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191. 发明授权

US10587089B2 Solid-state laser device, solid-state laser system, and laser device for exposure device 有权
公开(公告)号：US10587089B2
公开(公告)日：2020-03-10
申请号：US16446662
申请日：2019-06-20
申请人： Gigaphoton Inc.
发明人： Takashi Onose , Osamu Wakabayashi
IPC分类号： H01S3/10 , H01S3/23 , G02F1/35 , G02F1/355 , H01S3/067 , H01S3/108 , H01S3/109 , H01S3/11 , H01S3/115 , H01S3/16 , G02F1/37 , H01S3/131 , H01S3/0941 , H01S3/0971 , H01S3/00
摘要： A solid state laser device includes a seed laser that outputs continuous wave laser seed light, a light intensity changeable unit that changes a light intensity thereof and outputs seed pulse light, a CW excitation laser that outputs continuous wave excitation light, an amplifier that amplifies the seed pulse light and outputs amplified light based on an amplification gain increased by the excitation light, a wavelength conversion unit that converts a wavelength of the amplified light and outputs harmonic light, and a light intensity control unit that allows the light intensity changeable unit to output the seed pulse light after a certain time elapsed from an input of an external trigger signal each time the signal is input and output suppression light that suppresses an increase of the amplification gain in a period after an output of the seed pulse light until an input of a next external trigger signal.

192. 发明申请

US20200052458A1 LASER LIGHT-SOURCE APPARATUS AND LASER PULSE LIGHT GENERATING METHOD 审中-公开
公开(公告)号：US20200052458A1
公开(公告)日：2020-02-13
申请号：US16607209
申请日：2018-04-19
申请人： SPECTRONIX CORPORATION
发明人： Joji OKADA , Yosuke ORII
IPC分类号： H01S3/23 , H01S3/067 , H01S3/109 , H01S3/0941 , H01S3/094 , H01S3/10
摘要： A laser light-source apparatus includes a seed light source 10, fiber amplifiers 20 and 30 and a solid state amplifier 50 configured to amplify pulse light output from the seed light source, nonlinear optical elements 60 and 70 configured to perform wavelength conversion on the pulse light output from the solid state amplifier 50 and output the resultant pulse light, a semiconductor optical amplifier 15 disposed between the seed light source 10 and the solid state amplifier 50 and configured to amplify the pulse light output from the seed light source 10, and a control unit 100 configured to execute gain switching control processing in which the seed light source 10 is driven at a desired pulse rate, and semiconductor optical amplifier control processing in which an injection current to the semiconductor optical amplifier 15 is controlled depending on the pulse rate of the seed light source 10, and thus, generation of a giant pulse can be reliably prevented, regardless of the pulse rate of the seed light source.

193. 发明授权

US10511145B2 Generation of high-power spatially-restructurable spectrally-tunable beams in a multi-arm-cavity VECSEL-based laser system 有权
公开(公告)号：US10511145B2
公开(公告)日：2019-12-17
申请号：US16092379
申请日：2017-12-19
申请人： ARIZONA BOARD OF REGENTS ON BEHALF OF THE UNIVERSITY OF ARIZONA
发明人： Mahmoud Fallahi , Ewan Wright , Chris Hessenius
IPC分类号： H01S3/10 , H01S5/10 , H01S5/183 , H01S5/06 , H01S5/04 , H01S5/065 , H01S3/08 , H01S3/082 , H01S5/00 , H01S3/00 , H01S3/11 , H01S3/109
摘要： A collinear T-cavity VECSEL system generating intracavity Hermite-Gaussian modes at multiple wavelengths, configured to vary each of these wavelengths individually and independently. A mode converter element and/or an astigmatic mode converter is/are aligned intracavity to reversibly convert the Gaussian modes to HG modes to Laguerre-Gaussian modes, the latter forming the system output having any of the wavelengths provided by the spectrum resulting from nonlinear frequency-mixing intracavity (including generation of UV, visible, mid-IR light). The laser system delivers Watt-level output power in tunable high-order transverse mode distribution.

194. 发明授权

US10505336B2 Laser adjustment method and laser source device 有权
公开(公告)号：US10505336B2
公开(公告)日：2019-12-10
申请号：US15617307
申请日：2017-06-08
申请人： MITUTOYO CORPORATION
发明人： Tatsuya Narumi , Yoichi Toida
IPC分类号： H01S3/137 , H01S3/131 , H01S3/13 , H01S3/02 , H01S3/04 , H01S3/106 , H01S3/109 , G02F1/355 , H01S3/16
CPC分类号： H01S3/1317 , H01S3/025 , H01S3/0405 , H01S3/109 , H01S3/1062 , H01S3/1303 , H01S3/1305 , H01S3/137 , G02F1/3553 , H01S3/0402 , H01S3/1611 , H01S3/1673
摘要： A laser adjustment method includes a first adjustment step and a second adjustment step. In the first adjustment step, using a light detector detecting a second harmonic light, optical intensity and wavelength of the second harmonic light is detected and a first temperature adjuster is adjusted to adjust temperatures of a Nd:YVO4 crystal and a KTP crystal such that the detected wavelength of the second harmonic light approaches a desired wavelength and such that the optical intensity of the second harmonic light reaches at least a predetermined value. In the second adjustment step, after the first adjustment step, a temperature of an etalon is adjusted by a second temperature adjuster such that the detected wavelength of the second harmonic light approaches the desired wavelength and such that the optical intensity of the second harmonic light reaches at least a predetermined value.

195. 发明申请

US20190326721A1 Generation of Frequency-Tripled Laser Radiation 审中-公开
公开(公告)号：US20190326721A1
公开(公告)日：2019-10-24
申请号：US16391839
申请日：2019-04-23
申请人： TOPTICA Photonics AG
发明人： Matthias Scholz
IPC分类号： H01S3/109 , H01S3/08 , H01S3/16 , H01S3/081
摘要： The invention relates to a method of generating frequency-tripled laser radiation (THG). It is the object of the invention to demonstrate an efficient approach to generating frequency-tripled laser radiation. The method according to the invention comprises the following method steps: providing a first laser radiation at a fundamental frequency, coupling the first laser radiation into an optical resonator, which is resonant at the fundamental frequency, generating a second laser radiation by second-harmonic generation of the first laser radiation in a type-I process in a first nonlinear optical crystal (3), which is located in the optical resonator, wherein the second laser radiation has a polarization direction, rotating the polarization direction of the second laser radiation, preferably by an angle of substantially 90°, and generating a third laser radiation by generating the sum frequency of the first and second laser radiations in a type-I process in a second nonlinear optical crystal (9), which is likewise located in the optical resonator. The invention also relates to a device for generating frequency-tripled laser radiation.

196. 发明申请

US20190305508A1 SOLID-STATE LASER DEVICE, SOLID-STATE LASER SYSTEM, AND LASER DEVICE FOR EXPOSURE DEVICE 审中-公开
公开(公告)号：US20190305508A1
公开(公告)日：2019-10-03
申请号：US16446662
申请日：2019-06-20
申请人： Gigaphoton Inc.
发明人： Takashi ONOSE , Osamu WAKABAYASHI
IPC分类号： H01S3/23 , H01S3/108 , G02F1/35 , G02F1/355 , H01S3/109 , H01S3/067 , H01S3/10 , H01S3/11 , H01S3/115 , H01S3/16 , H01S3/131
摘要： A solid state laser device includes a seed laser that outputs continuous wave laser seed light, a light intensity changeable unit that changes a light intensity thereof and outputs seed pulse light, a CW excitation laser that outputs continuous wave excitation light, an amplifier that amplifies the seed pulse light and outputs amplified light based on an amplification gain increased by the excitation light, a wavelength conversion unit that converts a wavelength of the amplified light and outputs harmonic light, and a light intensity control unit that allows the light intensity changeable unit to output the seed pulse light after a certain time elapsed from an input of an external trigger signal each time the signal is input and output suppression light that suppresses an increase of the amplification gain in a period after an output of the seed pulse light until an input of a next external trigger signal.

197. 发明授权

US10374382B2 Solid-state laser device, solid-state laser system, and laser device for exposure device 有权
公开(公告)号：US10374382B2
公开(公告)日：2019-08-06
申请号：US16124434
申请日：2018-09-07
申请人： GIGAPHOTON INC.
发明人： Takashi Onose , Osamu Wakabayashi
IPC分类号： H01S3/10 , H01S3/23 , H01S3/16 , H01S3/067 , G02F1/35 , G02F1/355 , H01S3/109 , H01S3/115 , H01S3/11 , H01S3/108 , G02F1/37 , H01S3/131
摘要： A solid state laser device includes a seed laser that outputs continuous wave laser seed light, a light intensity changeable unit that changes a light intensity thereof and outputs seed pulse light, a CW excitation laser that outputs continuous wave excitation light, an amplifier that amplifies the seed pulse light and outputs amplified light based on an amplification gain increased by the excitation light, a wavelength conversion unit that converts a wavelength of the amplified light and outputs harmonic light, and a light intensity control unit that allows the light intensity changeable unit to output the seed pulse light after a certain time elapsed from an input of an external trigger signal each time the signal is input and output suppression light that suppresses an increase of the amplification gain in a period after an output of the seed pulse light until an input of a next external trigger signal.

198. 发明申请

US20190198330A1 Passivation of Nonlinear Optical Crystals 审中-公开
公开(公告)号：US20190198330A1
公开(公告)日：2019-06-27
申请号：US16287237
申请日：2019-02-27
申请人： KLA-Tencor Corporation
发明人： Yung-Ho Alex Chuang , Vladimir Dribinski
IPC分类号： H01L21/30 , G01N21/88 , C30B29/10 , H01S3/109 , H01L21/322 , H01S3/02 , H01S3/094 , H01S3/16 , C30B33/00 , C30B33/02 , G01N21/3563 , G01N21/59 , G01N21/95
CPC分类号： H01L21/3003 , C30B29/10 , C30B33/00 , C30B33/02 , G01N21/3563 , G01N21/59 , G01N21/8806 , G01N21/9501 , G01N2021/3568 , G01N2021/3595 , G01N2021/8477 , G01N2021/8822 , G01N2201/06113 , G02F1/3501 , H01L21/322 , H01S3/027 , H01S3/094 , H01S3/109 , H01S3/1666
摘要： A laser system includes a nonlinear optical (NLO) crystal, wherein the NLO crystal is annealed within a selected temperature range. The NLO crystal is passivated with at least one of hydrogen, deuterium, a hydrogen-containing compound or a deuterium-containing compound to a selected passivation level. The system further includes at least one light source, wherein at least one light source is configured to generate light of a selected wavelength and at least one light source is configured to transmit light through the NLO crystal. The system further includes a crystal housing unit configured to house the NLO crystal.

199. 发明授权

US10326250B2 Method for expanding tuning range of all-solid-state continuous-wave single frequency laser 有权
公开(公告)号：US10326250B2
公开(公告)日：2019-06-18
申请号：US16015868
申请日：2018-06-22
申请人： Shanxi University
发明人： Huadong Lu , Pixian Jin , Jing Su , Kunchi Peng
IPC分类号： H01S3/105 , H01S3/109 , H01S3/107 , H01S3/083 , H01S3/16
摘要： A method for expanding a tuning range of an all-solid-state continuous-wave single-frequency laser is provided. The method includes inserting a nonlinear frequency-doubling crystal into a laser resonant cavity, and converting a part of intra-cavity fundamental-frequency light to frequency-doubled light by the nonlinear frequency-doubling crystal, outputting the generated frequency-doubled light and the fundamental-frequency light together from the laser resonant cavity, and separating the two via a spectroscope. The method also includes splitting a part of the fundamental-frequency light reflected by the spectroscope through an optical beam-splitter, and outputting the remaining part of the fundamental-frequency light as a main laser. A cavity length of the laser resonant cavity is changed by adjusting a voltage loaded on a piezoelectric ceramic of the all-solid-state continuous-wave single-frequency laser, thereby achieving continuous frequency-tuning of the all-solid-state continuous-wave single-frequency laser.

200. 发明授权

US10283366B2 Passivation of nonlinear optical crystals 有权
公开(公告)号：US10283366B2
公开(公告)日：2019-05-07
申请号：US15284231
申请日：2016-10-03
申请人： KLA-Tencor Corporation
发明人： Yung-Ho Chuang , Vladimir Dribinski
IPC分类号： H01L21/30 , C30B29/10 , C30B33/00 , C30B33/02 , G01N21/3563 , G01N21/59 , G01N21/95 , G01N21/88 , H01L21/322 , H01S3/02 , H01S3/094 , H01S3/109 , H01S3/16 , G01N21/35 , G01N21/84
摘要： A laser system includes a nonlinear optical (NLO) crystal, wherein the NLO crystal is annealed within a selected temperature range. The NLO crystal is passivated with at least one of hydrogen, deuterium, a hydrogen-containing compound or a deuterium-containing compound to a selected passivation level. The system further includes at least one light source, wherein at least one light source is configured to generate light of a selected wavelength and at least one light source is configured to transmit light through the NLO crystal. The system further includes a crystal housing unit configured to house the NLO crystal.

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