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    • 21. 发明授权
    • Method for manufacturing piezo-resonator
    • 制造压电谐振器的方法
    • US07003875B2
    • 2006-02-28
    • US10968976
    • 2004-10-21
    • Masaaki ImuraKenji InoueEiju KomuroHisatoshi Saitou
    • Masaaki ImuraKenji InoueEiju KomuroHisatoshi Saitou
    • H05K3/02B44C1/22H01L4/04
    • H03H9/564H03H3/04H03H2003/0428H03H2003/0471Y10T29/42Y10T29/49005Y10T29/49155Y10T29/49156
    • A method for manufacturing a piezo-resonator including: a first step of forming an upper electrode layer 20 on the piezoelectric film 14, a second step of coating the upper electrode layer 20 with a resist 21 and of performing patterning on the resist so as to have a shape of the upper electrode, a third step of masking the patterned resist 21 and removing the upper electrode layer 20 other than masked portions and forming two or more first upper electrodes 15a, a fourth step of removing the resist 21, a fifth step of coating the first upper electrodes 15a with a resist and performing patterning on the resist so that the first upper electrodes 15a are partially exposed, a sixth step of etching each of the exposed first upper electrodes 15a by a specified thickness to form a second upper electrode 15b, and a seventh step of removing the resist 22.
    • 一种制造压电谐振器的方法,包括:在压电膜14上形成上电极层20的第一步骤,用抗蚀剂21涂覆上电极层20并在抗蚀剂上进行图案化的第二步骤,以便 具有上电极的形状,除了掩模部分之外掩蔽图案化抗蚀剂21和除去上电极层20并形成两个或更多个第一上电极15A的第三步骤,去除抗蚀剂21的第四步骤,第五步 使用抗蚀剂涂覆第一上电极15a并在抗蚀剂上进行图案化以使第一上电极15a部分暴露的步骤;将暴露的第一上电极15a的每一个蚀刻一定厚度以形成第六步骤 第二上电极15b,以及除去抗蚀剂22的第七步骤。