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    • 27. 发明授权
    • Electrostatic nanolithography probe actuation device and method
    • 静电纳米光刻探头致动装置及方法
    • US07247895B2
    • 2007-07-24
    • US11377629
    • 2006-03-16
    • Chang LiuDavid Andrew Bullen
    • Chang LiuDavid Andrew Bullen
    • H01L27/148H01L29/768
    • G01Q70/06G01Q70/16G01Q80/00G03F7/0002
    • Method and apparatus for selectively actuating a cantilevered probe for applying a compound to a substrate in nanolithography. A probe having a probe electrode and a substrate having a counter electrode are provided. Voltage applied to the probe electrode and/or counter electrode provides electrostatic attraction between them, moving a probe tip into sufficient proximity to the substrate to apply the patterning compound. Alternatively, a flexible cantilevered probe anchored to a holder includes a layer of conductive material forming a probe electrode. A counter electrode on the holder faces the probe electrode. The holder and probe are positioned so that a probe tip applies the compound to the substrate. The probe is disposed between the substrate and the counter electrode. An electrostatic attractive force generated between the probe electrode and the counter electrode flexes the probe and lifts the tip away from the substrate to suspend writing.
    • 用于在纳米光刻中选择性地致动用于将化合物施加到基底的悬臂探针的方法和装置。 提供具有探针电极和具有对电极的基板的探针。 施加到探针电极和/或对电极的电压在它们之间提供静电吸引,将探针尖端移动到足够接近衬底以施加图案化化合物。 或者,固定到保持器的柔性悬臂式探针包括形成探针电极的导电材料层。 保持器上的对电极面向探针电极。 定位器和探针被定位成使得探针尖端将化合物施加到基底上。 探针设置在基板和对置电极之间。 在探针电极和对置电极之间产生的静电吸引力使探针弯曲并将尖端远离衬底提升以暂停写入。