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    • 26. 发明授权
    • Single and double-gate pseudo-FET devices for semiconductor materials evaluation
    • 用于半导体材料评估的单栅极和双栅极伪FET器件
    • US07682846B2
    • 2010-03-23
    • US12169190
    • 2008-07-08
    • Harold J. HovelThermon E. McKoy
    • Harold J. HovelThermon E. McKoy
    • H01L21/36
    • H01L29/66772G01R31/2648H01L21/28512H01L21/84H01L22/14H01L22/34H01L29/41733H01L29/42384H01L29/458H01L29/66742H01L29/78645H01L29/78648H01L29/78654H01L29/78687H01L31/08H01L2924/3011
    • Several methods and structures are disclosed for determining electrical properties of silicon-on-insulator (SOI) wafers and alternate versions of such wafers such as strained silicon:silicon/germanium:-on-insulator (SSGOI) wafers. The analyzed electrical properties include mobilities, interface state densities, and oxide charge by depositing electrodes on the wafer surface and measuring the current-voltage behavior using these electrodes. In a single gate structure, the source and drain electrodes reside on the wafer surface and the buried insulator acts as the gate oxide, with the substrate acting as the gate electrode. In a double gate structure, an oxide is used on the upper surface between the source and drain electrodes and an additional metal layer is used on top of this oxide to act as a second gate electrode. Light of broad spectrum or specific wavelength may be used to alter electrical carrier densities in the region between the electrodes to further analyze the electrical properties of the material, or alternatively, the device can be used as a detector of light having a wavelength shorter than the bandgap wavelength of the Si surface.
    • 公开了几种方法和结构,用于确定绝缘体上硅(SOI)晶片的电性能以及诸如应变硅:硅/锗:绝缘体(SSGOI)晶片之类的晶片的替代形式。 通过在晶片表面上沉积电极并测量使用这些电极的电流 - 电压行为,所分析的电特性包括迁移率,界面态密度和氧化物电荷。 在单个栅极结构中,源极和漏极位于晶片表面上,埋入的绝缘体用作栅极氧化物,衬底用作栅电极。 在双栅极结构中,在源极和漏极之间的上表面上使用氧化物,并且在该氧化物的顶部上使用附加的金属层作为第二栅电极。 可以使用宽光谱或特定波长的光来改变电极之间的区域中的电载体密度,以进一步分析材料的电学性质,或者替代地,该器件可以用作波长短于 Si表面的带隙波长。
    • 27. 发明授权
    • Single and double-gate pseudo-FET devices for semiconductor materials evaluation
    • 用于半导体材料评估的单栅极和双栅极伪FET器件
    • US07288446B2
    • 2007-10-30
    • US11219919
    • 2005-09-06
    • Harold J. HovelThermon E. McKoy
    • Harold J. HovelThermon E. McKoy
    • H01L21/00H01L21/84
    • H01L29/66772G01R31/2648H01L21/28512H01L21/84H01L22/14H01L22/34H01L29/41733H01L29/42384H01L29/458H01L29/66742H01L29/78645H01L29/78648H01L29/78654H01L29/78687H01L31/08H01L2924/3011
    • Several methods and structures are disclosed for determining electrical properties of silicon-on-insulator (SOI) wafers and alternate versions of such wafers such as strained silicon:silicon/germanium:-on-insulator (SSGOI) wafers. The analyzed electrical properties include mobilities, interface state densities, and oxide charge by depositing electrodes on the wafer surface and measuring the current-voltage behavior using these electrodes, In a single gate structure, the source and drain electrodes reside on the wafer surface and the buried insulator acts as the gate oxide, with the substrate acting as the gate electrode. In a double gate structure, an oxide is used on the upper surface between the source and drain electrodes and an additional metal layer is used on top of this oxide to act as a second gate electrode. Light of broad spectrum or specific wavelength may be used to alter electrical carrier densities in the region between the electrodes to further analyze the electrical properties of the material, or alternatively, the device can be used as a detector of light having a wavelength shorter than the bandgap wavelength of the Si surface.
    • 公开了几种方法和结构,用于确定绝缘体上硅(SOI)晶片的电性能以及诸如应变硅:硅/锗:绝缘体(SSGOI)晶片之类的晶片的替代形式。 分析的电气特性包括迁移率,界面态密度和通过在晶片表面上沉积电极并测量使用这些电极的电流 - 电压行为的氧化物电荷。在单个栅极结构中,源极和漏极驻留在晶片表面上,并且 掩埋绝缘体用作栅极氧化物,其中衬底用作栅电极。 在双栅极结构中,在源极和漏极之间的上表面上使用氧化物,并且在该氧化物的顶部上使用附加的金属层作为第二栅电极。 可以使用宽光谱或特定波长的光来改变电极之间的区域中的电载体密度,以进一步分析材料的电学性质,或者替代地,该器件可以用作波长短于 Si表面的带隙波长。