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21. 发明授权

US08674464B2 MEMS component, method for producing a MEMS component, and method for handling a MEMS component 有权
标题翻译： MEMS部件，用于制造MEMS部件的方法以及用于处理MEMS部件的方法
公开(公告)号：US08674464B2
公开(公告)日：2014-03-18
申请号：US12842677
申请日：2010-07-23
申请人： Wolfgang Pahl , Gregor Feiertag , Anton Leidl
发明人： Wolfgang Pahl , Gregor Feiertag , Anton Leidl
IPC分类号： H01L21/00 , G01L9/00
CPC分类号： B81C1/00896 , B81B7/0061 , B81B2201/0257 , B81C2201/053 , H04R2201/003
摘要： A MEMS component includes a substrate in which at least one cavity is present. The cavity is closed off toward an active side of the substrate. An inactive side is arranged opposite the active side of the substrate, and the substrate is covered with a covering film on the inactive side.
摘要翻译： MEMS部件包括其中存在至少一个空腔的基板。空腔朝向基板的活动侧封闭。非活性侧被布置成与衬底的有源侧相对，并且衬底在不活动侧被覆盖膜覆盖。

22. 发明申请

US20120093346A1 MEMS MICROPHONE 有权
标题翻译： MEMS麦克风
公开(公告)号：US20120093346A1
公开(公告)日：2012-04-19
申请号：US13282668
申请日：2011-10-27
申请人： Gregor Feiertag , Anton Leidl , Wolfgang Pahl , Matthias Winter , Christian Siegel
发明人： Gregor Feiertag , Anton Leidl , Wolfgang Pahl , Matthias Winter , Christian Siegel
IPC分类号： H04R1/00
CPC分类号： H04R19/005 , H01L24/97 , H01L2224/16225 , H01L2924/00011 , H01L2924/00014 , H01L2924/14 , H01L2924/1461 , H04R1/2884 , H01L2924/00 , H01L2224/0401
摘要： A microphone package wherein an MEMS microphone chip (MIC) is mounted on a substrate (SUB) and is sealed with a cover (ABD) with respect to the substrate. The membrane (MMB) of the microphone chip is connected to a sound entry opening (SEO) in the substrate via an acoustic channel. As a result of defined dimensioning of, in particular, the cross section and length of sound entry opening and channel, an acoustic low-pass filter is formed, the −3 dB attenuation point of which is significantly below the natural resonance of microphone membrane and package.
摘要翻译：一种麦克风包，其中MEMS麦克风芯片（MIC）安装在基板（SUB）上并且相对于基板用盖（ABD）密封。麦克风芯片的膜（MMB）通过声道连接到基板中的声音入口（SEO）。由于声音入口开口和通道的横截面和长度的限定尺寸的确定，形成声学低通滤波器，其-3dB衰减点明显低于麦克风膜的天然共振，包。

23. 发明授权

US08713789B2 Method of manufacturing a microphone 有权
标题翻译：制造麦克风的方法
公开(公告)号：US08713789B2
公开(公告)日：2014-05-06
申请号：US13094515
申请日：2011-04-26
申请人： Anton Leidl , Wolfgang Pahl
发明人： Anton Leidl , Wolfgang Pahl
IPC分类号： H04R31/00
CPC分类号： H04R19/005 , H04R2201/003 , Y10T29/49005 , Y10T29/4908 , Y10T29/49798
摘要： A method of manufacturing a microphone comprising a substrate, a transducer element that is mounted on a top side of the substrate, a covering layer that covers the transducer element and forms a seal with the top side of the substrate, a shaped covering material that covers the substrate, the transducer element and the covering layer, and a sound opening that extends through the covering material and the covering layer. Methods for manufacturing a microphone and for manufacturing a plurality of microphones are also disclosed.
摘要翻译：一种制造麦克风的方法，包括基板，安装在基板的顶侧的换能器元件，覆盖换能器元件并与基板的顶侧形成密封的覆盖层，覆盖基板，换能器元件和覆盖层，以及延伸穿过覆盖材料和覆盖层的声音开口。还公开了制造麦克风和制造多个麦克风的方法。

24. 发明申请

US20130328448A1 PIEZO ACTUATOR WITH PROTECTION AGAINST ENVIRONMENTAL INFLUENCES 审中-公开
标题翻译：具有防止环境影响的PIEZO执行器
公开(公告)号：US20130328448A1
公开(公告)日：2013-12-12
申请号：US13993311
申请日：2011-11-30
申请人： Reinhard Gabl , Wolfgang Pahl , Anton Leidl
发明人： Reinhard Gabl , Wolfgang Pahl , Anton Leidl
IPC分类号： H01L41/053 , H01L41/273 , H01L41/083
CPC分类号： H01L41/0533 , H01L41/0472 , H01L41/0475 , H01L41/083 , H01L41/23 , H01L41/273 , Y10T29/42
摘要： A piezo actuator with protection against environmental influences comprises a layer stack (1) of piezoelectric material layers (10) and interposed electrode layers (20). The piezo actuator furthermore comprises a first and a second material layer (31, 32) composed in each case of a material which exhibits smaller amount of expansion. than the piezoelectric material layers (10) when a voltage is applied. to the electrode layers (20), and comprises a cover layer (50) composed of a metal material. The layer stack (1) is arranged between the first and second material layers (31, 32). The cover layer (50) surrounds the layer stack (1) and is sputtered onto the first and second material lavers (31, 32).
摘要翻译：具有防止环境影响的压电致动器包括压电材料层（10）的叠层（1）和插入的电极层（20）。压电致动器还包括第一和第二材料层（31,32），其在每种情况下由展现较小膨胀量的材料构成。比施加电压时的压电材料层（10）多。电极层（20），并且包括由金属材料构成的覆盖层（50）。层叠体（1）布置在第一和第二材料层（31,32）之间。覆盖层（50）围绕层堆叠（1）并被溅射到第一和第二材料掠过部分（31,32）上。

25. 发明授权

US08582788B2 MEMS microphone 有权
标题翻译： MEMS麦克风
公开(公告)号：US08582788B2
公开(公告)日：2013-11-12
申请号：US11816969
申请日：2006-02-08
申请人： Anton Leidl , Wolfgang Pahl , Ulrich Wolff
发明人： Anton Leidl , Wolfgang Pahl , Ulrich Wolff
IPC分类号： H04R25/00
CPC分类号： H04R1/2838 , H04R1/283 , H04R17/02 , H04R2201/003
摘要： A microphone includes a first diaphragm and a second diaphragm coupled to the first diaphragm by a closed air volume. The first diaphragm and the second diaphragm each constitutes a piezoelectric diaphragm. The first diaphragm and the second diaphragm are electrically coupled so that movement of the first diaphragm causes movement of the second diaphragm.
摘要翻译：麦克风包括第一隔膜和第二隔膜，其通过封闭的空气体积与第一隔膜相连。第一膜片和第二膜片均构成压电膜片。第一光阑和第二光阑电耦合，使得第一光阑的移动导致第二光阑的移动。

26. 发明授权

US08571239B2 MEMS microphone 有权
标题翻译： MEMS麦克风
公开(公告)号：US08571239B2
公开(公告)日：2013-10-29
申请号：US13282668
申请日：2011-10-27
申请人： Gregor Feiertag , Anton Leidl , Wolfgang Pahl , Matthias Winter , Christian Siegel
发明人： Gregor Feiertag , Anton Leidl , Wolfgang Pahl , Matthias Winter , Christian Siegel
IPC分类号： H04R25/00 , H04R9/08
CPC分类号： H04R19/005 , H01L24/97 , H01L2224/16225 , H01L2924/00011 , H01L2924/00014 , H01L2924/14 , H01L2924/1461 , H04R1/2884 , H01L2924/00 , H01L2224/0401
摘要： A microphone package wherein an MEMS microphone chip (MIC) is mounted on a substrate (SUB) and is sealed with a cover (ABD) with respect to the substrate. The membrane (MMB) of the microphone chip is connected to a sound entry opening (SEO) in the substrate via an acoustic channel. As a result of defined dimensioning of, in particular, the cross section and length of sound entry opening and channel, an acoustic low-pass filter is formed, the −3 dB attenuation point of which is significantly below the natural resonance of microphone membrane and package.
摘要翻译：一种麦克风包，其中MEMS麦克风芯片（MIC）安装在基板（SUB）上并且相对于基板用盖（ABD）密封。麦克风芯片的膜（MMB）通过声道连接到基板中的声音输入开口（SEO）。由于声音入口开口和通道的横截面和长度的限定尺寸的确定，形成声学低通滤波器，其-3dB衰减点明显低于麦克风膜的天然共振，包。

27. 发明授权

US08009407B2 Adjustable capacitor and circuit provided therewith 有权
标题翻译：可调节电容器和电路
公开(公告)号：US08009407B2
公开(公告)日：2011-08-30
申请号：US12064869
申请日：2006-09-12
申请人： Anton Leidl , Wolfgang Sauer , Stefan Seitz
发明人： Anton Leidl , Wolfgang Sauer , Stefan Seitz
IPC分类号： H01G4/06
CPC分类号： H01G7/06
摘要： A capacitor includes a multi layer structure on a ceramic or crystalline substrate. The multilayer structure includes a lower electrode, an upper electrode, and a dielectric that is tunable by a voltage applied to the electrodes. The multilayer structure is configured such that resonant oscillation modes of bulk acoustic waves can be propagated in the multilayer structure and such that the resonant frequencies of the oscillation modes are outside a first band range of between 810 and 1000 MHz, second band range of between 1700 and 2205 MHz and third band range of between 2400 and 2483.5 MHz.
摘要翻译：电容器包括在陶瓷或晶体衬底上的多层结构。多层结构包括下电极，上电极和可通过施加到电极的电压来调节的电介质。多层结构被配置为使得能够在多层结构中传播体声波的共振振荡模式，并且使得振荡模式的谐振频率在810和1000MHz之间的第一频带范围之外，第二频带范围在1700 和2205MHz，以及在2400和2483.5MHz之间的第三频带范围。

28. 发明申请

US20080253056A1 Adjustable Capacitor and Circuit Provided Therewith 有权
标题翻译：可调电容器及电路
公开(公告)号：US20080253056A1
公开(公告)日：2008-10-16
申请号：US12064869
申请日：2006-09-12
申请人： Anton Leidl , Wolfgang Sauer , Stefan Seitz
发明人： Anton Leidl , Wolfgang Sauer , Stefan Seitz
IPC分类号： H01G7/06
CPC分类号： H01G7/06
摘要： A capacitor with a multilayer structure on a ceramic or crystalline substrate is proposed that comprises at least one lower and one upper electrode as well as a tunable dielectric arranged therebetween in which resonant oscillation modes of bulk acoustic waves can be propagated, wherein, by suitable selection regarding material and thickness and a suitable number of layers in the multilayer structure, the latter is tuned such that the resonant frequencies of the oscillation modes lie outside of band ranges used in mobile telephones. Circuits with tunable capacitors that find multiple uses inside terminal devices for mobile communication are additionally proposed.
摘要翻译：提出了一种在陶瓷或晶体衬底上具有多层结构的电容器，其包括至少一个下电极和一个上电极以及布置在其间的可调电介质，其中可以传播体声波的共振振荡模式，其中通过适当的选择关于多层结构中的材料和厚度以及合适数量的层，后者被调整为使得振荡模式的谐振频率位于移动电话中使用的频带范围之外。另外提出了具有在移动通信终端设备内发现多种用途的可调电容器的电路。

29. 发明申请

US20100176899A1 COMPONENT HAVING STRESS-REDUCED MOUNTING 有权
标题翻译：具有应力减小安装的组件
公开(公告)号：US20100176899A1
公开(公告)日：2010-07-15
申请号：US12665385
申请日：2008-06-13
申请人： Ansgar Schäufele , Anton Leidl , Wolfgang Sauer
发明人： Ansgar Schäufele , Anton Leidl , Wolfgang Sauer
IPC分类号： H03H9/15
CPC分类号： H03H9/173 , H03H9/02133 , H03H9/09 , H03H9/174
摘要： A component (1) is proposed wherein the suspension of the component (1) is effected in a stress-reduced manner. The component (1) can rest on a membrane (4) or be held by a spring element (2). The membrane (4) or the spring element (2) is situated above a depression (6) or an opening (7) partially spanned by the membrane (4). Preferably, the membrane (4) has a modulus of elasticity that is less than or equal to the modulus of elasticity of the component (1) or of the substrate (3). The component (1) can be covered with metal electrodes (10) wholly or partially over the area on two sides.
摘要翻译：提出了组分（1），其中组分（1）的悬浮液以应力减小的方式进行。组件（1）可以搁置在膜（4）上或由弹簧元件（2）保持。膜（4）或弹簧元件（2）位于由膜（4）部分跨越的凹陷（6）或开口（7）的上方。优选地，膜（4）的弹性模量小于或等于组分（1）或基材（3）的弹性模量。组件（1）可以全部或部分地覆盖在两侧的区域上的金属电极（10）。

30. 发明申请

US20090255337A1 ROTATING MOTION SENSOR 有权
标题翻译：旋转运动传感器
公开(公告)号：US20090255337A1
公开(公告)日：2009-10-15
申请号：US12438251
申请日：2007-08-07
申请人： Werner Ruile , Anton Leidl
发明人： Werner Ruile , Anton Leidl
IPC分类号： G01C19/56
CPC分类号： G01C19/5698
摘要： A rotating motion sensor includes at least one electroacoustic resonator to stimulate a surface acoustic wave. The at least one electroacoustic resonator is configured so that rotation of the at least one electroacoustic resonator about an axis of rotation causes a change in resonance frequency of the at least one electroacoustic resonator. The at least one electroacoustic resonator includes oscillating structures configured to oscillate in a first direction that is a direction of propagation of the surface acoustic wave and/or a second direction that is transverse to the direction of propagation of the surface acoustic wave.
摘要翻译：旋转运动传感器包括至少一个电声谐振器以刺激表面声波。至少一个电声谐振器被配置成使得至少一个电声谐振器围绕旋转轴的旋转引起至少一个电声谐振器的谐振频率的变化。所述至少一个电声谐振器包括构造成在作为所述表面声波的传播方向的第一方向和/或横向于所述声表面波的传播方向的第二方向振荡的振荡结构。

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