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21. 发明申请

US20090027660A1 OPTICAL SPOT GEOMETRIC PARAMETER DETERMINATION USING CALIBRATION TARGETS 审中-公开
标题翻译：使用校准目标的光点几何参数确定
公开(公告)号：US20090027660A1
公开(公告)日：2009-01-29
申请号：US12173857
申请日：2008-07-16
申请人： Shahin Zangooie , Roger M. Young , Lin Zhou , Clemente Bottini , Ronald D. Fiege
发明人： Shahin Zangooie , Roger M. Young , Lin Zhou , Clemente Bottini , Ronald D. Fiege
IPC分类号： G01B9/08
CPC分类号： G03F7/70516
摘要： A method, system and computer program product for determining a geometric parameter of an optical spot of a light beam are disclosed. A method comprises: providing a calibration target, the calibration target including a systematic variation in a parameter; measuring the calibration target with respect to the systematic variation using the light beam to obtain a plurality of measurements; and analyzing the measurements and the systematic variation to determine the geometric parameter of the optical spot.
摘要翻译：公开了一种用于确定光束的光点的几何参数的方法，系统和计算机程序产品。一种方法包括：提供校准目标，所述校准目标包括参数中的系统变化; 使用光束测量相对于系统变化的校准目标以获得多个测量值; 并分析测量和系统变化，以确定光点的几何参数。

22. 发明授权

US07478019B2 Multiple tool and structure analysis 有权
标题翻译：多重工具和结构分析
公开(公告)号：US07478019B2
公开(公告)日：2009-01-13
申请号：US11043196
申请日：2005-01-26
申请人： Shahin Zangooie , Youxian Wen , Heath Pois , Jon Opsal
发明人： Shahin Zangooie , Youxian Wen , Heath Pois , Jon Opsal
IPC分类号： G06F17/10
CPC分类号： G01B11/0625 , G05B13/024 , G05B15/02
摘要： Measurement data sets for optical metrology systems can be processed in parallel using Multiple Tool and Structure Analysis (MTSA). In an MTSA procedure, at least one parameter that is common to the data sets can be coupled as a global parameter. Setting this parameter as global allows a regression on each data set to contain fewer fitting parameters, making the process is less complex, requiring less processing capacity, and providing more accurate results. MTSA can analyze multiple structures measured on a single tool, or a single structure measured on separate tools. For a multiple tool recipe, a minimized regression solution can be applied back to each tool to determine whether the recipe is optimized. If the recipe does not provide accurate results for each tool, search parameters and/or spaces can be modified in an iterative manner until an optimized solution is obtained that provides acceptable solutions on each tool.
摘要翻译：光学测量系统的测量数据集可以使用多工具和结构分析（MTSA）并行处理。在MTSA过程中，数据集共有的至少一个参数可以作为全局参数进行耦合。将此参数设置为全局允许每个数据集的回归包含较少的拟合参数，使得该过程不太复杂，需要较少的处理能力，并提供更准确的结果。 MTSA可以分析在单个工具上测量的多个结构，或分析在单独工具上测量的单个结构。对于多重工具配方，可以将最小化回归解决方案应用回每个工具以确定配方是否被优化。如果配方不能为每个工具提供准确的结果，则可以以迭代的方式修改搜索参数和/或空格，直到获得优化的解决方案，为每个工具提供可接受的解决方案。

23. 发明申请

US20090009763A1 FLIPPING STAGE ARRANGEMENT FOR REDUCED WAFER CONTAMINATION CROSS SECTION AND IMPROVED MEASUREMENT ACCURACY AND THROUGHPUT 失效
标题翻译：减少波浪污染的转运阶段安排交叉部分和改进的测量精度和通过率
公开(公告)号：US20090009763A1
公开(公告)日：2009-01-08
申请号：US11772838
申请日：2007-07-03
申请人： Shahin Zangooie , Lin Zhou , Roger M. Young , Clemente Bottini , Robert J. Foster , Ronald D. Fiege
发明人： Shahin Zangooie , Lin Zhou , Roger M. Young , Clemente Bottini , Robert J. Foster , Ronald D. Fiege
IPC分类号： G01J3/45 , G01B11/14 , G01B11/30
CPC分类号： G01N21/9501
摘要： A sample stage for performing measurements using an optical metrology system includes at least one sample section for retention of a sample, and components for controlling orientation of the sample section with relation to the optical metrology system. A method and a computer program product are provided.
摘要翻译：用于使用光学测量系统进行测量的样品台包括用于保持样品的至少一个样品部分和用于控制样品部分相对于光学测量系统的取向的部件。提供了一种方法和计算机程序产品。

24. 发明申请

US20060167651A1 Multiple tool and structure analysis 有权
公开(公告)号：US20060167651A1
公开(公告)日：2006-07-27
申请号：US11043196
申请日：2005-01-26
申请人： Shahin Zangooie , Youxian Wen , Heath Pois , Jon Opsal
发明人： Shahin Zangooie , Youxian Wen , Heath Pois , Jon Opsal
IPC分类号： G06F17/18
CPC分类号： G01B11/0625 , G05B13/024 , G05B15/02
摘要： Measurement data sets for optical metrology systems can be processed in parallel using Multiple Tool and Structure Analysis (MTSA). In an MTSA procedure, at least one parameter that is common to the data sets can be coupled as a global parameter. Setting this parameter as global allows a regression on each data set to contain fewer fitting parameters, making the process is less complex, requiring less processing capacity, and providing more accurate results. MTSA can analyze multiple structures measured on a single tool, or a single structure measured on separate tools. For a multiple tool recipe, a minimized regression solution can be applied back to each tool to determine whether the recipe is optimized. If the recipe does not provide accurate results for each tool, search parameters and/or spaces can be modified in an iterative manner until an optimized solution is obtained that provides acceptable solutions on each tool.

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