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21. 发明授权

US08269137B2 Link processing with high speed beam deflection 有权
标题翻译：链接处理与高速光束偏转
公开(公告)号：US08269137B2
公开(公告)日：2012-09-18
申请号：US12233476
申请日：2008-09-18
申请人： Jonathan S. Ehrmann , Joseph J. Griffiths , James J. Cordingley , Donald J. Svetkoff , Shepard D. Johnson , Michael Plotkin
发明人： Jonathan S. Ehrmann , Joseph J. Griffiths , James J. Cordingley , Donald J. Svetkoff , Shepard D. Johnson , Michael Plotkin
IPC分类号： B23K26/36
CPC分类号： B23K26/0869 , B23K26/0344 , B23K26/06 , B23K26/0624 , B23K26/064 , B23K26/0648 , B23K26/0665 , B23K26/082 , B23K26/0853 , B23K26/361 , B23K26/40 , B23K2101/40 , B23K2103/16 , B23K2103/50 , H01L21/76894 , H01L23/5258 , H01L27/10844 , H01L2924/0002 , Y10T29/49156 , H01L2924/00
摘要： The present invention relates to the field of laser processing methods and systems, and specifically, to laser processing methods and systems for laser processing multi-material devices. Systems and methods may utilize high speed deflectors to improve processing energy window and/or improve processing speed. In some embodiments, a deflector is used for non-orthogonal scanning of beam spots. In some embodiment, a deflector is used to implement non-synchronous processing of target structures.
摘要翻译：本发明涉及激光加工方法和系统的领域，具体涉及用于激光加工多材料装置的激光加工方法和系统。系统和方法可以利用高速偏转器来改善处理能量窗口和/或提高处理速度。在一些实施例中，偏转器用于束斑的非正交扫描。在一些实施例中，偏转器用于实现目标结构的非同步处理。

22. 发明授权

US07955905B2 Methods and systems for thermal-based laser processing a multi-material device 有权
公开(公告)号：US07955905B2
公开(公告)日：2011-06-07
申请号：US11643023
申请日：2006-12-20
申请人： James J. Cordingley , Jonathan S. Ehrmann , David M. Filgas , Shepard D. Johnson , Joohan Lee , Donald V. Smart , Donald J. Svetkoff
发明人： James J. Cordingley , Jonathan S. Ehrmann , David M. Filgas , Shepard D. Johnson , Joohan Lee , Donald V. Smart , Donald J. Svetkoff
IPC分类号： H01L21/00 , B23K26/00 , B23K26/08 , B23K26/36
CPC分类号： B23K26/0736 , B23K26/032 , B23K26/04 , B23K26/043 , B23K26/0613 , B23K26/0622 , B23K26/0624 , B23K26/064 , B23K26/0643 , B23K26/0648 , B23K26/0652 , B23K26/0665 , B23K26/067 , B23K26/082 , B23K26/10 , B23K26/16 , B23K26/361 , B23K26/389 , B23K26/40 , B23K2101/38 , B23K2101/40 , B23K2103/10 , B23K2103/12 , B23K2103/172 , B23K2103/50 , H01L21/485 , H01L21/76888 , H01L21/76894 , H01L22/12 , H01L23/5258 , H01L2924/0002 , H05K3/0026 , H01L2924/00
摘要： A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided. The method includes providing information based on a model of laser pulse interactions with the predetermined microstructure, the substrate and the other structures. At least one characteristic of at least one pulse is determined based on the information. A pulsed laser beam is generated including the at least one pulse. The method further includes irradiating the at least one pulse having the at least one determined characteristic into a spot on the predetermined microstructure. The at least one determined characteristic and other characteristics of the at least one pulse are sufficient to locally process the predetermined microstructure without causing the undesirable changes.

23. 发明申请

US20090095722A1 LINK PROCESSING WITH HIGH SPEED BEAM DEFLECTION 有权
标题翻译：具有高速光束偏转的链接处理
公开(公告)号：US20090095722A1
公开(公告)日：2009-04-16
申请号：US12233476
申请日：2008-09-18
申请人： Jonathan S. Ehrmann , Joseph J. Griffiths , James J. Cordingley , Donald J. Svetkoff , Shepard D. Johnson , Michael Plotkin
发明人： Jonathan S. Ehrmann , Joseph J. Griffiths , James J. Cordingley , Donald J. Svetkoff , Shepard D. Johnson , Michael Plotkin
IPC分类号： B23K26/36
CPC分类号： B23K26/0869 , B23K26/0344 , B23K26/06 , B23K26/0624 , B23K26/064 , B23K26/0648 , B23K26/0665 , B23K26/082 , B23K26/0853 , B23K26/361 , B23K26/40 , B23K2101/40 , B23K2103/16 , B23K2103/50 , H01L21/76894 , H01L23/5258 , H01L27/10844 , H01L2924/0002 , Y10T29/49156 , H01L2924/00
摘要： The present invention relates to the field of laser processing methods and systems, and specifically, to laser processing methods and systems for laser processing multi-material devices. Systems and methods may utilize high speed deflectors to improve processing energy window and/or improve processing speed. In some embodiments, a deflector is used for non-orthogonal scanning of beam spots. In some embodiment, a deflector is used to implement non-synchronous processing of target structures.
摘要翻译：本发明涉及激光加工方法和系统的领域，具体涉及用于激光加工多材料装置的激光加工方法和系统。系统和方法可以利用高速偏转器来改善处理能量窗口和/或提高处理速度。在一些实施例中，偏转器用于束斑的非正交扫描。在一些实施例中，偏转器用于实现目标结构的非同步处理。

24. 发明授权

US07394476B2 Methods and systems for thermal-based laser processing a multi-material device 有权
标题翻译：用于热基激光加工多材料装置的方法和系统
公开(公告)号：US07394476B2
公开(公告)日：2008-07-01
申请号：US11415547
申请日：2006-05-02
申请人： James J. Cordingley , Jonathan S. Ehrmann , Joseph J. Griffiths , Shepard D. Johnson , Joohan Lee , Donald V. Smart , Donald J. Svetkoff
发明人： James J. Cordingley , Jonathan S. Ehrmann , Joseph J. Griffiths , Shepard D. Johnson , Joohan Lee , Donald V. Smart , Donald J. Svetkoff
IPC分类号： B41J2/435 , B23K26/00
CPC分类号： B23K26/0736 , B23K26/032 , B23K26/04 , B23K26/043 , B23K26/0613 , B23K26/0622 , B23K26/0624 , B23K26/064 , B23K26/0643 , B23K26/0648 , B23K26/0652 , B23K26/0665 , B23K26/067 , B23K26/082 , B23K26/10 , B23K26/16 , B23K26/361 , B23K26/389 , B23K26/40 , B23K2101/38 , B23K2101/40 , B23K2103/10 , B23K2103/12 , B23K2103/172 , B23K2103/50 , H01L21/485 , H01L21/76888 , H01L21/76894 , H01L22/12 , H01L23/5258 , H01L2924/0002 , H05K3/0026 , H01L2924/00
摘要： A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided. The method includes providing information based on a model of laser pulse interactions with the predetermined microstructure, the substrate and the other structures. At least one characteristic of at least one pulse is determined based on the information. A pulsed laser beam is generated including the at least one pulse. The method further includes irradiating the at least one pulse having the at least one determined characteristic into a spot on the predetermined microstructure. The at least one determined characteristic and other characteristics of the at least one pulse are sufficient to locally process the predetermined microstructure without causing the undesirable changes.
摘要翻译：提供一种用于局部处理形成在基板上的预定微结构而不引起基板或其上形成在基板上的其它结构的电学或物理特性的不期望的变化的方法和系统。该方法包括基于与预定微结构，衬底和其它结构的激光脉冲相互作用的模型来提供信息。基于该信息确定至少一个脉冲的至少一个特性。生成包括至少一个脉冲的脉冲激光束。该方法还包括将具有至少一个确定特性的至少一个脉冲照射到预定微结构上的点中。所述至少一个脉冲的至少一个确定的特征和其它特征足以在不引起不期望的变化的情况下局部地处理预定的微结构。

25. 发明授权

US07382389B2 Methods and systems for thermal-based laser processing a multi-material device 有权
公开(公告)号：US07382389B2
公开(公告)日：2008-06-03
申请号：US11593797
申请日：2006-11-07
申请人： James J. Cordingley , Jonathan S. Ehrmann , David M. Filgas , Shepard D. Johnson , Joohan Lee , Donald V. Smart , Donald J. Svetkoff
发明人： James J. Cordingley , Jonathan S. Ehrmann , David M. Filgas , Shepard D. Johnson , Joohan Lee , Donald V. Smart , Donald J. Svetkoff
IPC分类号： B41J2/435 , B23K26/00
CPC分类号： B23K26/0736 , B23K26/032 , B23K26/04 , B23K26/043 , B23K26/0613 , B23K26/0622 , B23K26/0624 , B23K26/064 , B23K26/0643 , B23K26/0648 , B23K26/0652 , B23K26/0665 , B23K26/067 , B23K26/082 , B23K26/10 , B23K26/16 , B23K26/361 , B23K26/389 , B23K26/40 , B23K2101/38 , B23K2101/40 , B23K2103/10 , B23K2103/12 , B23K2103/172 , B23K2103/50 , H01L21/485 , H01L21/76888 , H01L21/76894 , H01L22/12 , H01L23/5258 , H01L2924/0002 , H05K3/0026 , H01L2924/00
摘要： A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided. The method includes providing information based on a model of laser pulse interactions with the predetermined microstructure, the substrate and the other structures. At least one characteristic of at least one pulse is determined based on the information. A pulsed laser beam is generated including the at least one pulse. The method further includes irradiating the at least one pulse having the at least one determined characteristic into a spot on the predetermined microstructure. The at least one determined characteristic and other characteristics of the at least one pulse are sufficient to locally process the predetermined microstructure without causing the undesirable changes.

26. 发明授权

US08084706B2 System and method for laser processing at non-constant velocities 失效
标题翻译：非恒定速度激光加工的系统和方法
公开(公告)号：US08084706B2
公开(公告)日：2011-12-27
申请号：US11532160
申请日：2006-09-15
申请人： Shepard D. Johnson , Bo Gu
发明人： Shepard D. Johnson , Bo Gu
IPC分类号： B23K26/00 , H01L21/331
CPC分类号： H01L23/5258 , B23K26/0624 , B23K26/0853 , B23K2101/40 , H01L2924/0002 , H01L2924/00
摘要： A method is disclosed for on-the-fly processing at least one structure of a group of structures with a pulsed laser output. The method includes the steps of relatively positioning the group of structures and the pulsed laser output axis with non-constant velocity, and applying the pulsed laser output to the at least one structure of the group of structures during the step of relatively positioning the group of structures and the pulsed laser output axis with non-constant velocity.
摘要翻译：公开了一种用于对具有脉冲激光输出的一组结构的至少一个结构进行即时处理的方法。该方法包括以非等速度相对地定位该组结构和脉冲激光输出轴的步骤，并且在相对定位组的步骤期间将脉冲激光输出施加到该组结构的至少一个结构中结构和具有非恒定速度的脉冲激光输出轴。

27. 发明申请

US20080029491A1 SYSTEM AND METHOD FOR LASER PROCESSING AT NON-CONSTANT VELOCITIES 失效
标题翻译：用于激光加工的非恒定速度的系统和方法
公开(公告)号：US20080029491A1
公开(公告)日：2008-02-07
申请号：US11532160
申请日：2006-09-15
申请人： Shepard D. Johnson , Bo Gu
发明人： Shepard D. Johnson , Bo Gu
IPC分类号： B23K26/00
CPC分类号： H01L23/5258 , B23K26/0624 , B23K26/0853 , B23K2101/40 , H01L2924/0002 , H01L2924/00
摘要： A method is disclosed for on-the-fly processing at least one structure of a group of structures with a pulsed laser output. The method includes the steps of relatively positioning the group of structures and the pulsed laser output axis with non-constant velocity, and applying the pulsed laser output to the at least one structure of the group of structures during the step of relatively positioning the group of structures and the pulsed laser output axis with non-constant velocity.
摘要翻译：公开了一种用于对具有脉冲激光输出的一组结构的至少一个结构进行即时处理的方法。该方法包括以非等速度相对地定位该组结构和脉冲激光输出轴的步骤，并且在相对定位组的步骤期间将脉冲激光输出施加到该组结构的至少一个结构中结构和具有非恒定速度的脉冲激光输出轴。

28. 发明申请

US20120083049A1 SYSTEM AND METHOD FOR LASER PROCESSING AT NON-CONSTANT VELOCITIES 审中-公开
标题翻译：用于激光加工的非恒定速度的系统和方法
公开(公告)号：US20120083049A1
公开(公告)日：2012-04-05
申请号：US13303327
申请日：2011-11-23
申请人： Shepard D. Johnson , Bo Gu
发明人： Shepard D. Johnson , Bo Gu
IPC分类号： H01L21/02 , B23K26/00
CPC分类号： H01L23/5258 , B23K26/0624 , B23K26/0853 , B23K2101/40 , H01L2924/0002 , H01L2924/00
摘要： A method is disclosed for on-the-fly processing at least one structure of a group of structures with a pulsed laser output, The method includes the steps of relatively positioning the group of structures and the pulsed laser output axis with non-constant velocity, and applying the pulsed laser output to the at least one structure of the group of structures during the step of relatively positioning the group of structures and the pulsed laser output axis with non-constant velocity.
摘要翻译：公开了一种用于对具有脉冲激光输出的一组结构的至少一个结构进行即时处理的方法。该方法包括以非等速度相对地定位该组结构和脉冲激光输出轴的步骤，以及在以非恒定速度相对地定位所述组结构和所述脉冲激光输出轴的步骤期间，将所述脉冲激光输出应用于所述一组结构的所述至少一个结构。

29. 发明授权

US5483345A Alignment system for use in lithography utilizing a spherical reflector having a centered etched-on projection object 失效
标题翻译：使用具有中心蚀刻投影物体的球面反射器的光刻中使用的对准系统
公开(公告)号：US5483345A
公开(公告)日：1996-01-09
申请号：US300649
申请日：1994-09-06
申请人： J. Casey Donaher , David S. Holbrook , Shepard D. Johnson , James A. Sozanski
发明人： J. Casey Donaher , David S. Holbrook , Shepard D. Johnson , James A. Sozanski
IPC分类号： G03F9/00 , G01B11/00
CPC分类号： G03F9/70
摘要： A system for aligning substrates when preparing flat panel displays by lithography. A spherical reflector (imaging mirror) is used to focus a small geometric object, such as a cross, etched at the center of the reflector. The cross is projected toward a beam splitter and is then reflected onto the mirror which, in turn, images it on the surface of the substrate being used in the lithographic process. This optical system, which has a numerical aperture of about 0.05 radians, provides maximum depth of field with essentially no aberrations, and produces a relatively large probe image on a large alignment mark.The surface of the substrate carries a grid of stepped patterns as an alignment mark. The steps diffract the light received, and the diffracted light passes through a lens system to a sensor associated with the lens system. The amount of light diffracted is dependent upon where the image strikes the steps in the grid. Thus, a correlation between position and the amount of light received by the sensor exists, and, so, the substrate can be precisely aligned.
摘要翻译：用于通过光刻制备平板显示器时用于对准衬底的系统。球形反射镜（成像镜）用于聚焦在反射体中心蚀刻的诸如十字的小几何物体。十字架朝向分束器投影，然后被反射到反射镜上，反射镜又将其图像在用于光刻工艺的基板的表面上。该光学系统具有大约0.05弧度的数值孔径，基本上没有像差提供最大景深，并且在大对准标记上产生相对较大的探测图像。基板的表面带有阶梯图案格栅作为对准标记。这些步骤衍射所接收的光，并且衍射光通过透镜系统到与透镜系统相关联的传感器。衍射的光量取决于图像撞击网格中的台阶。因此，存在位置与传感器接收的光量之间的相关性，因此可以精确地对准衬底。

30. 发明授权

US07955906B2 Methods and systems for thermal-based laser processing a multi-material device 有权
标题翻译：用于热基激光加工多材料装置的方法和系统
公开(公告)号：US07955906B2
公开(公告)日：2011-06-07
申请号：US12165853
申请日：2008-07-01
申请人： James J. Cordingley , Jonathan S. Ehrman , David M. Filgas , Shepard D. Johnson , Joohan Lee , Donald V. Smart , Donald J. Svetkoff
发明人： James J. Cordingley , Jonathan S. Ehrman , David M. Filgas , Shepard D. Johnson , Joohan Lee , Donald V. Smart , Donald J. Svetkoff
IPC分类号： H01L21/00 , B23K26/00
CPC分类号： B23K26/0736 , B23K26/032 , B23K26/04 , B23K26/043 , B23K26/0613 , B23K26/0622 , B23K26/0624 , B23K26/064 , B23K26/0643 , B23K26/0648 , B23K26/0652 , B23K26/0665 , B23K26/067 , B23K26/082 , B23K26/10 , B23K26/16 , B23K26/361 , B23K26/389 , B23K26/40 , B23K2101/38 , B23K2101/40 , B23K2103/10 , B23K2103/12 , B23K2103/172 , B23K2103/50 , H01L21/485 , H01L21/76888 , H01L21/76894 , H01L22/12 , H01L23/5258 , H01L2924/0002 , H05K3/0026 , H01L2924/00
摘要： A method and system for locally processing a predetermined microstructure formed on a substrate without causing undesirable changes in electrical or physical characteristics of the substrate or other structures formed on the substrate are provided. The method includes providing information based on a model of laser pulse interactions with the predetermined microstructure, the substrate and the other structures. At least one characteristic of at least one pulse is determined based on the information. A pulsed laser beam is generated including the at least one pulse. The method further includes irradiating the at least one pulse having the at least one determined characteristic into a spot on the predetermined microstructure. The at least one determined characteristic and other characteristics of the at least one pulse are sufficient to locally process the predetermined microstructure without causing the undesirable changes.
摘要翻译：提供一种用于局部处理形成在基板上的预定微结构而不引起基板或其上形成在基板上的其它结构的电学或物理特性的不期望的变化的方法和系统。该方法包括基于与预定微结构，衬底和其它结构的激光脉冲相互作用的模型来提供信息。基于该信息确定至少一个脉冲的至少一个特性。生成包括至少一个脉冲的脉冲激光束。该方法还包括将具有至少一个确定特性的至少一个脉冲照射到预定微结构上的点中。所述至少一个脉冲的至少一个确定的特征和其它特征足以在不引起不期望的变化的情况下局部地处理预定的微结构。

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