，使光致抗蚀剂干燥，并除去来自调制器的底物。

24. 发明授权

US5943155A Mars optical modulators 有权
标题翻译：火星光学调制器
公开(公告)号：US5943155A
公开(公告)日：1999-08-24
申请号：US133065
申请日：1998-08-12
申请人： Keith Wayne Goossen
发明人： Keith Wayne Goossen
IPC分类号： G02B26/00 , G02B26/02 , G02F1/29 , G02B26/08 , G02F1/01
CPC分类号： G02B26/001 , G02B26/02
摘要： The specification describes a double poly Mechanical Anti-Reflection Switch (MARS) device in which transition layers of SiN.sub.x are provided on either side of the air gap, and the thickness ratio of the two transition layers is adjusted to provide a tradeoff between the insertion loss of the device and the optical bandwidth.
摘要翻译：该说明书描述了一种双重多机械防反射开关（MARS）器件，其中SiNx的过渡层设置在气隙的两侧，并且调节两个过渡层的厚度比以提供插入损耗之间的折衷的设备和光学带宽。

25. 发明授权

US5825528A Phase-mismatched fabry-perot cavity micromechanical modulator 失效
标题翻译：相位不匹配的fabry-perot腔微机械调制器
公开(公告)号：US5825528A
公开(公告)日：1998-10-20
申请号：US578123
申请日：1995-12-26
申请人： Keith Wayne Goossen
发明人： Keith Wayne Goossen
IPC分类号： G02B26/00 , G02B26/08
CPC分类号： G02B26/0833 , G02B26/001
摘要： An apparatus for modulating an optical signal and a method for fabricating such an apparatus, are disclosed. The apparatus, which may be formed on a semiconductor wafer or chip, consists of a membrane that is supported over a substrate by flexible support arms. An air gap is defined between the membrane and substrate. The membrane thickness and refractive index are chosen so that the reflectivities of the membrane and substrate are not 180.degree. out of phase. Under the action of bias, the membrane moves vertically from a first position to a second position relative to the substrate, changing the air gap. The reflectivity of the modulator changes as the air gap changes. Membrane thickness and the air gap are suitably selected to achieve zero overall modulator reflectivity in one of the two membrane positions. Equations define acceptable values for the thickness of the membrane thickness and the air gap. The membrane and air gap are formed by various etching and photolithographic methods.
摘要翻译：公开了一种用于调制光信号的装置及其制造方法。可以形成在半导体晶片或芯片上的装置由通过柔性支撑臂支撑在基板上的膜构成。在膜和基底之间限定气隙。选择膜厚度和折射率，使得膜和基底的反射率不是180°异相。在偏压作用下，膜相对于基板从第一位置垂直移动到第二位置，从而改变气隙。调制器的反射率随着气隙的变化而变化。适当地选择膜厚度和气隙以在两个膜位置之一中实现零调制器反射率。等式定义了膜厚度和气隙的可接受值。膜和气隙通过各种蚀刻和光刻方法形成。

26. 发明授权

US5786925A Method and composition for arbitrary angle mirrors in substrates for use in hybrid optical systems 失效
标题翻译：用于混合光学系统的基板中的任意角度镜的方法和组成
公开(公告)号：US5786925A
公开(公告)日：1998-07-28
申请号：US650582
申请日：1996-05-20
申请人： Keith Wayne Goossen , James Albert Walker
发明人： Keith Wayne Goossen , James Albert Walker
IPC分类号： H01L27/15 , G02B6/12 , G02B6/122 , G02B6/42 , H01S5/00 , G02F1/025 , G02B6/26 , G02F1/035 , G02F1/295
CPC分类号： G02B6/4214 , G02B6/122 , G02B2006/12104
摘要： A method for forming, and an arrangement for using arbitrary angle mirrors in substrates is disclosed. An erodible material, such as a photoresist, is applied to a substrate at a site and is exposed to radiation at that site which has a linear variation in energy at the surface of the erodible material. Due to this variation in exposure energy, a taper results in the erodible material after development. The tapered region is then etched in a manner which etches both the erodible layer and the underlying substrate. The taper in the erodible layer provides a varying attenuation during the etching process such that the taper of the erodible layer, or a multiple of it, is transferred to the substrate. In a first embodiment, a tapered reflective surface is formed in a substrate, which surface engages an optical signal and deflects it to an optical device or another surface. In a second embodiment, two tapered reflective surfaces are formed in a substrate and oriented to deflect incident light to a modulation device. In a third embodiment, an arrangement for modulating a light signal is formed by two tapered reflective surfaces. The surfaces are oriented to form a vee groove in a substrate and are coated with an active semiconductor device.
摘要翻译：公开了一种用于在衬底中使用任意角度镜的形成方法和布置。将一种可蚀刻材料，例如光致抗蚀剂施加到位于基底的位置，并暴露于该位置处的辐射，其在可侵蚀材料的表面处具有线性的能量变化。由于暴露能量的这种变化，锥形导致显影后的可侵蚀材料。然后以蚀刻两个可侵蚀层和下面的衬底的方式蚀刻该锥形区域。可蚀化层中的锥度在蚀刻工艺期间提供变化的衰减，使得可侵蚀层的锥度或其多次被转移到衬底。在第一实施例中，锥形反射表面形成在衬底中，该表面接合光信号并将其偏转到光学器件或另一表面。在第二实施例中，两个锥形反射表面形成在基板中并且被定向成将入射光偏转到调制装置。在第三实施例中，用于调制光信号的装置由两个锥形反射表面形成。这些表面被定向成在基底中形成一个vee凹槽并涂覆有一个有源半导体器件。

27. 发明授权

US5767997A Method and arrangement for a combined modulator/photodetector 失效
标题翻译：组合调制器/光电探测器的方法和装置
公开(公告)号：US5767997A
公开(公告)日：1998-06-16
申请号：US675980
申请日：1996-07-05
申请人： David John Bishop , Keith Wayne Goossen , James A. Walker
发明人： David John Bishop , Keith Wayne Goossen , James A. Walker
IPC分类号： H04B10/24 , H04B10/00
CPC分类号： H04B10/40
摘要： Apparatus and methods for a combined optical modulator/photodetector are disclosed. A modulator chip is attached to a photodetector chip using a non-conductive epoxy or solder. The combined modulator/photodetector can be configured in at least two ways. In one configuration, the modulator is located on the upper surface of a chip that is attached, at its lower surface, to a photodetector containing chip. In another configuration, the modulator is located on the lower surface of the modulator chip, which is again attached at its lower surface to the pbotodetector chip. By combining the modulator and photodetector in the manner described above, they can be placed in a single package, resulting in reduced packaging costs versus a separately packaged modulator and a separately packaged photodetector. Moreover, feedback from the photodetector can used to optimize the operation of micromechanical optical modulators.
摘要翻译：公开了用于组合光调制器/光电检测器的装置和方法。使用非导电环氧树脂或焊料将调制器芯片附接到光电检测器芯片。组合的调制器/光电检测器可以至少两种方式配置。在一种配置中，调制器位于芯片的上表面上，芯片的下表面附接到包含光电检测器的芯片。在另一种配置中，调制器位于调制器芯片的下表面上，该调制器芯片的下表面再次连接到波导检测器芯片。通过以上述方式组合调制器和光电检测器，它们可以放置在单个封装中，从而与单独封装的调制器和单独封装的光电检测器相比降低了封装成本。此外，来自光电检测器的反馈可用于优化微机械光学调制器的操作。

28. 发明授权

US5698452A Method of making integrated detector/photoemitter with non-imaging director 失效
标题翻译：使用非成像导演制作集成检测器/照相器的方法
公开(公告)号：US5698452A
公开(公告)日：1997-12-16
申请号：US524142
申请日：1995-08-31
申请人： Keith Wayne Goossen
发明人： Keith Wayne Goossen
IPC分类号： H01L33/00 , H01L31/00 , H04B10/10 , H04B10/158 , H01L31/18
CPC分类号： H04B10/114 , Y10S148/135
摘要： A method and apparatus are disclosed for an integrated photonic device. A transparent non-imaging optical director having a top and a bottom surface is integrated, at its bottom surface, with a photonic device. The bottom surface is approximately equal in area to the active area of the photonic device. The top surface of the director is larger than its bottom surface. The top and bottom surface are connected by a waveguiding region. The geometry and refractive index of the non-imaging optical director are controlled so that the light entering the director is preferably totally internally reflected. Substantially all optical energy of an optical signal received at the top surface of the non-imaging optical director will be directed to its bottom surface, and then to the integrated photonic device. Where the photonic device is an optical source, substantially all optical energy emitted that is received by the bottom surface is directed to the top surface.
摘要翻译：公开了一种用于集成光子器件的方法和装置。具有顶表面和底表面的透明非成像光导体在其底表面处与光子器件集成。底面大致与光子器件的有效面积相等。导演的顶面大于其底面。顶表面和底表面通过波导区域连接。控制非成像光学导向器的几何形状和折射率，使得进入导光体的光优选是完全内反射的。在非成像光导向器的顶表面处接收的光信号的基本上所有的光能将被引导到其底表面，然后被引导到集成的光子器件。当光子器件是光源时，由底表面接收的基本上所发射的所有光能被引导到顶表面。

29. 发明授权

US5654819A Micromechanical modulator 失效
标题翻译：微机械调制器
公开(公告)号：US5654819A
公开(公告)日：1997-08-05
申请号：US478590
申请日：1995-06-07
申请人： Keith Wayne Goossen , James Albert Walker
发明人： Keith Wayne Goossen , James Albert Walker
IPC分类号： G02B26/00 , G02B26/02
CPC分类号： G02B26/02 , G02B26/001
摘要： A method and apparatus for modulating an optical signal, and a method for fabricating such an apparatus, are disclosed. The modulator comprises a membrane, which consists of at least three layers, and a substrate, spaced to form an air gap. The layers of the membrane are characterized by a relationship between the refractive indices of the layers and the refractive index of the substrate. The membrane is suspended in a first position over the substrate by a flexible support arrangement. A biasing force is applied to the membrane and the substrate to create an electrostatic force to move the membrane towards the substrate to a second position. The reflectivity of the device to an optical signal changes as the membrane moves from the first position to the second position, thereby modulating the signal.
摘要翻译：公开了一种用于调制光信号的方法和装置及其制造方法。调制器包括由至少三层组成的膜和间隔开以形成气隙的衬底。膜的层的特征在于层的折射率和基板的折射率之间的关系。膜通过柔性支撑装置悬挂在衬底上的第一位置。偏压力施加到膜和基底上以产生静电力，以将膜朝向衬底移动到第二位置。当膜从第一位置移动到第二位置时，器件对光学信号的反射率改变，从而调制信号。

30. 发明授权

US07180652B2 Mars optical modulators 有权
标题翻译：火星光学调制器
公开(公告)号：US07180652B2
公开(公告)日：2007-02-20
申请号：US11060870
申请日：2005-02-18
申请人： David John Bishop , Keith Wayne Goossen , Dennis S. Greywall , James Albert Walker
发明人： David John Bishop , Keith Wayne Goossen , Dennis S. Greywall , James Albert Walker
IPC分类号： G02B26/00
CPC分类号： G02B26/0825
摘要： The specification describes an improved Moving Anti-Reflection Switch (MARS) device structure that largely eliminates charge build up on the movable membrane, and reduces stresses that cause curling of the membrane. The improved device uses a movable membrane made of single crystal silicon.
摘要翻译：该规范描述了改进的移动防反射开关（MARS）器件结构，其大大消除了可移动膜上的电荷积累，并且减少了引起膜卷曲的应力。改进的装置使用由单晶硅制成的可移动膜。

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