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21. 发明授权

US06793795B1 Method for galvanically forming conductor structures of high-purity copper in the production of integrated circuits 失效
标题翻译：在集成电路生产中电镀高纯度铜导体结构的方法
公开(公告)号：US06793795B1
公开(公告)日：2004-09-21
申请号：US09831763
申请日：2001-05-11
申请人： Heinrich Meyer , Andreas Thies
发明人： Heinrich Meyer , Andreas Thies
IPC分类号： C25D2118
CPC分类号： H01L21/76877 , H01L21/2885
摘要： A method is disclosed for electrolytically forming conductor structures from highly pure copper on surfaces of semiconductor substrates, which surfaces are provided with recesses, when producing integrated circuits. The method includes the steps of coating the surfaces of the semiconductor substrates with a full-surface basic metal layer in order to achieve sufficient conductance for the electrolytic depositions, depositing full-surface deposition of copper layers of uniform layer thickness on the basic metal layer by an electrolytic metal deposition method, and structuring the copper layer. The electrolytic metal deposition method is accomplished by bringing the semiconductor substrates into contact with a copper deposition bath containing at least one copper ion source, at least one additive compound for controlling the physico-mechanical properties of the copper layers, and Fe(II) and/or Fe(III) compounds, and applying an electric voltage between the semiconductor substrates and dimensionally stable counter-electrodes.
摘要翻译：公开了一种用于在制造集成电路时从半导体衬底的表面上的高纯度铜电解形成导体结构的方法，该表面设置有凹部。该方法包括以下步骤：用全表面碱性金属层涂覆半导体衬底的表面，以便为电解沉积获得足够的电导，通过在基本金属层上沉积具有均匀层厚度的铜层的全表面沉积电解金属沉积法，构成铜层。电解金属沉积方法是通过使半导体衬底与含有至少一种铜离子源的铜沉积浴，至少一种用于控制铜层的物理机械性能的添加剂化合物和Fe（II）和 /或Fe（III）化合物，并且在半导体衬底和尺寸稳定的对电极之间施加电压。

22. 发明授权

US06706201B1 Method for producing metallized substrate materials 失效
标题翻译：金属化基板材料的制造方法
公开(公告)号：US06706201B1
公开(公告)日：2004-03-16
申请号：US09673760
申请日：2000-12-21
申请人： Heinrich Meyer , Ralf Schulz , Roland Heinz , Eckart Klusmann
发明人： Heinrich Meyer , Ralf Schulz , Roland Heinz , Eckart Klusmann
IPC分类号： C23C402
CPC分类号： H05K3/388 , C23C16/0245 , C23C16/06 , H05K1/034 , H05K3/146
摘要： For manufacturing substrate materials which are needed for the manufacture of electrical circuit carriers, methods are known in which metal layers are applied to a dielectric substrate by means of a glow discharge process and thereafter additional metal layers are applied by means of electroplating processes. These methods however are not suitable for the manufacture of substrate materials which are suitable for high frequency applications in the gigahertz range. The invention starts from the previously-mentioned methods and solves the described problem through the use of fluoropolymers and through coating of these materials by means of a glow discharge process with nickel, since by this means even very smooth surfaces of the substrate can be securely coated. The metallised materials can be coated with additional metal layers from electroless or electrolytic deposition baths.
摘要翻译：为了制造制造电路载体所需的衬底材料，已知通过辉光放电工艺将金属层施加到电介质衬底的方法，此后通过电镀工艺施加额外的金属层。然而，这些方法不适用于适用于千兆赫兹范围的高频应用的基片材料的制造。本发明从先前提到的方法开始，通过使用含氟聚合物并通过利用镍的辉光放电法涂覆这些材料来解决所述的问题，因为通过这种方式，可以牢固地涂覆基材的非常光滑的表面。金属化材料可以从化学镀或电解沉积浴中涂覆附加的金属层。

23. 发明授权

US06451498B1 Photosensitive composition 失效
标题翻译：感光组合物
公开(公告)号：US06451498B1
公开(公告)日：2002-09-17
申请号：US09544309
申请日：2000-04-06
申请人： Rosangela Pirri , Francis Verzaro , Heinrich Meyer , Gonzalo Urrutia Desmasion , Gilles Meunier
发明人： Rosangela Pirri , Francis Verzaro , Heinrich Meyer , Gonzalo Urrutia Desmasion , Gilles Meunier
IPC分类号： G03C173
CPC分类号： G03F7/0045 , G03F7/0392 , Y10S430/111
摘要： The invention relates to photosensitive compositions, which can be developed positively. Traditional compositions have either inadequate photosensitivity or they are not appropriate for use on the copper surfaces, for example of circuit boards, since the exposed coating sections of the composition cannot be completely removed during developing, which results in problems in subsequent plating or etching. In the photosensitive compositions according to the invention, these disadvantages cannot be observed. Various compositions are described, which contain photo acid generators and a polymer resin with side groups, which can split acid, said polymer resin being formed by polymerizing at least three different acrylate- or methacrylate-monomers.
摘要翻译：本发明涉及可以积极发展的光敏组合物。传统的组合物具有不足的光敏性，或者它们不适用于铜表面，例如电路板，因为组合物的暴露的涂层部分在显影期间不能完全去除，这导致随后的电镀或蚀刻中的问题。在根据本发明的光敏组合物中，不能观察到这些缺点。描述了各种组合物，其含有光酸产生剂和具有侧基的聚合物树脂，其可分裂酸，所述聚合物树脂通过聚合至少三种不同的丙烯酸酯或甲基丙烯酸酯单体而形成。

24. 发明授权

US06403168B2 Process for plating metal coatings 失效
标题翻译：电镀金属涂层的工艺
公开(公告)号：US06403168B2
公开(公告)日：2002-06-11
申请号：US09840367
申请日：2001-04-23
申请人： Heinrich Meyer , Ralf Schulz
发明人： Heinrich Meyer , Ralf Schulz
IPC分类号： H05H100
CPC分类号： C23C16/18 , C23C18/30 , H05K3/388
摘要： A process for depositing metal coatings on polyimide surfaces for producing conductor tracks includes depositing a first metal coating by decomposition of volatile metal compounds by a glow discharge in a gas mixture containing inert gases and oxygen containing compounds, followed by electroless deposition of a second metal coating from an acid or neutral metallizing bath.
摘要翻译：在用于制造导体轨迹的聚酰亚胺表面上沉积金属涂层的方法包括通过在包含惰性气体和含氧化合物的气体混合物中的辉光放电来分解挥发性金属化合物沉积第一金属涂层，然后通过无电沉积第二金属涂层来自酸性或中性金属浴。

25. 发明授权

US06375172B1 Hydraulically-damping engine bearing 失效
标题翻译：液压阻尼发动机轴承
公开(公告)号：US06375172B1
公开(公告)日：2002-04-23
申请号：US09335582
申请日：1999-06-18
申请人： Ernst Bungart , Heinrich Meyer , Jörn-Rainer Quast
发明人： Ernst Bungart , Heinrich Meyer , Jörn-Rainer Quast
IPC分类号： F16F500
CPC分类号： F16F13/262
摘要： A hydraulically-damping engine bearing includes a restrictedly deflectable diaphragm separating first and second fluid-filled primary chambers that are bordered at least partially by elastic walls. At least one channel is connected between the first and second primary chambers. An arrangement is connected for adjusting a characteristic of the bearing. The arrangement includes an auxiliary suspension spring that, with the wall of one of the chambers, forms an auxiliary chamber, whereby one of the primary chambers is connectable to the auxiliary chamber via a controllable flow connection.
摘要翻译：液压阻尼发动机轴承包括限制地偏转的隔膜，其隔开至少部分地由弹性壁限定的第一和第二流体填充的初级室。至少一个通道连接在第一和第二主室之间。连接用于调整轴承特性的装置。该装置包括辅助悬架弹簧，其中一个腔室的壁形成辅助腔室，由此主腔室中的一个可经由可控流动连接件连接到辅助腔室。

26. 发明授权

US06325910B1 Palladium colloid solution and its utilization 失效
标题翻译：钯胶体溶液及其应用
公开(公告)号：US06325910B1
公开(公告)日：2001-12-04
申请号：US09089578
申请日：1998-06-03
申请人： Heinrich Meyer , Lutz Stamp
发明人： Heinrich Meyer , Lutz Stamp
IPC分类号： C25D554
摘要： The invention relates to a palladium colloid solution, which, in addition to a palladium compound, a protective colloid for stabilizing the colloid and a reducing agent, additionally contains noble metals from the group rhodium, iridium and platinum. The solution can be used to treat electrically non-conductive substrate surfaces, particularly in order to metallize the substrate surfaces directly and electrolytically. By means of this method, the nonconductive areas of the holes in printed circuit boards can be directly electrolytically metallized.
摘要翻译：本发明涉及一种钯胶体溶液，其除了钯化合物之外，还包含用于稳定胶体的保护胶体和还原剂，还含有铑，铱和铂族的贵金属。该解决方案可用于处理非导电衬底表面，特别是为了直接和电解金属化衬底表面。通过这种方法，印刷电路板中的孔的非导电区域可以直接电解金属化。

27. 发明授权

US06221440B1 Process for plating metal coating 失效
标题翻译：电镀金属涂层工艺
公开(公告)号：US06221440B1
公开(公告)日：2001-04-24
申请号：US08817337
申请日：1997-04-02
申请人： Heinrich Meyer , Ralf Schulz
发明人： Heinrich Meyer , Ralf Schulz
IPC分类号： H05H100
CPC分类号： C23C16/18 , C23C18/30 , H05K3/388
摘要： A process for depositing metal coatings on polyimide surfaces for producing conductor tracks includes depositing a first metal coating by decomposition of volatile metal compounds by a glow discharge in a gas mixture containing inert gases and oxygen containing compounds, followed by electroless deposition of a second metal coating from an acid or neutral metallizing bath.
摘要翻译：在用于制造导体轨迹的聚酰亚胺表面上沉积金属涂层的方法包括通过在包含惰性气体和含氧化合物的气体混合物中的辉光放电来分解挥发性金属化合物沉积第一金属涂层，然后通过无电沉积第二金属涂层来自酸性或中性金属浴。

28. 发明授权

US06220584B1 Hydraulically damping engine bearing 失效
标题翻译：液压阻尼发动机轴承
公开(公告)号：US06220584B1
公开(公告)日：2001-04-24
申请号：US09275343
申请日：1999-03-24
申请人： Heinrich Meyer
发明人： Heinrich Meyer
IPC分类号： F16F1326
CPC分类号： B60K5/1266 , B60K5/1283 , F16F13/26
摘要： A hydraulically damping engine bearing having fluid-filled chambers bordered at least partially by elastic walls, a limitedly deflectable diaphragm separating the chambers, and at least one channel connecting the chambers. A bearing spring rate characteristic is adjustable by an arrangement that includes an additional suspension spring arranged outside of one of the chambers. An intermediate space is bordered by the suspension spring together with an outer wall of one of the chambers. A valve, in communication with the intermediate space, enables the space to be aerated and de-aerated.
摘要翻译：液压阻尼发动机轴承，其具有至少部分地由弹性壁邻接的流体填充室，分隔室的有限可偏转的隔膜以及连接室的至少一个通道。轴承弹簧特性可以通过一种布置来调节，该布置包括布置在其中一个室之外的附加悬架弹簧。中间空间与其中一个室的外壁一起被悬挂弹簧界定。与中间空间连通的阀门使空间得以充气和脱气。

29. 发明授权

US4765874A Laminated electrode the use thereof 失效
标题翻译：层压电极的用途
公开(公告)号：US4765874A
公开(公告)日：1988-08-23
申请号：US944849
申请日：1986-12-22
申请人： Christina Modes , Heinrich Meyer , Jochen-Werner K. Burgsdorff , Ulrich Stroder , Andrea Kramer
发明人： Christina Modes , Heinrich Meyer , Jochen-Werner K. Burgsdorff , Ulrich Stroder , Andrea Kramer
IPC分类号： C25B3/00 , C25B11/04 , C25B11/06 , C25B11/12 , C25C7/02 , C25D17/10 , C25C1/00
CPC分类号： C25B11/041 , C25B11/04 , C25B11/12 , C25C7/02
摘要： Laminated electrodes and a method for their preparation are described, these electrodes being composed of electrically conductive plastic having catalytic particles, composed of a catalyst deposited on supporting particles, pressed partially into the plastic. They can be used as oxygen anodes, for example in the electrolytic recovery of metal from aqueous solutions.
摘要翻译：描述了层压电极及其制备方法，这些电极由具有催化颗粒的导电塑料组成，催化颗粒由沉积在支撑颗粒上的催化剂组成，部分地压入塑料中。它们可以用作氧阳极，例如在从水溶液中电解回收金属。

30. 发明申请

US20110291336A1 AXIALLY DAMPING HYDRAULIC MOUNT 有权
标题翻译：轴向阻尼液压装置
公开(公告)号：US20110291336A1
公开(公告)日：2011-12-01
申请号：US13133965
申请日：2009-12-01
申请人： Heinrich Meyer , Detlev Hagedorn , Stefan Vollmann
发明人： Heinrich Meyer , Detlev Hagedorn , Stefan Vollmann
IPC分类号： F16F13/22 , F16F13/08
CPC分类号： F16F13/22 , F16F13/106
摘要： Axially damping hydraulic mount is provided, relating to elastomer mounts for engine mounts for damping the vibrations transmitted from internal combustion engine to the body and for acoustic decoupling. The hydraulic mount includes a frustoconical elastomer support spring, between mount core and upper part of outer jacket, with a working chamber and a compensating chamber for fluid damping medium. Chambers are separated from one another by a separator extending transversely to the mount axis and includes a coupling diaphragm, wherein the working chamber is enclosed by support spring and separating element. Compensating chamber is enclosed by separating element and elastomer bellows. A duct on the separating element is enclosed by a duct part. To counteract excessive increase in dynamic spring rate when frequencies of axially acting vibrations are present, the duct part is occupied by an additional mass. Then the duct part is rigidly connected to a mass element.
摘要翻译：提供了轴向阻尼液压支架，涉及用于发动机支架的弹性体支架，用于阻尼从内燃机传递到车身的振动和用于声学解耦。液压支架包括一个截头圆锥形弹性体支撑弹簧，位于安装芯和外护套的上部之间，具有工作室和用于流体阻尼介质的补偿室。室通过横向于安装轴线延伸的分离器彼此分开，并且包括耦合隔膜，其中工作室由支撑弹簧和分离元件包围。补偿室由分离元件和弹性体波纹管封闭。分离元件上的管道被管道部分包围。为了克服轴向作用振动的频率存在时动态弹簧刚度的过度增加，管道部分被另外的质量占据。然后，管道部分刚性地连接到质量元件。

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