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21. 发明授权

US07663386B2 Probe card 失效
标题翻译：探针卡
公开(公告)号：US07663386B2
公开(公告)日：2010-02-16
申请号：US10586651
申请日：2005-01-20
申请人： Hisatomi Hosaka
发明人： Hisatomi Hosaka
IPC分类号： G01R31/02 , G01R31/26
CPC分类号： G01R1/07342
摘要： It is an object of the present invention to realize sure electrical connection between a contactor and an object to be inspected without influenced by heat, a reduction in the pre-heating time, and an enhanced throughput.A probe card of the present invention includes a contactor, a printed wiring board, an interposer provided between the contactor and the printed wiring board to have the both in elastic and electrical contact with each other, a coupling member integrating these, and a reinforcing member reinforcing the printed wiring board integrated via the coupling member.
摘要翻译：本发明的目的是在不受热影响的情况下实现接触器与待检查物体之间的电连接，预热时间的减少和增加的生产量。本发明的探针卡包括接触器，印刷线路板，设置在接触器和印刷线路板之间以使两者彼此弹性和电接触的插入件，将它们结合的联接构件和加强构件加强通过联接构件一体化的印刷线路板。

22. 发明授权

US07629806B2 Method for forming connection pin, probe, connection pin, probe card and method for manufacturing probe card 失效
标题翻译：连接针，探针，连接针，探针卡的形成方法以及制造探针卡的方法
公开(公告)号：US07629806B2
公开(公告)日：2009-12-08
申请号：US11885936
申请日：2006-03-08
申请人： Hisatomi Hosaka
发明人： Hisatomi Hosaka
IPC分类号： G01R31/02
CPC分类号： G01R3/00 , G01R1/06727 , G01R1/07342 , Y10T29/49222
摘要： A probe which can be easily formed, is not limited in a mounting position and number, and capable of sufficiently securing a space allowing a contact to move is provided. The probe has a contact to be brought into contact with an inspection object, and a beam part supporting the contact at a tip end portion. A rear portion of the beam part of the probe is joined to a surface at an inspection object side, of a contractor disposed to be opposed to the inspection object. The beam part of the probe is bent so that the above described contact at the tip end portion inclines to the above described inspection object side.
摘要翻译：可以容易地形成的探针不限于安装位置和数量，并且能够充分确保允许接触移动的空间。探针具有与检查对象接触的接触部，以及在前端部支撑接触部的梁部。探针的梁部分的后部与检查对象侧的与检查对象相对设置的接触器的表面接合。探针的梁部被弯曲，使得顶端部的上述接触部倾斜到上述检查对象侧。

23. 发明授权

US07541820B2 Probe card 失效
标题翻译：探针卡
公开(公告)号：US07541820B2
公开(公告)日：2009-06-02
申请号：US11883885
申请日：2006-06-27
申请人： Takashi Amemiya , Hisatomi Hosaka
发明人： Takashi Amemiya , Hisatomi Hosaka
IPC分类号： G01R31/02
CPC分类号： G01R1/07342 , G01R1/07364
摘要： A probe card includes a contactor supporting probes, and a printed wiring board electrically connected to the contactor. An elastic sheet is interposed between the contactor and the printed wiring board. The elastic sheet is formed so that elasticity in a central side is smaller than that in an outer peripheral side of the contactor. An elastic reaction force which acts on the contactor from the elastic sheet when the elastic sheet is compressed becomes weaker at the central part side as compared with the outer peripheral side of the contactor. Thereby, the bending amount of a central part of the contactor which is away from a fixed end and bends the most is reduced, and horizontality of the contactor is maintained.
摘要翻译：探针卡包括接触器支撑探针和电连接到接触器的印刷线路板。在接触器和印刷电路板之间插入弹性片。弹性片形成为使得中央侧的弹性小于接触器的外周侧的弹性。弹性片被压缩时作用于弹性片的接触器的弹性反作用力与接触器的外周侧相比在中央部分变弱。因此，远离固定端部并且弯曲最多的接触器的中心部分的弯曲量减小，并且保持接触器的水平度。

24. 发明授权

US07498827B2 Probe card 失效
标题翻译：探针卡
公开(公告)号：US07498827B2
公开(公告)日：2009-03-03
申请号：US11710221
申请日：2007-02-23
申请人： Jun Mochizuki , Hisatomi Hosaka
发明人： Jun Mochizuki , Hisatomi Hosaka
IPC分类号： G01R31/02
CPC分类号： G01R1/07371 , G01R1/06733 , H01L2924/00013 , Y10T29/49204 , H01L2224/29099
摘要： The present invention provides a probe card that can examine an object with small electrode spacing. A probe supporting plate is provided to a lower face side of a printed wiring board of a probe card. A plurality of probes are supported by the probe supporting plate. The probes comprise an upper contact, a lower contact, and a main body portion. An upper end portion of the upper contact protrudes toward an upper side of the probe supporting plate and contacts a terminal of the printed wiring board. A lower end portion of the lower contact protrudes toward a lower side of the probe supporting plate. On the probe supporting plate, a through-hole and a concave portion are formed to lock the probes, and the probes can be inserted and removed freely against the probe supporting plate from above.
摘要翻译：本发明提供一种可以检查具有小电极间距的物体的探针卡。探针支撑板设置在探针卡的印刷电路板的下表面侧。多个探针由探针支撑板支撑。探针包括上触点，下触点和主体部分。上接触件的上端部朝向探针支撑板的上侧突出并与印刷线路板的端子接触。下接触件的下端部朝向探针支撑板的下侧突出。在探针支撑板上形成通孔和凹部来锁定探针，并且可以从上方将探针自由地插入和移除探针支撑板。

25. 发明申请

US20080191720A1 Multilayer Substrate and Probe Card 失效
标题翻译：多层基板和探针卡
公开(公告)号：US20080191720A1
公开(公告)日：2008-08-14
申请号：US11597476
申请日：2005-05-24
申请人： Jun Mochizuki , Hisatomi Hosaka
发明人： Jun Mochizuki , Hisatomi Hosaka
IPC分类号： G01R31/02 , H05K1/00 , G01R1/067
CPC分类号： G01R1/07342 , G01R1/0458 , G01R1/07307 , G01R1/07357 , H05K1/0271 , H05K1/0306 , H05K3/4688 , H05K2201/068 , H05K2201/09036
摘要： It is an object of the present invention to dramatically reduce thermal deformation without using any special material in a multilayer substrate and a probe card.According to the present invention, in a probe card including at least one circuit board connected in an electrically conductive manner to a probe brought into electrical contact with an inspection object, the circuit board includes a base layer and a surface layer stacked on at least an inspection object side surface of the base layer. The surface layer has a higher coefficient of thermal expansion than that of the base layer, and grooves dividing the surface layer into a plurality of areas are provided in the surface layer.
摘要翻译：本发明的目的是在不使用多层基板和探针卡中的任何特殊材料的情况下显着地减少热变形。根据本发明，在包括至少一个电路板的探针卡中，所述至少一个电路板以导电方式连接到与检查对象电接触的探针，所述电路板包括基底层和至少层叠在所述基底层上的表面层检查对象侧表面的基层。表面层的热膨胀系数比基层的热膨胀系数高，在表层设置表面层分割为多个区域的槽。

26. 发明授权

US07242206B2 Reliability evaluation test apparatus, reliability evaluation test system, contactor, and reliability evaluation test method 有权
标题翻译：可靠性评估试验装置，可靠性评价试验系统，接触器和可靠性评价试验方法
公开(公告)号：US07242206B2
公开(公告)日：2007-07-10
申请号：US11179538
申请日：2005-07-13
申请人： Kiyoshi Takekoshi , Hisatomi Hosaka , Junichi Hagihara , Kunihiko Hatsushika , Takamasa Usui , Hisashi Kaneko , Nobuo Hayasaka , Yoshiyuki Ido
发明人： Kiyoshi Takekoshi , Hisatomi Hosaka , Junichi Hagihara , Kunihiko Hatsushika , Takamasa Usui , Hisashi Kaneko , Nobuo Hayasaka , Yoshiyuki Ido
IPC分类号： G01R31/06 , G01R31/04 , G01R27/26
CPC分类号： G01R31/2862 , G01R1/0433 , G01R1/0491 , G01R31/2831 , G01R31/286 , G01R31/2865 , G01R31/2867 , G01R31/287 , G01R31/2886
摘要： A reliability evaluation test apparatus of this invention includes a wafer storage section which stores a wafer in a state wherein the electrode pads of a number of devices formed on the wafer and the bumps of a contactor are totally in electrical contact with each other. The wafer storage section transmits/receives a test signal to/from a measurement section and has a hermetic and heat insulating structure. The wafer storage section has a pressure mechanism which presses the contactor and a heating mechanism which directly heats the wafer totally in contact with the contactor to a predetermined high temperature. The reliability of an interconnection film and insulating film formed on the semiconductor wafer are evaluated under an accelerated condition.
摘要翻译：本发明的可靠性评价试验装置包括晶片存储部，其以形成在晶片上的多个器件的电极焊盘和接触器的凸块完全电接触的状态存储晶片。晶片存储部分向/从测量部分发送/接收测试信号，并具有密封和隔热结构。晶片存储部分具有压力接触器的压力机构和将与接触器完全接触的晶片直接加热到预定高温的加热机构。在加速条件下评估形成在半导体晶片上的互连膜和绝缘膜的可靠性。

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