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    • 25. 发明申请
    • PLASMA ETCHING METHOD
    • 等离子体蚀刻法
    • US20140144876A1
    • 2014-05-29
    • US14235857
    • 2012-07-30
    • Akira NakagawaFumio YamazakiHiromi Mochizuki
    • Akira NakagawaFumio YamazakiHiromi Mochizuki
    • H05H1/46
    • H05H1/46H01J37/32091H01J37/32165H01J2237/334H01L21/02164H01L21/3065H01L21/31116H01L21/31144H01L21/32137H01L21/67069
    • A plasma etching method using a plasma etching apparatus including a lower electrode and an upper electrode is provided. The plasma etching method includes a first etching step of performing plasma etching using a first process gas and a second etching step of performing the plasma etching using a second process gas. The adhesion of a radical of the second process gas to an object of processing is less than the adhesion of a radical of the first process gas to the object of processing. While alternately repeating a first condition of turning on high-frequency electric power for plasma generation and a second condition of turning off the high-frequency electric power, the second etching step applies a negative direct-current voltage to the upper electrode so that the absolute value of the applied voltage is greater in a period of the second condition than in a period of the first condition.
    • 提供了使用包括下电极和上电极的等离子体蚀刻装置的等离子体蚀刻方法。 等离子体蚀刻方法包括使用第一处理气体进行等离子体蚀刻的第一蚀刻步骤和使用第二处理气体进行等离子体蚀刻的第二蚀刻步骤。 第二工艺气体的基团与加工对象的粘附小于第一工艺气体的基团与加工对象的粘附。 在交替地重复开启用于等离子体产生的高频电力的第一条件和关闭高频电力的第二条件时,第二蚀刻步骤向上电极施加负的直流电压,使得绝对 施加电压的值在第二状态的期间比在第一状态的期间更大。
    • 27. 发明申请
    • Hierarchical control apparatus of hierarchical storage system and method for maintaining and managing duplexed media
    • 分级存储系统的分级控制装置和用于维护和管理双面媒体的方法
    • US20070276998A1
    • 2007-11-29
    • US11527547
    • 2006-09-27
    • Fumio Yamazaki
    • Fumio Yamazaki
    • G06F12/16
    • G06F11/2094G06F11/2097
    • A control unit of a hierarchical control apparatus holds information in which one of duplexed library apparatuses is set as a master and the other is set as a slave for each medium in each of the duplexed library apparatuses, and statistical information about each of the library apparatuses. The control unit includes an automatic redundant copy unit detecting that a statistical information of a medium reaches a predetermined amount, replacing the medium with a free medium, and copying data to the free medium, a master/slave setting unit setting the medium to which the data is copied and the other medium as a master or a slave such that a load is even between the duplexed library apparatuses according to the statistical information, and a unit copying and reading the requested data to the disk array apparatus by prioritizing one of the duplexed library apparatuses including the medium set as a master when there is no requested data in the disk array apparatus.
    • 分级控制装置的控制单元保存将双工库设备中的一个设置为主设备并将另一个设置为每个双工库设备中的每个介质的从设备的信息,以及关于每个库设备的统计信息 。 控制单元包括检测介质的统计信息达到预定量的自动冗余复制单元,用自由介质替换介质并将数据复制到可用介质;主/从设置单元,其设置为 数据被复制,另一个介质作为主机或从机,使得根据统计信息的双工库设备之间的负载均匀,并且单元通过对双绞线的一个进行优先级来复制和读取所请求的数据到磁盘阵列设备 当在磁盘阵列装置中没有请求的数据时,包括设置为主机的介质的图书馆装置。
    • 30. 发明授权
    • Speed and position signal generator
    • 速度和位置信号发生器
    • US06285184B1
    • 2001-09-04
    • US09257085
    • 1999-02-24
    • Fumio Yamazaki
    • Fumio Yamazaki
    • G01B730
    • G01P3/489G01D5/2451G01P3/481
    • There is provided a speed and position signal generator which operates irrespective of mechanical error, and also operates without any delay of signal transmission. The speed and position signal generator generates A, B phase pulse signals corresponding to a frequency set value and direction setting, and outputs these two phase pulse signals and a Z phase pulse signal corresponding to a teeth number set value, and includes a reference clock generator as a reference, a frequency arithmetic operation circuit, a frequency division circuit for frequency dividing an output phase train from the frequency arithmetic operation circuit, an A, B phase generation circuit for generating A, B phase pulse signals using the frequency division signal, and a Z phase generator circuit for generating a Z phase pulse signal.
    • 提供了速度和位置信号发生器,与机械误差无关地操作,并且在没有信号传输的任何延迟的情况下也进行操作。 速度和位置信号发生器产生对应于频率设定值和方向设定的A相,B相脉冲信号,并且输出这两个相位脉冲信号和对应于齿数设定值的Z相脉冲信号,并且包括参考时钟发生器 作为参考,频率运算电路,用于从频率运算电路分频输出相位串的分频电路,使用分频信号产生A,B相位脉冲信号的A相B产生电路,以及 用于产生Z相脉冲信号的Z相发生器电路。