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21. 发明授权

US09414495B2 Surface mount actuator 有权
公开(公告)号：US09414495B2
公开(公告)日：2016-08-09
申请号：US14065299
申请日：2013-10-28
申请人： DigitalOptics Corporation MEMS
发明人： Roman C. Gutierrez
IPC分类号： G03B3/10 , G03B13/34 , G01R31/02 , H05K1/18 , B81B7/00 , B81C3/00
CPC分类号： H05K1/181 , B81B7/0054 , B81B2201/038 , B81B2201/047 , B81B2203/0163 , B81B2203/053 , B81B2203/055 , B81B2207/07 , B81C3/008
摘要： A silicon MEMS device can have at least one solder contact formed thereupon. The silicon MEMS device can be configured to be mounted to a circuit board via the solder contact(s). The silicon MEMS device can be configured to be electrically connected to the circuit board via the solder contact(s).

22. 发明授权

US09061883B2 Actuator motion control features 有权
标题翻译：执行器运动控制功能
公开(公告)号：US09061883B2
公开(公告)日：2015-06-23
申请号：US12946624
申请日：2010-11-15
申请人： Roman C. Gutierrez , Robert J. Calvet , Xiaolei Liu , Guiqin Wang , Ankur Jain
发明人： Roman C. Gutierrez , Robert J. Calvet , Xiaolei Liu , Guiqin Wang , Ankur Jain
IPC分类号： G02B7/04 , G03B13/34 , B81B7/00
CPC分类号： B81B7/00 , B81B7/0016 , B81B2201/047 , Y10T29/49002
摘要： A method for making a motion control feature for an actuator device of a type that has a moveable component coupled to an opposing fixed component for out-of-plane rotational movement relative thereto includes forming first and second flaps respectively extending from the moveable and fixed components and toward the opposing component and operable to effect one or more of damping movement of the moveable component relative to the fixed component and/or restraining movement of the moveable component relative to the fixed component in a direction substantially perpendicular to the actuator device.
摘要翻译：一种制造用于致动器装置的运动控制特征的方法，所述致动器装置具有联接到相对的固定部件的可移动部件，用于相对于其相对的固定部件进行平面外旋转运动，所述方法包括形成分别从可移动和固定部件延伸的第一和第二翼片并且朝向相对的部件并且可操作以实现可移动部件相对于固定部件的阻尼运动和/或可移动部件相对于固定部件在大致垂直于致动器装置的方向上的约束运动中的一个或多个。

23. 发明授权

US09052567B2 Actuator inside of motion control 有权
标题翻译：执行器内部运动控制
公开(公告)号：US09052567B2
公开(公告)日：2015-06-09
申请号：US12946543
申请日：2010-11-15
申请人： Roman C. Gutierrez
发明人： Roman C. Gutierrez
IPC分类号： G03B13/00 , H04N5/225 , G03B5/00 , G02B27/64 , G03B3/10
CPC分类号： G02B27/646 , B81B7/0067 , G02B7/04 , G03B3/10 , G03B5/00 , G03B2205/0007 , G03B2205/0084 , H02N1/008 , H04M1/0264 , H04N5/2328 , Y10T29/49826
摘要： A device can comprise an outer frame, a platform, and a motion control mechanism. The motion control mechanism can be adapted to permit movement of the platform in a desired direction with respect to the outer frame and inhibit rotation of the platform with respect to the outer frame. An actuator can be contained at least partially within the motion control mechanism.
摘要翻译：装置可以包括外框架，平台和运动控制机构。运动控制机构可以适于允许平台相对于外框在期望的方向上移动，并且禁止平台相对于外框的旋转。致动器可以至少部分地包含在运动控制机构内。

24. 发明授权

US08941192B2 MEMS actuator device deployment 有权
标题翻译： MEMS执行机构部署
公开(公告)号：US08941192B2
公开(公告)日：2015-01-27
申请号：US13247888
申请日：2011-09-28
申请人： Robert J. Calvet , Xiaolei Liu , Ankur Jain , Lakshminarayan Hariharan , Roman C. Gutierrez
发明人： Robert J. Calvet , Xiaolei Liu , Ankur Jain , Lakshminarayan Hariharan , Roman C. Gutierrez
IPC分类号： H02N1/00 , G03B17/00 , G03B5/00 , B81B3/00 , G03B3/10
CPC分类号： G03B5/00 , B81B3/0037 , B81B2201/033 , B81B2203/053 , G03B3/10 , G03B2205/0007 , G03B2205/0084 , Y10T29/49826 , Y10T74/18992
摘要： A method for making an actuator device includes forming a substantially planar structure having a stage resiliently supported for movement within a plane of the structure, an actuator coupled to an outer periphery of the stage and operable to apply a force acting in the plane and tangentially to the stage when actuated, the actuator comprising a fixed frame and a moving frame resiliently supported for reciprocal movement relative to the fixed frame by a motion control flexure, and an outer frame surrounding and supporting the stage and the actuator. The moving frame is moved to a deployed position that is coplanar with, parallel to and spaced apart from the fixed frame at a selected distance, and the moving frame is then fixed at the deployed position for substantially rectilinear, perpendicular movement relative to the fixed frame.
摘要翻译：一种用于制造致动器装置的方法包括形成基本平坦的结构，其具有弹性支撑以在所述结构的平面内移动的台阶;致动器，其联接到所述平台的外周边并且可操作以施加作用在所述平面中的切向和切向地致动器包括固定框架和弹性支撑的运动框架，用于通过运动控制挠曲件相对于固定框架往复运动，以及围绕并支撑平台和致动器的外框架。移动框架被移动到展开位置，该展开位置与固定框架平行并间隔开一定距离，然后移动框架固定在展开位置，以相对于固定框架基本上直线，垂直移动。

25. 发明授权

US08884381B2 Guard trench 有权
标题翻译：守卫沟
公开(公告)号：US08884381B2
公开(公告)日：2014-11-11
申请号：US12946495
申请日：2010-11-15
申请人： Ankur Jain , Robert J. Calvet , Roman C. Gutierrez
发明人： Ankur Jain , Robert J. Calvet , Roman C. Gutierrez
IPC分类号： H01L27/14
CPC分类号： B81C1/00571 , B81B2203/033 , G03B3/10 , G03B2205/0061
摘要： A device may comprise a substrate formed of a first semiconductor material, a first trench formed in the substrate, a second trench formed in the substrate proximate the first trench, an oxide layer formed in the first trench and the second trench, and a second semiconductor material formed upon the oxide layer. The oxide layer in the second trench may be adapted to mitigate undercut of the oxide layer in the first trench during an etching process.
摘要翻译：器件可以包括由第一半导体材料形成的衬底，在衬底中形成的第一沟槽，在第一沟槽附近形成在衬底中的第二沟槽，在第一沟槽和第二沟槽中形成的氧化物层，以及第二半导体在氧化物层上形成的材料。第二沟槽中的氧化物层可以适于在蚀刻过程期间减轻第一沟槽中的氧化物层的底切。

26. 发明授权

US08873174B2 Mounting flexure contacts 有权
标题翻译：安装弯曲触点
公开(公告)号：US08873174B2
公开(公告)日：2014-10-28
申请号：US14101280
申请日：2013-12-09
申请人： DigitalOptics Corporation MEMS
发明人： Roman C. Gutierrez , Ankur Jain
IPC分类号： G02B7/00 , H02N2/00 , B81B7/00
CPC分类号： H02N2/005 , B81B7/0006 , B81B2201/033 , B81B2203/0154 , B81B2207/07
摘要： A device may comprise a flexure formed of a first semiconductor material. A first trench may be formed in the flexure. The first trench may separate the first semiconductor material into a first portion and a second portion thereof. An oxide layer may be formed in the first trench. The oxide layer may extend over a top portion of the first semiconductor material. A second semiconductor material may be formed on the oxide layer. The first trench and the oxide layer may cooperate to electrically isolate the first portion and the second portion from one another.
摘要翻译：装置可以包括由第一半导体材料形成的挠曲。可以在弯曲部中形成第一沟槽。第一沟槽可以将第一半导体材料分离成第一部分和第二部分。可以在第一沟槽中形成氧化物层。氧化物层可以在第一半导体材料的顶部上延伸。可以在氧化物层上形成第二半导体材料。第一沟槽和氧化物层可以协作以将第一部分和第二部分彼此电隔离。

27. 发明授权

US08869625B2 MEMS actuator/sensor 有权
标题翻译： MEMS致动器/传感器
公开(公告)号：US08869625B2
公开(公告)日：2014-10-28
申请号：US13247925
申请日：2011-09-28
申请人： Roman C. Gutierrez
发明人： Roman C. Gutierrez
IPC分类号： G01B7/16 , H03K17/98 , H01H59/00 , H02N1/00 , G06F3/01 , B81B3/00 , H01H3/00
CPC分类号： G06F3/016 , B81B3/0037 , B81B2203/051 , G01P15/0802 , G01P15/097 , G01P15/125 , G06F1/1686 , G06F1/1694 , G06F3/0202 , H01H59/0009 , H01H2003/008 , H02N1/00 , H02N1/006 , H03K17/98 , H03K2217/96062
摘要： A device can have an electrostatic MEMS actuator and a capacitive sensor in electrical communication with the electrostatic MEMS actuator. The capacitive sensor can be configured to determine a capacitance of the electrostatic MEMS actuator while a force is being applied to the electrostatic MEMS actuator as the electrostatic MEMS actuator is being actuated. The device can be used to construct a keyboard having tactile feedback, for example.
摘要翻译：设备可以具有静电MEMS致动器和与静电MEMS致动器电连通的电容传感器。当静电MEMS致动器被致动时，电容传感器可以被配置为确定静电MEMS致动器的电容，同时力施加到静电MEMS致动器。例如，该装置可用于构建具有触觉反馈的键盘。

28. 发明授权

US08855476B2 MEMS-based optical image stabilization 有权
标题翻译：基于MEMS的光学图像稳定
公开(公告)号：US08855476B2
公开(公告)日：2014-10-07
申请号：US13247906
申请日：2011-09-28
申请人： Xiaolei Liu , Roman C. Gutierrez , Pat K. Leang , Jose A. Mendez , Corneliu Zaharia , Alexandru F. Drimbarean , Petronel Gheorghe Bigioi
发明人： Xiaolei Liu , Roman C. Gutierrez , Pat K. Leang , Jose A. Mendez , Corneliu Zaharia , Alexandru F. Drimbarean , Petronel Gheorghe Bigioi
IPC分类号： G03B17/00 , G02B27/64 , H04N5/232 , G03B5/00 , G02B26/08
CPC分类号： G02B27/646 , G02B26/0841 , G02B27/64 , G03B5/00 , G03B2205/0015 , G03B2205/0084 , H04N5/23248 , H04N5/23258 , H04N5/23287
摘要： In one example, a camera is provided that includes: a plurality of MEMS electrostatic comb actuators, each actuator operable to exert a force on at least one lens; and an optical image stabilization (OIS) algorithm module operable to command the plurality of actuators to actuate the at least one lens responsive to motion of the camera.
摘要翻译：在一个示例中，提供了一种照相机，其包括：多个MEMS静电梳状致动器，每个致动器可操作以在至少一个透镜上施加力; 以及光学图像稳定（OIS）算法模块，其可操作以响应于相机的运动来命令所述多个致动器致动所述至少一个透镜。

29. 发明授权

US08853975B2 Electrostatic actuator control 有权
标题翻译：静电执行器控制
公开(公告)号：US08853975B2
公开(公告)日：2014-10-07
申请号：US13247919
申请日：2011-09-28
申请人： Roman C. Gutierrez
发明人： Roman C. Gutierrez
IPC分类号： H01L41/04 , H02N1/00
CPC分类号： H02N1/00 , H02N1/006
摘要： In one embodiment, a device is provided that includes: a cascaded electrostatic actuator defining a stack in a substrate having a plurality of gaps between parallel plate electrodes; and a controller configured to drive the cascaded electrostatic actuator to open and close selected ones of the gaps.
摘要翻译：在一个实施例中，提供了一种装置，其包括：级联静电致动器，其限定了在平行板电极之间具有多个间隙的衬底中的堆叠; 以及控制器，被配置为驱动所述级联的静电致动器以打开和关闭所选择的间隙。

30. 发明授权

US08803256B2 Linearly deployed actuators 有权
标题翻译：线性部署执行器
公开(公告)号：US08803256B2
公开(公告)日：2014-08-12
申请号：US12946670
申请日：2010-11-15
申请人： Roman C. Gutierrez
发明人： Roman C. Gutierrez
IPC分类号： H02N1/00 , G03B17/00
CPC分类号： H02N11/006 , B81B3/0035 , B81B3/0051 , G02B6/3584 , G02B7/102 , G02B26/0841 , G03B3/00 , G03B2205/0084 , H02K41/02 , H02N1/008 , Y10T29/49826 , Y10T29/49863 , Y10T74/18072
摘要： A method for making an actuator includes forming a substantially planar actuator device of an electrically conductive material, the device incorporating an outer frame, a fixed frame attached to the outer frame, a moveable frame disposed parallel to the fixed frame, a motion control flexure coupling the moveable frame to the outer frame for coplanar, rectilinear movement relative to the outer frame and the fixed frame, and an actuator incorporating a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame, moving the moveable frame to a deployed position that is coplanar with, parallel to and spaced at a selected distance apart from the fixed frame and fixing the moveable frame at the deployed position for substantially rectilinear, perpendicular movement relative to the fixed frame.
摘要翻译：制造致动器的方法包括形成导电材料的基本上平面的致动器装置，所述装置包括外框架，附接到外框架的固定框架，平行于固定框架设置的可移动框架，运动控制挠曲联接器可移动框架到外框架，用于相对于外框架和固定框架的共面，直线移动;以及致动器，其结合有多个交叉齿，其固定部分附接到固定框架，其移动部分是将可移动框架移动到展开位置，该展开位置与固定框架平行并间隔开选定的距离，并将可移动框架固定在展开位置，以相对于所述可移动框架基本上直线地垂直移动固定框架。

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