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    • 22. 发明授权
    • Oxidizing method and oxidizing unit for object to be processed
    • 用于处理物体的氧化方法和氧化装置
    • US07304003B2
    • 2007-12-04
    • US11086671
    • 2005-03-23
    • Keisuke SuzukiToshiyuki IkeuchiKimiya Aoki
    • Keisuke SuzukiToshiyuki IkeuchiKimiya Aoki
    • H01L21/31
    • C23C8/12C23C8/16H01L21/02164H01L21/0223H01L21/02238H01L21/02255H01L21/31662
    • An oxidizing method for an object to be processed according to the present invention includes: an arranging step of arranging a plurality of objects to be processed in a processing container whose inside can be vacuumed, the processing container having a predetermined length, a main supplying unit of an oxidative gas and a supplying unit of a reducing gas being provided at one end of the processing container, a sub supplying unit of the oxidative gas being provided on a way in a longitudinal direction of the processing container; an atmosphere forming step of supplying the oxidative gas and the reducing gas into the processing container in order to form an atmosphere having active oxygen species and active hydroxyl species in the processing container; and an oxidizing step of oxidizing surfaces of the plurality of objects to be processed in the atmosphere. In the atmosphere forming step, the oxidative gas is adapted to be supplied from the main supplying unit of the oxidative gas and the sub supplying unit of the oxidative gas.
    • 根据本发明的被处理物的氧化方法包括:排列步骤,将待处理的多个物体排列在可以被抽真空的处理容器内,处理容器具有预定长度,主供应单元 在所述处理容器的一端设置有氧化性气体和还原气体供给单元,所述氧化性气体的副供给单元设置在所述处理容器的长度方向上; 将氧化性气体和还原性气体供给到处理容器中以在处理容器中形成具有活性氧和活性羟基的气氛的气氛形成工序; 以及在大气中氧化多个待处理物体的表面的氧化步骤。 在气氛形成工序中,氧化气体适于从氧化气体的主供给单元和氧化气体的副供给单元供给。
    • 24. 发明申请
    • Power generation control system for fuel cell
    • 燃料电池发电控制系统
    • US20050244688A1
    • 2005-11-03
    • US10519472
    • 2003-12-16
    • Keisuke Suzuki
    • Keisuke Suzuki
    • H01M8/00B60L11/18H01M8/04
    • H01M8/04559H01M8/04298H01M8/04388H01M8/04395H01M8/04589H01M8/04753H01M8/0494
    • A power generation control system which includes: a fuel cell (201); a target power provider (101) for the fuel cell (201); a operation status monitoring system (102) for monitoring output power from the fuel cell (201), in which the detected output power includes actual output voltage (AV) of the fuel cell (201); and a controller (214). The controller (214) includes: a target current computing unit (104) which calculates a target current (TI) from the target power (TPW) given by the target power provider (101), based on PW-I characteristic obtained from I-V characteristic of the fuel cell (201); and a command output power computing unit (106) which calculates a command output power (CPW) of the fuel cell (201) based on the target current (TI) and the actual output voltage (AV).
    • 一种发电控制系统,包括:燃料电池(201); 用于所述燃料电池的目标电力供应器(101); 用于监视来自燃料电池(201)的输出功率的操作状态监视系统(102),其中所检测的输出功率包括燃料电池(201)的实际输出电压(AV); 和控制器(214)。 控制器(214)包括:目标电流计算单元(104),其基于从IV特性获得的PW-I特性,从目标电力提供者(101)给出的目标功率(TPW)计算目标电流(TI) 的燃料电池(201); 以及基于目标电流(TI)和实际输出电压(AV)计算燃料电池(201)的指令输出功率(CPW)的指令输出功率运算单元(106)。
    • 27. 发明授权
    • Automatic maximum theoretical yield calculating apparatus and computer-readable recording medium storing programs for automatic maximum theoretical yield calculation with a computer
    • 自动最大理论产量计算装置和计算机可读记录介质,存储用计算机自动最大理论产量计算的程序
    • US06314548B1
    • 2001-11-06
    • US09275783
    • 1999-03-25
    • Keisuke Suzuki
    • Keisuke Suzuki
    • G06P1750
    • H01L22/20
    • This apparatus can automatically calculate the specification of an exposing device which can automatically calculate the maximum theoretical yield of chips and realize chip manufacture with the minimum number of times of exposure by obtaining the chip layout producing the maximum number of chips from a wafer in the process to manufacture the chips from the wafer. This apparatus comprises initial data means, virtual chip layout calculating means, virtual chip layout storing means, maximum theoretical yield layout determining means, virtual exposure layout calculating means, virtual exposure layout storing means, minimum exposure layout determining means and determined layout displaying means. As explained above, it has been expected to provide an automatic maximum theoretical yield calculating apparatus to realize the maximum theoretical yield with the minimum number of times of exposure.
    • 该装置可以自动计算曝光装置的规格,该曝光装置可以自动计算芯片的最大理论产量,并通过获得在该过程中从晶片产生最大数量的芯片布局的芯片布局,以最小曝光次数实现芯片制造 从晶片制造芯片。 该装置包括初始数据装置,虚拟芯片布局计算装置,虚拟芯片布局存储装置,最大理论产量布局确定装置,虚拟曝光布局计算装置,虚拟曝光布局存储装置,最小曝光布局确定装置和确定布局显示装置。 如上所述,期望提供一种自动最大理论产量计算装置,以最小曝光次数实现最大理论产量。
    • 30. 发明授权
    • Combustion state control apparatus for internal combustion engine
    • 内燃机燃烧状态控制装置
    • US5361745A
    • 1994-11-08
    • US89345
    • 1993-07-12
    • Keisuke SuzukiHiroshi Satoh
    • Keisuke SuzukiHiroshi Satoh
    • F02D45/00F02D21/08F02D41/00F02M25/07F02B47/08
    • F02D41/0052F02D35/023Y02T10/47
    • An apparatus for controlling an engine operation such as EGR rate for an internal combustion engine is disclosed with an air/fuel mixture ratio control. In the control apparatus, a variable representing a characteristic of a combustion state in the engine is detected and a difference of the combustion state variable, a target value is averaged for each rich/lean period T determined from the variation of a feedback correction coefficient so that a basic EGR (Exhaust Gas Recirculation) rate determined according to the engine operating condition is corrected on the basis of the average value to derive a final EGR rate. Thus, the variation in the EGR rate cannot be amplified or incremented even when the variation in the combustion state variable occurs due to the influence of the variation in the air/fuel mixture ratio.
    • 公开了一种用于控制内燃机的EGR率的发动机操作的装置,其具有空气/燃料混合比控制。 在控制装置中,根据反馈校正系数的变化确定的每个富/稀期间T,检测表示发动机的燃烧状态的特性的变量,对燃烧状态变化的差,目标值进行平均, 根据发动机工作条件确定的基本EGR(排气再循环)率根据平均值进行校正,得到最终EGR率。 因此,即使当由于空气/燃料混合比的变化的影响而发生燃烧状态变化的变化时,EGR率的变化也不能被放大或增加。