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    • 24. 发明授权
    • Metal-insulator-metal capacitor
    • 金属绝缘体金属电容器
    • US07700988B2
    • 2010-04-20
    • US11386362
    • 2006-03-21
    • Cha-Hsin LinChing-Chiun WangLurng-Shehng Lee
    • Cha-Hsin LinChing-Chiun WangLurng-Shehng Lee
    • H01L27/108H01L29/94
    • H01L28/56H01L21/02186H01L21/022H01L21/31604
    • A metal-insulator-metal (MIM) capacitor having a top electrode, a bottom electrode and a capacitor dielectric layer is provided. The top electrode is located over the bottom electrode and the capacitor dielectric layer is disposed between the top and the bottom electrode. The capacitor dielectric layer comprises several titanium oxide (TiO2) layers and at least one tetragonal structure material layer. The tetragonal structure material layer is disposed between two titanium oxide layers and each tetragonal structure material layer has the same or a different thickness. Leakage path can be cut off through the tetragonal material layer between the titanium oxide layers. In the meantime, the tetragonal structure material layer can induce the titanium oxide layers to transform into a high k rutile phase.
    • 提供了具有顶部电极,底部电极和电容器电介质层的金属 - 绝缘体金属(MIM)电容器。 顶部电极位于底部电极之上,并且电容器介电层设置在顶部和底部电极之间。 电容器介电层包括几个氧化钛(TiO 2)层和至少一个四方结构材料层。 四方结构材料层设置在两个氧化钛层之间,每个四边形结构材料层具有相同或不同的厚度。 可以通过钛氧化物层之间的四方材料层来切断泄漏路径。 同时,四方结构材料层可以诱导氧化钛层转变成高k金红石相。