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    • 24. 发明申请
    • APPARATUS FOR MANUFACTURING SEMICONDUCTOR WAFER
    • 制造半导体波形的装置
    • US20130160261A1
    • 2013-06-27
    • US13701880
    • 2012-06-13
    • Hongyu ZhaoXiaohong ZhangLikun PeiBao ZhangRuiting Wang
    • Hongyu ZhaoXiaohong ZhangLikun PeiBao ZhangRuiting Wang
    • H01L21/677
    • H01L21/67769H01L21/67017H01L21/67742H01L21/67766Y10T29/41
    • The present invention provides an apparatus for manufacturing semiconductor wafer comprising at least two manipulators, at least one set of chemical gas/liquid distribution unit and an air circulating and filtering unit. The air circulating and filtering unit is separated into three regions, including the front region, the middle region, and the side region, which are controlled by respective control electric motors to achieve uniform air flow and uniform pressure in the respective regions. The cleaning degree in the internal of the apparatus can be improved by the regional control of the air circulating and filtering unit; the wafer transport efficiency can be enhanced by the double-armed manipulators having multiple degrees of freedom; and the product yield per unit area can be increased by the chemical gas/liquid distribution unit providing stable and uniform gas/liquid flow and pressure.
    • 本发明提供了一种用于制造半导体晶片的装置,其包括至少两个操纵器,至少一组化学气体/液体分配单元和空气循环和过滤单元。 空气循环和过滤单元被分为包括前区域,中间区域和侧区域的三个区域,这三个区域由相应的控制电动机控制,以在各个区域中实现均匀的气流和均匀的压力。 通过空气循环和过滤单元的区域控制可以改善设备内部的清洁度; 可以通过具有多个自由度的双臂操纵器来提高晶片输送效率; 可以通过化学气体/液体分配单元提高单位面积的产品产量,提供稳定和均匀的气/液流量和压力。
    • 26. 发明申请
    • Process For Synthesis of 9,9'-Dianthracene
    • 9,9'-二蒽的合成方法
    • US20120065445A1
    • 2012-03-15
    • US13321799
    • 2010-05-05
    • Lifei CaiLei DaiHongyu Zhao
    • Lifei CaiLei DaiHongyu Zhao
    • C07C1/20
    • C07C1/2076C07C2523/06C07C2527/11C07C2531/04C07C2603/90C07C13/605
    • This invention, which involves “the synthetic method of 9, 9′-biantnthracine”, belongs to the field of synthetic technology of organic electroluminesent materials. Synthetic method of 9, 9′-bianthracine is to add anthraquinone as raw material and zinc as reducing agent in glacial acetic acid solution, then batch addition of hydrochloric acid at 70-120°, maintain the temperature unchanged and react, then 9, 9′-bianthracine is achieved. This invention uses one-step method to synthesize 9, 9′-bianthracine, which reduces not only cost but also generation of side products, in addition, the products obtained need no purification and can be directly used to synthesize related similar compounds, therefore, it is very suitable for large-scale industrial production.
    • 本发明涉及“9,9-双蒽”的合成方法,属于有机电致发光材料合成技术领域。 9,9'-双蒽的合成方法是在冰醋酸溶液中加入蒽醌作为原料,还加入锌作为还原剂,然后在70-120℃下分批加入盐酸,保持温度不变,反应9,9 实现了“ - ” - 本发明使用一步法合成9,9'-双蒽并不仅降低成本而且降低副产物的产生,此外,所得产物不需要纯化,可直接用于合成相关的相似化合物,因此, 非常适合大型工业生产。