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    • 23. 发明授权
    • Method and system to compensate for lamp intensity differences in a photolithographic inspection tool
    • 补偿光刻检测工具灯强度差异的方法和系统
    • US07680321B2
    • 2010-03-16
    • US12101260
    • 2008-04-11
    • David DixonLloyd Lee
    • David DixonLloyd Lee
    • G06K9/00
    • G01N21/95607G01N21/278G01N21/93G01N21/9501G01N2021/8416G01N2201/0695G01N2201/12753
    • An after develop inspection tool considers tool-to-tool variability when determining confidence score for wafers under inspection. A golden wafer is used to calculate a RGB signature as well as the slope of the individual RGB curves for different lamp intensities. These slopes are normalized in order to generate a compensation factor for red values and blue values within a signature. When a wafer is subsequently inspected at an ADI station using a different lamp, the test wafer RGB signature is likely captured at a different lamp intensity. Consequently, when comparing the signatures, the golden wafer RGB signature is adjusted by the compensation factors, based on the different lamp's intensity setting, and this adjusted RGB signature is then used to determine whether a defect exists on the test wafer.
    • 在确定检查中的晶片的置信度得分后,开发后的检查工具会考虑刀具对刀具的变异性。 使用金色晶片来计算RGB特征以及不同灯泡强度的各个RGB曲线的斜率。 这些斜率被归一化以便在签名中产生红色值和蓝色值的补偿因子。 当使用不同的灯随后在ADI站检查晶片时,可能以不同的灯强度捕获测试晶片RGB特征。 因此,当比较签名时,基于不同的灯的强度设置,通过补偿因子来调整金色晶片RGB签名,然后使用该调整的RGB签名来确定在测试晶片上是否存在缺陷。
    • 27. 发明申请
    • Method and system for facilitating preventive maintenance of an optical inspection tool
    • 用于促进光学检查工具的预防性维护的方法和系统
    • US20080082283A1
    • 2008-04-03
    • US11529352
    • 2006-09-29
    • David DixonMichael Kincaid
    • David DixonMichael Kincaid
    • G06F19/00
    • G02B21/125G01N21/95684G03F7/70616G03F7/70975
    • A method of determining preventive maintenance for an optical inspection system for inspecting photolithography processed substrates. The method includes measuring at least one operational characteristic of the optical inspection system and comparing a measurement result for said at least one operational characteristic with predetermined preventive maintenance criteria for the operational characteristic. Also included is determining a preventive maintenance requirement based on a comparison result of said comparing, and initiating a preventive maintenance action on said optical inspection system, said preventive maintenance action corresponding to said preventive maintenance requirement. A method of automatically performing preventive maintenance on an optical inspection system, and for retrofitting an optical inspection system to facilitate preventive maintenance of the optical inspection system are also disclosed.
    • 一种确定用于检查光刻处理的基板的光学检查系统的预防性维护的方法。 该方法包括测量光学检查系统的至少一个操作特性,并将所述至少一个操作特性的测量结果与用于操作特性的预定维护准则进行比较。 还包括基于所述比较的比较结果来确定预防性维护要求,并且对所述光学检查系统启动对所述预防性维护要求的预防性维护动作。 还公开了一种在光学检查系统上自动执行预防性维护以及用于改进光学检查系统以便于光学检查系统的预防性维护的方法。
    • 28. 发明申请
    • Linear position indicator system and method
    • 线性位置指示器系统及方法
    • US20070186648A1
    • 2007-08-16
    • US11525501
    • 2006-09-22
    • Robert HarmonPhilip CouchAlexander BarryDavid Dixon
    • Robert HarmonPhilip CouchAlexander BarryDavid Dixon
    • G01F23/56
    • G01F23/68G01F23/72
    • The present invention is directed to system and method for determining a fluid level. The system comprises a sensing rod assembly comprised of releasably connectable rod segments. Each rod segment carries a processor and a plurality of inductors. Each inductor generates a position signal responsive to a float signal. A float assembly comprises a housing containing a circuit having an integrally formed coil periodically energizable by a processor to emit the float signal. A control assembly receives the generated position signals and determines the fluid level. The method comprises providing releasably connectable rod segments with inductors that generate a position signal responsive to a float signal, determining a sensing rod assembly length, forming the sensing rod assembly, disposing it within a container, providing a float assembly periodically actuated to generate a float signal, generating position signals responsive to the float signal and analyzing those signals to determine the fluid level.
    • 本发明涉及用于确定流体液位的系统和方法。 该系统包括由可释放地连接的杆段组成的感测杆组件。 每个杆段承载处理器和多个电感器。 每个电感器响应于浮动信号产生位置信号。 浮子组件包括壳体,该外壳包含具有由处理器周期性激励的整体形成的线圈以发射浮动信号的电路。 控制组件接收所产生的位置信号并确定液位。 该方法包括提供具有电感器的可释放地连接的杆段,其产生响应于浮子信号的位置信号,确定感测杆组件长度,形成感测杆组件,将其设置在容器内,提供周期性致动以产生浮子的浮子组件 信号,响应于浮动信号产生位置信号并分析这些信号以确定流体水平。