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21. 发明申请

US20050134972A1 Replacement apparatus for an optical element 有权
标题翻译：用于光学元件的替换装置
公开(公告)号：US20050134972A1
公开(公告)日：2005-06-23
申请号：US10966388
申请日：2004-10-15
申请人： Jens Kugler , Franz Sorg , Andreas Wurmbrand , Thomas Schletterer , Thomas Ittner
发明人： Jens Kugler , Franz Sorg , Andreas Wurmbrand , Thomas Schletterer , Thomas Ittner
IPC分类号： G02B7/00 , G02B7/02 , G02B7/14 , G02B13/14 , G03F7/20 , G21K7/00 , G01N23/00
CPC分类号： G03F7/70191 , G02B7/00 , G02B7/02 , G02B7/023 , G02B7/14 , G02B13/14 , G03F7/7015 , G03F7/70258 , G03F7/70825
摘要： A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.
摘要翻译：用于安装在光刻物镜中的两个相邻光学元件之间的光学元件的替换装置具有用于待更换的光学元件的保持器，该保持器可以通过其外壳中的侧向开口移动到光刻物镜中。

22. 发明授权

US07995296B2 Replacement apparatus for an optical element 有权
标题翻译：用于光学元件的替换装置
公开(公告)号：US07995296B2
公开(公告)日：2011-08-09
申请号：US12830913
申请日：2010-07-06
申请人： Jens Kugler , Franz Sorg , Andreas Wurmbrand , Thomas Schletterer , Thomas Ittner
发明人： Jens Kugler , Franz Sorg , Andreas Wurmbrand , Thomas Schletterer , Thomas Ittner
IPC分类号： G02B7/02
CPC分类号： G03F7/70191 , G02B7/00 , G02B7/02 , G02B7/023 , G02B7/14 , G02B13/14 , G03F7/7015 , G03F7/70258 , G03F7/70825
摘要： A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.
摘要翻译：用于安装在光刻物镜中的两个相邻光学元件之间的光学元件的替换装置具有用于待更换的光学元件的保持器，该保持器可以通过其外壳中的侧向开口移动到光刻物镜中。

23. 发明申请

US20100271716A1 REPLACEMENT APPARATUS FOR AN OPTICAL ELEMENT 有权
标题翻译：光学元件更换装置
公开(公告)号：US20100271716A1
公开(公告)日：2010-10-28
申请号：US12830913
申请日：2010-07-06
申请人： Jens Kugler , Franz Sorg , Andreas Wurmbrand , Thomas Schletterer , Thomas Ittner
发明人： Jens Kugler , Franz Sorg , Andreas Wurmbrand , Thomas Schletterer , Thomas Ittner
IPC分类号： G02B7/02
CPC分类号： G03F7/70191 , G02B7/00 , G02B7/02 , G02B7/023 , G02B7/14 , G02B13/14 , G03F7/7015 , G03F7/70258 , G03F7/70825
摘要： A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.
摘要翻译：用于安装在光刻物镜中的两个相邻光学元件之间的光学元件的替换装置具有用于待更换的光学元件的保持器，该保持器可以通过其外壳中的侧向开口移动到光刻物镜中。

24. 发明授权

US07515363B2 Replacement apparatus for an optical element 有权
标题翻译：用于光学元件的替换装置
公开(公告)号：US07515363B2
公开(公告)日：2009-04-07
申请号：US11895990
申请日：2007-08-28
申请人： Jens Kugler , Franz Sorg , Andreas Wurmbrand , Thomas Schletterer , Thomas Ittner
发明人： Jens Kugler , Franz Sorg , Andreas Wurmbrand , Thomas Schletterer , Thomas Ittner
IPC分类号： G02B7/02
CPC分类号： G03F7/70191 , G02B7/00 , G02B7/02 , G02B7/023 , G02B7/14 , G02B13/14 , G03F7/7015 , G03F7/70258 , G03F7/70825
摘要： A replacement apparatus for an optical element mounted between two adjacent optical elements in a lithography objective has a holder for the optical element to be replaced, which holder can be moved into the lithography objective through a lateral opening in a housing of the same.
摘要翻译：用于安装在光刻物镜中的两个相邻光学元件之间的光学元件的替换装置具有用于待更换的光学元件的保持器，该保持器可以通过其外壳中的侧向开口移动到光刻物镜中。

25. 发明授权

US09046795B2 Optical element unit for exposure processes having sealing element 有权
标题翻译：用于具有密封元件的曝光工艺的光学元件单元
公开(公告)号：US09046795B2
公开(公告)日：2015-06-02
申请号：US12046186
申请日：2008-03-11
申请人： Tilman Schwertner , Ulrich Bingel , Guido Limbach , Julian Kaller , Hans-Juergen Scherle , Jens Kugler , Dirk Schaffer , Bernhard Gellrich
发明人： Tilman Schwertner , Ulrich Bingel , Guido Limbach , Julian Kaller , Hans-Juergen Scherle , Jens Kugler , Dirk Schaffer , Bernhard Gellrich
IPC分类号： G03F7/20
CPC分类号： G03F7/7015 , G02B27/0006 , G03F7/70808 , G03F7/70825 , G03F7/70883 , G03F7/70908 , G03F7/70916 , G03F7/70933 , Y10T29/49
摘要： An optical element unit includes a first optical element module and a sealing arrangement. The first optical element module occupies a first module space and includes a first module component of a first component type and an associated second module component of a second component type. The first component type is optical elements and the second component type being different from the first component type. The sealing arrangement separates the first module space into a first space and a second space and substantially pre-vents, at least in a first direction, the intrusion of substances from one of the first space and the second space into the other one of the first space and the second space. The first module component at least partially contacts the first space and, at least in its area optically used, not contacting the second space. The second module component at least partially contacts the second space.
摘要翻译：光学元件单元包括第一光学元件模块和密封装置。第一光学元件模块占据第一模块空间并且包括第一组件类型的第一模块组件和第二组件类型的相关联的第二模块组件。第一部件类型是光学元件，第二部件类型与第一部件类型不同。密封装置将第一模块空间分隔成第一空间和第二空间，并且至少在第一方向上基本上预先将物质从第一空间和第二空间中的一个进入另一个第一空间空间和第二空间。第一模块部件至少部分地接触第一空间，并且至少在其光学使用的区域中不接触第二空间。第二模块组件至少部分地接触第二空间。

26. 发明授权

US08351139B2 Optical element module with minimized parasitic loads 有权
标题翻译：具有最小化寄生负载的光学元件模块
公开(公告)号：US08351139B2
公开(公告)日：2013-01-08
申请号：US12708034
申请日：2010-02-18
申请人： Jens Kugler , Ulrich Weber , Dirk Schaffer
发明人： Jens Kugler , Ulrich Weber , Dirk Schaffer
IPC分类号： G02B7/02
CPC分类号： G02B7/02 , G02B7/021 , G03F7/70825
摘要： An optical element module is provided. The optical module includes an optical element unit that includes an optical element and a support structure that supports the optical element unit. The support structure includes a support device and a contact device mounted to the support device. The contact device exerts a force on the optical element unit in a first direction via a first contact surface of the contact device. The first contact surface contacts a second contact surface of the optical element unit. The contact device includes a first linking section and a second linking section extending along a second direction running transverse to the first direction and arranged kinematically in series between the first contact surface and the support device. The first linking section and the second linking section are elastically deformed in response to a bending moment resulting from the force. The first linking section and the second linking section are arranged on opposite sides of a reference plane. The reference plane includes the force and runs transverse to the second direction.
摘要翻译：提供了一种光学元件模块。光学模块包括光学元件单元，其包括光学元件和支撑光学元件单元的支撑结构。支撑结构包括支撑装置和安装到支撑装置的接触装置。接触装置经由接触装置的第一接触面沿第一方向在光学元件单元上施加力。第一接触表面接触光学元件单元的第二接触表面。接触装置包括第一连接部分和第二连接部分，该第二连接部分沿着横向于第一方向的第二方向延伸并且在运动学上串联布置在第一接触表面和支撑装置之间。第一连接部分和第二连接部分响应于由力产生的弯矩而弹性变形。第一连接部分和第二连接部分布置在参考平面的相对侧上。参考平面包括力并横向于第二方向延伸。

27. 发明授权

US07986472B2 Optical element module 有权
标题翻译：光学元件模块
公开(公告)号：US07986472B2
公开(公告)日：2011-07-26
申请号：US11444191
申请日：2006-05-31
申请人： Jens Kugler , Ulrich Weber , Bernhard Gellrich , Yim-Bun Patrick Kwan , Peter Deufel
发明人： Jens Kugler , Ulrich Weber , Bernhard Gellrich , Yim-Bun Patrick Kwan , Peter Deufel
IPC分类号： G02B7/02
CPC分类号： G02B7/028 , G02B7/008 , G03F7/70825 , G03F7/70891
摘要： There is provided an optical element module comprising a first optical element and an optical element holder. The first optical element has a first coefficient of thermal expansion. The optical element holder holds the first optical element and has a second coefficient of thermal expansion, the second coefficient of thermal expansion being adapted to the first coefficient of thermal expansion. The optical element is directly contacting the optical element holder in a wide contact area. The contact area is defined by a first contact surface of the first optical element and a second contact surface of the optical element holder, wherein the second contact surface matches the first contact surface. Thus, favorable rigidity and deformation behavior is provided.
摘要翻译：提供了一种包括第一光学元件和光学元件保持器的光学元件模块。第一光学元件具有第一热膨胀系数。光学元件保持器保持第一光学元件并具有第二热膨胀系数，第二热膨胀系数适应于第一热膨胀系数。光学元件在宽接触区域中直接接触光学元件保持器。接触区域由第一光学元件的第一接触表面和光学元件保持器的第二接触表面限定，其中第二接触表面与第一接触表面匹配。因此，提供了良好的刚性和变形行为。

28. 发明申请

US20080013063A1 Optical imaging device 审中-公开
标题翻译：光学成像装置
公开(公告)号：US20080013063A1
公开(公告)日：2008-01-17
申请号：US11804632
申请日：2007-05-18
申请人： Stefan Hembacher , Bernhard Gellrich , Jens Kugler
发明人： Stefan Hembacher , Bernhard Gellrich , Jens Kugler
IPC分类号： G02B7/04 , G03B27/68
CPC分类号： G03F7/7015 , G03F7/70241 , G03F7/70341 , G03F7/70825 , G03F7/70883
摘要： There is provided an optical imaging device, in particular for microlithography, comprising at least one optical element and at least one holding device associated to the optical element (109), wherein the holding device holds the optical element and a first part (109.1) of the optical element contacts a first atmosphere and a second part (109.2) of the optical element at least temporarily contacts a second atmosphere. There is provided a reduction device at least reducing dynamic fluctuations in the pressure difference between the first atmosphere and the second atmosphere.
摘要翻译：提供了一种光学成像装置，特别是用于微光刻，包括至少一个光学元件和与光学元件（109）相关联的至少一个保持装置，其中保持装置保持光学元件和第一部分（109.1）光学元件接触第一大气，并且光学元件的第二部分（109.2）至少临时接触第二气氛。提供一种还原装置，至少减少第一大气和第二气氛之间的压差的动态波动。

29. 发明授权

US06744574B2 Mount for an optical element in an optical imaging device 失效
标题翻译：安装在光学成像设备中的光学元件
公开(公告)号：US06744574B2
公开(公告)日：2004-06-01
申请号：US10247964
申请日：2002-09-20
申请人： Ulrich Weber , Jochen Becker , Hubert Holderer , Bernhard Gellrich , Jens Kugler
发明人： Ulrich Weber , Jochen Becker , Hubert Holderer , Bernhard Gellrich , Jens Kugler
IPC分类号： G02B702
CPC分类号： G02B7/02
摘要： A mount for an optical element in an optical imaging device, in particular in a lens system (4) for semiconductor lithography, has at least one mounting ring (2) which bears the optical element (6). The mounting ring (2) is of at least partially hollow design in cross section.
摘要翻译：用于光学成像装置中的光学元件的安装件，特别是在用于半导体光刻的透镜系统（4）中，具有至少一个承载光学元件（6）的安装环（2）。安装环（2）的截面至少部分为中空设计。

30. 发明授权

US08988654B2 Support elements for an optical element 有权
标题翻译：用于光学元件的支撑元件
公开(公告)号：US08988654B2
公开(公告)日：2015-03-24
申请号：US13071165
申请日：2011-03-24
申请人： Jens Kugler , Ulrich Weber , Nicolai Wengert
发明人： Jens Kugler , Ulrich Weber , Nicolai Wengert
IPC分类号： G02B7/00 , G03F7/20
CPC分类号： G03F7/7015 , G02B7/003 , G02B7/02 , G03F7/70825
摘要： Support elements for an optical element and a method for supporting an optical element are disclosed. The disclosure can be used in connection with arbitrary optical apparatuses or optical imaging methods. In particular, the disclosure can be used in connection with the microlithography employed in the manufacture of microelectronic circuits.
摘要翻译：公开了用于光学元件的支撑元件和用于支撑光学元件的方法。本公开可以与任意光学装置或光学成像方法结合使用。特别地，本公开可以结合用于制造微电子电路的微光刻来使用。

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