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21. 发明申请

US20070097487A1 High fill ratio silicon spatial light modulator 有权
标题翻译：高填充率硅空间光调制器
公开(公告)号：US20070097487A1
公开(公告)日：2007-05-03
申请号：US11448149
申请日：2006-06-05
申请人： Xiao Yang , Yuxiang Wang , Wook Ji , Justin Payne , Ye Wang , William Worley , Dongmin Chen , Howard Woo
发明人： Xiao Yang , Yuxiang Wang , Wook Ji , Justin Payne , Ye Wang , William Worley , Dongmin Chen , Howard Woo
IPC分类号： G02B26/00
CPC分类号： G02B26/0841 , G02B26/008
摘要： An optical deflection device for a display application. The optical deflection device includes a semiconductor substrate including an upper surface region and one or more electrode devices provided overlying the upper surface region. The optical deflection device also includes a hinge device including a silicon material and coupled to the upper surface region. The optical deflection device further includes a spacing defined between the upper surface region and the hinge device and a mirror structure including a post portion coupled to the hinge device and a mirror plate portion coupled to the post portion and overlying the hinge device.
摘要翻译：一种用于显示器应用的光学偏转装置。光偏转装置包括：半导体衬底，包括上表面区域和设置在上表面区域上的一个或多个电极器件。光学偏转装置还包括铰链装置，其包括硅材料并且连接到上表面区域。光学偏转装置还包括限定在上表面区域和铰链装置之间的间隔，以及反射镜结构，其包括联接到铰链装置的柱部分和耦合到柱部分并且覆盖铰链装置的镜板部分。

22. 发明申请

US20050202683A1 Method of depositing an amorphous carbon film for etch hardmask application 有权
标题翻译：沉积用于蚀刻硬掩模应用的无定形碳膜的方法
公开(公告)号：US20050202683A1
公开(公告)日：2005-09-15
申请号：US10799146
申请日：2004-03-12
申请人： Yuxiang Wang , Sudha Rathi , Michael Kwan , Hichem M'Saad
发明人： Yuxiang Wang , Sudha Rathi , Michael Kwan , Hichem M'Saad
IPC分类号： H01L21/469
CPC分类号： G03F7/094 , G03F7/091 , H01L21/02115 , H01L21/02274 , H01L21/0276 , H01L21/31122 , H01L21/31144 , H01L21/76802 , H01L21/7681 , H01L21/76829 , H01L21/7684
摘要： Methods are provided for depositing amorphous carbon materials. In one aspect, the invention provides a method for processing a substrate including forming a dielectric material layer on a surface of the substrate, depositing an amorphous carbon layer on the dielectric material layer by introducing a processing gas comprises one or more hydrocarbon compounds and an argon carrier gas, and generating a plasma of the processing gas by applying power from a dual-frequency RF source, etching the amorphous carbon layer to form a patterned amorphous carbon layer, and etching feature definitions in the dielectric material layer corresponding to the patterned amorphous carbon layer. The amorphous carbon layer may act as an etch stop, an anti-reflective coating, or both.
摘要翻译：提供了沉积无定形碳材料的方法。一方面，本发明提供了一种处理衬底的方法，包括在衬底的表面上形成介电材料层，通过引入包含一种或多种烃化合物和氩气的处理气体在电介质材料层上沉积无定形碳层并且通过从双频RF源施加电力来产生处理气体的等离子体，蚀刻无定形碳层以形成图案化的非晶碳层，并且在对应于图案化无定形碳的电介质材料层中蚀刻特征定义层。无定形碳层可用作蚀刻停止层，抗反射涂层或两者。

23. 发明申请

US20050199585A1 Method of depositing an amorphous carbon film for metal etch hardmask application 审中-公开
标题翻译：沉积用于金属蚀刻硬掩模应用的无定形碳膜的方法
公开(公告)号：US20050199585A1
公开(公告)日：2005-09-15
申请号：US10800112
申请日：2004-03-12
申请人： Yuxiang Wang , David Bittrich , Christopher Bencher , Heraldo Botelho , Sudha Rathi , Michael Kwan
发明人： Yuxiang Wang , David Bittrich , Christopher Bencher , Heraldo Botelho , Sudha Rathi , Michael Kwan
IPC分类号： H01L21/027 , H01L21/033 , H01L21/314 , H01L21/3213 , B44C1/22 , C23F1/00 , C23F3/00
CPC分类号： H01L21/67248 , H01L21/0276 , H01L21/0332 , H01L21/3146 , H01L21/32139
摘要： Methods are provided for processing a substrate including etching conductive materials with amorphous carbon materials disposed thereon. In one aspect, the invention provides a method for processing a substrate including forming a conductive material layer on a surface of the substrate, depositing an amorphous carbon layer on the conductive material layer, etching the amorphous carbon layer to form a patterned amorphous carbon layer, and etching feature definitions in the conductive material layer corresponding to the patterned amorphous carbon layer. The amorphous carbon layer may act as a hardmask, an etch stop, or an anti-reflective coating.
摘要翻译：提供了用于处理衬底的方法，该衬底包括设置在其上的非晶碳材料的蚀刻导电材料。一方面，本发明提供一种处理衬底的方法，包括在衬底的表面上形成导电材料层，在导电材料层上沉积无定形碳层，蚀刻无定形碳层以形成图案化的无定形碳层，并且在对应于图案化的无定形碳层的导电材料层中蚀刻特征定义。无定形碳层可以用作硬掩模，蚀刻停止层或抗反射涂层。

24. 发明申请

US20120034724A1 METHOD AND APPARATUS FOR MEMS OSCILLATOR 失效
标题翻译： MEMS振荡器的方法和装置
公开(公告)号：US20120034724A1
公开(公告)日：2012-02-09
申请号：US13275617
申请日：2011-10-18
申请人： Xiao Yang , Dongmin Chen , Ye Wang , Justin Payne , Yuxiang Wang , Wook Ji
发明人： Xiao Yang , Dongmin Chen , Ye Wang , Justin Payne , Yuxiang Wang , Wook Ji
IPC分类号： H01L21/02
CPC分类号： H03H3/0072 , H03H3/0073 , H03H9/02244 , H03H9/2463 , H03H2009/02511 , H03H2009/02519
摘要： A resonator includes a CMOS substrate having a first electrode and a second electrode. The CMOS substrate is configured to provide one or more control signals to the first electrode. The resonator also includes a resonator structure including a silicon material layer. The resonator structure is coupled to the CMOS substrate and configured to resonate in response to the one or more control signals.
摘要翻译：谐振器包括具有第一电极和第二电极的CMOS衬底。 CMOS衬底被配置为向第一电极提供一个或多个控制信号。谐振器还包括包括硅材料层的谐振器结构。谐振器结构耦合到CMOS衬底并且被配置为响应于一个或多个控制信号而谐振。

25. 发明授权

US07863697B2 Method and apparatus for MEMS oscillator 有权
标题翻译： MEMS振荡器的方法和装置
公开(公告)号：US07863697B2
公开(公告)日：2011-01-04
申请号：US11950373
申请日：2007-12-04
申请人： Xiao Yang , Dongmin Chen , Ye Wang , Justin Payne , Yuxiang Wang , Wook Ji
发明人： Xiao Yang , Dongmin Chen , Ye Wang , Justin Payne , Yuxiang Wang , Wook Ji
IPC分类号： H01L29/86
CPC分类号： H03H3/0072 , H03H3/0073 , H03H9/02244 , H03H9/2463 , H03H2009/02511 , H03H2009/02519
摘要： A resonator includes a CMOS substrate having a first electrode and a second electrode. The CMOS substrate is configured to provide one or more control signals to the first electrode. The resonator also includes a resonator structure including a silicon material layer. The resonator structure is coupled to the CMOS substrate and configured to resonate in response to the one or more control signals.
摘要翻译：谐振器包括具有第一电极和第二电极的CMOS衬底。 CMOS衬底被配置为向第一电极提供一个或多个控制信号。谐振器还包括包括硅材料层的谐振器结构。谐振器结构耦合到CMOS衬底并且被配置为响应于一个或多个控制信号而谐振。

26. 发明授权

US07675670B2 Fabrication of a high fill ratio silicon spatial light modulator 有权
标题翻译：高填充率硅空间光调制器的制造
公开(公告)号：US07675670B2
公开(公告)日：2010-03-09
申请号：US11448148
申请日：2006-06-05
申请人： Xiao Yang , Yuxiang Wang , Wook Ji , Justin Allen Payne , Ye Wang , Howard Woo
发明人： Xiao Yang , Yuxiang Wang , Wook Ji , Justin Allen Payne , Ye Wang , Howard Woo
IPC分类号： G02B26/00 , G02F1/00
CPC分类号： G02B26/0841
摘要： A method for forming an optical deflection device includes providing a semiconductor substrate comprising an upper surface region and a plurality of drive devices within one or more portions of the semiconductor substrate. The upper surface region includes one or more patterned structure regions and at least one open region to expose a portion of the upper surface region to form a resulting surface region. The method also includes forming a planarizing material overlying the resulting surface region to fill the at least one open region and cause formation of an upper planarized layer using the fill material. The method further includes forming a thickness of silicon material at a temperature of less than 300 ° C. to maintain a state of the planarizing material.
摘要翻译：一种形成光偏转装置的方法包括提供半导体衬底的一个或多个部分内包括上表面区域和多个驱动装置的半导体衬底。上表面区域包括一个或多个图案化结构区域和至少一个开放区域，以暴露上表面区域的一部分以形成所得表面区域。该方法还包括形成覆盖所得表面区域的平坦化材料以填充至少一个开放区域，并且使用填充材料形成上部平坦化层。该方法还包括在小于300℃的温度下形成硅材料的厚度以保持平坦化材料的状态。

27. 发明授权

US07522330B2 High fill ratio silicon spatial light modulator 有权
标题翻译：高填充率硅空间光调制器
公开(公告)号：US07522330B2
公开(公告)日：2009-04-21
申请号：US11448149
申请日：2006-06-05
申请人： Xiao Yang , Yuxiang Wang , Wook Ji , Justin Allen Payne , Ye Wang , William Spencer Worley, III , Dongmin Chen , Howard Woo
发明人： Xiao Yang , Yuxiang Wang , Wook Ji , Justin Allen Payne , Ye Wang , William Spencer Worley, III , Dongmin Chen , Howard Woo
IPC分类号： G02B26/00
CPC分类号： G02B26/0841 , G02B26/008
摘要： An optical deflection device for a display application. The optical deflection device includes a semiconductor substrate including an upper surface region and one or more electrode devices provided overlying the upper surface region. The optical deflection device also includes a hinge device including a silicon material and coupled to the upper surface region. The optical deflection device further includes a spacing defined between the upper surface region and the hinge device and a mirror structure including a post portion coupled to the hinge device and a mirror plate portion coupled to the post portion and overlying the hinge device.
摘要翻译：一种用于显示器应用的光学偏转装置。光偏转装置包括：半导体衬底，包括上表面区域和设置在上表面区域上的一个或多个电极器件。光学偏转装置还包括铰链装置，其包括硅材料并且连接到上表面区域。光学偏转装置还包括限定在上表面区域和铰链装置之间的间隔，以及反射镜结构，其包括联接到铰链装置的柱部分和耦合到柱部分并且覆盖铰链装置的镜板部分。

28. 发明授权

US06967072B2 Photolithography scheme using a silicon containing resist 失效
标题翻译：使用含硅抗蚀剂的光刻方案
公开(公告)号：US06967072B2
公开(公告)日：2005-11-22
申请号：US09921938
申请日：2001-08-02
申请人： Ian Latchford , Christopher Dennis Bencher , Yuxiang Wang , Mario Dave Silvetti
发明人： Ian Latchford , Christopher Dennis Bencher , Yuxiang Wang , Mario Dave Silvetti
IPC分类号： B01J19/08 , C23C16/26 , C23C16/46 , G03C5/00 , G03F7/075 , G03F7/09 , H01L21/027 , H01L21/283 , H01L21/311 , H01L21/312 , H01L21/314 , H01L21/316 , H01L21/3205 , H01L21/768 , G03F7/004 , G03F7/085
CPC分类号： H01L21/31144 , G03F7/0757 , G03F7/091 , H01L21/0276 , H01L21/76802 , H01L21/76825 , H01L21/76832
摘要： A method for forming a patterned amorphous carbon layer in a semiconductor stack, including forming an amorphous carbon layer on a substrate and forming a silicon containing photoresist layer on top of the amorphous carbon layer. Thereafter, the method includes developing a pattern transferred into the resist layer with a photolithographic process and etching through the amorphous carbon layer in at least one region defined by the pattern in the resist layer, wherein a resist layer hard mask is formed in an outer portion of the photoresist layer during etching.
摘要翻译：一种在半导体堆叠中形成图案化的非晶碳层的方法，包括在基底上形成无定形碳层，并在无定形碳层的顶部形成含硅光致抗蚀剂层。此后，该方法包括通过光刻工艺显影转印到抗蚀剂层中的图案，并且在由抗蚀剂层中的图案限定的至少一个区域中通过无定形碳层进行蚀刻，其中在外部形成抗蚀剂层硬掩模的光刻胶层。

29. 发明申请

US20050008029A1 System and method of accessing and transmitting different data frames in a digital transmission network 有权
标题翻译：在数字传输网络中访问和传输不同数据帧的系统和方法
公开(公告)号：US20050008029A1
公开(公告)日：2005-01-13
申请号：US10765204
申请日：2004-01-28
申请人： Zhiqun He , Yuxiang Wang
发明人： Zhiqun He , Yuxiang Wang
IPC分类号： H04L12/28 , H04L12/46 , H04L12/931 , H04L29/06 , H04J3/22
CPC分类号： H04L12/2898 , H04L12/4625 , H04L12/4633 , H04L12/4641 , H04L49/351 , H04L49/354 , H04L69/08
摘要： A system accessing and transmitting different data frames in a digital transmission network for accessing and transmitting different data frames, comprising: at least a user-network interface (UNI), which is used to couple with the user's network; at least a network-network interface (NNI), which is used to couple with said digital transmission network to transfer data; a data converting device, which is coupled with said UNIs and said NNIs to convert data formats between said UNIs, data formats between said NNIs, or data formats between said NNIs and said UNIs; wherein said data converting device comprises a virtual interface device, said virtual interface device comprises: at least two device interfaces, a virtual interface processing unit, a rule database, a control interface unit and an inter-device interface, so as to improve access ability of the device.
摘要翻译：一种在数字传输网络中访问和发送不同数据帧以访问和发送不同数据帧的系统，包括：用于与用户网络耦合的至少一个用户网络接口（UNI）; 至少一个网络网络接口（NNI），用于与所述数字传输网络耦合以传送数据; 数据转换装置，其与所述UNI和所述NNI耦合以在所述UNI之间转换数据格式，所述NNI之间的数据格式，或所述NNI与所述UNI之间的数据格式; 其中所述数据转换装置包括虚拟接口设备，所述虚拟接口设备包括：至少两个设备接口，虚拟接口处理单元，规则数据库，控制接口单元和设备间接口，以便提高接入能力的设备。

30. 发明申请

US20050005029A1 System and method of accessing and transmitting different data frames in a digital transmission network 有权
标题翻译：在数字传输网络中访问和传输不同数据帧的系统和方法
公开(公告)号：US20050005029A1
公开(公告)日：2005-01-06
申请号：US10765205
申请日：2004-01-28
申请人： Zhiqun He , Yuxiang Wang , Qian Qiao
发明人： Zhiqun He , Yuxiang Wang , Qian Qiao
IPC分类号： H04L12/46 , H04L29/06 , G06F15/16
CPC分类号： H04L12/4625 , H04L12/4641 , H04L69/08
摘要： A system accessing and transmitting different data frames in a digital transmission network, for accessing and transmitting different data frames, said system comprises: at least a user-network interface (UNI), which is used to couple with the subscriber's network; and/or at least a network-network interface (NNI), which is used to couple with said digital transmission network to transfer data; and a data converting device, coupled with said UNIs and said NNIs, which is used to convert data formats between said UNIs or data formats between said NNIs or data formats between said UNIs and said NNIs; said data converting device comprises a virtual bridge device and an interface device, said virtual bridge device switches data between said UNIs and said NNIs, and said virtual bridge device detects control messages, and transmits the control messages to control system of the device to process via the control interface unit; and data frames of message except control messages are switched, so as to overcome the limitation of address space of Ethernet data frames.
摘要翻译：一种在数字传输网络中访问和发送不同数据帧的系统，用于访问和发送不同的数据帧，所述系统包括：至少一个用户网络接口（UNI），用于与用户网络耦合; 和/或至少网络网络接口（NNI），其用于与所述数字传输网络耦合以传送数据; 以及与所述UNI和所述NNI相耦合的数据转换装置，其用于在所述UNI或所述NNI之间的所述NNI或数据格式之间的所述UNI或数据格式之间转换数据格式; 所述数据转换装置包括虚拟桥接设备和接口设备，所述虚拟桥接设备在所述UNI与所述NNI之间切换数据，所述虚拟桥接设备检测控制消息，并将所述控制消息发送到所述设备的控制系统以经过控制接口单元; 并且除了控制消息之外的消息的数据帧被切换，以便克服以太网数据帧的地址空间的限制。

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