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21. 发明申请

US20130186471A1 CALIBRATION METHOD AND FLOW RATE MEASUREMENT METHOD FOR FLOW RATE CONTROLLER FOR GAS SUPPLY DEVICE 有权
标题翻译：用于气体供应装置的流量控制器的校准方法和流量测量方法
公开(公告)号：US20130186471A1
公开(公告)日：2013-07-25
申请号：US13813219
申请日：2011-06-28
申请人： Masaaki Nagase , Nobukazu Ikeda , Yohei Sawada , Tooru Hirai , Kazuyuki Morisaki , Kouji Nishino , Ryousuke Dohi
发明人： Masaaki Nagase , Nobukazu Ikeda , Yohei Sawada , Tooru Hirai , Kazuyuki Morisaki , Kouji Nishino , Ryousuke Dohi
IPC分类号： G01F7/00
CPC分类号： G01F7/005 , G01F1/34 , G01F15/002 , G01F15/005 , G01F25/0053 , G05D7/0652 , Y10T137/0324
摘要： In a gas supply device supplying many different gases to a gas use portion through many flow rate controllers, a flow rate controller calibration unit includes a build-up tank with inner volume, an inlet side on-off valve and an outlet side on-off valve V2 of the tank, and a gas pressure detector and a gas temperature detector for gas inside the tank, joined in a branched form to a gas supply line, with the valve V2 connected to vacuum. The calibration unit is used to calibrate a flow rate controller based on performing a first measurement of gas temperature and pressure inside the tank, and then building-up gas into the tank, and then performing a second measurement of gas temperature and pressure, and from respective measured values, calculating gas flow rate Q and by comparing a set gas flow rate and calculated gas flow rate Q, performing flow rate calibration.
摘要翻译：在通过许多流量控制器向气体使用部分供应许多不同气体的气体供应装置中，流量控制器校准单元包括具有内部容积的积聚罐，入口侧开关阀和出口侧开关阀的阀V2，以及气罐内的气体的气体压力检测器和气体温度检测器，以分支形式连接到气体供给管线，阀V2连接到真空。校准单元用于基于对罐内的气体温度和压力进行第一次测量，然后将气体积聚到罐中，然后对气体温度和压力进行第二次测量，并从各个测量值，计算气体流量Q，并通过比较设定的气体流量和计算出的气体流量Q进行流量校准。

22. 发明授权

US08191856B2 Piezoelectric element driven metal diaphragm control valve 有权
标题翻译：压电元件驱动金属隔膜控制阀
公开(公告)号：US08191856B2
公开(公告)日：2012-06-05
申请号：US12852220
申请日：2010-08-06
申请人： Atsushi Matsumoto , Kaoru Hirata , Ryousuke Dohi , Nobukazu Ikeda , Kouji Nishino
发明人： Atsushi Matsumoto , Kaoru Hirata , Ryousuke Dohi , Nobukazu Ikeda , Kouji Nishino
IPC分类号： F16K31/02
CPC分类号： F16K24/04 , F16K7/14 , F16K31/004 , F16K31/007 , F16K51/02
摘要： A control valve has a body that forms a valve chamber and a valve seat, a metal diaphragm installed inside the valve chamber and making contact with and departing from the valve seat, an actuator box fixed to the side of the body, a piezoelectric element installed inside the actuator box to thrust the metal diaphragm through mediation of a metal diaphragm presser by elongating downward when voltage is applied, a conical spring mechanism that absorbs elongation of the piezoelectric element at the time when the metal diaphragm makes contact with the valve seat and a prescribed thrust is applied to the valve seat and the like, and a preload mechanism that applies upward compressive force to the piezoelectric element all the time wherein the compressive force applied to the piezoelectric element is externally adjustable.
摘要翻译：控制阀具有形成阀室和阀座的主体，安装在阀室内部并与阀座接触和离开的金属隔膜，固定在主体侧的致动器盒，安装在压缩元件侧的压电元件在致动器箱内部，通过金属隔膜压板的调节，通过在施加电压时向下延伸来推动金属隔膜;锥形弹簧机构，其在金属隔膜与阀座接触时吸收压电元件的伸长，规定的推力被施加到阀座等，以及预压机构，其向压电元件施加向上的压缩力，其中施加到压电元件的压缩力是外部可调节的。

23. 发明授权

US08181932B2 Normally open type piezoelectric element driven metal diaphragm control valve 有权
标题翻译：常开式压电元件驱动金属隔膜控制阀
公开(公告)号：US08181932B2
公开(公告)日：2012-05-22
申请号：US12161549
申请日：2006-11-13
申请人： Atsushi Matsumoto , Kaoru Hirata , Ryousuke Dohi , Nobukazu Ikeda , Kouji Nishino
发明人： Atsushi Matsumoto , Kaoru Hirata , Ryousuke Dohi , Nobukazu Ikeda , Kouji Nishino
IPC分类号： F16K31/02
CPC分类号： F16K24/04 , F16K7/14 , F16K31/004 , F16K31/007 , F16K51/02
摘要： A control valve has a body that forms a valve chamber and a valve seat, a metal diaphragm installed inside the valve chamber and making contact with and departing from the valve seat, an actuator box fixed to the side of the body, a piezoelectric element installed inside the actuator box to thrust the metal diaphragm through mediation of a metal diaphragm presser by elongating downward when voltage is applied, a conical spring mechanism that absorbs elongation of the piezoelectric element at the time when the metal diaphragm makes contact with the valve seat and a prescribed thrust is applied to the valve seat and the like, and a preload mechanism that applies upward compressive force to the piezoelectric element all the time wherein the compressive force applied to the piezoelectric element is externally adjustable.
摘要翻译：控制阀具有形成阀室和阀座的主体，安装在阀室内部并与阀座接触和离开的金属隔膜，固定在主体侧的致动器盒，安装在压缩元件侧的压电元件在致动器箱内部，通过金属隔膜压板的调节，通过在施加电压时向下延伸来推动金属隔膜;锥形弹簧机构，其在金属隔膜与阀座接触时吸收压电元件的伸长，规定的推力被施加到阀座等，以及预压机构，其向压电元件施加向上的压缩力，其中施加到压电元件的压缩力是外部可调节的。

24. 发明授权

US08047510B2 Evaporation supply apparatus for raw material and automatic pressure regulating device used therewith 有权
标题翻译：用于原材料的蒸发供应装置和使用的自动压力调节装置
公开(公告)号：US08047510B2
公开(公告)日：2011-11-01
申请号：US12306904
申请日：2007-06-13
申请人： Kaoru Hirata , Masaaki Nagase , Atsushi Hidaka , Atsushi Matsumoto , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
发明人： Kaoru Hirata , Masaaki Nagase , Atsushi Hidaka , Atsushi Matsumoto , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
IPC分类号： B01F3/04
CPC分类号： C23C16/4481 , C23C16/52 , G05D16/2013 , Y10T137/7737
摘要： An evaporation supply apparatus for raw material used in semiconductor manufacturing includes a source tank in which a raw material is pooled; a flow rate control device that supplies carrier gas at a regulated flow rate into the source tank; a primary piping path for feeding mixed gas G0, made up of raw material vapor G4 and carrier gas G1, an automatic pressure regulating device that regulates a control valve based on the detected values of the pressure and temperature of mixed gas G0 to regulate the cross-sectional area of the passage through which the mixed gas G0 is distributed so as to hold the pressure of the mixed gas G0 inside the source tank constant; and a constant-temperature heating unit for heating the source tank to a set temperature, in which mixed gas G0 is supplied to a process chamber while controlling the pressure inside the source tank.
摘要翻译：用于半导体制造的原料的蒸发供给装置包括：原料汇集在其中的源罐; 流量控制装置，其以规定的流量将载气供给到所述源罐; 用于供给由原料蒸气G4和载气G1组成的混合气体G0的主要管路，基于混合气体G0的压力和温度的检测值来调节控制阀的自动调压装置，以调节十字混合气体G0通过其分配的通道的截面积，以将混合气体G0的压力保持在源箱内部恒定; 以及用于将源罐加热到设定温度的恒温加热单元，其中将混合气体G0供给到处理室，同时控制源罐内的压力。

25. 发明申请

US20110139271A1 AUTOMATIC PRESSURE REGULATOR FOR FLOW RATE REGULATOR 有权
标题翻译：用于流量调节器的自动调压器
公开(公告)号：US20110139271A1
公开(公告)日：2011-06-16
申请号：US12996370
申请日：2009-04-06
申请人： Kaoru Hirata , Katsuyuki Sugita , Kouji Nishino , Ryousuke Dohi , Nobukazu Ikeda , Takeo Sugimoto
发明人： Kaoru Hirata , Katsuyuki Sugita , Kouji Nishino , Ryousuke Dohi , Nobukazu Ikeda , Takeo Sugimoto
IPC分类号： F16K31/02
CPC分类号： G05D7/0635 , Y10T137/7761
摘要： The invention prevents overshoot from occurring in flow rate on the output side of a flow rate regulator when output flow rate is changed or the gas type distributed is changed. Thus, an automatic pressure regulator is provided to supply gas pressure to a flow rate regulator that includes a piezoelectric element driving type pressure regulating valve, a control pressure detector provided on the output side of the pressure regulating valve, and a controller to which a detected value P2 of the control pressure detector and a set value Pst for control pressure are input, wherein the controller supplies a control signal to a piezoelectric element driving unit of the pressure regulating valve using a proportional control system to perform valve opening regulation, in which the proportional control system of the controller is set to control to bring about a residual deviation in control pressure by disabling an integral action.
摘要翻译：本发明防止了当流量改变或气体分布改变时流量调节器的输出侧的流量发生过冲。因此，提供了一种自动压力调节器，用于向包括压电元件驱动型压力调节阀的流量调节器，设置在压力调节阀的输出侧的控制压力检测器和控制器提供气体压力，输入控制压力检测器的值P2和用于控制压力的设定值Pst，其中控制器使用比例控制系统向压力调节阀的压电元件驱动单元提供控制信号，以执行阀开启调节，其中控制器的比例控制系统设置为通过禁用积分作用来控制控制压力的残留偏差。

26. 发明申请

US20110108138A1 PRESSURE CONTROL VALVE DRIVING CIRCUIT FOR PRESSURE TYPE FLOW RATE CONTROL DEVICE WITH FLOW RATE SELF-DIAGNOSIS FUNCTION 有权
标题翻译：压力型流量控制装置的压力控制阀驱动电路流速自动诊断功能
公开(公告)号：US20110108138A1
公开(公告)日：2011-05-12
申请号：US12989614
申请日：2009-02-18
申请人： Katsuyuki Sugita , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi , Kaoru Hirata , Takatoshi Nakatani
发明人： Katsuyuki Sugita , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi , Kaoru Hirata , Takatoshi Nakatani
IPC分类号： F16K31/12
CPC分类号： G05D7/0635 , Y10T137/7762
摘要： A pressure control valve piezoelectric element driving circuit is provided for a pressure type flow rate control device provided with a flow rate self-diagnosis function for comparing initial pressure drop characteristics data measured and with pressure drop characteristics data in a flow rate diagnosis which are measured under conditions that are the same for both measurements to detect malfunction in flow rate control from a difference between both characteristics data, wherein a first discharge circuit slowly discharges a piezoelectric element driving voltage applied to the piezoelectric element according to a step-down command signal from a CPU, through a step-down command circuit to step down the voltage, and a second discharge circuit that rapidly discharges a piezoelectric element driving voltage applied to the piezoelectric element according to a high-speed step-down command signal from the CPU, through a high-speed step-down command circuit to step down the voltage.
摘要翻译：为压力式流量控制装置设置压力式流量控制装置，该压力式流量控制装置具有用于比较测定的初始压降特性数据和流量诊断中的压降特性数据的流量自我诊断功能，两个测量结果相同的条件是根据两个特性数据之间的差异来检测流量控制的故障，其中第一放电电路根据来自一个压电元件的降压命令信号缓慢放电施加到压电元件的压电元件驱动电压 CPU通过降压指令电路降低电压，以及第二放电电路，其根据来自CPU的高速降压命令信号快速放电施加到压电元件的压电元件的驱动电压，通过高速降压指令电路降压。

27. 发明授权

US07926509B2 Method for flow rate control of clustering fluid and device for flow rate control of clustering fluid employed in the method 有权
标题翻译：聚类流体流量控制方法和方法中采用的聚类流体流量控制装置
公开(公告)号：US07926509B2
公开(公告)日：2011-04-19
申请号：US11182762
申请日：2005-07-18
申请人： Tadahiro Ohmi , Kazuhiko Sugiyama , Kenetu Mizusawa , Eiji Takahashi , Tomio Uno , Kouji Nishino , Ryousuke Dohi , Nobukazu Ikeda , Masaaki Nagase
发明人： Tadahiro Ohmi , Kazuhiko Sugiyama , Kenetu Mizusawa , Eiji Takahashi , Tomio Uno , Kouji Nishino , Ryousuke Dohi , Nobukazu Ikeda , Masaaki Nagase
IPC分类号： F16K49/00
CPC分类号： H01L21/67023 , G05D7/0635 , Y10T137/6416 , Y10T137/6606 , Y10T137/7761
摘要： Disclosed is a method of controlling the flow rate of clustering fluid using a pressure type flow rate control device in which the flow rate Q of gas passing through an orifice is computed as K=KP1 (where K is a constant) with the gas being in a state where the ratio P2/P1 between the gas pressure P1 on the upstream side of the orifice and the gas pressure P2 on the downstream side of the orifice is held at a value not higher than the critical pressure ratio of the gas wherein the association of molecules is dissociated either by heating the pressure type flow rate control device to the temperature higher than 40° C., or by applying the diluting gas to the clustering fluid to make it lower than a partial pressure so the clustering fluid is permitted to pass through the orifice in a monomolecular state.
摘要翻译：公开了一种使用压力式流量控制装置控制聚集流体的流量的方法，其中通过孔口的气体的流量Q被计算为K = KP1（其中K是常数），气体处于孔口上游侧的气体压力P1与孔口下游侧的气体压力P2之间的比P2 / P1保持在不高于气体的临界压力比的值的状态，的分子通过将压力型流量控制装置加热到高于40℃的温度来解离，或者通过将稀释气体施加到聚集流体以使其低于分压使得聚集流体被允许通过通过孔在单分子状态。

28. 发明申请

US20100229976A1 FLOW RATE RATIO VARIABLE TYPE FLUID SUPPLY APPARATUS 有权
标题翻译：流量比可变型流体供应装置
公开(公告)号：US20100229976A1
公开(公告)日：2010-09-16
申请号：US12303841
申请日：2007-06-13
申请人： Kaoru Hirata , Yohei Sawada , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
发明人： Kaoru Hirata , Yohei Sawada , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
IPC分类号： F16L41/00 , G01F1/42
CPC分类号： G05D7/0664 , Y10T137/85938 , Y10T137/87314 , Y10T137/87539
摘要： A flow rate ratio variable type fluid supply apparatus includes a flow rate control system supplying gas of flow rate Q that is diverted to first flow diverting pipe passage and second flow diverting pipe passage with prescribed flow rates Q1/Q0 so gas is supplied to a chamber, and a first orifice having opening area S1 is installed on the first flow diverting passage, and the second flow diverting passage is connected to a plurality of branch pipe passages connected in parallel, orifices having opening area installed on the branch passages, and open/close valves installed on all, or some of, the branch passages so gas is diverted to flow diverting passages with flow rate ratio Q1/Q0 equivalent to the ratio of the first orifice and the total opening area S2o of flow passable orifices of the second flow diverting passage by regulating total opening area of the flow passable orifices.
摘要翻译：流量比可变型流体供给装置包括：流量控制系统，其将具有规定流量Q1 / Q0的第一分流管路和第二分流管路的流量Q的气体供给到气室，并且具有开口面积S1的第一孔口安装在第一分流通道上，第二分流通道连接到并联连接的多个支管通道，开口区域安装在分支通道上，开口/ 安装在所有或一些分支通道上的关闭阀，使得气体转向流动转向通道，流量比Q1 / Q0等于第一孔口与第二流量的可流通孔口的总开口面积S2o的比值通过调节流通孔的总开口面积来分流通道。

29. 发明申请

US20100207044A1 CAM VALVE 有权
标题翻译：凸轮阀
公开(公告)号：US20100207044A1
公开(公告)日：2010-08-19
申请号：US12439572
申请日：2007-08-21
申请人： Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda , Yohei Sewada
发明人： Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda , Yohei Sewada
IPC分类号： F16K31/02 , F16K1/36
CPC分类号： F16K31/04 , F16K7/16 , F16K31/52491
摘要： In a step motor driven cam valve a stem freely ascends and descends within a body having an in-flow passage, an out-flow passage, a valve chamber, and a valve seat. The stem is descended by an actuator, composed of a step motor and a cam mechanism located at a position above the stem, that changes a rotational motion of the step motor to a linear motion and transmits the linear motion to the stem. A diaphragm within a valve chamber or a valve body at a lower end part of the stem rests on the valve seat. A lift support mechanism that supports the actuator to freely ascend and descend is arranged at a bonnet that covers the valve chamber. A height fine-adjustment mechanism, arranged at the lift supporting mechanism, finely adjusts the height of the actuator relative to the stem so as to perform zero-point adjustment of the valve.
摘要翻译：在步进马达驱动的凸轮阀中，杆在具有流入通道，流出通道，阀室和阀座的主体内自由上升和下降。杆由致动器下降，该致动器由位于杆上方的位置的步进电动机和凸轮机构组成，其将步进电动机的旋转运动改变为线性运动，并将线性运动传递到杆。阀室内的隔膜或阀杆的下端部的阀体位于阀座上。支撑致动器自由上升和下降的提升支撑机构布置在覆盖阀室的发动机罩上。布置在升降支撑机构处的高度精细调节机构，精细地调节致动器相对于杆的高度，以便执行阀的零点调节。

30. 发明申请

US20090292399A1 METHOD FOR DETECTING MALFUNCTION OF VALVE ON THE DOWNSTREAM SIDE OF THROTTLE MECHANISM OF PRESSURE TYPE FLOW CONTROL APPARATUS 有权
标题翻译：用于检测压力型流量控制装置的压力机构下游侧阀门故障的方法
公开(公告)号：US20090292399A1
公开(公告)日：2009-11-26
申请号：US12307554
申请日：2007-06-13
申请人： Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Kouji Nishino , Kaoru Hirata , Katsuyuki Sugita , Atsushi Matsumoto
发明人： Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Kouji Nishino , Kaoru Hirata , Katsuyuki Sugita , Atsushi Matsumoto
IPC分类号： G05D7/06
CPC分类号： G05D7/0635 , G01F1/36 , G01F15/005 , G01F15/022
摘要： With a pressure type flow control apparatus, a valve on the downstream side of a throttle mechanism is released and a flow rate setting value Qe inputted to the pressure type flow control apparatus is changed to detect the magnitude ΔV of change of a flow rate output signal Qo from the pressure type flow control apparatus while the flow rate setting value Qe is changed, so that normal functioning of the releasing operations of the valve on the downstream side of the throttle mechanism is confirmed when the magnitude ΔV of change of the flow rate output signal Qo is above the predetermined value. If the releasing operations are malfunctioning, the magnitude ΔV of changes is found to be below the predetermined value.
摘要翻译：利用压力式流量控制装置，释放节气门机构下游侧的阀，改变输入到压力式流量控制装置的流量设定值Qe，以检测流量输出信号的变化幅度DeltaV 当流量设定值Qe变化时，来自压力式流量控制装置的Qo，使得当流量输出的变化幅度DeltaV被确定时，节气门机构的下游侧的阀的释放操作的正常功能被确认信号Qo高于预定值。如果释放操作发生故障，则发现变化幅度DeltaV低于预定值。

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