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    • 21. 发明授权
    • Liquid for immersion exposure and immersion exposure method
    • 液体浸渍曝光和浸渍曝光方法
    • US07580111B2
    • 2009-08-25
    • US10588263
    • 2005-05-19
    • Takashi MiyamatsuHiroaki NemotoYong Wang
    • Takashi MiyamatsuHiroaki NemotoYong Wang
    • G03B27/42G03B27/52
    • G03F7/2041
    • An immersion exposure liquid which exhibits a high refractive index, prevents elution and dissolution of a photoresist film or its upper layer film component, and reduces defects during formation of a resist pattern when used in an immersion exposure method, and an immersion exposure method using the immersion exposure liquid. The immersion exposure liquid is used for an immersion exposure device or an immersion exposure method in which a substrate is exposed through a liquid provided between a lens of a projection optical system and the substrate, the immersion exposure liquid being liquid in an operating temperature range of the immersion exposure device and including an alicyclic hydrocarbon compound or a cyclic hydrocarbon compound containing a silicon atom in the ring structure.
    • 表现出高折射率的浸渍曝光液体,防止光刻胶膜或其上层膜成分的溶出和溶解,并且在浸渍曝光方法中使用时减少形成抗蚀剂图案时的缺陷,以及使用 浸渍曝光液体。 浸渍曝光液体用于浸没曝光装置或浸渍曝光方法,其中通过设置在投影光学系统的透镜和基板之间的液体曝光基板,浸没曝光液体在液晶的工作温度范围内 浸渍曝光装置,并且在环结构中包含脂环族烃化合物或含有硅原子的环状烃化合物。
    • 27. 发明申请
    • MAGNETIC RECORDING MEDIUM USING LAYERS HAVING HIGHER- AND LOWER-HK ANISOTROPIC MAGNETIC FIELDS
    • 使用具有高,低HK HKS磁场的层的磁记录介质
    • US20110122525A1
    • 2011-05-26
    • US12938214
    • 2010-11-02
    • Hiroaki NemotoKiwamu TanahashiHiroyuki Nakagawa
    • Hiroaki NemotoKiwamu TanahashiHiroyuki Nakagawa
    • G11B5/66G11B21/02
    • G11B5/65G11B5/66
    • According to one embodiment, a magnetic recording medium includes a magnetic recording layer formed above a substrate, comprising: a first magnetic layer formed from a [Co/Pt]n multilayered film, wherein the first magnetic layer has a face-centered cubic (fcc) (111) crystal structure, the (111) direction being perpendicular to a film surface thereof, and a second magnetic layer comprising a CoCrPt or CoCrPt alloy film formed above the first magnetic layer, wherein the second magnetic layer has a hexagonal close packed (hcp) (00.1) crystal structure, the (00.1) direction being perpendicular to a film surface thereof. According to another embodiment, a system includes a magnetic recording medium as described above, a magnetic head for reading from and/or writing to the magnetic recording medium, a magnetic head slider for supporting the magnetic head, and a control unit coupled to the magnetic head for controlling operation of the magnetic head.
    • 根据一个实施例,磁记录介质包括形成在衬底上的磁记录层,包括:由[Co / Pt] n多层膜形成的第一磁性层,其中第一磁性层具有面心立方(fcc )(111)晶体结构,(111)方向垂直于其膜表面,以及第二磁性层,其包含形成在第一磁性层上方的CoCrPt或CoCrPt合金膜,其中第二磁性层具有六方密堆积 hcp)(00.1)晶体结构,(00.1)方向垂直于其膜表面。 根据另一个实施例,一种系统包括如上所述的磁记录介质,用于从磁记录介质读取和/或写入磁头的磁头,用于支撑磁头的磁头滑块,以及耦合到磁头的控制单元 用于控制磁头的操作。