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21. 发明授权

US6080905A Olefin purification by adsorption of acetylenics and regeneration of adsorbent 失效
标题翻译：烯烃通过吸附炔烃和吸附剂再生来净化
公开(公告)号：US6080905A
公开(公告)日：2000-06-27
申请号：US22651
申请日：1998-02-12
申请人： Mark P. Kaminsky , Shiyou Pei , Richard A. Wilsak , Robert C. Whittaker
发明人： Mark P. Kaminsky , Shiyou Pei , Richard A. Wilsak , Robert C. Whittaker
IPC分类号： B01D53/02 , B01J20/02 , B01J20/08 , B01J20/32 , B01J20/34 , C07C7/12 , C07C7/152 , C07C11/02 , C10G25/00 , C10G25/03 , C10G70/04 , C07C7/00
CPC分类号： C10G70/046 , B01J20/02 , B01J20/08 , B01J20/103 , B01J20/12 , B01J20/18 , B01J20/20 , B01J20/28016 , B01J20/28061 , B01J20/3078 , B01J20/3204 , B01J20/3236 , B01J20/3433 , B01J20/3458 , C07C7/12 , C07C7/152 , C10G25/003 , B01J2220/56
摘要： Processes using heterogeneous adsorbents are disclosed for purification of olefins such as are typically produced by thermal cracking of suitable hydrocarbon feedstocks, by passing a stream of olefin having from 2 to about 8 carbon atoms, containing acetylenic impurities having the same or similar carbon content, and optionally saturated hydrocarbon gases, through a particulate bed of predominantly a support material having high surface area on which is dispersed at least one metallic element. Adsorption is carried out in an essentially dihydrogen-free atmosphere within the bed, selective and reversible adsorption and/or complexing of the contained acetylenic contaminants with the adsorbent, and thereby obtain purified effluent which contains less than a predetermined level of the acetylenic impurities. Selective and reversible adsorption and/or complexing of the contained acetylenic impurities with the adsorbent is continued until levels of acetylenic impurities in the effluent stream increase to a predetermined level. Thereafter the resulting bed of adsorbent is regenerated in the presence of a reducing gas containing dihydrogen to effect release of the contained acetylenic impurities from the adsorbent.
摘要翻译：公开了使用非均相吸附剂的方法，用于纯化烯烃，例如通常通过使合适的烃原料热裂解，通过含有2至约8个碳原子的烯烃流，其含有具有相同或相似碳含量的炔属杂质，以及任选的饱和烃气体，通过主要是具有高表面积的支撑材料的颗粒床，其上分散有至少一种金属元素。吸附在床内基本上不含二氢的气氛中进行，选择性和可逆吸附和/或将所含的炔属污染物与吸附剂络合，从而获得含有小于预定水平的炔属杂质的纯化流出物。所含有的炔属杂质与吸附剂的选择性和可逆吸附和/或络合继续进行，直到排出物流中的炔属杂质水平增加到预定水平。此后，所得到的吸附剂床在含有二氢的还原气体的存在下再生，以使吸附剂中含有的炔属杂质释放。

22. 发明授权

US5639437A Oxygen ion-conducting dense ceramic 失效
标题翻译：氧离子导电致密陶瓷
公开(公告)号：US5639437A
公开(公告)日：1997-06-17
申请号：US706813
申请日：1996-09-03
申请人： Uthamalingam Balachandran , Mark S. Kleefisch , Thaddeus P. Kobylinski , Sherry L. Morissette , Shiyou Pei
发明人： Uthamalingam Balachandran , Mark S. Kleefisch , Thaddeus P. Kobylinski , Sherry L. Morissette , Shiyou Pei
IPC分类号： B01D53/22 , B01D71/02 , B01J12/00 , B01J19/24 , C01B13/02 , C01G51/00 , C04B35/01 , C04B35/26 , H01M8/12 , H01B1/06 , C01G37/14
CPC分类号： B01D67/0041 , B01D53/22 , B01D53/228 , B01D71/024 , B01J12/007 , B01J19/2475 , B01J19/2485 , C01B13/0203 , C01B13/0255 , C01G49/0018 , C01G49/009 , C01G51/006 , C04B35/01 , C04B35/2633 , H01M8/1231 , H01M8/1246 , B01D2257/104 , B01D2325/26 , B01J2219/00051 , B01J2219/00186 , C01B2210/0046 , C01B2210/0051 , C01B2210/0071 , C01B2210/0075 , C01P2002/20 , C01P2002/34 , C01P2002/54 , C01P2002/72 , C01P2002/74 , C01P2002/77 , C01P2002/78 , C01P2006/80 , Y02E60/525 , Y02P70/56
摘要： Preparation, structure, and properties of mixed metal oxide compositions containing at least strontium, cobalt, iron and oxygen are described. The crystalline mixed metal oxide compositions of this invention have, for example, structure represented bySr.sub..alpha. (Fe.sub.1-x Co.sub.x).sub..alpha.+.beta. O.sub..delta.where x is a number in a range from 0.01 to about 1, .alpha. is a number in a range from about 1 to about 4, .beta. is a number in a range upward from 0 to about 20, and .delta. is a number which renders the compound charge neutral, and wherein the composition has a non-perovskite structure. Use of the mixed metal oxides in dense ceramic membranes which exhibit oxygen ionic conductivity and selective oxygen separation, are described as well as their use in separation of oxygen from an oxygen-containing gaseous mixture.
摘要翻译：描述了至少包含锶，钴，铁和氧的混合金属氧化物组合物的制备，结构和性质。本发明的结晶混合金属氧化物组合物具有例如由Srα（Fe1-xCox）α+βOδ表示的结构，其中x是0.01至约1的数，α是范围内的数从约1至约4，β是从0至约20的范围内的数字，并且δ是使化合物电荷为中性的数，并且其中所述组合物具有非钙钛矿结构。介绍了在氧离子导电性和选择性氧分离的密集陶瓷膜中使用混合金属氧化物，以及它们在与含氧气体混合物中分离氧气的用途。

23. 发明授权

US07345306B1 Corona based charge voltage measurement 有权
标题翻译：基于电晕的充电电压测量
公开(公告)号：US07345306B1
公开(公告)日：2008-03-18
申请号：US11421855
申请日：2006-06-02
申请人： Sergio Edelstein , Eric F. Bouche , Jianou Shi , Shiyou Pei , Xiafang Zhang
发明人： Sergio Edelstein , Eric F. Bouche , Jianou Shi , Shiyou Pei , Xiafang Zhang
IPC分类号： H01L23/58
CPC分类号： G01R31/303 , G01R31/2648 , H01L22/14
摘要： A method of measuring electrical characteristics of a gate dielectric. The gate dielectric is local annealed by directing a highly localized energy source at the measurement area, such that the measurement area is brought to an annealing temperature while surrounding structures are not significantly heated. While heating the measurement area, a flow of a gas containing a percentage of hydrogen, deuterium, or water vapor at a flow rate is directed to the measurement area. A charge is inducted on the measurement area and the electrical characteristics of the gate dielectric are measured using non contact electrical probing.
摘要翻译：测量栅极电介质的电特性的方法。栅极电介质通过在测量区域处引导高度局部化的能量源进行局部退火，使得测量区域达到退火温度，而周围结构不被显着加热。在加热测量区域的同时，以一定的流量将含有一定百分比的氢，氘或水蒸汽的气体流动到测量区域。在测量区域上引入电荷，并且使用非接触电探测来测量栅极电介质的电特性。

24. 发明申请

US20070069759A1 Systems and Methods for Controlling Deposition of a Charge on a Wafer for Measurement of One or More Electrical Properties of the Wafer 有权
标题翻译：用于控制在晶片上沉积电荷以测量晶片的一个或多个电性能的系统和方法
公开(公告)号：US20070069759A1
公开(公告)日：2007-03-29
申请号：US11465893
申请日：2006-08-21
申请人： Jeffrey Rzepiela , Yiping Feng , Shiyou Pei , Alexander Kagan , Jianou Shi , Sergio Edelstein
发明人： Jeffrey Rzepiela , Yiping Feng , Shiyou Pei , Alexander Kagan , Jianou Shi , Sergio Edelstein
IPC分类号： G01R31/26
CPC分类号： G01R31/2831 , G01R31/2856 , H01L22/34 , H01L2924/0002 , H01L2924/00
摘要： Systems and methods for controlling deposition of a charge on a wafer for measurement of one or more electrical properties of the wafer are provided. One system includes a corona source configured to deposit the charge on the wafer and a sensor configured to measure one or more conditions within the corona source. This system also includes a control subsystem configured to alter one or more parameters of the corona source based on the one or more conditions. Another system includes a corona source configured to deposit the charge on the wafer and a mixture of gases disposed within a discharge chamber of the corona source during the deposition of the charge. The mixture of gases alters one or more parameters of the charge deposited on the wafer.
摘要翻译：提供了用于控制晶片上的电荷沉积以测量晶片的一个或多个电性能的系统和方法。一个系统包括配置成将电荷沉积在晶片上的电晕源和配置成测量电晕源内的一个或多个条件的传感器。该系统还包括配置为基于一个或多个条件来改变电晕源的一个或多个参数的控制子系统。另一种系统包括电晕源，其被配置为在电荷沉积期间将电荷沉积在晶片上以及布置在电晕源的放电室内的气体混合物。气体混合物改变沉积在晶片上的电荷的一个或多个参数。

25. 发明授权

US07110238B1 Systems and methods for using non-contact voltage sensors and corona discharge guns 有权
标题翻译：使用非接触式电压传感器和电晕放电枪的系统和方法
公开(公告)号：US07110238B1
公开(公告)日：2006-09-19
申请号：US11154991
申请日：2005-06-16
申请人： Zhiwei (Steve) Xu , Jianou Shi , Shiyou Pei , Mahmood Mirzaaghaeian , Jeffrey A. Rzepiela
发明人： Zhiwei (Steve) Xu , Jianou Shi , Shiyou Pei , Mahmood Mirzaaghaeian , Jeffrey A. Rzepiela
IPC分类号： H01H47/00
CPC分类号： G01N27/002
摘要： A method and a system for calibrating the work function of a non-contact voltage sensor are provided. The method includes preparing a reference sample to have a stable work function, measuring a voltage of the sample using a non-contact voltage sensor, and determining a work function correction factor of the sensor from the measured voltage. In turn, the calibrated work function may be used to adjust voltages of substrates measured by the sensor. A corona gun which includes a first electrode and one or more conductive rods is provided. In some embodiments, the conductive rods may be angled between 0 and 90 degrees with respect to a first electrode sidewall and/or be concentrically arranged less than 90 degrees from each other. In addition or alternatively, the corona gun may be adapted to alter its length and/or include a second electrode partially inset within a space surrounded by the first electrode.
摘要翻译：提供了一种用于校准非接触式电压传感器的功能的方法和系统。该方法包括制备参考样品以具有稳定的功函数，使用非接触电压传感器测量样品的电压，以及根据测量的电压确定传感器的功函数校正因子。反过来，校准的功函数可以用于调节由传感器测量的衬底的电压。提供包括第一电极和一个或多个导电棒的电晕枪。在一些实施例中，导电棒相对于第一电极侧壁可以在0度和90度之间成角度和/或彼此同心布置成小于90度。另外或替代地，电晕枪可以适于改变其长度和/或包括在由第一电极包围的空间内部分插入的第二电极。

26. 发明授权

US07103484B1 Non-contact methods for measuring electrical thickness and determining nitrogen content of insulating films 有权
标题翻译：用于测量电气厚度和确定绝缘膜氮含量的非接触式方法
公开(公告)号：US07103484B1
公开(公告)日：2006-09-05
申请号：US10698222
申请日：2003-10-31
申请人： Jianou Shi , Steve Yifeng Cui , Shiyou Pei , Zhiwei (Steve) Xu , Haiyong (Howard) Wang
发明人： Jianou Shi , Steve Yifeng Cui , Shiyou Pei , Zhiwei (Steve) Xu , Haiyong (Howard) Wang
IPC分类号： G01R15/00 , G01R31/26
CPC分类号： G01N27/205 , G01R31/305 , H01L22/14 , H01L2924/0002 , H01L2924/00
摘要： Non-contact methods for determining a parameter of an insulating film are provided. One method includes measuring at least two surface voltages of the insulating film. The surface voltages are measured after different charge depositions. Measuring the surface voltages is performed in two or more sequences. The method also includes determining individual parameters for the two or more sequences from the surface voltages and the charge depositions. In addition, the method includes determining the parameter of the insulating film as an average of the individual parameters. The parameter is substantially independent of leakage in the insulating film. Another method includes determining a characteristic of nitrogen in an insulating film using two parameters of the insulating film selected from equivalent oxide thickness, optical thickness, and a measure of leakage through the insulating film. The characteristic may be a nitrogen dose, a nitrogen percentage, or a presence of nitrogen in the insulating film.
摘要翻译：提供了用于确定绝缘膜的参数的非接触方法。一种方法包括测量绝缘膜的至少两个表面电压。在不同的电荷沉积之后测量表面电压。以两个或更多个顺序进行表面电压的测量。该方法还包括从表面电压和电荷沉积确定两个或多个序列的各个参数。此外，该方法包括将绝缘膜的参数确定为各个参数的平均值。该参数基本上与绝缘膜中的泄漏无关。另一种方法包括使用选自等效氧化物厚度，光学厚度和通过绝缘膜的泄漏的测量的绝缘膜的两个参数来确定绝缘膜中的氮的特性。该特性可以是绝缘膜中的氮剂量，氮百分比或氮的存在。

27. 发明授权

US07098050B1 Corona based charge voltage measurement 有权
标题翻译：基于电晕的充电电压测量
公开(公告)号：US07098050B1
公开(公告)日：2006-08-29
申请号：US10974270
申请日：2004-10-27
申请人： Sergio Edelstein , Eric F. Bouche , Jianou Shi , Shiyou Pei , Xiafang Zhang
发明人： Sergio Edelstein , Eric F. Bouche , Jianou Shi , Shiyou Pei , Xiafang Zhang
IPC分类号： H01L31/26
CPC分类号： G01R31/303 , G01R31/2648 , H01L22/14
摘要： A method of measuring electrical characteristics of a gate dielectric. The gate dielectric is local annealed by directing a highly localized energy source at the measurement area, such that the measurement area is brought to an annealing temperature while surrounding structures are not significantly heated. While heating the measurement area, a flow of a gas containing a percentage of hydrogen, deuterium, or water vapor at a flow rate is directed to the measurement area. A charge is inducted on the measurement area and the electrical characteristics of the gate dielectric are measured using non contact electrical probing.
摘要翻译：测量栅极电介质的电特性的方法。栅极电介质通过在测量区域处引导高度局部化的能量源进行局部退火，使得测量区域达到退火温度，而周围结构不被显着加热。在加热测量区域的同时，以一定的流量将含有一定百分比的氢，氘或水蒸汽的气体流动到测量区域。在测量区域上引入电荷，并且使用非接触电探测来测量栅极电介质的电特性。

28. 发明申请

US20050206402A1 Methods and systems for determining one or more properties of a specimen 有权
标题翻译：用于确定样品的一个或多个性质的方法和系统
公开(公告)号：US20050206402A1
公开(公告)日：2005-09-22
申请号：US11078669
申请日：2005-03-10
申请人： Jianou Shi , Jeffrey Rzepiela , Shiyou Pei , Zhiwei Xu , John Alexander
发明人： Jianou Shi , Jeffrey Rzepiela , Shiyou Pei , Zhiwei Xu , John Alexander
IPC分类号： H01L21/66 , G01R31/26 , G01R31/311
CPC分类号： G01R31/311 , G01R31/2648
摘要： Various methods and systems for determining one or more properties of a specimen are provided. One system for determining a property of a specimen is configured to illuminate a specimen with different wavelengths of light substantially simultaneously. The different wavelengths of light are modulated at substantially the same frequency. The system is also configured to perform at least two measurements on the specimen. A minority carrier diffusion length of the specimen may be determined from the measurements and absorption coefficients of the specimen at the different wavelengths. Another system for detecting defects on a specimen is configured to deposit a charge at multiple locations on an upper surface of the specimen. This system is also configured to measure a vibration of a probe at the multiple locations. Defects may be detected on the specimen using a two-dimensional map of the specimen generated from the measured surface voltages.
摘要翻译：提供了用于确定样本的一个或多个属性的各种方法和系统。用于确定样本特性的一个系统被配置为基本上同时照射具有不同波长的光的样本。不同波长的光以基本上相同的频率被调制。该系统还被配置为对样本进行至少两次测量。样品的少数载流子扩散长度可以根据不同波长的样品的测量和吸收系数来确定。用于检测样本上的缺陷的另一系统被配置为在样本的上表面上的多个位置沉积电荷。该系统还被配置为测量在多个位置处的探针的振动。可以使用从测量的表面电压产生的样本的二维图来在样本上检测缺陷。

29. 发明授权

US06691404B2 Fabricating of a flat-panel displace using porous spacer 有权
标题翻译：使用多孔间隔件制造平板位移
公开(公告)号：US06691404B2
公开(公告)日：2004-02-17
申请号：US09771295
申请日：2001-01-25
申请人： Roger W. Barton , Michael J. Nystrom , Bob L. Mackey , Lawrence S. Pan , Shiyou Pei , Stephen Wallace , Douglas M. Smith
发明人： Roger W. Barton , Michael J. Nystrom , Bob L. Mackey , Lawrence S. Pan , Shiyou Pei , Stephen Wallace , Douglas M. Smith
IPC分类号： H05K336
CPC分类号： H01J29/028 , H01J9/185 , H01J9/242 , H01J29/864 , H01J31/127 , H01J2329/8635 , H01J2329/864 , H01J2329/8645 , Y10T29/49128 , Y10T29/49155 , Y10T428/249956 , Y10T428/249957 , Y10T428/24997 , Y10T428/249974 , Y10T428/249978 , Y10T428/249979 , Y10T428/24999
摘要： A flat-panel display is fabricated according to a process in which a liquid-containing film (92, 116, 124, 132, 144, or 166) is formed over a substrate (80). In addition to suitable liquid, the liquid-containing film contains oxide or/and hydroxide. Liquid is removed from the liquid-containing film to convert it into a solid porous film (82 or 150) having (a) a porosity of at least 10% along an exposed face of the film, (b) an average resistivity of 108-1014 ohm-cm at 25° C., and (c) an average thickness of no more than 20 &mgr;m. A spacer (24) formed with at least a segment of the substrate and overlying solid porous film is positioned between opposing first and second plate structures (20 and 22) of the display. The second plate structure (22) emits light upon receiving electrons emitted by the first plate structure (20).
摘要翻译：根据其中在衬底（80）上形成含液膜（92,116,124,132,144或166）的工艺制造平板显示器。除了合适的液体之外，含液体膜含有氧化物或/和氢氧化物。将液体从含液膜中除去，以将其转化为固体多孔膜（82或150），其具有（a）膜的暴露面至少10％的孔隙率，（b）平均电阻率为10 < 8> -10 14欧姆 - 厘米，（c）平均厚度不超过20毫米。形成有衬底的至少一个部分并覆盖固体多孔膜的间隔物（24）位于显示器的相对的第一和第二板结构（20和22）之间。第二板结构（22）在接收由第一板结构（20）发射的电子时发光。

30. 发明授权

US5723074A Oxygen ion-conducting dense ceramic 失效
标题翻译：氧离子导电致密陶瓷
公开(公告)号：US5723074A
公开(公告)日：1998-03-03
申请号：US626119
申请日：1996-04-01
申请人： Uthamalingam Balachandran , Mark S. Kleefisch , Thaddeus P. Kobylinski , Sherry L. Morissette , Shiyou Pei
发明人： Uthamalingam Balachandran , Mark S. Kleefisch , Thaddeus P. Kobylinski , Sherry L. Morissette , Shiyou Pei
IPC分类号： B01D53/22 , B01D71/02 , B01J12/00 , B01J19/24 , C01B13/02 , C01G51/00 , C04B35/01 , C04B35/26 , H01M8/12 , H01B1/06
CPC分类号： B01D67/0041 , B01D53/22 , B01D53/228 , B01D71/024 , B01J12/007 , B01J19/2475 , B01J19/2485 , C01B13/0203 , C01B13/0255 , C01G49/0018 , C01G49/009 , C01G51/006 , C04B35/01 , C04B35/2633 , H01M8/1231 , H01M8/1246 , B01D2257/104 , B01D2325/26 , B01J2219/00051 , B01J2219/00186 , C01B2210/0046 , C01B2210/0051 , C01B2210/0071 , C01B2210/0075 , C01P2002/20 , C01P2002/34 , C01P2002/54 , C01P2002/72 , C01P2002/74 , C01P2002/77 , C01P2002/78 , C01P2006/80 , Y02E60/525 , Y02P70/56
摘要： Preparation, structure, and properties of mixed metal oxide compositions and their uses are described. Mixed metal oxide compositions of the invention have stratified crystalline structure identifiable by means of powder X-ray diffraction patterns. In the form of dense ceramic membranes, the present compositions demonstrate an ability to separate oxygen selectively from a gaseous mixture containing oxygen and one or more other volatile components by means of ionic conductivities.
摘要翻译：描述了混合金属氧化物组合物的制备，结构和性质及其用途。本发明的混合金属氧化物组合物具有通过粉末X射线衍射图可鉴定的分层结晶结构。以致密陶瓷膜的形式，本发明组合物显示出通过离子电导率从含氧气和一种或多种其它挥发性组分的气体混合物中选择性地分离氧气的能力。

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