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    • 29. 发明授权
    • Dispensing pump for epoxy encapsulation of integrated circuits
    • 集成电路环氧树脂封装分配泵
    • US5927560A
    • 1999-07-27
    • US828569
    • 1997-03-31
    • Alan LewisEric L. AustinAlec BabiarzJohn Newbold
    • Alan LewisEric L. AustinAlec BabiarzJohn Newbold
    • F04B15/02B05C11/10H01L21/56G01F11/00
    • B05C11/1034H01L21/56H01L2924/0002
    • A dispensing pump for dispensing liquid, particularly suitable for dispensing two-part epoxy for encapsulation of integrated circuits, includes a pumping chamber in communication with a nozzle via a three way valve, the pumping chamber including an outlet, an internal volume, a pair of spaced directional seals located away from the outlet, an open volume residing between the seals and an external port opening the open volume to atmosphere. A stepped plunger extends axially within the pumping chamber, with a first portion sized to be received and aligned through the first directional seal, the plunger being movable to move the first portion toward the outlet to close off the internal volume at the second seal. The second portion of the plunger is relatively smaller in transverse cross-sectional dimension than the inside diameter of the second seal, to cooperate with the port to promote fluid removal from the internal volume during initial filling and priming of the pumping chamber. Once filled and primed, the plunger causes positive volume displacement of liquid from the pumping chamber and out of the nozzle, with very good repeatability and high fluid flow rates, independent of material viscosity, and/or temperature or viscosity changes. For refilling, the plunger is retracted from a volume which corresponds to the volume of material refilled into the internal volume.
    • 用于分配液体的分配泵,特别适用于分配用于集成电路封装的两部分环氧树脂,包括通过三通阀与喷嘴连通的泵送室,所述泵送室包括出口,内部容积,一对 位于远离出口的间隔开的定向密封件,位于密封件之间的开放体积和打开到大气的开放体积的外部端口。 阶梯式柱塞在泵送室内轴向延伸,其中第一部分的尺寸被设计成被接收并对准穿过第一定向密封件,柱塞可移动以使第一部分朝向出口移动,以在第二密封处封闭内部容积。 柱塞的第二部分的横截面尺寸相对于第二密封件的内径相对较小,以便在泵送室的初始填充和起动期间与端口配合以促进流体从内部容积移除。 一旦填充和填充,柱塞会引起液体从泵送室排出喷嘴的正体积位移,具有非常好的重复性和高流体流速,与材料粘度和/或温度或粘度变化无关。 为了再填充,柱塞从对应于重新填充到内部体积中的材料的体积的体积缩回。