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    • 27. 发明授权
    • Surface optical device apparatus, method of fabricating the same, and apparatus using the same
    • 表面光学器件装置及其制造方法以及使用其的装置
    • US06932516B2
    • 2005-08-23
    • US09903709
    • 2001-07-13
    • Toshihiko OuchiHajime SakataFutoshi HiroseAya Imada
    • Toshihiko OuchiHajime SakataFutoshi HiroseAya Imada
    • G02B6/42G02B6/36
    • G02B6/4249
    • A surface optical device apparatus includes a surface optical device capable of emitting or receiving light through a surface thereof and a thick layer formed of a radiation-curable or electron-beam-curable material, such as a polymerizable resist. In the thick layer, a guide hole for inserting an end portion of a light-transmission member, such as an optical fiber, and a plastic optical fiber with a flat end face or a lens-shaped end face, therein is formed at a position corresponding to the surface of the surface optical device such that the surface optical device can be optically coupled to the light-transmission member inserted in the guide hole. The guide hole is formed in the thick layer by performing a patterning on the thick layer using photolithography to selectively harden the thick layer and developing the thick layer.
    • 表面光学器件装置包括能够通过其表面发射或接收光的表面光学器件以及由可聚合抗蚀剂等可辐射固化或电子束固化材料形成的厚层。 在厚层中,形成用于插入诸如光纤的光传输构件的端部的引导孔和具有平坦端面或透镜形端面的塑料光纤,位于 对应于表面光学装置的表面,使得表面光学装置可以光学耦合到插入导向孔中的光传输构件。 通过使用光刻法在厚层上进行图案化以选择性地硬化厚层并显影厚层,在厚层中形成引导孔。