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    • 23. 发明授权
    • Turbo vacuum pump
    • 涡轮真空泵
    • US08109744B2
    • 2012-02-07
    • US12410780
    • 2009-03-25
    • Hiroyuki KawasakiHiroaki OgaminoHiroshi Sobukawa
    • Hiroyuki KawasakiHiroaki OgaminoHiroshi Sobukawa
    • F04B37/14F04B37/10
    • F04D19/042F04D17/168F04D29/0513F04D29/28
    • An oil-free turbo vacuum pump is capable of evacuating gas in a chamber from atmospheric pressure to high vacuum. The turbo vacuum pump includes a pumping section having rotor blades and stator blades which are disposed alternately in a casing, a main shaft for supporting the rotor blades, and a bearing and motor section having a motor for rotating the main shaft and a bearing mechanism for supporting the main shaft rotatably. A gas bearing is used as a bearing for supporting the main shaft in a thrust direction, spiral grooves are formed in both surfaces of a stationary part of the gas bearing, and the stationary part having the spiral grooves is placed between an upper rotating part and a lower rotating part which are fixed to the main shaft.
    • 无油涡轮真空泵能够将室内的气体从大气压降至高真空。 涡轮真空泵包括具有交替设置在壳体中的转子叶片和定子叶片的泵送部分,用于支撑转子叶片的主轴以及具有用于使主轴旋转的马达的轴承和马达部分以及用于 可旋转地支撑主轴。 气体轴承用作用于沿推力方向支撑主轴的轴承,在气体轴承的静止部分的两个表面上形成螺旋槽,并且具有螺旋槽的固定部分设置在上部旋转部分和 固定在主轴上的下部旋转部。
    • 24. 发明授权
    • Turbo vacuum pump
    • 涡轮真空泵
    • US08087907B2
    • 2012-01-03
    • US12410720
    • 2009-03-25
    • Hiroyuki KawasakiToshimitsu Barada
    • Hiroyuki KawasakiToshimitsu Barada
    • F04B37/14
    • F04D17/168F04D19/042F04D29/0513F04D29/28F16C17/045F16C39/06F16C2360/45
    • An oil-free turbo vacuum pump is capable of evacuating gas in a chamber from atmospheric pressure to high vacuum. The turbo vacuum pump includes a pumping section having rotor blades and stator blades which are disposed alternately in a casing, and a main shaft for supporting the rotor blades. A gas bearing is used as a bearing for supporting the main shaft in a thrust direction, spiral grooves are formed in both surfaces of a stationary part of the gas bearing, and the stationary part having the spiral grooves is placed between an upper rotating part and a lower rotating part which are fixed to the main shaft. A thrust magnetic bearing for canceling out a thrust force generated by the differential pressure between a discharge side and an intake side by an evacuation action of the pumping suction is provided.
    • 无油涡轮真空泵能够将室内的气体从大气压降至高真空。 涡轮真空泵包括具有交替设置在壳体中的转子叶片和定子叶片的泵送部分和用于支撑转子叶片的主轴。 气体轴承用作用于沿推力方向支撑主轴的轴承,在气体轴承的静止部分的两个表面上形成螺旋槽,并且具有螺旋槽的固定部分设置在上部旋转部分和 固定在主轴上的下部旋转部。 提供了一种推力磁轴承,其用于通过抽吸抽吸的排气作用来消除由排出侧和进气侧之间的压差产生的推力。
    • 25. 发明授权
    • Turbo vacuum pump
    • 涡轮真空泵
    • US07645116B2
    • 2010-01-12
    • US11411896
    • 2006-04-27
    • Hiroyuki KawasakiShinichi Sekiguchi
    • Hiroyuki KawasakiShinichi Sekiguchi
    • F01D1/10
    • F04D19/046F04D17/168F04D23/008
    • A turbo vacuum pump of the present invention includes a suction part for sucking gas in an axial direction; a discharge section in which rotating impellers and stationary impellers are alternately arranged; a rotating shaft for rotating the rotating impellers; and a turbine impeller part fixed to the suction side end face of the rotating shaft. The rotating impellers include one or more turbine impellers for discharging the sucked gas in the axial direction, and one or more centrifugal impellers, located downstream of the one or more turbine impellers, for further discharging the discharged gas by a centrifugal drag effect. The one or more centrifugal impellers are fixed to the rotating shaft passing therethrough. The one or more turbine impellers are included in the turbine impeller part.
    • 本发明的涡轮式真空泵包括:用于沿轴向抽吸气体的吸入部; 排出部,其中旋转叶轮和固定叶轮交替布置; 用于旋转旋转叶轮的旋转轴; 以及固定在旋转轴的吸入侧端面的涡轮叶轮部。 旋转的叶轮包括用于沿轴向排出吸入气体的一个或多个涡轮叶轮,以及位于一个或多个涡轮叶轮下游的一个或多个离心式叶轮,用于通过离心牵引效应进一步排出排出的气体。 一个或多个离心式叶轮固定在通过其的旋转轴上。 一个或多个涡轮叶轮包括在涡轮叶轮部分中。
    • 26. 发明申请
    • Turbo vacuum pump
    • 涡轮真空泵
    • US20060263205A1
    • 2006-11-23
    • US11411896
    • 2006-04-27
    • Hiroyuki KawasakiShinichi Sekiguchi
    • Hiroyuki KawasakiShinichi Sekiguchi
    • F04D13/12
    • F04D19/046F04D17/168F04D23/008
    • A turbo vacuum pump 1 of the present invention comprises a suction part 23A for sucking gas in an axial direction; a discharge section 50 in which rotating impellers 70, 24 and stationary impellers 71, 28 are alternately arranged; a rotating shaft 21 for rotating said rotating impellers 70, 24; a turbine impeller part 73 fixed to the suction part side end face 15 of said rotating shaft 21; said rotating impellers 70,24 including one or more turbine impellers 70 for discharging said sucked gas in said axial direction, and one or more centrifugal impellers 24, located downstream of said one or more turbine impellers 70, for further discharging said discharged gas by a centrifugal drag effect; and said one or more centrifugal impellers 24 being fixed to said rotating shaft 21 passing therethrough; said one or more turbine impellers 70 being included in said turbine impeller part 73.
    • 本发明的涡轮式真空泵1具有:沿轴向抽吸气体的吸入部23A; 排出部50,其中旋转叶轮70,24和固定叶轮71,28交替布置; 用于旋转所述旋转叶轮70,24的旋转轴21; 固定在所述旋转轴21的吸附部侧端面15的涡轮叶轮部73; 所述旋转叶轮70,24包括用于沿所述轴向方向排出所述吸入气体的一个或多个涡轮叶轮70和位于所述一个或多个涡轮叶轮70下游的一个或多个离心式叶轮24,用于将所述排出气体进一步排出 离心拖曳效应; 并且所述一个或多个离心式叶轮24固定到通过其的所述旋转轴21; 所述一个或多个涡轮叶轮70包括在所述涡轮叶轮部分73中。
    • 27. 发明授权
    • Turbo-molecular pump
    • 涡轮分子泵
    • US06468030B2
    • 2002-10-22
    • US09883927
    • 2001-06-20
    • Hiroyuki Kawasaki
    • Hiroyuki Kawasaki
    • F04D1904
    • F04D19/046F04D17/168F04D29/28F04D29/30F04D29/4213F04D29/441F04D29/444F05D2250/51
    • A turbo-molecular pump evacuates gas with a rotor that rotates at a high speed. The turbo-molecular pump comprises a casing, a stator fixedly mounted in the casing and having stator blades, a rotor rotatably provided in the casing and having rotor blades alternating with the stator blades, and a radial turbine blade pumping section having a spiral ridge-groove section provided on at least one of surfaces, facing each other, of the stator blade and the rotor blade. At least one of the stator blade and the rotor blade which are located at a first stage of the radial turbine blade pumping section has such a shape that at least one of the stator blade and the rotor blade is smaller in thickness in a direction of gas flow.
    • 涡轮分子泵以高速旋转的转子排出气体。 涡轮分子泵包括壳体,固定地安装在壳体中并具有定子叶片的定子,可旋转地设置在壳体中并具有与定子叶片交替的转子叶片的转子,以及具有螺旋脊 - 所述槽部设置在所述定子叶片和所述转子叶片的彼此面对的至少一个表面上。 位于径向涡轮机叶片泵送部分的第一级的定子叶片和转子叶片中的至少一个具有使得定子叶片和转子叶片中的至少一个在气体方向上的厚度更小的形状 流。
    • 28. 发明授权
    • Vacuum exhaust system
    • 真空排气系统
    • US06382249B1
    • 2002-05-07
    • US09671745
    • 2000-09-29
    • Hiroyuki KawasakiHiroshi Sobukawa
    • Hiroyuki KawasakiHiroshi Sobukawa
    • C23C1600
    • F04D25/00C23C16/4412F04D17/168F04D19/046Y10T137/86139Y10T137/86163
    • A vacuum exhaust system comprising a vacuum chamber; means for introducing a gas into the vacuum chamber; a main pump for exhausting the vacuum chamber and reducing a pressure of the vacuum chamber to a desired pressure; an auxiliary pump disposed downstream from the main pump; and piping for connecting them, wherein an outer diameter of connecting piping as a connection between the main pump and the auxiliary pump is ½ inch (12.7 mm) or less; and a length of the connecting piping and capability of the auxiliary pump are combined so that a back pressure of the main pump becomes 5 Torr or more. This vacuum exhaust system can realize cost reduction through a saving in entire space, simplification of piping construction work, and so on.
    • 一种真空排气系统,包括一个真空室; 用于将气体引入真空室的装置; 用于排出真空室并将真空室的压力降低到所需压力的主泵; 辅助泵设置在主泵的下游; 和用于连接它们的管道,其中作为主泵和辅助泵之间的连接的连接管的外径为1/2英寸(12.7mm)或更小; 并且连接管道的长度和辅助泵的能力被组合,使得主泵的背压变为5托或更大。 该真空排气系统可以通过节省整个空间实现成本降低,简化管道施工工作等。
    • 29. 发明授权
    • Turbo vacuum pump
    • 涡轮真空泵
    • US07938619B2
    • 2011-05-10
    • US12320356
    • 2009-01-23
    • Hiroyuki KawasakiShinichi Sekiguchi
    • Hiroyuki KawasakiShinichi Sekiguchi
    • F01D1/10
    • F04D19/046F04D17/168F04D23/008
    • A turbo vacuum pump of the present invention includes a suction part for sucking gas in an axial direction; a discharge section in which rotating impellers and stationary impellers are alternately arranged; a rotating shaft for rotating the rotating impellers; and a turbine impeller part fixed to the suction side end face of the rotating shaft. The rotating impellers include one or more turbine impellers for discharging the sucked gas in the axial direction, and one or more centrifugal impellers, located downstream of the one or more turbine impellers, for further discharging the discharged gas by a centrifugal drag effect. The one or more centrifugal impellers are fixed to the rotating shaft passing therethrough. The one or more turbine impellers are included in the turbine impeller part.
    • 本发明的涡轮式真空泵包括:用于沿轴向抽吸气体的吸入部; 排出部,其中旋转叶轮和固定叶轮交替布置; 用于旋转旋转叶轮的旋转轴; 以及固定在旋转轴的吸入侧端面的涡轮叶轮部。 旋转的叶轮包括用于沿轴向排出吸入气体的一个或多个涡轮叶轮,以及位于一个或多个涡轮叶轮下游的一个或多个离心式叶轮,用于通过离心牵引效应进一步排出排出的气体。 一个或多个离心式叶轮固定在通过其的旋转轴上。 一个或多个涡轮叶轮包括在涡轮叶轮部分中。
    • 30. 发明申请
    • Turbo vacuum pump
    • 涡轮真空泵
    • US20090142183A1
    • 2009-06-04
    • US12320356
    • 2009-01-23
    • Hiroyuki KawasakiShinichi Sekiguchi
    • Hiroyuki KawasakiShinichi Sekiguchi
    • F04D13/12
    • F04D19/046F04D17/168F04D23/008
    • A turbo vacuum pump of the present invention includes a suction part for sucking gas in an axial direction; a discharge section in which rotating impellers and stationary impellers are alternately arranged; a rotating shaft for rotating the rotating impellers; and a turbine impeller part fixed to the suction side end face of the rotating shaft. The rotating impellers include one or more turbine impellers for discharging the sucked gas in the axial direction, and one or more centrifugal impellers, located downstream of the one or more turbine impellers, for further discharging the discharged gas by a centrifugal drag effect. The one or more centrifugal impellers are fixed to the rotating shaft passing therethrough. The one or more turbine impellers are included in the turbine impeller part.
    • 本发明的涡轮式真空泵包括:用于沿轴向抽吸气体的吸入部; 排出部,其中旋转叶轮和固定叶轮交替布置; 用于旋转旋转叶轮的旋转轴; 以及固定在旋转轴的吸入侧端面的涡轮叶轮部。 旋转的叶轮包括用于沿轴向排出吸入气体的一个或多个涡轮叶轮,以及位于一个或多个涡轮叶轮下游的一个或多个离心式叶轮,用于通过离心牵引效应进一步排出排出的气体。 一个或多个离心式叶轮固定在通过其的旋转轴上。 一个或多个涡轮叶轮包括在涡轮叶轮部分中。