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    • 25. 发明授权
    • Semiconductor device and a fabrication process thereof
    • 半导体器件及其制造方法
    • US07557446B2
    • 2009-07-07
    • US12216134
    • 2008-06-30
    • Takeshi ItoSatoshi InagakiYasunori UchinoKazuo Kawamura
    • Takeshi ItoSatoshi InagakiYasunori UchinoKazuo Kawamura
    • H01L23/52
    • H01L21/76814H01L21/76846H01L21/76877
    • A semiconductor device formed by the steps of forming a contact hole in an insulation film so as to extend therethrough and so as to expose a conductor body at a bottom part of the contact hole, forming a barrier metal film of tungsten nitride on the bottom part and a sidewall surface of the contact hole with a conformal shape to the bottom part and the sidewall surface of the contact hole, forming a tungsten layer so as to fill the contact hole via the barrier metal film, and forming a tungsten plug in the contact hole by the tungsten layer by polishing away a part of the tungsten film on the insulation film until a surface of the insulation film is exposed, wherein there is conducted a step of cleaning a surface of the conductor body prior to the forming step of the barrier metal film.
    • 一种半导体器件,通过以下步骤形成:在绝缘膜上形成接触孔以便延伸穿过其中,以便在接触孔的底部露出导体,在底部形成氮化钨的阻挡金属膜 以及与接触孔的底部和侧壁表面具有共形形状的接触孔的侧壁表面,形成钨层,以便通过阻挡金属膜填充接触孔,并在触头中形成钨塞 通过抛光绝缘膜上的一部分钨膜直到透明绝缘膜的表面,由钨层形成孔,其中在屏障的形成步骤之前进行清洁导体主体的表面的步骤 金属膜。
    • 26. 发明授权
    • Angular velocity sensor and method for operating the same
    • 角速度传感器及其操作方法
    • US07523665B2
    • 2009-04-28
    • US11653344
    • 2007-01-16
    • Takashi KatsumataTakeshi ItoHirofumi HiguchiMutsuhito OginoTetsuya Morishima
    • Takashi KatsumataTakeshi ItoHirofumi HiguchiMutsuhito OginoTetsuya Morishima
    • G01P15/125
    • G01C19/5719
    • An angular velocity sensor includes first and second vibrators having a movable portion with driving and detecting purpose movable electrodes and a fixed portion with first and second side driving and detecting purpose fixed electrodes. The driving voltages applied to the first side driving purpose fixed electrode in the first vibrator is a first driving voltage including direct and alternating voltages. The driving voltage applied to the second side driving purpose fixed electrode in the first vibrator is a second driving voltage including direct and alternating voltages. At least one of the direct voltages, one of the alternating voltages, or one of duty ratios of the first and second driving voltages is controlled so that the first vibrator vibrates opposite to the second vibrator.
    • 角速度传感器包括第一振动器和第二振动器,该第一振动器和第二振动器具有带有驱动和检测目的的可移动电极的可移动部分和具有第一和第二侧驱动和检测目的的固定电极的固定部分。 施加到第一振动器中的第一侧驱动用固定电极的驱动电压是包括直流和交流电压的第一驱动电压。 施加到第一振动器中的第二侧驱动用固定电极的驱动电压是包括直流和交流电压的第二驱动电压。 控制直流电压中的至少一个,交流电压之一或第一和第二驱动电压的占空比中的一个,使得第一振动器与第二振动器相反地振动。
    • 27. 发明申请
    • VISUAL PROCESSING DEVICE, VISUAL PROCESSING METHOD, PROGRAM, DISPLAY DEVICE, AND INTEGRATED CIRCUIT
    • 视觉处理装置,视觉处理方法,程序,显示装置和集成电路
    • US20090097775A1
    • 2009-04-16
    • US12297403
    • 2007-03-27
    • Yusuke MonobeHaruo YamashitaTakeshi Ito
    • Yusuke MonobeHaruo YamashitaTakeshi Ito
    • G06K9/40
    • H04N1/4092G06T5/008G06T2207/20012G06T2207/20021G06T2207/20192H04N5/142H04N5/20
    • It is possible to inhibit artifacts, even when a special image has been input. The visual processing device of the invention is provided with a spatial processing portion (10) that extracts surrounding image information US from an image signal IS that is input, a special image detection portion (40) that outputs a special image effect adjustment signal DS according to a degree of the statistical bias of the image signal IS, a continuous changing portion (50) that outputs an effect adjustment signal MOD in which the special image effect adjustment signal DS is continuously changed between frames, an effect adjustment portion (20) that outputs a synthesized signal MUS in which the effect of the visual processing is differed depending on the effect adjustment signal MOD, and a visual processing portion (30) that outputs a processed signal OS that is obtained by visually processing the image signal IS based on the image signal IS and the synthesized signal MUS.
    • 即使输入了特殊图像,也可以抑制伪影。 本发明的可视处理装置设置有从输入的图像信号IS提取周边图像信息US的空间处理部(10),根据输入的图像信号IS输出特殊图像效果调整信号DS的特殊图像检测部(40) 在图像信号IS的统计偏差的程度上,输出特殊图像效果调整信号DS在帧之间连续变化的效果调整信号MOD的连续变化部(50),效果调整部(20) 根据效果调整信号MOD输出视觉处理的效果不同的合成信号MUS,以及输出通过视觉处理图像信号IS而获得的处理信号OS的可视处理部(30) 图像信号IS和合成信号MUS。
    • 30. 发明申请
    • Scanning probe microscope
    • 扫描探针显微镜
    • US20080110248A1
    • 2008-05-15
    • US11976500
    • 2007-10-25
    • Takeshi ItoMasahiro Ota
    • Takeshi ItoMasahiro Ota
    • G01B5/28
    • G01Q60/32
    • A scanning probe microscope scans the surface of a sample while making a cantilever to which an exploratory needle is attached oscillate near its resonance point, and collects information on the surface of the sample based on the change of oscillation due to the interaction between the surface of the sample and the exploratory needle. The scanning probe microscope includes a plurality of oscillators attached to the cantilever for oscillating the cantilever, and an oscillator drive device connected to the oscillators for selectively applying an alternating voltage for excitation to the plurality of oscillators.
    • 扫描探针显微镜扫描样品表面,同时制成探针连接的悬臂,在其共振点附近振荡,并且基于由于表面之间的相互作用而引起的振荡的变化收集样品表面上的信息 样品和探针。 扫描探针显微镜包括附接到用于振荡悬臂的悬臂的多个振荡器,以及连接到振荡器的振荡器驱动装置,用于选择性地向多个振荡器施加用于激励的交流电压。