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    • 25. 发明授权
    • Sensor package and method of forming same
    • 传感器封装及其形成方法
    • US09040355B2
    • 2015-05-26
    • US13546902
    • 2012-07-11
    • Philip H. BowlesPaige M. HolmStephen R. HooperRaymond M. Roop
    • Philip H. BowlesPaige M. HolmStephen R. HooperRaymond M. Roop
    • H01L21/00B81B7/00B81C1/00
    • B81B7/0006B81B7/0077B81B2201/02B81C1/0023H01L2224/48091H01L2224/48464H01L2924/1461H01L2924/00014H01L2924/00
    • A method (70) of forming sensor packages (20) entails providing a sensor wafer (74) having sensors (30) formed on a side (26) positioned within areas (34) delineated by bonding perimeters (36), and providing a controller wafer (82) having control circuitry (42) at one side (38) and bonding perimeters (46) on an opposing side (40). The bonding perimeters (46) of the controller wafer (82) are bonded to corresponding bonding perimeters (36) of the sensor wafer (74) to form a stacked wafer structure (48) in which the control circuitry (42) faces outwardly. The controller wafer (82) is sawn to reveal bond pads (32) on the sensor wafer (74) which are wire bonded to corresponding bond pads (44) formed on the same side (38) of the wafer (82) as the control circuitry (42). The structure (48) is encapsulated in packaging material (62) and is singulated to produce the sensor packages (20).
    • 形成传感器封装(20)的方法(70)需要提供传感器晶片(74),传感器晶片(74)具有形成在位于通过接合周边(36)所描绘的区域(34)内的侧面(26)上的传感器(30),并且提供控制器 具有在一侧(38)处的控制电路(42)和在相对侧(40)上的接合周边(46)的晶片(82)。 控制器晶片(82)的接合周边(46)被接合到传感器晶片(74)的对应的接合周边(36),以形成其中控制电路(42)面向外的堆叠的晶片结构(48)。 锯切控制器晶片(82)以露出传感器晶片(74)上的接合焊盘(32),该接合焊盘引线键合到形成在晶片(82)的同一侧(38)上的对应接合焊盘(44) 电路(42)。 结构(48)被封装在包装材料(62)中,并被分割以产生传感器封装(20)。
    • 26. 发明申请
    • SENSOR PACKAGING METHOD AND SENSOR PACKAGES
    • 传感器包装方法和传感器包装
    • US20140124958A1
    • 2014-05-08
    • US14151305
    • 2014-01-09
    • Philip H. BowlesPaige M. HolmStephen R. HooperRaymond M. Roop
    • Philip H. BowlesPaige M. HolmStephen R. HooperRaymond M. Roop
    • H01L23/528
    • H01L23/528B81C1/0023B81C1/00238B81C2201/019B81C2203/0792H01L2224/48091H01L2924/1461H01L2924/00014H01L2924/00
    • A method (80) entails providing (82) a structure (117), providing (100) a controller element (102, 24), and bonding (116) the controller element to an outer surface (52, 64) of the structure. The structure includes a sensor wafer (92) and a cap wafer (94) Inner surfaces (34, 36) of the wafers (92, 94) are coupled together, with sensors (30) interposed between the wafers. One wafer (94, 92) includes a substrate portion (40, 76) with bond pads (42) formed on its inner surface (34, 36). The other wafer (94, 92) conceals the substrate portion (40, 76). After bonding, methodology (80) entails forming (120) conductive elements (60) on the element (102, 24), removing (126) material sections (96, 98, 107) from the wafers to expose the bond pads, forming (130) electrical interconnects (56), applying (134) packaging material (64), and singulating (138) to produce sensor packages (20, 70).
    • 方法(80)需要提供(82)结构(117),提供(100)控制器元件(102,24),并将控制器元件(116)结合(116)到结构的外表面(52,64)。 该结构包括传感器晶片(92)和盖晶片(94)晶片(92,94)的内表面(34,36)被耦合在一起,传感器(30)插入晶片之间。 一个晶片(94,92)包括具有形成在其内表面(34,36)上的接合焊盘(42)的衬底部分(40,76)。 另一个晶片(94,92)隐藏基板部分(40,76)。 在结合之后,方法学(80)需要在元件(102,24)上形成(120)导电元件(60),从晶片去除(126)材料部分(96,98,107)以暴露接合焊盘,形成 130)电互连(56),施加(134)包装材料(64)和单分离(138)以产生传感器封装(20,70)。
    • 27. 发明申请
    • SENSOR PACKAGING METHOD AND SENSOR PACKAGES
    • 传感器包装方法和传感器包装
    • US20140061948A1
    • 2014-03-06
    • US13597824
    • 2012-08-29
    • Philip H. BowlesPaige M. HolmStephen R. HooperRaymond M. Roop
    • Philip H. BowlesPaige M. HolmStephen R. HooperRaymond M. Roop
    • H01L23/52H01L21/50
    • H01L23/528B81C1/0023B81C1/00238B81C2201/019B81C2203/0792H01L2224/48091H01L2924/1461H01L2924/00014H01L2924/00
    • A method (80) entails providing (82) a structure (117), providing (100) a controller element (102, 24), and bonding (116) the controller element to an outer surface (52, 64) of the structure (117). The structure includes a sensor wafer (92) and a cap wafer (94). Inner surfaces (34, 36) of the wafers (92, 94) are coupled together, with sensors (30) interposed between the wafers (92, 94). One wafer (94, 92) includes a substrate portion (40, 76) with bond pads (42) formed on its inner surface (34, 36). The other wafer (94, 92) conceals the substrate portion (40, 76). After bonding, methodology (80) entails forming (120) conductive elements (60) on the element (102, 24), removing (126) material sections (96, 98, 107) from the wafers (92, 94, 102) to expose the bond pads (42), forming (130) electrical interconnects (56), applying (134) packaging material (64), and singulating (138) to produce sensor packages (20, 70).
    • 方法(80)需要提供(82)结构(117),提供(100)控制器元件(102,24),并且将所述控制器元件(116)结合(116)到所述结构的外表面(52,64) 117)。 该结构包括传感器晶片(92)和盖晶片(94)。 晶片(92,94)的内表面(34,36)被耦合在一起,传感器(30)置于晶片(92,94)之间。 一个晶片(94,92)包括具有形成在其内表面(34,36)上的接合焊盘(42)的衬底部分(40,76)。 另一个晶片(94,92)隐藏基板部分(40,76)。 在键合之后,方法(80)需要在元件(102,24)上形成(120)导电元件(60),将材料部分(96,98,107)从晶片(92,94,107)移除到 露出接合焊盘(42),形成(130)电互连(56),施加(134)包装材料(64)和单分离(138)以产生传感器封装(20,70)。
    • 29. 发明授权
    • LED display packaging with substrate removal and method of fabrication
    • LED显示包装与基板去除及其制造方法
    • US5780321A
    • 1998-07-14
    • US699263
    • 1996-08-19
    • Chan-Long ShiehHsing-Chung LeePaige M. Holm
    • Chan-Long ShiehHsing-Chung LeePaige M. Holm
    • H01L21/60G09F9/33H01L25/16H01L27/15H01L33/00H01L21/00
    • H01L27/156H01L25/162H01L25/167H01L2924/0002
    • A light emitting diode display package and method of fabricating a light emitting diode (LED) display package including a light emitting diode array on a substrate, having row and column connection pads routed to display connection pads positioned on an uppermost surface of the LED array device, a separate silicon driver device having connection pads routed to an uppermost surface, positioned to cooperatively meet those of the LED device when properly registered, the LED device flip chip bump bonded to the driver device using standard C5 DCA, an underfill layer positioned between the space defined by the LED device and the driver device. The LED display and driver device package subsequently having selectively removed the substrate onto which the LED array was initially formed. The light emitted from the LED display device, being emitted through the remaining indium-gallium-aluminum-phosphide (InGaAlP) epilayer of the LED device.
    • 一种发光二极管显示器封装以及制造在衬底上包括发光二极管阵列的发光二极管(LED)显示器封装的方法,所述发光二极管阵列具有布置成显示位于所述LED阵列器件的最上表面上的连接焊盘的行和列连接焊盘 ,具有连接到最上表面的连接焊盘的单独的硅驱动器装置,其被定位成在正确地注册时协同地与LED器件的那些耦合,使用标准C5 DCA将LED装置倒装芯片凸块结合到驱动器装置,底部填充层位于 LED设备和驱动器设备定义的空间。 LED显示器和驱动器件封装件随后选择性地去除了最初形成LED阵列的衬底。 从LED显示装置发射的光通过LED装置的剩余的铟 - 镓 - 铝 - 磷化物(InGaAlP)外延层发射。
    • 30. 发明授权
    • Light emitting diode display package
    • 发光二极管显示封装
    • US5621225A
    • 1997-04-15
    • US599434
    • 1996-01-18
    • Chan-Long ShiehHsing-Chung LeePaige M. Holm
    • Chan-Long ShiehHsing-Chung LeePaige M. Holm
    • H01L21/60G09F9/33H01L25/16H01L27/15H01L33/00H01L23/48
    • H01L27/156H01L25/162H01L25/167H01L2924/0002
    • A light emitting diode display package and method of fabricating a light emitting diode (LED) display package including a light emitting diode array on a substrate, having row and column connection pads routed to display connection pads positioned on an uppermost surface of the LED array device, a separate silicon driver device having connection pads routed to an uppermost surface, positioned to cooperatively meet those of the LED device when properly registered, the LED device flip chip bump bonded to the driver device using standard C5 DCA, an underfill layer positioned between the space defined by the LED device and the driver device. The LED display and driver device package subsequently having selectively removed the substrate onto which the LED array was initially formed. The light emitted from the LED display device, being emitted through the remaining indium-gallium-aluminum-phosphide (InGaAlP) epilayer of the LED device.
    • 一种发光二极管显示器封装以及制造在衬底上包括发光二极管阵列的发光二极管(LED)显示器封装的方法,所述发光二极管阵列具有布置成显示位于所述LED阵列器件的最上表面上的连接焊盘的行和列连接焊盘 ,具有连接到最上表面的连接焊盘的单独的硅驱动器器件,其被定位成在正确地注册时协同地与LED器件的LED器件匹配,使用标准C5 DCA将LED器件倒装芯片凸块结合到驱动器器件,底部填充层位于 LED设备和驱动器设备定义的空间。 LED显示器和驱动器件封装件随后选择性地去除了最初形成LED阵列的衬底。 从LED显示装置发射的光通过LED装置的剩余的铟 - 镓 - 铝 - 磷化物(InGaAlP)外延层发射。