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21. 发明申请

US20130012078A1 METHOD FOR PLUGGING A HOLE AND A PLUGGED HOLE 有权
标题翻译：用于插入孔和插入孔的方法
公开(公告)号：US20130012078A1
公开(公告)日：2013-01-10
申请号：US13511486
申请日：2010-12-17
申请人： Andreas Fischer , Göran Stemme , Frank Niklaus , Niklas Roxhed
发明人： Andreas Fischer , Göran Stemme , Frank Niklaus , Niklas Roxhed
IPC分类号： B81C1/00 , H01R13/02
CPC分类号： B81C1/00293 , B01L3/502707 , B01L2300/042 , B81B2201/058 , B81B2203/0315 , B81C2201/019 , B81C2203/0145 , Y10T29/49117 , Y10T29/49151 , Y10T29/49153 , Y10T29/49826 , Y10T29/49885
摘要： A method for at least partially inserting a plug into a hole, said method comprising the steps of a) providing a at least one substrate with at least one hole wherein said at least one hole has a largest dimension of from 1 μm to 300 μm, b) providing a piece of material, wherein said piece of material has a larger dimension than said at least one hole, c) pressing said piece of material against the hole with a tool so that a plug is formed, wherein at least a part of said piece of material is pressed into said hole, d) removing the tool from the piece of material. There is further disclosed a plugged hole manufactured with the method. One advantage of an embodiment is that an industrially available wire bonding technology can be used to seal various cavities. The existing wire bonding technology makes the plugging fast and cheap.
摘要翻译：一种用于至少部分地将插头插入孔中的方法，所述方法包括以下步骤：a）提供具有至少一个孔的至少一个基底，其中所述至少一个孔具有1μm至300μm的最大尺寸， b）提供一块材料，其中所述材料片具有比所述至少一个孔更大的尺寸，c）用工具将所述材料件压靠在孔上，从而形成插塞，其中至少部分所述材料被压入所述孔中，d）从所述材料上移除所述工具。还公开了一种使用该方法制造的堵塞孔。一个实施例的一个优点是可以使用工业上可用的引线接合技术来密封各种空腔。现有的导线接合技术使堵塞快速便宜。

22. 发明授权

US08262847B2 Plasma-enhanced substrate processing method and apparatus 有权
标题翻译：等离子体增强的基板处理方法和装置
公开(公告)号：US08262847B2
公开(公告)日：2012-09-11
申请号：US11618583
申请日：2006-12-29
申请人： Rajinder Dhindsa , Hudson Eric , Alexei Marakhtanov , Andreas Fischer
发明人： Rajinder Dhindsa , Hudson Eric , Alexei Marakhtanov , Andreas Fischer
IPC分类号： C23F1/00 , H01L21/306 , C23C16/00
CPC分类号： H01J37/32165 , H01J37/32091
摘要： A method and apparatus for processing a substrate in a capacitively-coupled plasma processing system having a plasma processing chamber and at least an upper electrode and a lower electrode. The substrate is disposed on the lower electrode during plasma processing. The method includes providing at least a first RF signal, which has a first RF frequency, to the lower electrode. The first RF signal couples with a plasma in the plasma processing chamber, thereby inducing an induced RF signal on the upper electrode. The method also includes providing a second RF signal to the upper electrode. The second RF signal also has the first RF frequency. A phase of the second RF signal is offset from a phase of the first RF signal by a value that is less than 10%. The method further includes processing the substrate while the second RF signal is provided to the upper electrode.
摘要翻译：一种用于在具有等离子体处理室和至少上电极和下电极的电容耦合等离子体处理系统中处理衬底的方法和装置。在等离子体处理期间，衬底设置在下电极上。该方法包括向下电极提供至少具有第一RF频率的第一RF信号。第一RF信号与等离子体处理室中的等离子体耦合，从而在上电极上感应感应RF信号。该方法还包括向上电极提供第二RF信号。第二RF信号也具有第一RF频率。第二RF信号的相位偏离第一RF信号的相位小于10％的值。该方法还包括在将第二RF信号提供给上电极的同时处理衬底。

23. 发明授权

US07976998B2 Apparatus for the deionization of cooling media for fuel cells 失效
标题翻译：用于燃料电池冷却介质去离子的装置
公开(公告)号：US07976998B2
公开(公告)日：2011-07-12
申请号：US11802476
申请日：2007-05-23
申请人： Claudius Kormann , Andreas Fischer
发明人： Claudius Kormann , Andreas Fischer
IPC分类号： H01M8/04
CPC分类号： H01M8/04029
摘要： The present invention relates to a process for the deionization of a cooling medium in a fuel cell (11) circulating in a cooling circuit (20), in which the cooling medium is subjected to at least intermittent, but preferably continuous, electrochemical deionization. To this end, at least one electrode deionization cell (23) , through which a diluate stream (27) serving as cooling medium and a concentrate stream (28) flow, is arranged in the cooling circuit. The concentrate stream (28) may be part of a secondary cooling circuit.
摘要翻译：本发明涉及在冷却回路（20）中循环的燃料电池（11）中的冷却介质去离子的方法，其中冷却介质经历至少间歇但优选连续的电化学去离子。为此，在冷却回路中设置至少一个电极去离子电池（23），作为冷却介质的稀释流（27）和浓缩物流（28）流过该电极去离子电池。浓缩物流（28）可以是二次冷却回路的一部分。

24. 发明授权

US07976673B2 RF pulsing of a narrow gap capacitively coupled reactor 有权
标题翻译：窄间隙电容耦合反应器的RF脉冲
公开(公告)号：US07976673B2
公开(公告)日：2011-07-12
申请号：US10431030
申请日：2003-05-06
申请人： Peter Loewenhardt , Mukund Srinivasan , Andreas Fischer
发明人： Peter Loewenhardt , Mukund Srinivasan , Andreas Fischer
IPC分类号： H01L21/00 , C23F1/00
CPC分类号： H01J37/32137 , H01J37/32082 , H01J37/32165
摘要： An apparatus for providing a plasma etch of a layer over a wafer is provided. A capacitively coupled process chamber is provided. A gas source is provided. A first and a second electrode are provided within the process chamber. A first radio frequency power source is electrically connected to at least one of the first and second electrodes, where the first radio frequency power source provides radio frequency power. A second radio frequency power source is electrically connected to at least one of the first and second electrodes. A first modulation control is connected to the first radio frequency power source, to provide a controlled modulation of the first radio frequency power source.
摘要翻译：提供了一种用于在晶片上提供层的等离子体蚀刻的设备。提供了一种电容耦合处理室。提供气源。第一和第二电极设置在处理室内。第一射频电源电连接到第一和第二电极中的至少一个，其中第一射频电源提供射频功率。第二射频电源电连接到第一和第二电极中的至少一个。第一调制控制连接到第一射频电源，以提供对第一射频电源的受控调制。

25. 发明申请

US20110147228A1 PROCESS FOR THE ANODIC DEHYDRODIMERIZATION OF SUBSTITUTED PHENOLS 有权
标题翻译：取代苯酚的阳离子脱氢方法
公开(公告)号：US20110147228A1
公开(公告)日：2011-06-23
申请号：US13059548
申请日：2009-08-28
申请人： Andreas Fischer , Itamar Michael Malkowsky , Florian Stecker , Siegfried Waldvogel , Axel Kirste
发明人： Andreas Fischer , Itamar Michael Malkowsky , Florian Stecker , Siegfried Waldvogel , Axel Kirste
IPC分类号： C25B3/10
CPC分类号： C25B3/10 , C25B3/02
摘要： The invention relates to a process for preparing biaryl alcohols, in which anodic dehydrodimerization of substituted phenols is carried out in the presence of partially fluorinated and/or periluorinated mediators and a supporting electrolyte at a graphite electrode.
摘要翻译：本发明涉及一种制备联芳基醇的方法，其中取代酚的阳极脱氢二聚化在部分氟化和/或过氧化介质和支持电解质存在下在石墨电极上进行。

26. 发明申请

US20110108432A1 METHOD FOR THE ELECTROCHEMICAL DIRECT AMINATION OF HYDROCARBONS 审中-公开
标题翻译：烃类电化学直接分解方法
公开(公告)号：US20110108432A1
公开(公告)日：2011-05-12
申请号：US13001956
申请日：2009-06-15
申请人： Itamar Malkowsky , Alexander Panchenko , Ulrich Griesbach , Andreas Fischer
发明人： Itamar Malkowsky , Alexander Panchenko , Ulrich Griesbach , Andreas Fischer
IPC分类号： C25B3/00
CPC分类号： C25B3/00
摘要： The invention relates to a process for the electrochemical direct amination of hydrocarbons by means of a diamond electrode and also a process for preparing aniline.
摘要翻译：本发明涉及通过金刚石电极对烃进行电化学直接胺化的方法，还涉及一种制备苯胺的方法。

27. 发明申请

US20110089046A1 PROCESS FOR THE ELECTROCHEMICAL CLEAVAGE OF LIGNIN AT A DIAMOND ELECTRODE 审中-公开
标题翻译：金刚石电极电化学清洗方法
公开(公告)号：US20110089046A1
公开(公告)日：2011-04-21
申请号：US12992217
申请日：2009-05-11
申请人： Ulrich Griesbach , Andreas Fischer , Florian Stecker , Joerg Botzem , Ralf Pelzer , Mario Emmeluth , Siegfried R. Waldvogel
发明人： Ulrich Griesbach , Andreas Fischer , Florian Stecker , Joerg Botzem , Ralf Pelzer , Mario Emmeluth , Siegfried R. Waldvogel
IPC分类号： C25B3/00
CPC分类号： C25B3/02
摘要： The invention relates to a process for the electrochemical cleavage of lignin by means of a diamond electrode and also to a process for producing vanillin and derivatives thereof by electrochemical cleavage of lignin in a solution having a pH≦11.
摘要翻译：本发明涉及一种通过金刚石电极电化学切割木质素的方法，还涉及通过在具有pH＆nlE的溶液中电化学裂解木质素来生产香草醛及其衍生物的方法。

28. 发明申请

US20110067814A1 MULTI-PART ELECTRODE FOR A SEMICONDUCTOR PROCESSING PLASMA REACTOR AND METHOD OF REPLACING A PORTION OF A MULTI-PART ELECTRODE 有权
标题翻译：用于半导体处理等离子体反应器的多部分电极和替换多部分电极的部分的方法
公开(公告)号：US20110067814A1
公开(公告)日：2011-03-24
申请号：US12954060
申请日：2010-11-24
申请人： Andreas Fischer , William S. Kennedy , Peter Loewenhardt , David Trussell
发明人： Andreas Fischer , William S. Kennedy , Peter Loewenhardt , David Trussell
IPC分类号： H01L21/3065
CPC分类号： H01J37/32541 , H01J37/32009
摘要： An improved upper electrode system has a multi-part electrode in which a central portion of the electrode having high wear is replaceable independent of an outer peripheral portion of the electrode. The upper electrode can be used in plasma processing systems for processing semiconductor substrates, such as by etching or CVD. The multi-part upper electrode system is particularly useful for large size wafer processing chambers, such as 300 mm wafer processing chambers for which monolithic electrodes are unavailable or costly.
摘要翻译：改进的上电极系统具有多部分电极，其中具有高磨损的电极的中心部分可以独立于电极的外周部分进行替换。上电极可用于等离子体处理系统中，例如通过蚀刻或CVD来处理半导体衬底。多部分上电极系统对于大尺寸晶片处理室是特别有用的，例如用于单片电极不可用或成本高的300mm晶片处理室。

29. 发明申请

US20110059615A1 HYBRID RF CAPACITIVELY AND INDUCTIVELY COUPLED PLASMA SOURCE USING MULTIFREQUENCY RF POWERS AND METHODS OF USE THEREOF 有权
标题翻译：混合射频功率和电感耦合等离子体源使用多频RF功率及其使用方法
公开(公告)号：US20110059615A1
公开(公告)日：2011-03-10
申请号：US12945314
申请日：2010-11-12
申请人： Alexei Marakhtanov , Rajinder Dhindsa , Eric Hudson , Andreas Fischer
发明人： Alexei Marakhtanov , Rajinder Dhindsa , Eric Hudson , Andreas Fischer
IPC分类号： H01L21/3065
CPC分类号： H01J37/321 , H01J37/32091 , H01J2237/03
摘要： A device for inductively confining capacitively coupled RF plasma formed in a plasma processing apparatus. The apparatus includes an upper electrode and a lower electrode that is adapted to support a substrate and to generate the plasma between the substrate and the upper electrode. The device includes a dielectric support ring that concentrically surrounds the upper electrode and a plurality of coil units mounted on the dielectric support ring. Each coil unit includes a ferromagnetic core positioned along a radial direction of the dielectric support ring and at least one coil wound around each ferromagnetic core. The coil units generate, upon receiving RF power from an RF power source, electric and magnetic fields that reduce the number of charged particles of the plasma diffusing away from the plasma.
摘要翻译：用于感应地限制在等离子体处理装置中形成的电容耦合RF等离子体等离子体的装置。该装置包括上电极和下电极，其适于支撑衬底并在衬底和上电极之间产生等离子体。该装置包括同心地围绕上电极的电介质支撑环和安装在电介质支撑环上的多个线圈单元。每个线圈单元包括沿着电介质支撑环的径向定位的铁磁芯和缠绕在每个铁磁芯周围的至少一个线圈。线圈单元在从RF电源接收到RF功率时产生电场和磁场，其减少等离子体的带电粒子的数量远离等离子体扩散。

30. 发明授权

US07829468B2 Method and apparatus to detect fault conditions of plasma processing reactor 有权
标题翻译：检测等离子体处理反应堆故障状况的方法和装置
公开(公告)号：US07829468B2
公开(公告)日：2010-11-09
申请号：US11447946
申请日：2006-06-07
申请人： Douglas Keil , Eric Hudson , Chris Kimball , Andreas Fischer
发明人： Douglas Keil , Eric Hudson , Chris Kimball , Andreas Fischer
IPC分类号： H01L21/302 , H01L21/461
CPC分类号： C23C16/52 , C23C16/509 , H01J37/32935 , H01J37/3299
摘要： A method of fault detection for use in a plasma processing chamber is provided. The method comprises monitoring plasma parameters within a plasma chamber with a single planar ion flux (PIF) probe, analyzing the resulting information, measuring the plasma parameters as a function of time and analyzing the resulting data. The data can be observed, characterized, compared with reference data, digitized, processed, or analyzed to reveal a specific fault. The PIF probe is preferably positioned at a grounded surface within the reactor. Chamber faults that can be detected include a build-up of process by-products in the process chamber, a helium leak, a match re-tuning event, a poor stabilization rate, and a loss of plasma confinement.
摘要翻译：提供了一种用于等离子体处理室的故障检测方法。该方法包括使用单个平面离子通量（PIF）探针监测等离子体室内的等离子体参数，分析所得信息，测量作为时间的函数的等离子体参数并分析所得数据。数据可以观察，表征，与参考数据进行比较，数字化，处理或分析，以显示特定故障。 PIF探针优选地位于反应器内的接地表面上。可以检测到的室内故障包括处理室中的过程副产物的积聚，氦泄漏，匹配重新调谐事件，差的稳定化速率和等离子体约束的损失。

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